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ST LIS344ALH handbook

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1. X 2 31V 19 X 1 65V 0g Y 1 65V 0g Y 2 31V 19 o Z 1 65V 09 Z 1 65V 0g o o X 1 65V 0g X 0 99V 19 Y 0 99V 19 Y 1 65V 0g Z 1 65V 0g Z 1 65V 09 Bottom x 1 65V 0g LI Y 1 65V 0g Top Z 0 99V 19 DTTTTTTT Top X 1 65V 09 MD Y 1 65V 0g Bottom Z 2 31V 19 Earth s Surface TTTTTTTT Figure 4 shows output voltage values of LIS344ALH powered at 3 3 V with full scale 2 g 13 19 Typical performance characteristics LIS344ALH 5 Typical performance characteristics 5 1 Mechanical characteristics at 25 C Figure 5 X axis Zero g level at 3 3 V Figure 6 X axis Sensitivity at 3 3 V 30 16 14 25 12 20 Percent of parts a Percent of parts o 6k 10 4L 5k 2b 0 0 1 6 1 61 1 62 1 63 1 64 1 65 1 66 1 67 1 68 1 69 1 7 0 62 67 0 X 0 7 Zero g Level Offset V 0 65 0 66 0 Sensitivity V g Figure 7 Y axis Zero g level at 3 3 V Figure 8 Y axis Sensitivity at 3 3 V 25 15 20 gt m10 z isl 2 amp amp t t 8 8 i a sl 5L 0 0 1 6 4 1 62 1 63 1 64 1 65 1 66 1 67 1 68 1 69 17 0 62 0 65 0 66 0 67 Zero g Level Offset V Sensitivity V g Figure 9 Z axis Zero g level at 3 3 V Figure 10 Z axis Sensitivity at 3 3 V 25 14 12r 20r 10r E Eas pa t at amp amp e 5 t tl 80k 8 6 2 2 al st 2L Q o 1 6 4 1 62 16
2. ky LIS344ALH MEMS inertial sensor high performance 3 axis 2 6g ultracompact linear accelerometer Features 2 4 V to 3 6 V single supply operation 2 g 6 g user selectable full scale Low power consumption Output voltage offset and sensitivity are ratiometric to the supply voltage Factory trimmed device sensitivity and offset Embedded self test RoHS ECOPACK compliant High shock survivability 10000 g Description The LIS344ALH is an ultra compact consumer low power three axis linear accelerometer that includes a sensing element and an IC interface able to take the information from the sensing element and to provide an analog signal to the external world The sensing element capable of detecting the acceleration is manufactured using a dedicated process developed by ST to produce inertial sensors and actuators in silicon The IC interface is manufactured using an ST proprietary CMOS process with high level of integration The dedicated circuit is trimmed to better match the sensing element characteristics a LGA 16L 4x4x1 5 mm The LIS344ALH has a dynamically user selectable full scale of 2 g 6 g and it is capable of measuring accelerations over a maximum bandwidth of 1 8 kHz for all axes The device bandwidth may be reduced by using external capacitances The self test capability allows the user to check the functioning of the system The LIS344ALH is available in Land Gri
3. D1 3 850 4 000 4 150 0 1516 0 1575 0 1634 E1 3 850 4 000 4 150 0 1516 0 1575 0 1634 m L2 1 950 0 0768 M 0 100 0 0039 E N1 0 650 0 0256 N2 0 975 0 0384 P1 1 750 0 0689 s ee 0 9609 LGA 16L 4x4x1 5mm i es ud Land Grid Array Package k 0 050 0 0020 Pin 1 Indicator A Pin 1 Indicator EL A Lk p TOP VIEW seating plane m f HONG a oO L1 1 G una AA bolo n M BOTTOM VIEW 7974136 17 19 Revision history LIS344ALH 7 18 19 Revision history Table 7 Document revision history Date Revision Changes 15 Jan 2008 1 Initial release 18 Feb 2008 2 Minor text changes 29 Apr 2008 Updated Section 2 Mechanical and electrical specifications and added distribution graphs in Section 5 Typical performance characteristics LIS344ALH Please Read Carefully Information in this document is provided solely in connection with ST products STMicroelectronics NV and its subsidiaries ST reserve the right to make changes corrections modifications or improvements to this document and the products and services described herein at any time without notice All ST products are sold pursuant to
4. Seo ae A je Y X Routz VoutZ S H SELF TEST REFERENCE TRIMMING CIRCUIT CLOCK Pin description Figure 2 Pin connection Zz lt 6g 86 13 16 O VoutX 12 1 FS NC ST VoutY NC NC 9 4 Res 8 oz vu 2 Dg O TOP VIEW IN DIRECTIONS OF THE BOTTOM VIEW DETECTABLE ACCELERATIONS 5 19 Block diagram and pin description LIS344ALH Table 2 Pin description Pin Pin name Function 1 FS Full scale selection logic 0 2g full scale logic 1 6g full scale 2 ST Self test logic 0 normal mode logic 1 self test mode 3 NC Internally not connected 4 Res Leave unconnected or connect to Vdd 5 PD Power down logic 0 normal mode logic 1 power down mode 6 NC Internally not connected 7 GND 0 V supply 8 VoutZ Output voltage Z channel 9 NC Internally not connected 10 VoutY Output voltage Y channel 11 NC Internally not connected 12 VoutX Output voltage X channel 13 NC Internally not connected 14 Vdd Power supply 15 Res Connect to Vdd 16 NC Internally not connected a 6 19 LIS344ALH Mechanical and electrical specifications 2 Mechanical and electrical specifications 2 1 Mechanical characteristics Table3 Mechanical characteristics Vdd 3 3 V T 25 C unless otherwise noted Symbol Parameter Test condition Min Typ Max Unit FS pin connected to 18 2 Ar Ac
5. PERSONAL INJURY DEATH OR SEVERE PROPERTY OR ENVIRONMENTAL DAMAGE ST PRODUCTS WHICH ARE NOT SPECIFIED AS AUTOMOTIVE GRADE MAY ONLY BE USED IN AUTOMOTIVE APPLICATIONS AT USER S OWN RISK Resale of ST products with provisions different from the statements and or technical features set forth in this document shall immediately void any warranty granted by ST for the ST product or service described herein and shall not create or extend in any manner whatsoever any liability of ST ST and the ST logo are trademarks or registered trademarks of ST in various countries Information in this document supersedes and replaces all information previously supplied The ST logo is a registered trademark of STMicroelectronics All other names are the property of their respective owners 2008 STMicroelectronics All rights reserved STMicroelectronics group of companies Australia Belgium Brazil Canada China Czech Republic Finland France Germany Hong Kong India Israel Italy Japan Malaysia Malta Morocco Singapore Spain Sweden Switzerland United Kingdom United States of America www st com 19 19 a
6. ST s terms and conditions of sale Purchasers are solely responsible for the choice selection and use of the ST products and services described herein and ST assumes no liability whatsoever relating to the choice selection or use of the ST products and services described herein No license express or implied by estoppel or otherwise to any intellectual property rights is granted under this document If any part of this document refers to any third party products or services it shall not be deemed a license grant by ST for the use of such third party products or services or any intellectual property contained therein or considered as a warranty covering the use in any manner whatsoever of such third party products or services or any intellectual property contained therein UNLESS OTHERWISE SET FORTH IN ST S TERMS AND CONDITIONS OF SALE ST DISCLAIMS ANY EXPRESS OR IMPLIED WARRANTY WITH RESPECT TO THE USE AND OR SALE OF ST PRODUCTS INCLUDING WITHOUT LIMITATION IMPLIED WARRANTIES OF MERCHANTABILITY FITNESS FOR A PARTICULAR PURPOSE AND THEIR EQUIVALENTS UNDER THE LAWS OF ANY JURISDICTION OR INFRINGEMENT OF ANY PATENT COPYRIGHT OR OTHER INTELLECTUAL PROPERTY RIGHT UNLESS EXPRESSLY APPROVED IN WRITING BY AN AUTHORIZED ST REPRESENTATIVE ST PRODUCTS ARE NOT RECOMMENDED AUTHORIZED OR WARRANTED FOR USE IN MILITARY AIR CRAFT SPACE LIFE SAVING OR LIFE SUSTAINING APPLICATIONS NOR IN PRODUCTS OR SYSTEMS WHERE FAILURE OR MALFUNCTION MAY RESULT IN
7. VOUt Vst Logico 8 Self test output voltage change varies cubically with supply voltage 9 When full scale is set to 6 g Self test output voltage change is one third of the specified value at 2 g 10 Minimum resonance frequency Fres 1 8 kHz Sensor bandwidth 1 2 x 110kQ Cload with Cload gt 1 nF ky 7 19 Mechanical and electrical specifications LIS344ALH 2 2 Electrical characteristics Table 4 Electrical characteristics Vdd 3 3 V T 25 C unless otherwise noted Symbol Parameter Test condition Min Typ Max Unit Vdd Supply voltage 2 4 3 3 3 6 V Normal mode 680 850 Idd Supply current pA Power down mode 1 5 Vfs Full scale input Logic 0 level 0 0 3 Vdd V Vst Self test input Vpd Power down input Logic 1 level 0 7 Vdd Vdd V Output impedance of Rout VoutX VoutY VoutZ 39 tap IR ES Capacitive load drive 9 Cload for VoutX VoutY VoutZ 1 lib Turn on time at exit of f 550 Cload Ton Power denn mode Cload expressed in uF 03 ms Top Operating temperature 40 85 C range 1 The product is factory calibrated at 3 3 V Typical specifications are not guaranteed Minimum resonance frequency Fres 1 8 kHz Device bandwidth 1 2 n 110 kQ Cload with Cload gt 1 nF ky 8 19 LIS344ALH Mechanical and electrical specifications 2 3 Absolute maximum ratings Stresses above those listed as Absolute maximum ratings may cause permanent damage to the
8. device This is a stress rating only and functional operation of the device under these conditions is not implied Exposure to maximum rating conditions for extended periods may affect device reliability Table 5 Absolute maximum ratings Symbol Ratings Maximum value Unit Vdd Supply voltage 0 3 to 7 V Vin Input voltage on any control pin FS ST PD 0 3 to Vdd 0 3 V 3000 g for 0 5 ms Apow Acceleration any axis powered Vdd 3 3 V 10000 g for 0 1 ms 3000 g for 0 5 ms Ayunp Acceleration any axis not powered 10000 g for 0 1 ms Tsra Storage temperature range 40 to 125 C 4 HBM KV ESD Electrostatic discharge protection 1 5 CDM KV 400 MM V This is a mechanical shock sensitive device improper handling can cause permanent damages to the part gt Thisis an ESD sensitive device improper handling can cause permanent damages to AS the part 9 19 Mechanical and electrical specifications LIS344ALH 2 4 Terminology Sensitivity describes the gain of the sensor and can be determined by applying 1g acceleration to it As the sensor can measure DC accelerations this can be done easily by pointing the axis of interest towards the center of the Earth note the output value rotate the sensor by 180 degrees point to the sky and note the output value again thus applying 1g acceleration to the sensor Subtracting the larger output value from the smaller one and divi
9. elles 15 Z axis Zero g level change vs temperature at 3 3 V nennen 15 Z axis Sensitivity change vs temperature at3 3V 00 000 c cee eee 15 Current consumption in normal mode at 3 3V ccc eee 16 Current consumption in power down at 3 JV eese 16 Noise density at 3 3 V X Y axiS 0 0 nennen een en 16 Noise density at 3 3 V Z axis n een een 16 LGA 16 mechanical data and package dimensions liliis eee 17 3 19 List of tables LIS344ALH List of tables Table 1 Table 2 Table 3 Table 4 Table 5 Table 6 Table 7 4 19 Device summary crack ir ae en 1 Pin deSCHiptION iui TE 6 Mechanical characteristics Vdd 3 3 V T 25 C unless otherwise noted 7 Electrical characteristics Vdd 3 3 V T 25 C unless otherwise noted 8 Absolute maximum ratings cent nh 9 Filter capacitor selection Ojoad X Y Z lt ee eee 13 Document revision history LIS344ALH Block diagram and pin description 1 1 1 2 Block diagram and pin description Block diagram Figure 1 Block diagram X Routx e CHARGE S H AMPLIFIER Z T oz Lal Routy a E MUX DEMUX I g H ar
10. 3 1 64 1 65 166 1 67 168 1 69 1 7 0 62 0 67 0 4 0 7 Zero g Level Offset V 0 0 66 Sensitivity V g 14 19 ky LIS344ALH Typical performance characteristics 5 2 Mechanical characteristics derived from measurement in the 40 C to 85 C temperature range Figure 11 X axis Zero g level change Figure 12 X axis Sensitivity change vs temperature at 3 3 V vs temperature at 3 3 V 50r ko zr 3 5 5 20 E ol 10r 2 3 4 Sa 0 08 0 08 2 04 0 02 o 0 02 0 04 0 06 0 08 0 1 Zero g Level drift mg C Sensitivity drift C Figure 13 Y axis Zero g level change Figure 14 Y axis Sensitivity change vs temperature at 3 3 V vs temperature at 3 3 V 45 T T T T T T T 45 40 40 35 35 gt 30 gt 30 3 ka H 25 H 25 E 20 E 20 ba Es 10 10 5 4 5t 3 2 E 0 1 2 3 4 Sa 10 08 70 06 70 04 0 02 o 0 02 0 04 0 06 0 08 0 1 Zero g Level drift mg C Sensitivity drift C Figure 15 Z axis Zero g level change Figure 16 Z axis Sensitivity change vs temperature at 3 3 V vs temperature at 3 3 V 35 40 30 35r 30 25 25r go 5 20 5 15r 5 5 is 10r 10r 5t PIE 4 3 2 2 3 4 Sa 0 08 0 06 0 04 0 02 0 0 02 0 04 0 06 0 08 0 1 Zero g Level drift mg C Sensitivity drift C 15 19 Typical performance characteristics LIS344ALH 5 3 Electrical characteristics
11. at 25 C Figure 17 Current consumption Figure 18 Current consumption in normal mode at 3 3 V in power down at 3 3 V 30 T T T T T T T T 45 40 25 35 sr mM a ias 5 10r E 15t 10r sl sl 250 550 600 650 700 750 9 3 E E 0 1 2 3 4 Current consumption uA Current consumption uA Figure 19 Noise density at 3 3 V X Y axis Figure 20 Noise density at 3 3 V Z axis Frequency of parts Frequency of parts 76 24 26 28 30 40 Noise Density mug sqrt Hz Noise Density mug sqrt Hz 16 19 4 LIS344ALH Package information 6 a Package information In order to meet environmental requirements ST offers these devices in ECOPACK packages These packages have a lead free second level interconnect The category of second level Interconnect is marked on the inner box label in compliance with JEDEC Standard JESD97 The maximum ratings related to soldering conditions are also marked on the inner box label ECOPACK is an ST trademark ECOPACK specifications are available at www st com Figure 21 LGA 16L mechanical data and package dimensions Dimensions Ret mm inch Outline and Min Typ Max Min Typ Max mechanical data A1 1 500 1 600 0 0591 0 0630 A2 1 330 0 0524 A3 0 160 0 200 0 240 0 0063 0 0079 0 0094 d 0 300 0 0118
12. celeration range GND g FS pin connected to Vdd 5 4 6 4 Full scale 2 g Vdd 5 5 Vdd 5 Vdd 5 5 So Sensitivity V g Full scale 6 g Vdd 15 1096 Vdd 15 Vdd 15 10 SoDr Sensitivity change Vs Delta from 25 C 0 01 9e C Temperature Voff Zero g level 2 vad 2 5 Vdd 2 vdd 2 5 V OffDr Zero g level change Vs Delta from 25 C 0 4 mg C Temperature NL Non linearity Best fit straight line 0 5 FS Full scale 2 g CrossAx Cross axis 9 2 Acceleration noise Vdd 3 3 V An density Full scale 2 g 99 ug 4Hz X axis 80 140 200 mV T 25 C Vdd 3 3 V Self test output voltage Y axis Vt change 7 8 9 T 25 C Vdd 3 3 V 200 140 80 mV Z axis 100 230 350 mV T 25 C Vdd 3 3 V Fres sensing element 10 X Y Z axis 1 8 KHz resonant frequency Top Operating temperature 40 85 C range Wh Product weight 0 040 gram 1 The product is factory calibrated at 3 3 V The operational power supply range is from 2 4 V to 3 6 V Voff So and Vt parameters will vary with supply voltage 2 Typical specifications are not guaranteed 3 Guaranteed by wafer level test and measurement of initial offset and sensitivity 4 Zero g level and sensitivity are essentially ratiometric to supply voltage at the calibration level 8 5 Guaranteed by design 6 Contribution to the measuring output of an inclination acceleration along any perpendicular axis 7 Self test output voltage change is defined as Vout yst Logie1
13. d Array package LGA manufactured by ST It is guaranteed to operate over an extended temperature range of 40 C to 85 C The LIS344ALH belongs to a family of products suitable for a variety of applications Mobile terminals Gaming and virtual reality input devices Antitheft systems and inertial navigation Appliance and robotics Table 1 Device summary Order codes Temp range C Package Packaging LIS344ALH 40 to 85 LGA 16L Tray LIS344ALHTR 40 to 85 LGA 16L Tape and reel April 2008 Rev 3 1 19 www st com Content LIS344ALH Content 1 Block diagram and pin description 00000 eee eee eens 5 1 1 Block diagram s oa uad ee arena 5 1 2 Pin description s kuha serien rn dr 5 2 Mechanical and electrical specifications 7 2 1 Mechanical characteristics 222er een nn 7 2 2 Electrical characteristics HHHH nennen nenn nen 8 2 3 Absolute maximum ratings llli 9 24 Teiminology lt sct24 200e2puneneeaticaceenteee teaser ieee ees 10 3 FUNCHIONAINY nennen iS 11 3 1 Sensing element us cue KAKA ew ede ieee ea bes Beheaded eus 11 3 2 IC internace os estan PREECREHOERE NEU EST AT 11 3 3 Factory calibration als dua nawa kanan ehren A RN ERES seus 11 4 Application hints rr ee rk RE xw 12 4 1 Soldering information liliis 13 4 2 Output response vs orientation llli 13 5 Typical performance characteristic
14. ding the result by 2 will give the actual sensitivity of the sensor This value changes very little over temperature see sensitivity change vs temperature and also very little over time The Sensitivity tolerance describes the range of sensitivities of a large population of sensors Zero g level describes the actual output signal if there is no acceleration present A sensor in a steady state on a horizontal surface will measure O g in X axis and O gin Y axis whereas the Z axis will measure 1g The output is ideally for a 3 3 V powered sensor Vdd 2 1650 mV A deviation from ideal 0 g level 1650 mV in this case is called Zero g offset Offset of precise MEMS sensors is to some extend a result of stress to the sensor and therefore the offset can slightly change after mounting the sensor onto a printed circuit board or exposing it to extensive mechanical stress Offset changes little over temperature see Zero g level change vs temperature the Zero g level of an individual sensor is very stable over lifetime The Zero g level tolerance describes the range of Zero g levels of a population of sensors Self test allows to test the mechanical and electric part of the sensor allowing the seismic mass to be moved by means of an electrostatic test force The Self Test function is off when the ST pin is connected to GND When the ST pin is tied at Vdd an actuation force is applied to the sensor simulating a definite input acceleration In this case
15. erface able to take the information from the sensing element and to provide an analog signal to the external world Sensing element A proprietary process is used to create a surface micro machined accelerometer The technology allows to carry out suspended silicon structures which are attached to the substrate in a few points called anchors and are free to move in the direction of the sensed acceleration To be compatible with the traditional packaging techniques a cap is placed on top of the sensing element to avoid blocking the moving parts during the moulding phase of the plastic encapsulation When an acceleration is applied to the sensor the proof mass displaces from its nominal position causing an imbalance in the capacitive half bridge This imbalance is measured using charge integration in response to a voltage pulse applied to the sense capacitor At steady state the nominal value of the capacitors are few pF and when an acceleration is applied the maximum variation of the capacitive load is in the fF range IC interface The complete signal processing uses a fully differential structure while the final stage converts the differential signal into a single ended one to be compatible with the external world The first stage is a low noise capacitive amplifier that implements a Correlated Double Sampling CDS at its output to cancel the offset and the 1 f noise The produced signal is then sent to three different S amp Hs one for eac
16. h channel and made available to the outside All the analog parameters output offset voltage and sensitivity are ratiometric to the voltage supply Increasing or decreasing the voltage supply the sensitivity and the offset will increase or decrease linearly This feature provides the cancellation of the error related to the voltage supply along an analog to digital conversion chain Factory calibration The IC interface is factory calibrated for sensitivity So and Zero g level Voff The trimming values are stored inside the device by a non volatile structure Any time the device is turned on the trimming parameters are downloaded into the registers to be employed during the normal operation This allows the user to employ the device without further calibration 11 19 Application hints LIS344ALH 4 12 19 Application hints Figure 3 LIS344ALH electrical connection GND O Vdd Z FS O Pin 1 indicator 1 Vout x ST gt J LIS344ALH 3 top view Vout y 4 X TOP VIEW out z DIRECTIONS OF THE a DETECTABLE L ACCELERATIONS GND Digital signals Power supply decoupling capacitors 100 nF ceramic or polyester 10 uF Aluminum should be placed as near as possible to the device common design practice The LIS344ALH allows to band limit VoutX VoutY and VoutZ through
17. s LLss 14 5 1 Mechanical characteristics at 25 C 1 1 a 14 5 2 Mechanical characteristics derived from measurement in the 40 C to 85 C temperature range 22 4 ie uk exa ERR RR ES IE d ERR EE 15 5 3 Electrical characteristics at 25 C ernennen nennen 16 6 Package information 000 c cece eens 17 7 Revision history stewed oh nha NAG WG a en 18 308089 Rc eR ee 18 2 19 ky LIS344ALH List of figures List of figures Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Figure 11 Figure 12 Figure 13 Figure 14 Figure 15 Figure 16 Figure 17 Figure 18 Figure 19 Figure 20 Figure 21 Block diagram e raars Funes deen ee ee een 5 PIN CONNECLON cL 5 LIS344ALH electrical connection 0 0 00 cee eee tenes 12 Output response vs orientation lisse 13 X axis Zero g level at 3 3 V 02 e en 14 X axis Sensitivity at3 3V anaua eee 14 Y axis Zero g level at 3 3 V 0 0 0 2 tees 14 Y axis Sensitivity at3 3V 0 ere 14 Z axis Zero g level at3 3V 0 ee en 14 Z axis Sensitivity a13 3JV eee 14 X axis Zero g level change vs temperature at 3 3 V 2000 a 15 X axis Sensitivity change vs temperature at 3 3 V llli elles 15 Y axis Zero g level change vs temperature at 3 3 V a 15 Y axis Sensitivity change vs temperature at3 3V 00 00 cece
18. the sensor outputs will exhibit a voltage change in their DC levels which is related to the selected full scale and depending on the supply voltage through the device sensitivity When ST is activated the device output level is given by the algebraic sum of the signals produced by the acceleration acting on the sensor and by the electrostatic test force If the output signals change within the amplitude specified inside Table 3 then the sensor is working properly and the parameters of the interface chip are within the defined specification Output impedance describes the resistor inside the output stage of each channel This resistor is part of a filter consisting of an external capacitor of at least 1 nF and the internal resistor Due to the high resistor level only small inexpensive external capacitors are needed to generate low corner frequencies When interfacing with an ADC it is important to use high input impedance input circuitries to avoid measurement errors Note that the minimum load capacitance forms a corner frequency close to the resonance frequency of the sensor In general the smallest possible bandwidth for a particular application should be chosen to get the best results tono SI LIS344ALH Functionality 3 3 1 3 2 3 3 Functionality The LIS344ALH is an ultra compact low power analog output three axis linear accelerometer packaged in aLGA package The complete device includes a sensing element and an IC int
19. the use of external capacitors The recommended frequency range spans from DC up to 1 8 kHz In particular capacitors are added at output VoutX VoutY VoutZ pins to implement low pass filtering for antialiasing and noise reduction The equation for the cut off frequency f of the external filters is in this case f 1 t 2r Bout Cjoad X y Z Taking into account that the internal filtering resistor Rout has a nominal value equal to 110 KQ the equation for the external filter cut off frequency may be simplified as follows 1 45uF SE Hz Fo ware The tolerance of the internal resistor can vary typically of 220 within its nominal value of 110 KQ thus the cut off frequency will vary accordingly A minimum capacitance of 1 nF for Cioad X y Z is required LIS344ALH Application hints Table 6 Filter capacitor selection Cjoad X y z Cut off frequency Capacitor value 1Hz 1500 nF 10 Hz 150 nF 20Hz 68 nF 50 Hz 30 nF 100 Hz 15 nF 200 Hz 6 8 nF 500 Hz 3 nF 4 1 Soldering information 4 2 The LGA package is compliant with the ECOPACK RoHS and Green standard It is qualified for soldering heat resistance according to JEDEC J STD 020C Leave Pin 1 Indicator unconnected during soldering Land pattern and soldering recommendations are available at www st com mems Output response vs orientation Figure 4 Output response vs orientation

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