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Agilent Turbo-V 81 brochure Manual

1. Varian Inc Vacuum Technologies a l ee n Nh i 4 pa Tuto NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem gfxcellence EE Agilent Technologies Inspirin High performance Turbo V 81 M Improved Mechanical Lighter more rigid rotor optimized balancing system and enhanced ceramic bearing suspension deliver e Higher nominal rotational Speed e Longer life in any working position Applications e Mass Spectrometers e Electron Microscopes e Surface Analysis Worldwide Support e Leak Detection Turbo V 81 M e Varian s Turoo V 81 M is a high performance turbo drag pump in the 80 I s class e Compact package design wide selection of inlet flanges and on board or remote driver options make this pump ideal for new vacuum system design or for easy retrofit of existing systems e The Turbo V 81 M is suitable for demanding vacuum applications including high foreline pressure high throughput and UHV requirements Design e Research Laboratories and application engineers e Toll free telephone lines with native language representatives will assist you with Technical Application Order Processing Engineering support Better Vacuum Performance Higher nominal rotational speed optimized rotor blades sequence
2. z VACUUM TEPHNOLOGIES I l x 2 T 3 i Er slo l OY 2 a JJ L e amp CT A g IVLER A N i JA j 1 WEOFEN i J I AE Al I 3 31 84 00 ISO63 KF40 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 Toll Free 0800 051342 UK and Ireland Varian Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 10U England Tel 44 1865 291570 Fax 44 1865 291571 All CFF 2 75 CFF4 5 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Inc Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 ay 2N VARIAN www varianinc com Toll Free Number for North America 1 800 882 7426 Toll Free Number for Europe 00 800 234 234 00 specifications are subject to change without notice Copyright by Varian SpA GRAFFIO Giu06
3. 3 Italy Varian Inc Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Japan Varian Vacuum Technologies 969 9290 969 9940 969 9823 969 9824 969 9942 969 9844 969 9941 R1400301 969 9943 969 9944 969 9375 969 9376 969 8902 969 8901 969 9300 969 9309 969 9328 Sumitomo Shibaura Building 8 Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Toll Free 0120 655 040 VIEW FROM A inches mm 3 15 lt 80 gt 4 47 lt 113 54 gt j j 3 15 lt 80 gt 1 at 2 73 lt 69 34 gt 0 68 17 33 I l jl T T I 0 98 25 0 1 00 25 50 0 69 17 50 1 26 32 00 6 44 163 50 6 37 161 8 5 69 144 50 j 1 97 50 12 1 48 37 50 I 2 23 56 58 2 13 58 50 3 74 lt 94 89 gt 3 15 lt 80 gt 3 15 lt 80 gt 2 17 lt 55 gt I J q I 1 Da i 7 I 8 1 N I E 3 62 92 00 DA I L I I a E E S
4. and New Macrotorr stages provide e Higher foreline pressure tolerance e Higher pumping speed and throughput e Lower power requirements e Excellent compression ratio Controllers New capabilities enhance pump system control and communication e Rack on board and PCB versions e 24 Vdc and 100 240 V 50 60Hz versions e O and serial communications e Plus Navigator software e Pressure gauge reading capability e International network of professional sales dia ay GELEES E ois ih Sf a ee ee i es a Features and Benefits MacroTorr Stages Optimized to deliver better vacuum performance in a smaller package e ncrease foreline pressure tolerance by 100 e Reduce power requirements by 50 elncrease maximum throughput by 300 This pump is also available without MacroTorr stages as Turbo V 81 T Permanent bearing lubrication Varian s unique dry lubricant technology combined with ceramic bearings assures eClean vacuum no system contamination e Any working position without compromising performance or operating life e Maintenance free pump re lubrication not required Enhanced Electronic Controllers New innovative features are now available e Universal voltages e ntegrated Vent valve command adjustable valve delay and opening time e Stop Speed Reading command allows monitoring of pump slow down time during the venting phase e Pressure gauge reading e Integrat
5. art up time Recommended forepump Operating position Cooling requirements Bakeout temperature Vibration Level displacement Weight kg Ibs Inlet Pressure mbar N2 77 Ifs He 65 s N2 50 l s He 56 Ifs N2 5 x 108 He 8 x 104 12 mbar 10 mbar lt 5x 10 mbar 3 8 x 10 Torr according to PNEUROP 5608 CF 4 1 2 ISO 63 CF 2 3 4 KF 40 KF 16 80 000 rpm lt 60 sec H2 50 I s H2 46 Ifs H2 7 x 10 8 mbar Mechanical pump Varian DS102 Varian DS42 Dry Scroll Varian SH 110 Any Natural air convection Forced air or water optional 120 C at inlet flange max CF flange 80 C at inlet flange max ISO flange lt 0 01 micron at inlet flange CFF 2 98 6 57 ISO 2 00 4 40 Ordering Information and Outline Drawing PUMPS Turbo V81 M with ISO 63 flange Turbo V81 M with CF 4 1 2 flange Turbo V81 M with KF 40 flange Turbo V81 M with CF 2 3 4 flange CONTROLLERS Part Number 969 8901 969 8903 969 8902 969 8904 Part Number Turbo V81 AG 1 4 Rack controller 110 220 V basic version Turbo V81 AG 1 4 Rack controller 110 220 V RS232 485 Turbo V81 AG 1 4 Rack controller 110 220 V Profibus Turbo V81 M PCB controller 24 Vdc T Plus Navigator Software RS232 RS485 required ACCESSORIES Air cooling kit 0 5 m cable 969 8988 969 8989 969 8990 969 9538 969 9883 Part Number Air cooling kit extension cable 5 m cable Metal connection water cooling
6. ed Profibus T Plus Navigator Software In a Windows based environment T Plus software simplifies pump operation and control via computer allowing simultaneous drive of one or more Turbo pumps using either RS232 or RS485 ports Monitoring data logging and chart representation of pump parameters is now easily done with a click of the mouse Pressure gauge reading capability EyeSys Mini IMG active gauge available as option Three levels of Product Support Support programs for Pumps and Controllers are designed to meet your needs e Advance Exchange e Factory repair e Upgrade Program 1 00E 10 1 00E 09 1 00E 08 1 00E 07 1 00E 06 1 00E 05 1 00E 04 Compression ratio 1 00E 03 1 00E 02 1 00E 01 1 00E 00 1 00E 03 H2 He N2 Ar 1 00E 01 1 00E 00 Foreline Pressure mbar 1 00E 01 1 00E 02 9 00E 01 8 00E 01 7 00E 01 6 00E 01 5 00E 01 4 00E 01 3 00E 01 Pumping speed L s 2 00E 01 1 00E 01 Helium Nitrogen Argon 0 00E 00 1 00E 09 1 00E 08 1 00E 07 1 00E 06 1 00E 05 1 00E 04 1 00E 03 1 00E 02 1 00E 01 1 00E 00 1 00E 01 Pumping speed With CF 4 1 2 or ISO 63 With CF 2 3 4 or KF 40 Compression ratio Foreline Tolerance Base Pressure Inlet flange Foreline flange Nominal rotational speed St
7. kit Plastic connection water cooling kit Pump extension cable 5 m Turbo V81 AG Rack controller N O Vent valve 0 5 m cable Vent valve extension cable 5 m cable EyeSys Mini IMG NW25 EyeSys Mini IMG cable 1 mater Gauge extension cable 5 meters Vibration damper DN 63 ISO Vibration damper 4 1 2 CFF Heater band 120 V Heater band 220 V Inlet screen DN 63 Inlet screen DN 40 Inlet screen CF 2 3 4 Canada Central coordination through Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 1 800 882 7426 China Varian Technologies Beijing Rm 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 100052 P R China Tel 86 10 63108550 Fax 86 10 63100141 Toll Free 800 820 6556 France and Benelux Varian s a 7 avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 84 Fax 33 1 69 86 29 88 From Benelux Tel 31 118 67 15 70 From Benelux Fax 31 118 67 15 69 O h go E RA T F i E D Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 28521171 Fax 91 11 2852117

Agilent Turbo-V 81 brochure Manual

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