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Agilent Leak Detection Manual

1. NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem The Varian Advant 3 Varian Leak Detection Instruments Y 7 M y 5 Accessories and Options Varian Global Support Network T Field amp Factory Support Program d EL gna ii 7 pri ll Y 7 1 Advantages of Helium Leak Detection Typical Applicat Design and Applicz Consid Leak Detection The Varian Advantage Rigorous standards in today s manufacturing and research and development environments require complete leak detection solutions The Varian Advantage offers a comprehensive solution the primary component of which is our committment to Maximize your Productivity and Uptime 959 Leak Detector e High vacuum fast starting external wet or dry version pump e Single button test activation automatic pumpdown and transfer into test mode e Vacuum testing at high inlet pressures up to 1 torr shortens time to test e Auto protection for protection against test port over pressure power failures and operator errors VS Series e Easy two button operation with full automated start up and calibration Broad range of test methods Operates in multiple languages and units Made truly portable with wireless remote VS C15 Leak detector components in si
2. i3 Remote Module for 947 948 979 new platform 530 Te T o Remote Module for 947 948 960 old electronics 1955830 e e Spectrometer Tube Cleaning Kit 670090906 o e Test Port O Ring 2 216 66082216 T T Test Port Conversion Kit 11 8 Test Port to NW25 18744300 o Test Port Conversion Kit 11 8 Test Port to NW40 187430 o o Test Port Extension Manifold Kerex3 Se Tip Filters for Power Probe Sniffer 10 each K956530 J o Throttle Valve 62600083485 Valve Block Basic Unit 990 Series 1908530 i Valve Block Complete Standard Version 990 Series 19085302 J e Valve Block Complete Stainless Version 990 Series 190853030 D 2 Probe Set 96035855 Capillary Leak with Refillable Reservoir 99934230 Probe with 10 m 30 Sampling Line 9609352255 Telescoping Extension Probe 96035220 J Oil Mist Eliminator for Internal DS 42 VSFACME Ji 11 8 Compression Test Port vsupP e Factory installed option only Leak un x e Q D Tw VU fe For further information contact our technical support staff Varian Inc Vacuum Technologies 25 26 Varian Global Support Network Our Cust
3. 1 Response time Response time Is defined as the time required for a leak detec tor to measure 63 of the peak helium signal This response time is based on an exponential behavior Figure 1 This shows the appearance of a 10 7 std cc sec leak signal Figure 1 Response Time of Signal Response Time In order to quickly measure the signal in a vacuum application the response time should be as short as possible In general a larger test volume will yield a slower response time Also a test volume connected to the detector by a long narrow tube will negatively affect the response time since helium must travel through the tube to the detector For a given volume the effective pump speed of the leak detector or leak detection system must always be as large as possible To optimize cycle time for example in a production application auxiliary pumps can be used to obtain the desired objectives These pumps must be sized and correctly integrated to yield maximum effectiveness 2 Appearance time Appearance time is the time required to see an increase of signal above the background level after helium is admitted to a leak Appearance time is only a first indication of a leak and does not indicate the eventual magnitude of the leak rate This Is different from response time which is calculated from the peak value The first appearance of a leak is often sufficient to stop a test cycle before a test chamber becomes saturat
4. O Ring Kit for 959 DP 06 930 e O Ring Kit for 959 Turbo 6300010 e O Ring Kit for 956 DP 9599001 f JJ O Ring Kit for 956 Turbo 95990058 f J O Ring Kit for 990 Valve Block 093430 O Ring Kit for 938 41 KWen amp l O Ring Kit for 936 Series K32800 J O Ring Kit for 947 948 960 DP t56980 J e e Power Probe Sniff Accessory 11 8 Fitting 10 K956530 o Test Port Nipple NW25 on 11 8 OD Tube LIEN TT J a 27 Test Port Nipple NW40 on 11 8 OD Tube CAR a a NEN eoa aoa Test Port Adapter Kit 11 8 Compression Fitting LDCOMPINADKIT o Test Port Adapter Kit NW25 Fitting LDONW2SINADKIT J f Power Probe Sniff Accessory 11 8 Fitting 25 K9565300 o o e Ordering Information Description Part Number VS PHD 979 959 947 948 960 99 Power Probe Sniff Accessory KF25 Fitting 10 ee ee ee e Power Probe Sniff Accessory KF25 Fitting 25 K9565307 LU Preamplifier Assembly 959 Turbo 938 41 936 Series 2924 Preamplifier Assembly 959 MacroTorr and 990 9030301 Te Preamplifier Board 947 948 and 960 Kevessor Te Te Preamplifier Assembly 979 Standard Sensitivity 190003000 o Preamplifier Assembly 979 High Sensitivity R1003301 J
5. Components and systems Course Outline BVP Companion LRTM BC 1 Day Basic Vacuum Practice is the required prerequisite and scheduled to immediately precede LRTM BC e Introduction to Leak Detection Leak Rate Specification Conversions ocating Leaks Demo LAB Find leaks in evacuated amp pressurized parts Measuring Leak Rate Demo LAB Measure leak rates Application Specific Leak Rate Testing examples Hermetically sealed parts Pressurized parts accumulation method joints welds crimps AC lines brake lines valves Pre pressurized parts in large vacuum chamber com pressor heater core wheel gas tank transmission torque converter Parts with pressure differential intolerance gas tanks gas caps filler necks Small part high sensitivity Long narrow tubes Process gas components and systems Leak Detector Maintenance LDM le m L Course Description This course provides participants with the ability to perform routine maintenance and troubleshooting procedures on supported Varian Leak Detectors Scheduled training is available for the following Varian models 959 979 and VS Training for other Varian LD models is available through our On Site Training program This course begins with an introduction to leak detection and vacuum fundamentals then moves on to cover the principles of operation of the Spectrometer and the underlying vacuum system in a classroom
6. cycle from evacuation to test to venting Amplifier and readout instrumentation that monitors spectrometer output signal e Electrical power supplies and controls that sequence valve s protective circuits etc Fixturing that attaches the part to be leak tested to the leak testing equipment To Preamplifier 73 Collector Chamber Filament E Lighter lons Magnetic field deflects helium ions 135 through slit and are collected SN i CA Helium ions pass e Heavier lons Figure 2 Mass Spectrometer Tube Schematic The PHD 4 Portable Helium Detector is also sensitive to helium and is based on a patented technology called Selective lon Pump Detection SIPD Figure 3 The sensor technology incorporates an ion pump connected to a quartz capillary tube and maintained under high vacuum This membrane is heated with a coiled platinum filament Once heated the membrane becomes permeable to helium As the partial pressure of helium in the ion pump increases so does the current draw of the ion pump This current is proportional to the pressure and is therefore representative of the helium at the test probe of the PHD 4 A selective ion pump detector consists of the following an ion pump and controller A permeable quartz capillary A heater coil that surrounds the quartz capillary e Electronics to process the signal Display for access to leak rate and other unit functions Sampling Pump N
7. deliver a pumping speed higher then 0 27 s Using this value in the calculations provided for response time appearance time and disappearance time will clearly demonstrate the impact of limited conductance Figure 2 Conductance Speed l sec e e e e e e e e e e e Pressure Torr The Evacuation Process In order to leak test a part by the Outside in V acuum Method it is necessary to evacuate the part or the chamber in which the part is placed The required vacuum level will depend on the acceptable leak rate requirements See section on helium background page 39 Figure 3 Evacuation 1000 00 100 00 10 00 Torr 1 00 gt 0 01 0 0 10 0 200 300 400 500 60 00 70 0 80 0 90 0 Seconds To reach the appropriate level in a timely fashion it is necessary to select a pumping system based on the right pump characteristics pumping speed and base pressure as well as the right manifolds arrangement conductance limitations and added volume considerations When purchasing a self contained helium leak detector that is equipped with it own roughing pump special attention should be paid to the size of the pump to avoid the need for purchas ing auxiliary pumps manifold or control equipment Appropriate Helium Background Conditions As shown in Figure 4 helium is present in ambient air at 5 parts
8. 620 Nominal Pumping Speed m3 hr 1 min 2 34 3 50 30 500 30 500 Sensitivity Ranges atm cc sec bx 10 12 Minimum Detectable Leak 5 x 10 12 atm cc sec 5 x 10 12 mbar l s 5 x 10 13 Pa m3 sec Maximum Test Port Pressure 13 mbar 10 Torr 1330 Pa Calibration Automated or Manual Internal or External Background Suppression Push Button Initiated Auto Zero and Auto Zero Zero Function Communication Interface RS 232 Isolated Interface 9600 baud DB 9S Set Points 5 Set Points Standard N O or N C 3 Leak Rate 1 Pressure 1 Audio Remote Display Control Siping Weight base uni to bs 14650 Compliance to Norms CE UL CSA VS PRO2 VS MD30 VS MR15 Leak Detectors Mobile 959 MSLD Selective lon Pump Detector Portable Sniffer VS C15 PHD 4 Options as required Options as required 1 x 10 4 through 1 x 10 8 4 working ranges covering 1 x 10 3 to 1 x 10 9 atm cc sec 5 x 10 6 atm cc sec 5 x 10 6 mbar l s 2 x 10 9 atm cc sec 5 x 10 10 atm cc sec 5 x 10 10 mbar l s 5 x 10 1 Pa m3 sec 5 x 10 7 Pa m3 sec 1 Torr Manual Manual 23 50 959 5 Torr 7 mbar 667 Pa Automated or manual internal or external Auto zero and auto zero zero function Automatic Manual Standard Analog and RS 232 Serial Output 28167 ct CSAUS es Varian Inc Vacuum Technologies E d 7 4 4 A T m Go U o 5 am
9. VS Series VS Series leak detectors combine the simplicity of two button operation with advanced system intelligence Start and vent buttons permit simple day to day operation User friendly software offers intuitive navigation to vast system capabilities Programmable test sequences simplify daily operation minimize operator error and maximize production effieciency The TFT style touch screen features high definition and brightness with wide viewing angles Setup for worldwide use these leak detectors can be operated in multiple languages English French German Spanish Korean Japanese and Chinese and units of measure And the VS Series conforms to CE UL and CSA standards assuring global acceptance VS Series leak detectors employ Varian s primary pumps rotary vane or scroll and high vacuum pumps that deliver high inlet pumping speed and inlet pressure tolerance minimizing test cycle time and maximizing production throughput Outline Drawing Dimensions millimeters inches State of the art spectrometer and vacuum system design enable a broad range of test methods for specific applications The high efficiency ion source and beam optics optimize sensitivity and mass separation giving the VS Series very high sensitivity to meet the most stringent leak test requirements At the same time these leak detectors enjoy high test port pressure tolerance which permits detection of large leaks In addition high heliu
10. fuel and hydraulic lines e Gas tanks e Food storage tanks and packaging e Body implantable medical devices e High purity piping Maintenance of Systems Many vacuum process tools in fabs of all types require occasional leak checking This may be part of a preventative maintenance schedule or in the event of an unexpected failure Downtime in either case must be minimized A rugged dependable fast starting leak detector is essential to maximize up time of production tools Varian VS Series 959 and PHD 4 portable leak detectors keep industry moving Examples of some of these applications are Vacuum process equipment or tools e Vacuum furnaces e Vacuum coaters e Beam lines e Electron beam and ion beam process equipment e Analytical Instruments e Semiconductor process tools e Laser process equipment Pressurized systems e Power Plants e Underground tanks cables and pipes e High purity gas handling systems e Bioreactors and fermenters e Liquid gas manufacturing facilities e Fuel tanks and bladders System Integrated Leak Detection Manufacturers of large complex systems may choose to integrate into those systems a component leak detector that can facilitate the on going maintenance of leak free integrity thereby providing additional value to their customers The Varian VS C15 Component Leak Detector provides the necessary elements for flexible integration of leak detection capability into a large system Exam
11. is developed for a particular part or system it can be saved and recalled for future use Results from leak tests are graphically displayed in easy to read formats to provide individual part test histories or to clearly identify trends in high volume test applications All this can be accomplished without costly third party support Features Benefits e Data recording and plotting mode e Stores and plots leak rate vs time and pressure vs time data for analysis Multiple parts testing mode Basic automation of a leak testing process without the need for third party support Four reject set points with custom messaging capability Custom messages guide operator through step by step process 1 Background test set up function dentify bad parts early in the testing cycle E E Leak test library Allows access to previous test set ups B E Graphical display of test results in easy to read formats Clearly track trends during the testing process Minimum System Requirements e Windows version 98 2000 or XP required e PC with 266 MHz or higher processor Intel Pentium Il or higher e CD ROM drive for installation e Minimum 384 MB total RAM 25 MB available hard disk space for installation Ordering Information Description Shipping Weight kg Ibs Part Number Leak Test Data Wizard 0 2 0 5 VSLTDW Varian Inc Vacuum Technologies VS Series Features and Benefits Easy to Use Two Button Operatio
12. per million pom Although this is a very low level when looking for leaks as small as 10 9 std cc sec helium background remains an issue by Gas Symbol Volume PPM Nitrogen N 78 08 780800 Oxygen 05 2095 209500 Argon Ar 0 93 9300 Carbon Dioxide CO 0 03 300 Neon Ne 0 0018 1 Helium He 0 0005 5 Krypton Kr 0 0001 1 Hydrogen H2 0 00005 0 5 Xenon Xe 0 0000087 0 087 When testing by the Outside in Vacuum Method correct evacuation conditions and proper spraying technique combined with adequate ventilation are key to maintaining proper detector system operation Proper charging venting and careful release of the helium after a test are critical in testing by the Inside out Sniffing Method Varian s VS series leak detectors are equipped with unique helium background suppression features that allow compen sation of 2 decades of helium background Floating Zero Parallel Operation If the volume of the part to be tested is very large or the cycle time very short an auxiliary pumping station may be required operating in parallel with the leak detector see Figure 5 In this situation the auxiliary pump or pumping station is used for roughing only Figure 5 Parallel Operation Calculation of response time appearance time and disappear ance time must be considered in both the effective helium pumping speed provided by the detector and the effective helium pumping speed provided by the auxiliary pump at the chamber
13. setting Operation tuning and calibration of the leak detector as well as preventative maintenance and troubleshooting procedures are covered in practical laboratory sessions Lab equipment including Varian leak detectors and various maintenance consumables is provided for extensive hands on lab activities and instructor led demonstrations Participants will work with the Varian leak detector model that they use in their work environment Who Should Attend This course is for maintenance technicians and personnel responsible for maintaining Varian leak detectors Course Goals and Objectives After completing this course participants will be able to e Explain vacuum fundamentals and concepts essential to the operation of a leak detector e Describe principles of operation of a helium mass spectrom eter and ContraFlow e Identify all major LD components e Properly operate tune and calibrate the LD e Perform preventative maintenance procedures e Spectrometer cleaning and seal replacement lon Source replacement Valve blocks and manifold cleaning Mechanical and high vacuum pumps Troubleshoot routine problems 3 Days Course Outline Day 1 e Introduction to Leak Detection e Overview of Vacuum for Leak Detectors e Introduction to Rough Vacuum Systems Hands On LAB Roughing pump down e Introduction to High Vacuum Systems e Leak Detector Fundamentals Hands On LAB D system components Day 2 e Operation o
14. the product manual Leak Detection Handbook he 135 page handbook ntroduction to Helium Mass Spectrometer Leak Detection is useful for experts and novices It covers leak detection fundamentals helium leak detector types equipment calibration and product fixture design A wide variety of process specific application solution notes is also available 699909070 4 p xg G OQ U o a U am Leak Detection Service Contracts Varian offers a full range of preventive maintenance and comprehensive on site support options for all of our leak detectors See page 26 Leak Test Data Wizard The Leak Test Data Wizard is a comprehensive data management software package for use with our VS Series leak detectors It is a flexible PC based graphic rich tool that makes full use of the data from the VS leak detector to customize automation of basic leak test processes assuring testing uniformity VSLTDW over time or between operators See page 9 Varian Inc Vacuum Technologies 21 22 Accessories and Options for Varian Leak Detectors Cont d Training Programs Training courses for leak detector operation and maintenance are offered in regularly scheduled classes at our Palo Alto California or Lexington Massachusetts facilities On site training can also be provided at your plant Contact your local sales engineer or see the training and service sections of this catalog See worldwide service and s
15. the rigorous requirements of use in leak detection while delivering quiet cool running and dependable performance DS Series Pumps e provide excellent helium pumping characteristics for stable leak rate signals e employ forced oil feed to remain cool even when pumping large volumes e feature an anti suck back valve to prevent migration of pump oil toward the leak detector For technical information on rotary vane pumps refer to Varian s Dual Stage Rotary Vane Pump catalog TriScroll Series Dry Scroll Pumps For many applications dry pumping is essential In the past dry pumps have had either low pumping speeds poor base pressure or both Varian s TriScroll series pumps have revolutionized dry leak detection With special design considerations implemented specifically for helium mass spectrometer leak detection our dry pumps conform to rigorous standards without the potential for contamination TriScroll pumps provide high speeds for fast evacuation and cycle time e deliver low base pressure for high sensitivity testing use no oil avoiding contamination and oil disposal are optimized for helium pumping For technical information on scroll pumps refer to Varian s Dry Scroll Pump catalog MacroTorr Turbo and Turbo drag pumps The high vacuum pump in a mass spectrometer system is critical to a well designed leak detector These pumps need to deliver high pumping speed to keep the spectrometer tube at low pressure
16. transducer is optional Helium Lecture Bottle Kit L8856301 The Helium Lecture bottle provides a convenient supply of helium for leak testing Measuring only 14 long and 21 2 diameter the bottle will provide enough helium for a full eight hours of leak testing at 5 normal flow rates The kit includes a Helium Lecture bottle containing 2 cubic feet of helium at 1800 psi a pressure and flow regulator P N 642972175 and a helium spray probe kit P N K0167301 in one package K0167301 Helium Spray Probe Kit For use in spraying helium to find the exact location of a leak Three nozzles are included a hypodermic nozzle for URDU leaks a flexible tubing nozzle for hard to reach areas and a long soft copper nozzle that can be bent into almost any configuration to reach into deep crevices An easy operating spring handle and 10 feet of hose with a female fitting simplifies attachment to the helium regulator lon Source 82850301 Tungsten lon Source 82850302 Thoriated Iridium lon Source GG82850301 Tungsten lon Source Rebuilt GG82850302 Thoriated Iridium lon Source Rebuilt Varian lon Sources contain two prearranged filaments a built in header and all appropriate mounting hardware in a single all welded assembly Varian offers both new and rebuilt ion sources Rebuilt ion sources can be purchased on an advance exchange basis Tungsten ion sources are available for older models please refer to
17. use Probe set with no training required All tuning and zeroing are handled The PHD 4 replacement kit includes automatically The display can be set to use any of four Sampling pump with fittings languages English French German and Italian Probe with sampling line Probe tip filter e Internal filter kit 5 units Technical Specifications Lowest Detectable Helium Concentration 2 ppm parts per million Lowest Detectable Helium leak 5 x 10 6 mbar s 5 x 10 6 atm eces 5 x 10 7 Pa m3 s Response Time 2 S Recovery Time 10 sec from 50 ppm to O ppm Start up time including self check up 3 min approx Electrical Supply Rechargeable Battery included Power Supply included 110 240 V 50 60Hz Battery operation Time 4 hours Maximum Signal Drift 10 ppm 10 min Operating Conditions Temperature 5 C to 35 C Humidity 90 maximum relative humidity Storage Conditions Temperature 20 C to 60 C Weight 2 6 Kg 5 7 lbs Compliance to Norms CE CSA US approved Ordering Information PHD 4 Complete Package Travel Case includes e PHD 4 Basic Unit e Spare Battery e Transformer Battery Charger 110 240V e Carrying Strap o Probe Set e 15 pin I O connector e CD Instruction Manual PHD 4 Replacement Part Kit Includes e Sampling Pump with Fittings e Probe with Sampling Line Tip Probe Filter e Internal Filter Kit of 5 units PHD 4 Basic Package Includes e PHD 4 Basic Unit e Transformer Battery Charger 110 240V e Carryi
18. your needs TotalCare Comprehensive support ensures continuous high performance operation including RemoteCare Varian s unique remote diagnostic support capability PreCare Extend the life of your leak detector and protect your initial investment with regularly scheduled preventative main tenance support PMs Optimize system operation with basic cleaning and retune Establish and maintain clear audit trails for ISO and other quality standard requirements Varian Remote Care To meet the stringent uptime demand of today s business environment Varian has developed RemoteCare a unique remote diagnostic program utiliz ing the vast capabilities of our VS Leak Detectors Our factory technical experts are able to con nect to your VS Leak Detector at your site and perform analysis for proactive system reviews or rapid problem resolution Advanced Care Guarantee uninterrupted system operation with advanced exchange inventory available to meet the most time critical applications Extended support available beyond basic factory warranty Factory and field corrective maintenance support for rapid repair and quick turnaround of equipment And more Ve offer special customer defined services not offered in standard agreements Maximize equipment performance with training courses on site training and leak detection technology application seminars Varian Inc Vacuum Technologies 27 4 p
19. 10 4 atm cc second Another problem with this method is that fluctuations in temperature degrade the accuracy of the tests Halogen Gas Detection is commonly used in the air condition ing and cooling industry This technology uses an infrared type detector to detect the presence of halogen tracer gas This requires the test piece to be charged with Halogen which is impractical expensive and can be an environmental issue Varian s Helium Leak Detection Technologies A Mass Spectrometer Leak Detector MSLD is a complete system for locating and or measuring the size of leaks into or out of a device or a container This method of leak detection is initiated when a tracer gas helium is introduced to a test part that is connected to the MSLD system The helium leaking from the test part diffuses through the system its partial pressure is measured and results are displayed The MSLD operating principle consists of ionization of the gases in a vacuum and their acceleration across a voltage drop and a magnetic field Figure 2 The helium ions are separated and collected and the resulting ion current is amplified and indicated on the display A mass spectrometer leak detector consists of the following components A spectrometer tuned to detect helium e A vacuum system to maintain adequately low pressure in the spectrometer Primary pumps to evacuate the part to be tested Valves that enable the various stages of the leak detection
20. Power Supply 4 four AA Batteries or by 5 1 VDC 1 A min Operating Life Approximately 12 hrs dependent on batteries Internal Speaker 85 dB min E 1 0 ft Head Phones Mono 3 5 mm plug 32 ohm impedance 1000 10 000 Hz frequency response Operating Temperature 12 C to 40 C Ruggedness Meets industrial standards for hand held equipment Section 8 4 2 of UL 6 1010 1 2nd edition Description Shipping Weight kg Ibs Part Number Wireless Base Unit Field Installed 0 5 1 0 VSFLDWB Wireless Base Unit Factory Installed VSFACWB Wireless Remote Control 1 0 2 2 VSLDWRC Leak Test Data Wizard for VS Series Leak Detectors Capturing and analyzing leak test data are increasingly critical to the leak test process Aggressive manufacturing yield and efficiency targets demanding quality control procedures and ISO and regulatory compliance requirements have created a need for a capable user friendly data management tool To meet this need Varian has designed the Leak Test Data Wizard a comprehensive data management software package for use with our VS Series mass spectrometer leak detectors The Leak Test Data Wizard is a flexible PC based graphic rich tool that makes full use of the data from the VS leak detector to customize automation of basic leak test processes assuring testing uniformity over time or between operators Messages can be created that guide your operators step by step through your testing process Once a specific test
21. RS 232 isolated interface 9600 baud DB 9S UL CSA CE Ordering Information Part Number Description VS Series Leak Detectors VS PRO2 portable leak detector DS 42 rotary vane pump VS PRO2 portable leak detector DS 42 rotary vane pump VS PDO3 portable leak detector dry pump combination VS PDO3 portable leak detector dry pump combination VS MR15 mobile leak detector DS 302 rotary vane pump VS MR15 mobile leak detector DS 302 rotary vane pump VS MD30 mobile leak detector TS 620 dry scroll pump VS MD30 mobile leak detector TS 620 dry scroll pump VS BR15 bench mount leak detector DS 302 rotary vane pump VS BR15 bench mount leak detector DS 302 rotary vane pump VS BD30 bench mount leak detector TS 620 dry scroll pump VS BD30 bench mount leak detector TS 620 dry scroll pump Accessories Oil Mist Eliminator PRO2 only Wireless Remote Base Unit Hand held Remote Control Discrete 1 0 Leak Test Data Wizard Software 118 in Compression Test Port Sniffer NW25 Power Cords Rating Country Where Used 16A 250V China 15A 125V Japan Philippines Thailand 20A 250V North America 20A 125V North America 15A 250V UK Ireland Hong Kong Malaysia Singapore 15A 250V Europe Korea Indonesia 16A 250V Denmark Switzerland 16A 250V Israel 16A 250V India South Africa 15A 250V X Australia New Zealand 15A 125V Cord Jumper DS 302 8 0 Ft 15A 125V Cord Jumper DS 302 0 9 Ft Support Plans see page 26 Ad
22. State of the art microprocessor control allows great simplicity of operation Fully automatic start up Ready for test in less than 3 minutes Intuitive touch screen display Visual and audio indicators standard headphone connection No tuning required Truly Portable Compact and light e The PHD 4 weighs only 2 6 Kg 5 7 lbs including the battery ts compact size allows it to be easily carried anywhere ts ergonomic design allows comfortable use for extended periods Versatile Suitable for many different applications Wide range of uses replaces or can be used with existing methods such as bubble test or pressure decay Able to detect both very small and large leaks Can operate either on battery power or connected to an outlet Displayed messages can be viewed in several languages English French German Italian i Standard Analog and RS232 Serial output Dependable Long term operation e Automatic backflow valve prevents helium saturation ensuring fast response times as well as long life of sensing element e CE CSA US approved for global standardization PHD 4 Applications Courtesy of Fraunhofer UMSICHT Germany p Leak Part to be tested Large Vessels and Bioreactors The PHD 4 offers unmatched accuracy and repeatability presenting a unique solution that It is cost effective and very well suited for the leak range specifications of this application Biot
23. The total helium flow Qt coming through a leak and through the chamber will be split in a flow Qld towards the detector and flow Qaux towards the auxiliary pump This will result in a decrease of the indicated leak rate at the leak detector for which must be compensation must be made 4 2 Noe OQ U o 2 42 QU am Helium Consumption Based on the attainable sensitivity using the helium leak detection method parts to be tested may be charged with a helium gas mixture to reduce the helium consumption This is especially true for large parts or production type testing Lower Helium consumption may also be achieved by raising the pressure inside the part to be tested while lowering the concentration The effect will vary depending on the flow conditions of the actual leak Varian Inc Vacuum Technologies 39 40 Equations for Use in Helium Leak Detection Response time in molecular flow te With t Time in seconds to 63 of full signal V Volume in liters S Helium pumping speed in l s Appearance time in molecular flow V x 2 3 x log S Sg With t Appearance time in seconds V Volume in liters S Helium pumping speed of the detector in l s O Leak rate in mbar l s Om Smallest detectable leak in mbar s Disappearance time in molecular flow 7 x 2 3 x log 0 0 With tg Disappearance time in seconds V Volume in liters S Helium pumping speed of the detector in liters s
24. al and in the same direction as in actual use Therefore systems that are under vacuum while in opera tion should be leak tested under vacuum while pressurized systems should be charged with helium to a pressure similar to operational conditions when possible Vacuum Systems Figure 6 In general vacuum systems are tested with a portable leak detector Typically the leak detector is connected by means of a tee connected in between the foreline of the high vacu um pump and the inlet of its backing pump A system should be capable of maintaining a foreline pressure low enough to operate the leak detector at this location Helium is sup plied to potential leak site using a spray probe or bagging suspected areas If a leak exists helium will enter the system and rapidly diffuse through it The leak detector should respond within several seconds or less Note that leak detector sensitivity will be diminished in systems with large backing pumps If a system is using a cryopump as a high vacuum pump it must be valved off before helium is introduced as cryopumps have limited helium pumping capacity Isolation Valve Roughing Line or Turbo Foreline System Rough Pump orForepump 7 Figure 6 Vacuum System Pressurized systems Many different types of pressurized systems also need to be leak free These systems can be charged with helium or some mixture of helium and another gas such as nitrogen If a dilut ed heli
25. anual Background suppression Manual Leak indication Leak units displayed Ranging Analog leak rate output plug Audio alarm Electronic response time Recommended ambient operating temperature Power requirements Weight base unit 50 segment bar graph w exponent display Atmospheric cc sec Manual Phone jack 0 5 VDC Threshold and volume control 103 dBA maximum 1 ft and output jack for remote speaker 2 seconds 5 to 35 C 115 V or 230 V 50 60 Hz 15 20 amps 22 7 kgs 50 lbs Ordering Information Part Number Configuration Base x Mounting X Sensitivity xxx Voltage Stand Alone Pumps not Included e O None supplied ingle Rotary Vane Pum e B Bench 8 in end T Two wheel e M Standard Sensitivity s Single Dry Scroll Pum e B Bench Description Shipping Weight kg Ibs Part Number Accessories and Options Sniffer probe NW25 10 hose 1 8 4 K9565306 Sniffer probe NW25 25 hose 1 8 4 K9565307 Calibrated leak external NW25 10 7 range NIST traceable 1 8 4 F8473321 Calibrated leak external NW25 10 8 range NIST traceable 1 8 4 F8473322 Tuning leak throttle valve NW25 2 3 5 R1947301 Spectrometer tube cleaning kit 1 4 3 670029096 Replacement Parts O ring kit 0 9 2 L6930301 lon Source thoriated iridium 0 1 0 2 82850302 Preamplifier MacroTorr 0 5 1 L9030301 Manual 1 4 3 699909745 959 sensitivity is influenced by the speed of the system s primary pump The above spec
26. arate pumping system for large volumes or with just the leak detector itself When the appropriate cross over pressure has been reached the leak detector is valved in or transfers into test and the part is tested using one of the following methods Locating Leaks Figure 1 To pinpoint the location of the leak s out not measure the total leakage rate helium is administered to the suspected leak sites of the part using a spray probe with an adjustable flow Helium Spray Probe T3 a He Figure 1 Locating Leaks Outside in Measuring Leaks Figure 2 To determine the total quantity of leakage but not the number or location of leaks the part is connected to the leak detector and shrouded by a helium environment This helium environ ment can be contained in many methods ranging from a simple plastic bag to more complex bell jar arrangements Figure 2 Measuring Leaks Outside In Pressure Testing Method Inside out In this technique the part is pressurized with helium or a mixture of helium and air and tested by one of the following methods Measuring Leaks Figure 3 To determine the total quantity of leakage out not the num ber or location of leaks the part is pressurized with helium or a mixture of helium and air or nitrogen This can be done by bombing or backfilling small hermetically sealed parts Larger parts can be actively pressurized using a hose or tubing to deliver the helium The part
27. cables required one for power one for communications Does not require mounting modules or bulky expensive interconnecting cables that are found standard in most leak detection systems today e Most comprehensive array of interface options including serial discrete I O and Profinet Other interface options to be made available when required Optional color touch screen display allows access to system Status information and all operating parameters Critical leak detector components are safely housed in a single enclosure protecting them from the industrial environment e Selectable sensitivity scales and a Contra Flow vacuum design ensures fast accurate measurements while maximiz ing protection from contamination in industrial applications Technical Specifications Lowest Detectable Helium Concentration 2 ppm parts per million Minimum Detectable Leak Selectable Sensitivity Ranges Maximum Test Port Pressure Calibration Routine Background Suppression Display Interface optional Display Selectable Languages Set Points Analog Output Serial Interface Discrete 1 0 Networking Interface optional Power Input Operating temperature 5 x 10 10 atm cc sec 5 x 10 10 mbar l s 5 x 10 11 Pa m3 sec 4 working ranges covering 1 x 10 3 to 1 x 10 9 atm cc sec 5 Torr 7 mbar 667 Pa Automated or manual internal or external Auto zero and auto zero zero function High clarity TFT color touch screen English Frenc
28. cating very large leaks in your vacuum system K1608301 he Tuning Leak consists of a ten segment cali orated needle valve which can be used as an aid to gross leak testing or for gross leak cali oration The Tuning Leak can be used with any Varian Leak Detector and can also provide an indication of background helium in the testing area Throttle Tuning Leak Valve R1947301 with NW25 Fitting For leak detectors with an NW25 inlet the tuning leak y and throttle valves have been combined into one et product This valve performs the same functions as the two described above Universal Test Fixture Option Flapper Box L6241301 947 948 Series 11 8 Compression Port L6241305 979 Series 11 8 Compression Port L6241306 979 Series NW25 This leak detector option makes leak testing of small parts almost totally automatic and very fast With this option the total time to test a typical integrated circuit or other small device Is less than six seconds The fixture is clamshell shaped with tapered walls and a spring loaded lid The fixture can be used with the Automatic Sequencer feature in Models 947 948 960 or 979 in order to fully automate and quicken the test cycle Size 4 ID x 1 deep An insert is supplied to reduce the size to 3 25 ID tapered to 2 83 x 3 4 deep Probe Set PHD 4 9693515 This set consists of three different probe tips that can replace the standard tip for specific applications One tip has a smalle
29. d The parts are shown on the top and bottom of the table 3 Find dots that indicate the suggested leak check method and equipment Components Rocket valves O ring seals Fire extinguishers Fuel tank production Automobile Pressurized vessel US Food manufacturing A C systems Distillation columns e m IC systems equ Condensors Filters Vacuum chambers oai Ine components Storage drums Evaporators Reactors p l Compressors Steam generators Valves i e i Food containers Dryers High pressure components Fittings a LEAK Water pipes Valves Connecting hardware Cans DETECTION METHOD Vacuum Outside In MA ee A Measurement A A Measurement A Locion Accumulation TECHNOLOGY amp MODEL Mass Spectrometer e VS Series gt OS vc BE ES s yee Leak Nn x o Q P p m Interconnecting Heat treatment Pressure vessels Space simulation chambers tubing ovens furnaces Coaters Accelerators Fuel tank maintenance Synchrotrons Storage tanks Experimental chambers Transport lines Electron microscopes Surface analytical systems Varian Inc Vacuum Technologies oF 38 Design and Application Considerations The Effect of Helium Pumping Speed Detecting a leak quickly is one of the most important requirements In using a helium leak detector or a leak detection system This requirement is characterized by the following elements e Response time e Appearance time e Disappearance cleanup time
30. ditional options and accessories see page 2 1 through 25 120 V 220V 120 V 220V 120 V 220V 120 V 220V 120 V 220V 120 V 220V Length 2 bm 2 5m 2 5m 2 5m 2 5 M 2 5 m 2 5 M 2 5 m 2 5 mMm 2 5 m 8 0 Ft 0 9 Ft Shipping Weight kg lbs 140 140 125 63 63 H SZ 125 140 140 125 125 105 230 105 230 114 250 114 250 165 165 l 183 183 15 75 83 83 Factory Installed VSFACME VSFACWB VSFACIO Safety Approval CCEE PSE UL CSA UL CSA BSI VDE KEMA CEBEC SETI NEMKO OVE DEMKO SEV VDE HAR TUV SII 32 SABS SAA UL CSA UL CSA Varian Inc Vacuum Technologies VSPR021 VSPRO22 VSPDO31 VSPDO32 VSMR151 VSMR152 VSMD301 VSMD302 VSBR151 VSBR152 VSBD301 VSBD302 Field Installed VSFLDME VSFLDWB VSLDWRC VSFLDIO VSLTDW VSFLDCP K9565306 Part Number R2984001 R2983001 RO460001 R2840001 R2841001 R2842001 R2843001 R2844001 R2845001 R2989001 R2846001 R2846002 Leak Nn x e Q D v fe Wireless Remote for VS Series Leak Detectors i Leaks in large systems often occur far from the leak detector Wired remote controls have sought to address this problem but impedance and the cumbersome nature of long cables are often limiting factors For many applications these traditional wired remotes provide little benefit By utilizing modern wire less technology leak testing hard to reach locations is now much easie
31. e 959 Outline Drawing Dimensions millimeters inches The 959 MacroTorr Helium Leak Detector fulfills the need for a rugged and dependable leak detector in the most demanding industrial applications With its low initial price and cost of a ownership this unit is the most cost effective leak detector i available It is available in stand alone bench top and two wheel cart configurations We have designed these units with large externally mounted primary pumps that deliver high roughing speeds for fast pump down times The bench top and cart mounted versions are available with Varian DS 302 rotary vane pumps or TriScroll 320 dry pumps Outline Drawing on 2 Wheel Cart e External mounting of large primary pumps results in fast pump down cycles e High test port pressure tolerance reduces time required to reach test mode e Available in wet and dry versions on two or four wheel carts or bench top e Simple rugged design provides the cost effective solution for many applications Technical Specifications Sensitivity ranges 10 4 thru 10 8 atm cc sec Minimum detectable leak at 1000 ppm ambient helium 2 x 10 9 atm cc sec helium Maximum test port pressure 1 Torr High Vacuum Pump V70D MacroTorr turbo drag pump Dimensions millimeters inches Primary Pump Type Rotary vane pump DS 302 Dry scroll pump 15 320 Inlet flange NW 25 optional 11 8 compression adapter Calibration routine M
32. eak NW25 10 6 10 5 atm cc sec F8473325 External Calibrated Helium Leak 11 8 Comp 10 7 atm cc sec F8473301 External Calibrated Helium Leak NW25 10 7 atm cc sec F8473321 External Calibrated Helium Leak 11 8 Comp 10 8 atm cc sec F8473302 External Calibrated Helium Leak NW25 10 8 atm cc sec F8473322 External Calibrated Helium Leak 11 8 Comp 10 9 atm cc sec F8473303 External Calibrated Helium Leak NW25 10 9 atm cc sec F8473323 External Calibrated Helium Leak 11 8 Comp 10 10 atm cc sec F8473304 External Calibrated Helium Leak NW25 10 10 atm cc sec F8473324 Fast Sniff Tester External Attachment 115 V 11 8 Compression Port L6539301 Gas Line Testing Accessory MSPA6415 E Handbook of Leak Detection 699909070 q ABE Helium Lecture Bottle with regulator and spray probe kit 18856301 e e e Helium Spray Probe order regulator separately K001670o e Internal Calibrated Leak 10 7 atm cc sec range K3264301 o Internal Calibrated Leak 10 8 atm cc sec range K3264330 lon Source Thoriated Iridium New 8285002 o o lon Source Thoriated Iridium Rebuilt 668285002 e e lon Source Tungsten New 885001 e lon Source Tungsten Rebuilt 6682850001 J O Ring Kit for 979 Rosson O Ring Kit for 947 948 960 D5680 e e
33. ech and pharmaceutical industries used to rely on pressure decay and bubble test methods for finding leaks in their large bioreactors The PHD 4 has established a new standard of quality significantly increasing production yields Fermenters Sterilizers e Freeze Dryers Underground Pipes and Storage Tanks The portability and light weight of the PHD 4 plays a major role in this application Underground pipes and storage tanks UST are slightly pressurized with helium which due to its high mobility can escape through small leaks and migrate to the surface where it can be easily detected by the PHD 4 The accuracy portability and light weight of this unit greatly simplifies this process particularly in difficult construction sites or rough terrain Gas distribution lines Under and above ground containers and storage tanks Telecommunication and high voltage underground cables Water Heating and Cooling Pipes The PHD 4 locates leaks without interruption of the normal operation by mixing helium with the water in the circuit Until recently the precise and rapid location of leaks in buried pipes has been very difficult In the event of a leak helium desorbs from the fluid and diffuses to the surface where it is easily detected Leaks in pipeline systems such as district heating systems drinking or chilled water systems and steam pipe networks incur high costs due to losses and corrosion damage Heater exchangers and steam condensa
34. econd O Leak rate in mbar l sec Qm Smallest detectable leak in mbar I s Evacuation time _ VX23x log P S P With t Evacuation time in seconds Volume in liters Pumping speed in l s P4 Beginning pressure in mbar Ending pressure in mbar In lt I ot Ig NO Viscous flow conductance circular tube 4 C 182x 7 xP With C Conductance in s D Tube diameter in cm L Tube length in cm P4 Upstream pressure in mbar P9 Downstream pressure in mbar P average pressure P P9 2 in mbar Molecular flow conductance circular tube for N2 at room temperature D3 C 12x T With C Conductance in l s D Tube diameter in cm L Tube length in cm Split flow calculations gt Qu ee x 0 Sia T Saud With Qj Helium flow towards the leak detector Q Total helium flow from the chamber towards the LD auxiliary pump Sig Helium pumping speed of the leak detector Say Helium pumping speed of the auxiliary pump Gas loss under viscous flow conditions With _R 22400 I M 365x24x3600 273 O Leak rate in mbar l s R Gas loss in grams year M Molecular weight gas T Temperature in degrees Kelvin 22400 Volume of one mole of gas at 273 K and 1 atm in cc 365 x 24 x 3600 seconds in one year Gas flow under viscous flow conditions o SLO y Lx pi p 256 x VISC Q Leak rate in mbar l sec D Leak diameter in cm L Length of the leak in cm
35. ed with helium thus avoiding a lengthy cleanup period In some applications it is sufficient to know that there is a leak without knowing the actual magnitude of the leak and the full response time The outstanding background subtraction capabilities of Varian s VS series helium leak detectors is of great importance in improving appearance time 3 Disappearance time Disappearance time cleanup time is the time required for a leak detector to recover to a desired sensitivity after exposure to a leak Here one will observe the most noticeable time dif ference between a high performance and low performance leak detection system arrangement A high pumping speed will yield significantly faster cleanup times Selecting the Proper Connections In most situations when using the Outside in Vacuum Method it is necessary to install a connection between the leak detector and the part or chamber to be evacuated Sizing this connection is an important aspect of the leak detection system performance because 1 the connection adds volume to the total system arrangement and 2 it restricts the helium pumping capability of the leak detector system Selecting an inappropriate connection line can alter the capa bilities of a leak detector system For example a tube of 4 feet in length by 0 40 inches in diameter has a conductance of 0 27 Ifs for helium in molecular flow Figure 2 This means that even the most powerful helium leak detector will not
36. eration facilities process gas delivery and refrigeration etc Course Goals and Objectives After completing this course participants will be able to e Identify advantages and disadvantages of various leak testing methods e Describe rate leak specifications and helium conversions e Select setup and perform the proper leak test technique for a given application Students who take the 2 Day Stand alone course will be able to e Explain vacuum fundamentals and concepts essential to the operation of an HMSLD e Describe principles of operation of a mass spectrometer e Properly operate tune and calibrate an HMSLD Course Outline Stand Alone LRTM SA 2 Days Basic Vacuum Practice is the required prerequisite and sche duled to immediately precede LRIM BC Day 1 e Introduction to Leak Detection e Vacuum Fundamentals for Leak Detection e Introduction to Rough Vacuum Systems e Introduction to High Vacuum Systems e Helium Leak Detector Fundamentals e Demo LAB Tuning zeroing and calibration Day 2 e HMSLD performance considerations e Leak Rate Specification Conversions e Locating Leaks e Measuring Leak Rate e Demo LAB Measure leak rates e Application Specific Leak Rate Testing examples Hermetically sealed parts Pressurized parts accumulation method Pre pressurized parts in large vacuum chamber Parts with pressure differential intolerance Small part high sensitivity Long narrow tubes Process gas
37. ez aM aan u LI E 1 a P a Ll LLLIREL 0 0 ua i d y p Ed 4 p xg OQ U o fe T am High Vacuum Figure 3 Selective lon Pump Detector Varian Inc Vacuum Technologies 31 32 Leak Detection Methods Methods of Leak Testing There are many different ways to leak test parts using helium ed based on the actual working conditions of the part being tested It is recommended that during leak testing the same pressure differential be maintained and in the same direction as exists during the actual use of the part For example a vacuum system is tested with a vacuum inside the chamber while a compressed air cylinder should be tested with a high pressure inside the cylinder as a tracer gas In general the leak detection method is select There are also two general concerns when leak testing One is the location of leaks and the other is the measurement of the total leakage rate of the part as some leakage may be accept able In many cases parts may be first tested to determine if they pass an acceptable level and if not the part may be taken off line and subjected to a second test with the intent of locating the leak Additionally many parts may be tested in batches If a batch fails the individual parts in that batch may then be tested separately to identify the leaking part s Vacuum Testing Method Outside in The part to be tested is evacuated with a sep
38. f the Leak Detector e Spectrometer Tuning Zeroing and Calibration e Spectrometer Maintenance Procedures Hands On LAB Clean spectrometer and replace lon source e System Electronics Hands On LAB ID components and verify test point data e Gauge Maintenance Hands On LAB Calibrate test port and system gauge Day 3 e Valve Block and Manifold Maintenance Hands On LAB Clean valve block and manifold e Mechanical Pump Maintenance Hands On LAB RV TS pump maintenance e High Vacuum Pump Maintenance Procedures Hands On LAB DP TP pump maintenance e System Troubleshooting Hands On LAB Troubleshoot common problems Varian Inc Vacuum Technologies 29 4 p xg OQ U o H U am 30 Advantages of Helium Leak Detection Why Helium Leak Detection Helium is a Superior choice of tracer gas used to find leaks for a multitude of reasons Helium is e Non toxic e Inert and non condensable e Normally not present in the atmosphere at more than trace amounts e Relatively inexpensive e Readily passes through leaks due to Its small atomic size e Non flammable e Available in various size cylinders e Available in purities appropriate for medical usage The only molecule smaller than helium mass 4 is hydrogen mass 2 which is not inert Helium is much lighter than the next heavier inert molecule neon mass 20 which is much more expensive Helium is present at a concentration of only 5 ppm in normal a
39. ging environments Fast clean up time enhances system up time Robust Faraday cup technology delivers proven reliability with low cost of ownership Conforms to CE UL and CSA standards assuring global acceptance Truly Portable Wireless Remote Control Display Hand held remote performs essential functions up to 100 meters 328 feet indoors facilitating access to all leak sites Eliminates cumbersome cables while extending range Allows testing of large systems by a single operator eak detector can be located outside cleanroom to prevent contamination Multiple channels for use of one remote with up to ten leak detectors VS Series Applications Industrial Process Tools VS Series Leak Detectors can help rid your process tool of costly and Inefficient leaks Robust system featu res assure reliable operation in the most challenging industrial environments Superior pumping characteri stics such as high inlet pressure tolerance and split flow capability deliver fast response and clean up times Wireless remote control enables single person leak testing of even the largest systems e Vacuum furnaces Coating systems Electronic beam welders Power Generation Leaks within power plant condensers can cause a significant loss of efficiency High inlet pressure tolerance auto zero function and mobility of the two wheel cart option simplify the leak detection process Simple intuitive operation allows intermit
40. h German Spanish Japanese Korean Mandarin 5 set points 4 leak rate and or pressure 1 audio 0 10V log 1V decade Et 2V decade and linear DB 9F RS 232 isolated interface 29600 baud DB 9M Optically isolated 5 24VDC outputs and inputs DB 25S Profinet 1 0 option RJ45 24VDC 590 Max current 4A Molex 03 12 1036 5 to 48 C Ordering Information Description Shipping Weight kg Ibs Part Number VS C15 Base Unit 9 kg 19 8 lbs 9 0 19 8 VSC15BU Options and Accessories Display and display cable 10 ft 5 7 8 VSC15DU Display Cable 10 ft 2 0 5 VSCDUC10 24V External Power Supply 8 1 7 VSCTBPS Power Cord for Power Supply 8 ft 0 5 1 0 VSCBUPC8 Calibrated Leak 1 x 10 7 atm cc sec factory installed VSCFACCL Calibrated Leak 1 x 10 7 atm cc sec field installed 0 5 1 0 VSCFLDCL ConvecTorr Gauge 1 8 in NPT gt 5 1 0 19090301 ConvecTorr Gauge NW 16 KF 5 1 0 19090305 ConvecTorr Gauge NW 25 KF o 5 1 0 19090306 Remote Gauge Cable 10 ft 0 2 0 5 VSCCTC10 Remote Gauge Cable 25 ft 0 2 0 5 VSCCTC25 Profinet Interface Card factory installed VSCFACPN Profinet Interface Card field installed 0 5 1 0 VSCFLDPN For information on Support Plans refer to page 26 For information on leak detector options and accessories refer to page 21 through 25 For information on roughing pumps refer to page 20 Varian Inc Vacuum Technologies Leak Nn x e Q D Tw VU f
41. ifications are obtained with a nominal 10 cfm displacement pump For information on Support Plans refer to page 26 For information on pump options refer to page 20 For information on additional accessories and options refer to pages 21 through 25 Leak Nn x e Q D Tw VU fe Varian Inc Vacuum Technologies PHD 4 Outline Drawing 136 5 35 l 170 5 6 71 16 9 0 66 291 11 45 Dimensions millimeters inches The PHD 4 is a portable compact leak detector that runs on The basic PHD 4 package includes its own battery for up to four hours Weighing only 2 6 kg 5 7 e PHD 4 basic module los including the battery it can be taken anywhere The PHD 4 Transformer oattery charger 115V 240V detects very small leaks in objects that have a slight helium air Carrying strap pressure inside It is sensitive to helium concentrations as small 15 pin 1 0 connector as 2 parts per million which equivalent to a leak rate of 5 x 1 0 6 Instruction manual on CD ROM atm cc sec This level of sensitivity is far superior to the perfor mance of other means of detecting leaks such as bubble test ing To accomplish this it relies on Varian s proprietary and patented Selective lon Pump Detection SIPD technology The complete PHD 4 package includes everything in the basic package plus e Spare battery o Travel case Controlled by a microprocessor the PHD 4 is easy to
42. is placed in a volume that is then evacuated by the leak detector All the helium escaping from the part is captured and quantified Test Part Helium Filled u Vacuum Chamber Test Port Figure 3 Measuring Leaks Inside out Locating Leaks Figure 4 To pinpoint the location of the leak s but not measure the total leakage the likely potential leak sites of the part are scanned using a Sniffer Probe connected to the inlet of the leak detector F3 AS Figure 4 Locating Leaks Inside Out Flexible Hose Test Probe Accumulation Testing Method Figure 5 This method can both locate and quantify leaks Some type of shroud or hood is placed in such a manner as to envelop a potential leak site A certain amount of time is given to allow leaking helium to accumulate in the shrouded area increasing the helium concentration The leak detector is then valved in to the shrouded volume If many potential leak sites exist in a man ifold or if many parts are to be tested at the same time they can be sequentially valved in to determine which site is leaking Accumulation Device containing item under test X Test Valve SQ ie 1 4 solenoid operated Flow Control Device i e needle valve Flow Line i e 1 4 diameter Tygon 5 long Figure 5 Accumulation Inside out System Leak Test Methods Systems like individual parts should be tested with the same pressure differenti
43. m pumping speed ensures fast system response and clean up times Primary pump and system mounting options may be selected to best suit application requirements and test environments and the compact lightweight design enables easy transport from one application to another Robust design innovations allow the VS Series to conform to the most rigoroug industrial Standards and oprate dependently in the most challenging environments Technical Specifications Model Number Configuration options Primary pump type Rotary vane pump Dry scroll pump Minimum detectable leak at 1000 ppm ambient helium Maximum test port pressure Helium pumping speed test port fine test Calibration routine Background suppression User interface Selectable languages Automated cycling Response time Set points Communications interface Conformance standards PRO2 amp PDO3 DS 42 2 m3 hr 34 m Dry pump combo 3 m3 hr 50 m 5 x 10 12 atm cc sec 5 x 10 12 mbar I s 5 x 10 13 Pa m3 sec helium MR15 amp MD30 Mobile DS 302 14 m3 hr 232 m TS 620 30 m3 hr 500 I m 13 mbar 10 Torr 1330 Pa 1 8 1 s Automated or manual internal or external Push button initiated auto zero and auto zero zero function High clarity color display TFT touch screen English French German Japanese Korean Mandarin Spanish Programmable rough time test time reject set points 0 5 seconds Standard 5 set points N O or N C 3 leak rate 1 pressure 1 audio
44. n VS Series Leak Detectors combine the simplicity of two button operation with advanced expert system Intelligence e Fully automated start up and calibration maximizes productivity Intuitive menu structure is easy to navigate Programmable test sequences improves testing efficiency e Color touch screen provides excellent clarity even at wide angles Powerful Broad Range of Test Methods The state of the art spectrometer and vacuum system design provides powerful capability enabling a broad range of test methods for specific applications High test port pressure allows for detection of large leaks 5x 10 12 MDL sensitivity meets the most stringent leak test requirements B High helium pumping speed ensures fast system response and clean up times New high efficiency ion source and beam optics optimize sensitivity and mass separation Versatile Multiple System Configurations A wide range of options allows for broad configuration flexibility meeting all application requirements and test environments Primary pump and system mounting options may be selected to best suit your needs Multiple language and units capability permits easy implementation worldwide Compact lightweight design enables easy transport from one application to another Dependable Robust Design Robust design innovations allow the VS series to conform to the most rigorous industrial standards and operate dependably in the most challen
45. nes Nn Ll xz o ow 2 m an Small Parts Manufacturing VS Series Leak Detectors employ high inlet pumping speed and high inlet pressure tolerance to minimize test cycle time thereby maximizing production throughput Programmable test sequences simplify daily operation minimize operator error and maximize your production efficiency Optional Leak Test Data Wizard software can be used to collect data for quality control purposes and even automate test cycles e Automotive Electrical Refrigeration Hermetic packaging Medical Implantable devices General R amp D Research and university labs often require a portable leak detector with the versatility to cover a wide range of applications The ability to be easily moved from lab to lab in conjunction with high performance specifi cations in both the evacuation and pressurized mode make the VS Series an essential tool for this environ e Electron microscopes Experimental chambers Surface analytical systems Space chambers Varian Inc Vacuum Technologies 11 VS C15 Component Leak Detector Outline Drawing The VS C15 Component Leak Detector is a simple solution to the complex task of leak detection integration e Compact housing minimizes space requirements every thing needed to do the job is located within one box Over 50 reduction in space when compared to competitive sys tems e Simplified interface with only two
46. ng Strap Part Number e 15 pin 1 0 connector 9694640 e CD Instruction Manual Accessories Part Number e Probe Set 9693515 e Capillary leak with refillable reservoir and gauge 9693540 e Probe with 10 meter 30 maximum Sampling Line 9693525 e Telescoping Extension Probe 9693520 Individual Replacement Parts Part Number e Spare Battery SR 03 702609 Part Number Power Supply 110 240V SR 03 702888 9694660 e Sampling Pump with Fittings Sh 03 702513 Probe with Sampling Line SR 03 702538 Tip Probe Filter SR 28 900012 01 e Internal Filter Kit of 5 units SR 03 702959 Carrying Strap SR 03 702791 Part Number e 15 pin 1 0 connector SR 03 702894 9694600 o Travel Case Metal SR 03 702890 Protective Bag Canvas VSPHD4BAG Contact Varian for Rack mounting or specific application requirements Varian Inc Vacuum Technologies Leak un x e Q D Tw VU fe PHD 4 Features and Benefits High Sensitivity to Helium Can detect very small leaks e High Sensitivity 2 ppm to helium three orders of magnitude better than industry standard due to SIPD proprietary and patented Selective lon Pump Detection e Excellent selectivity for helium allows you to read helium leaks and ignore all other gases Helium sensitivity can be adjusted as required to minimize test costs and helium consumption Autozero function allows leak detection even in high helium background environment Easy to Use No training required o
47. ngle protective enclosure more than 509 o smaller than competitive systems Only 2 cables power and communications Comprehensive interface options serial discrete I O and Profinet Key components of The Varian Advantage Global Applications Support High Performance Instruments Industry Leading Service and Support High Performance Instruments Selectable sensitivity scales and Contra Flow vacuum design for fast accurate measurements with maximal protection from contamination in industrial applications PHD 4 High sensitivity to helium can detect very small leaks Easy to use no training required Truly portable compact and light e Versatile suitable for many different applications e Dependable long term operation Application Notes and Literature Our offering of technical information guides you to the most appropriate leak detection method or system design for your Specific application Global Applications Support Maximize Your Productivity and System Uptime Industry Leading Service and Support Complete Line of Vacuum Pumps Varian is a Total Vacuum Solutions provider offering a comprehensive choice of vacuum pumps Rotary vane and dry scroll primary pumps e Turbo drag high vacuum pumps Specifically designed for leak detection applications e See page 20 and dedicated sections of the Varian catalog for more information e Applica
48. omer Service mandate is to provide you with the level of support necessary to increase your maximize your system uptime and achieve possible return on your investment Application Consulting Your initial introduction to the Varian begins assist you in evaluating your requirements to determine the leak detection solution best su Trade Up Program Offers trade in opportunities of your older units toward the purchase of a new VS Leak Detector maximizes return on investment VarianCare Field amp Factory Support In order to maximize your system uptime and extend the value of your investment we offer a complete range of support programs that meet all your needs al productivity the highest Global Support Network when our field engineers ited to your application Varian Advantage Onsite Integration Support When its time to install your new equip ment your local engineer will provide hands on integration and training assistance Ongoing Technical Support When you are a member of the Varian Global Support Network support is for the life of your instrument with 24 7 toll free technical sup port and Varian RemoteCare providing appli cation analysis and rapid problem resolution Field amp Factory Support Programs VarianC are In order to maximize your system uptime and extend the value of your investment we offer a complete range of support pro grams that meet all
49. plants e Pressurized pipelines e Bioreactors and fermenters e Petrochemical plants and refineries e Underground tanks e Large condensers or heat exchangers Varian Inc Vacuum Technologies 35 36 Applications Table General Guidelines for Leak Detection Methods and Equipment The chart below is a general guide to assist you in determining which leak detector and test method is the correct solution for your application This information should be used in conjunction with guidance from your Varian Sales Engineer Radiators Brake lines Battery cases enic d Fuel lines Heat exchangers amp AGENS tanks Exhaust systems Oil coolers Electronic backages Display S Quartz Reed relays Oxygen sensors LEAK ABS valves DETECTION Headlight assemblies METHOD Is SAWS Vacuum Outside In Location M E Measurement ee a ES ween lt Inside Out Measurement ie el ee Location EMBAR AE Y Accumulation TECHNOLOGY amp MODEL same O exis bot te e s Eo ee 359 ESA es SIPD A A El PHD 4 Airbag devices M ope Shock absorbers Torque converters Transmissions Wheel rims Fuel injectors Gas tanks Gas zonas To determine the appropriate leak detector for your application 1 Find the colored column of table that relates to your application P ower Generation Automotive etc 2 Find part s that are similar to your part to be teste
50. ples of these systems are e Semiconductor process equipment e PVD CVD equipment e E beam and ion beam processing equipment Small compact self contained footprint inside your system Mass Produced Parts Some manufacturing processes require the integration of a leak checking device into a multi step process usually with very high production rates Component leak detectors are designed specifically for these applications in which a vacuum system and the control electronics may be mounted separately The Varian VS C15 offers the ultimate flexibility in a helium mass spectrometer leak detection system The flexibility ruggedness and rapid response time of these units allows for accurate repeatable high volume leak testing in demanding production environments Some examples include High Volume Manufactured Parts e Automotive fuel systems e Automotive brake components e Cooling and refrigeration system components e Medical devices e Automotive airbag components e Tire and wheel assemblies Portable Sniffing Applications Some applications require operators or technicians to look for leaks from a ladder outdoors above or below ground or in a densely constructed industrial facility or power plant In these cases a mobile cart mounted MSLD may not be prac tical A truly portable unit such as the PHD 4 is required Some examples of such applications are e Aircraft manufacturing and maintenance e Power generating
51. r and can be performed at much greater distances of up to 100 meters pp hl 4 390 sas Pie P FE Be Applications in large systems which have traditinally required two technicians can now be performed by one technician thereby reducing labor costs All the major functions of the leak detector are at your fingertips giving you a truly portable leak detection solution In addition to the visual bar graph of the leak rate the remote control has a speaker that provides a variable tone indicating the trend and relative size of the leak The wireless remote can operate for a full 8 hour shift or longer on four AA batteries and conforms to ISM band 2 4 GHz FHSS standards Applications Features Benefits Vacuum Furnaces e Wireless technology e Significantly extends range without Glass Coaters cumbersome restrictive cables Roll Coaters e 100 meter 328 ft range e Enables single operator testing E Beam Welders e Internal speaker e Emits variable tone that Beam Lines Accelerators corresponds to leak rate signal Semiconductor Process Tools e Head phone jack e Enables testing even in noisy lon Implanters environments Power Generation Plants e 20 channels e Allows use of hand held remote with multiple leak detectors e 2 4 GHz frequency ISM band Free license band with minimum compliant cross talk Frequency Band 2 4 GHz ISM Band FHSS Compliant Range 100 m 328 ft Functions Test Hold Zero Read Standard Leak Set up
52. r diameter for more precise leak location A second is more flexible for easy access to difficult areas and a third is for general use Capillary Leak with Refillable Reservoir PHD 4 9693540 This capillary leak is useful to monitor proper operation of the PHD 4 ensuring that it is sensitive to helium at all times The probe tip can be simply inserted in the capillary outlet and a Signal of given value Is displayed on the front panel The helium reservoir can be refilled from a helium source Probe with 10m 30 Sampling Line PHD 4 9693525 For applications in which the length of the standard probe Is not adequate a probe extension is available It has a maximum length of 10m but may be cut to shorter lengths Telescoping Extension Probe PHD 4 9693520 This probe assists the operator when additional rigid length is required as when checking underground objects or objects beyond arms length The tip has a small funnel to better convey helium to the probe Varian Inc Vacuum Technologies 23 4 p xg OQ U o H U am 24 Accessories and Options for Varian Leak Detectors Cont d Ordering Information Description Part Number VS PHD 4 979 959 947 948 E Atmospheric Gross Leak Option for 947 948 6839301 _ e Collector Assembly for 947 948 and 960 K9740301 BEEN A External Calibrated Helium Refillable Leak 11 8 Comp 10 6 10 5 std cc sec F8473320 External Calibrated Helium Refillable L
53. re header mounted and easily field replaceable Tuning Leak for 11 8 Compression Port Spectrometer Tube Cleaning Kit 670029096 Kit with pre saturated wipes and swabs This Cleaning Kit contains clean wipes pre saturated with Dow Corning OS 20 solvent plus cotton swabs for cleaning in small holes or corners The kit is adequate for three spectrometer cleanings and can also be used for a variety of other vacuum applications Test Port Adapters and Kits L8741301 11 8 Test Port to NW25 nipple adapter L8741302 11 8 Test Port to NW40 nipple adapter KCP401125 Adapter from NW40 to 11 8 compression fitting LDCOMPINADKIT Test Port Adapter Kit to 11 8 compression fitting LDNW25INADKIT Test Port Adapter Kit to NW25 fitting Test Port Extension Manifold On request K9799303 The Test Port Extension Manifold provides a 1 28 mm ID quick coupling port on both the left side and the right side of the 947 948 or 960 leak detector The standard test port is still available for use with the extension manifold attached Throttle Valve for 11 8 Compression Port 626603345 The Varian throttle valve is a manually operated NW25 to 11 8 tubulated variable conductance device used to control the flow of gas to the leak detector It is frequently used in leak detector applications in which a grossly leaking part or vacuum chamber will not permit the leak detector to go into the test mode The throttle valve is a non quantitative approach to lo
54. tent use without excessive training requirements Wireless remote control with an operating range of 100 meters 328 feet provides true hand held portability enabling leak testing by a single operator e Condensers Heat exchangers e Steam circuits Underground pressured power cables High Energy Physics High sensitivity large roughing capacity and portability are essential for leak testing accelerators and beam lines These instruments provide excellent mass separation that differentiates the smallest helium leaks from residual water vapor and hydrogen and are available with large dry roughing pumps to evacuate large volumes or smaller internal pumps when used with turbo pumping systems Wireless remote control with an operating range of 100 meters 328 feet enables a single operator to check potential leak sites without a cord of any kind e Accelerators Beam lines Synchrotrons Semiconductor Production VS Series Leak Detectors combine high sensitivity and large dry rough pumping capacity to meet the testing needs of semiconductor processing equipment and gas handling systems With the high inlet pres sure tolerance and fast clean up and response times these units excel at locating leaks in both evacuated and pressurized systems clean room technician can use the hand held wireless remote control while the leak detector remains installed in a less critical area e Process tools Gas panels Gas transfer li
55. tion lines Water pipes Radiant heating systems 4 2 xg G OQ U o a U am Airplane Fuel Tanks and Lines PHD 4 technology is approved worldwide by airplane manufacturers and operators as the standard for the location of leaks in aircraft fuel tanks and in oxygen distribution lines For this purpose helium is injected from the outside into the tank to be checked and the helium probe is used inside the wings to locate any leaks e Fuel tanks Oxygen distribution lines Other Applications The PHD 4 is in daily use in many other applications Virtually any object requiring any level of leak tightness can be simply tested with this instrument Here is a partial list of other applications Components and systems for the Chemical and Petrochemical Industries Components for the Automotive industry Process gas delivery lines in Semiconductor fabrication industry Varian Inc Vacuum Technologies 20 Varian Pumps Designed for Leak Detection Varian has the advantage of being a designer and manufacturer of both vacuum pumps and leak detectors This gives us the proper insight for designing pumps that are perfectly suited for use In leak detection applications DS Series Rotary Vane Pumps Leak detectors require pumps with the ability to quickly pump out the test piece while efficiently pumping and expelling helium from the system Failure to do so limits leak detector performance DS series pumps fulfill all
56. tion notes are available at no cost e Varian handbooks on leak detection principles operation and techniques Global Applications Support Expertise When amp Where You Need It e Toll free hotlines provide easy accessibility to live front end support e Worldwide customer service representatives assist you with order status pricing and delivery and service information e Native language applications specialists available locally worldwide e Application specific consulting e More than ten thousand installed systems delivering application solutions to customers in a broad range of industries Industry Leading Service amp Support Get theMost fromYour Investment e Extensive network of service engineers available locally to meet your needs e Flexible comprehensive service plans provide service and support for years of trouble free Operation e Services include applications assistance Start up support vacuum and leak detection training comprehensive maintenance service agreements and warranty extensions Competent Technical support engineers are to respond with technical product data troubleshooting and literature Varian Inc Vacuum Technologies Leak 4 FS 2 P Vu am Varian Leak Detection Instruments Mass Spectrometer Portable Bench Mount Mobile VS PDO3 VS BR15 VS MR15 VS MD30 Primary Pumps DS42 RVP Dry pump combo DS 302 TriScroll 620 DS 302 TriScroll
57. tmospheric conditions Other Leak Test Methods Often Fall Short There are many other methods of leak testing but none that can match the ability of helium leak testing to locate and quantify leaks Figure 1 Test Method Approximate Leak Detection Ranges Helium Leak Detector Acoustic Bubble Testing Pressure Decay Halogen Sniffer 102 10 100 10 1 10 2 10 3 10 4 10 5 10 6 10 7 10 8 10 9 Leak Rates in atm cc sec Figure 1 Leak Test Methods Comparison Acoustic Leak Detection uses sonic or ultrasonic energy that Is generated by a gas as it expands through an orifice This method is fairly simple and fast but is only sensitive to 1 0 3 atm cc second Bubble Testing is a common method of leak detection in industry today It can be as simple as pressurizing a part placing it under water and looking for leaks It can also be done by pressurizing the part with air applying a soapy solution and looking for bubbles This method is simple and cost effective for locating large leaks but also has its drawbacks The test piece gets wet and may therefore need drying It also cannot measure total leakage rates and is only useful for 10 4 atm cc second leaks and larger Pressure Decay is commonly used in plumbing and many other industries It may only involve a compressor and a pressure gauge though some systems can be much more complex and expensive The sensitivity of this method is proportional to time but generally limited to
58. to 1 atmosphere The addition of this factory installed option allows the user to find leaks as large as 10 std cc sec at virtually any test port pressures up to atmosphere Calibrated Helium Leaks Varian offers helium leaks traceable to NIST standards for use in calibrating your leak detector An NW25 or 11 8 OD tube fitting and isolation valve are provided as standard on the external leaks The 10 6 10 5 range reference helium leak includes a pressure gauge and refill port for evacuation and sniff test calibration External 11 8 Compression NW25 Port F8473325 F8473320 10 6 10 5 std cc sec range refillable sniffing evacuation leak with pressure gauge and KF25 adapter F8473321 F8473301 10 7 std cc sec range with valve F8473322 F8473302 10 8 std cc sec range with valve F8473323 F8473303 10 9 std cc sec range with valve F8473324 F8473304 10 10 std cc sec range with valve Internal 8 NPT Fitting without valve K3264301 10 7 std cc sec range K3264302 10 8 std cc sec range Calibration Calibration of existing leaks is done on an advance exchange basis To order the recalibration service simply add GG in front of the above part numbers Gas Line Testing Accessory MSPA6415 The gas line testing accessory allows fast response evacuation leak detection of long gt 30 gas lines It is comprised of a male VCR PS Cajon 4 cross with needle type purge flow valve and 10 9 atm cc sec range calibrated leak A pressure
59. um mixture is used the helium signal will be dimin ished proportionally For example if a mixture of 10 helium and 90 nitrogen is used the signal will read 10 of the actual value of the leak or a decade lower This may be acceptable in many cases as system leak checking is usually to locate rather than quantify leaks Once the system has been charged with an appropriate amount of helium leak checking can be performed by means of a sniffer probe or by bagging suspected leak sites so that leaking helium will accumulate to a detectable level Varian Inc Vacuum Technologies 33 4 2 xg G OQ Uv a uU 34 Typical Leak Detection Applications Quality Control of Production Parts and Assemblies The detection and location of leaks is critical in the production of many products from individual components to sub assemblies to completed systems In many of these cases it is as important to know the size or rate of the leak as it is the location Whether quantitative or qualitative testing Is required our leak detectors help assure the leak integrity of your parts or assemblies Some examples include Evacuated parts and assemblies e Hermetically sealed electronic packages e Valves and manifolding e Feedthroughs glass to metal seals e Vacuum vessels and systems Pressurized parts and assemblies e Air conditioning and refrigeration assemblies e Radiators heat exchangers and condensers e Brake
60. upport on page 26 See Leak Detector Training Programs on pages 28 and 29 PHD 4 Bag VSPHD4BAG The Power Probe is a sniffer probe designed to locate leaks emanating from sealed containers internally pressurized with helium The Power Probe adjusts for varying sensitivity and response time It is extremely rugged and can be easily g disassembled for cleaning Power Probe K9565301 Power Probe with 11 8 Test Port Adapter 10 length K9565302 Power Probe with 11 8 Test Port Adapter 25 length K9565306 Power Probe with KF25 Flange 10 length K9565307 Power Probe with KF25 Flange 25 length K9565303 Spare Tip Filters 10 each The Power Probe is a sniffer probe designed to locate leaks emanating from sealed containers internally pressurized with helium The Power Probe adjusts for varying sensitivity and response time It is extremely rugged and can be easily disassembled for cleaning The probe kit includes 5 tip filters and is available with 10 or 25 feet of connecting tubing and an inlet adapter to fit on the leak detector It Is ideal for fast response sniffing with Macrolorr pumped leak detectors x Preamplifiers MS K3333301 956 959 DP and Turbo 19030301 959 MacroTorr 990 and 979 Standard Sensitivity K9740301 947 948 and 960 Collector Assembly R1003301 979 High Sensitivity Spare preamplifiers and collectors are available for all portable and cabinet leak detector spectrometer assemblies They a
61. visc viscosity of the gas in bar s P Absolute pressure one side of the wall in bar P Absolute pressure other side of the wall in bar Gas flow under molecular flow conditions for long cylindrical tube Q With 1 2x3 14x RxT DS 7 WA M X f X Py Po O Leak rate in mbar l sec L Length of the leak in cm D Leak diameter in cm M Molecular weight gas R Gas constant 8 3 E7 Temperature in degrees Kelvin P Absolute pressure one side of the wall in bar P Absolute pressure other side of the wall in bar Conversion Tables Pumping Speed m3 hour 1 cfm 1282 tren 1697 minut Gus Lon 8 ise ame O 1 38 EIN esis ON Flow Leak Rate scem 1 atm cc sec ee E 60 male Are 9 amp Lor se m 3 1 5s E Wamhe o 01 0 75 1 89 1 sccm 0 016 0 016 0 0 125 0 0016 1 Pressure Torr mbar micron atm 1 Torr ee monos NN 0 00132 imron mo oor oono O O00 0009 I su eses omo 1 09 Volume o dn O fO O dier cm o m 1 inch ss 0 000016 Lite m Oui 0 00 Leak Nn pen e Q D VU fe Varian Inc Vacuum Technologies 41
62. while offering the correct helium compression ratios to allow for high sensitivity In addition to offering all of the appropriate pumping characteristics Varian s patented Macrolorr turbo and turbo drag pumps require no periodic maintenance Macrolorr design provides high inlet pressure tolerance optimized helium compression ratio permits optimal helium detection and fast signal clean up permanently lubricated bearings need no maintenance For technical information on turbo pumps refer to Varian s Turbo Pump catalog Rotary Vane Pump Outline Drawing T m Fli C width 108 4 2 Pump DS 42 A length 309 12 0 B height 192 7 5 Pump Speed 60 Hz 1 2 cfm 50Hz 1 8 m3 hr 60 Hz 8 2 cfm 50Hz 11 6 m3 hr DS 302 467 18 4 212 83 SEL TriScroll Pump Outline Drawing C A N N Pump TriScroll 620 60 Hz 50 Hz B height 355 13 98 C width 300 11 8 Pump Speed A length 17 7 cfm 471 18 54 25 2 m hr Accessories and Options for Varian Leak Detectors Atmospheric Gross Leak For 947 948 L6839301 This option extends the gross leak testing range of the 947 and 948 leak detectors to a test port pressure of up
63. xg OQ U o H U am 28 Training Leak Rate Test amp Measurement LE Las de al E a a D c f F z _ i Course Description Leak Rate Test and Measurement provides a comprehensive introduction to production testing of parts against leak rate specifications and measuring and locating leaks in pressurized systems components using popular Helium Mass Spectrometer Leak Detectors HMSLDs and various application test fixtures The 2 Day Stand Alone course presents principles of operation of the spectrometer and underlying vacuum fundamentals in a classroom setting Operation tuning and calibration of the leak detector are covered in practical demonstration laboratory sessions Leak testing methods designed to solve various problems are discussed and demonstrated The 1 Day Companion course builds on the vacuum and Helium Mass Spectrometer Leak Detector HMSLD fundamentals learned in BVP and provides an introduction to production testing of parts against leak rate specifications and measuring and locating leaks in pressurized systems components using an HMSLD Leak testing methods designed to solve various problems are discussed and demonstrated Who Should Attend Engineers and operators who are responsible for quality control of production parts and assemblies Also technicians responsi ble for the maintenance of pressurized and evacuated systems such as those found in power gen

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