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Agilent Technologies Turbo-V 2K-G System 969-8873 Manual

1. 33000 max To Turbo V 2K G computer host RS232 RS485
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3. Technical Information BIAQMATOL ISO 250 F 12 22 Nm M10 H Turbo V 2K G dev To ISO 250F H ISO 1609 Eva 500 N mm IS O Turbo V 2K G axe NA anog 61010 1 N omoia AVTNAV
4. 1 advanced exchange service eva LED LD1 Turbo V 2K G
5. Turbo V 2 6 46 100 TWV mg 35 kg 120 85 399 IS 11POZOXH TOV H Turbo V 2K G dev
6. TNV po Turbo V 2K G controller inlet screen uovtapiou vo oe CD ROM 15 REMOTE VO IP 54 HE 6 9 SERIAL IP 54 7 9 Network MoniTorr 8 OVB o KINAYNOZ H va
7. VO STOP I O JI REMOTE VO Technical Information 3 amoot lovtag STOP RS 232 485 RS 232 485 Communication Description Techni cal Information NE va OVV NAKEC TO Turbo V 2K G anoa tov controller Kal TOU EAeyx nevou TO
8. Profibus rou P ropa H TOU Turbo V 2K G KINAYNOZ O POTOP 50 C service Varian Varian advanced exchange service
9. N Y AN V N Ja Y NV x Y N 87 900 968 01 F HASZN LATI UTAS T S Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez gepk nyvben le van irva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k dese p ld ul a rotor ll resz rintkez si hib ja vagy ak r a forg r sz sz tt r se eseten a forg si energia felszabadulhat ZN BETSTVIN A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a gepk nyvben adott telepitesi utasit sokat szigoruan be kell tartani 49 100 87 900 968 01 F LTAL NOS INFORM CI A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtetese el tt el kell olvasnia ezt a g pk nyvet s a Varian ltal biztos tott b rmely inform ci t A Varian nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utasit soknak val ak r reszbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendezesbe val jogosulatlan beavatkoz s vagy a konkret nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A Turbo V 2K G egy integr lt rendszer turbo molek
10. Apy v mo Varian Turbo V 2K G VO Input Output STOP JI REMOTE I O Technical Information 1 I O 2 3 0 1 mbar 4 Turbo V 2K G START
11. SOFT START ue ano 10 I N soft start KL ZHMEIQZH va IP 54 ue 969 9957 969 9958 controller va ue n 01
12. 400 ms stop Waiting for interlock 400 Ms Turbo V 2K G 48 100 logo WEEE WEEE
13. AK PA for R eques t for Keturn VARIAN ROI 9001 FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Does not start I Noise 1 Vertical Power Rotational Speed Does not spin freely O Vibrations O Horizontal Current Inlet Pressure L Does not reach full speed Leak L Upside down Temp 1 Foreline Pressure Mechanical Contact L Overtemperature Other Temp 2 Purge flow O Cooling defective o OPERATION TIME TURBOCONTROLLER ERROR MESSAGE ION PUMPS CONTROLLERS VALVES COMPONENTS L Bad feedthrough Poor vacuum L Main seal leak Bellows leak I Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other LI Damaged sealing area Other Customer application Customer application LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround I Gauge tube not working Display problem I Vacuum system unstable Cannot reach test mode LI Communication failure Degas not working Failed to start Other A Error code on display LI Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS I Pump doesn t start Noisy pump describe Heater failure O Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum A Cooling coil damage I Pump seized Other I Vacuum leak Other
14. TV 87 900 968 01 F IS 11POzOXH HE IS H OL 2 bar 5 C
15. IP 54 O Turbo V 2K G egyet TU TOV MUGTE EVAL TPOGLTOM VKOA tagon OQTL mn Turbo V 2K G Ka anog 61010 1 47 100 IS Ta A KINAYNOZ m H
16. Technical Information opovsi A KINAYNOZ US O1 Tia 9 OL
17. a TO VO 87 900 968 01 F b START VO JI REMOTE I O Technical Information c START RS 232 485 RS 232 485 Communication Description Technical Information N KINAYNOZ o 15 pin Turbo V 2K G SF O controller O controller Varian Vacuum Technologies n Turbo V 2K G controller EKKIVEI ue ua
18. e 20 C 70 C O 95 e o e 10 IS HE TIA To Turbo V 2K G
19. The system is provided with a green status led signal The green LED located on the Turbo V 2K G base front panel indicates with its flashing frequency the system operating condi tions e with no flashing the pump is normally rotating e slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status e fast flashing period of about 200 ms error condition How to stop the system To stop the pump you can use one of the following methods 1 unplugging the provided mating I O connector 2 giving a remote stop signal through the I O connector see para J1 REMOTE I O of annex Technical Information 3 giving a remote stop signal via the serial RS 232 485 inter face see para RS232 RS 485 Communication Descrip tion of annex Technical Information 73 100 INSTRUCTIONS FOR USE Emergency Stop To immediately stop the Turbo V 2K G in an emergency condi tion it is necessary to remove the mains It must be however noted that this operation in addition to cutting off the pump power also cuts off all other controller functions such as Purge and Controlled Vent management and the capability of commu nicating with the system in which the pump is integrated via I Os Serial or Profibus Furthermore this operation may not ensure the immediate stopping of the rotor Rotation speed of the rotor will decrease according to the degree
20. HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Customer Service to discuss alternatives if this requirement presents a problem The equipment listed above check one LI HAS NOT been exposed to any toxic or hazardous materials OR I HAS been exposed to any toxic or hazardous materials In case of this selection check boxes for any materials that eguipment was exposed to check all categories that apply A Toxic 1 Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic or hazardous materials Include product name chemical name and chemical symbol or formula Print Name nie Customer Authorized Signature Print Title ceste Date o atts NOTE If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Do not write below this line Notification RA Customer IDH Equipment
21. Varian TOV To dev 80 C 120 C O 1 0 default vo Technical Informa tion KINAYNOZ
22. 40 C STO O 95 To TURBO V 2K G Turbo V 2K G Turbo V 2K G 10600 Nm H ISO O TOV TOV
23. i 100 ORDERABLE PARTS aii indeed ede t die de ed dele ale A 100 ISTRUZIONI PER L USO Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa speci fica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata AN EZ Per evitare danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 1 100 87 900 968 01 F INFORMAZIONI GENERALI Questa apparecchiatura destinata ad uso professionale L uti lizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell utilizzo dell apparecchiatura La Varian si ritiene sollevata da eventuali responsabilit dovute all inosser vanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche La Turbo V 2K G un sistema integrato costituito da una pom pa turbomolecolare per applicazioni di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare molti tipi di
24. Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken US ATTENTIE Bij dit symbool staat tekst met procedures die indien niet opgevolgd schade aan apparatuur kunnen veroorzaken OPMERKING De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht OPSLAG Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Varian te garanderen moeten de volgende voorschriften in acht worden genomen e tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan e temperatuur van 20 C tot 70 C relatieve vochtigheid van O tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum IRS ATTENTIE Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Varian 25 100 GEBRUIKSAANWIJZINGEN UITPAKKEN De Turbo V 2K G wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transpo
25. NWN OI 45 100 87 900 968 01 F O Varian Varian TOV 1 To Turbo V 2K G controller
26. Turbo V 2K G no posee ning n agente contaminante y por lo tanto es adecuado para aplicaciones que requieren un vacio limpio Adem s cuenta con conectores auxiliares mediante los cuales es posible pilotearlo de remoto a trav s de un ordenador host conectado con l nea serie RS232 o RS485 A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada Este manual utiliza las convenciones siguientes A gm Los mensajes de peligro atraen la atenci n del operador sobre un procedimiento o una ejecuci n espec fica que de no realizarse correctamente podr a provocar graves lesiones personales US ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato NOTA Las notas contienen informaci n importante extra da del texto ALMACENAMIENTO Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Varian deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C e humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al r
27. 4 Anna Turbo V 2K G pumpulle START signaali yhdell seuraavista tavoista a Liit ohessa toimitettu l O liitin b Anna START et signaali O liittimell ks Technical Information liitteen kappale J1 REMOTE I O c Anna START et signaali RS232 485 sarjaliit nn n kautta ks Technical Information liitteen kappale RS232 485 Communication Description 87 900 968 01 F VAARA Kytkett ess s hk p lle 15 nastaisen liittimen ollessa liitettyn Turbo V 2K G k ynnistyy automaattisesti IS Huomio Valvoja toimitetaan pumppuun mekaanisesti ja s hk isesti kytkettyn Valvojan saa irrottaa pumpun rungosta ainoastaan Varian Vacuum Technologies yrityksen valtuuttama henkil HUOM Kun Turbo V 2K G k ynnistet n ensimm isen kerran valvoja k ynnist j rjestelm n automaattisesti erikoistoimenpiteell joka suojaa laakereita vaurioilta SOFT START J rjestelm k ynnistet n per kk isill askelilla t yteen nopeuteen asti 10 minuutista 1 tuntiin vaihtelevana aikana Kun j rjestelm on saavuttanut t yden nopeuden soft start toimenpide kytket n pois ja seuraavat k ynnistykset suoritetaan normaalisti HUOM K yt ainoastaan pumpun ohessa toimitettuja liittimi s ilytt ksesi IP54 suojatason K yt s hk kaapelina ainoastaan tuotetta 969 9957 tai 969 9958 ja kiinnit s hk kaapeli valvojaan erityisell kannattimella ks seuraava kuva K yt t t
28. Remote 1 0 mode even if it was in Serial mode before power down This connector carries all the input and output sig nals to remote control the Turbo V 2K G It is a 15 pins D type connector the available sig nals are detailed in the table the following para graphs describe the signal characteristics and use PIN N SIGNAL NAME INPUT ISOLATION OUTPUT 1 START STOP IN Optocoupled 2 START STOP IN Optocoupled 3 INTERLOCK IN Optocoupled 4 INTERLOCK IN Optocoupled 5 SPEED SETTING IN Optocoupled 6 FAULT COMMOMN OUT Relay 7 SOFT START IN Optocoupled 8 SET POINT OUT Relay 9 24 Vdc OUT Transformer 10 PURGE IN Optocoupled 11 SET POINT OUT Relay 12 VENT IN Optocoupled 13 FAULT OUT Relay 14 ANALOG OUTPUT OUT Optocoupled 15 GROUND OUT Transformer 78 100 87 900 968 01 E Signals description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump auto matically starts as soon as the controller recog nises the input supply Plug amp Pump INTERLOCK input signal to confirm the pump ro tation With the supplied cover connector the INTERLOCK signal is connected to the 24 Vde pin and the INTERLOCK signal to the GR
29. The pump can be water cooled only For this pur pose the customer must use the dedicated chan nel on the pump body The pump is balanced after assembly with a resid ual vibration amplitude less than 0 01 um The pump can operate in any position and must be supported on the high vacuum flange The con nection of the forevacuum on the side of the pump is a KF 40 NW flange TECHNICAL INFORMATION Turbo V 2K G mem b E b a 9 Controller Description The dedicated controller is a solid state freguency converter which is driven by a single chip micro computer The controller can be operated by a remote host computer via the serial connection a Windows based software is available as an option or by the remote I O connector At every power up the controller is in Remote Mode of operation and accepts only commands from J1 remote I O connector To put it in Serial Mode of operation please refer to the serial com mand table TECHNICAL SPECIFICATION Pumping speed without inlet screen No 1600 l s 1400 l s Compression ratio Base pressure with 5 x 10 mbar recommended 4 x 10 Torr forepump According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the comple tion of test dome bake out with a Turbopump fitted with a ISO 250 flange and using the recom mended pre vacuum pump Inlet flange ISO 250 F Foreline flange KF 4
30. a Mitgelieferten E A Gegenkonnektor anschlie en b Das Signal START von der Fernsteuerung ber den E A Konnektor geben siehe Abschnitt J1 REMOTE im Anhang Technical Informati on c Das Signal START von der Fernsteuerung ber die serielle Schnittstelle RS 232 485 geben siehe Abschnitt RS 232 485 Communication Descripti on im Anhang Technical Information Wenn die Spannung zugeschaltet und der Gegenkonnektor mit 15 PINs angeschlossen ist startet die Turbo V 2K G automa tisch RONA IS ACHTUNG Im Lieferumfang ist der mechanisch und elektrisch an die Pumpe angeschlossene Controller enthalten Die Trennung des Control lers vom Pumpenkorpus darf nur von Personen ausgef hrt wer den die von Varian Vacuum Technologies autorisiert sind HINWEIS Bei Erstingangsetzung der Turbo V 2K G startet der Controller das System mit einer Spezialprozedur um die Kugellager vor etwaigen Sch den zu sch tzen SOFT START Das System wird innerhalb von 10 min bis zu 1 h in aufeinander folgenden Schritten bis zur Arbeitsgeschwindigkeit gestartet Sobald das System die Arbeitsgeschwindigkeit erreicht hat wird die soft start Prozedur deaktiviert Die darauf folgenden Anlaufvorg n ge werden normal ausgef hrt HINWEIS Um die Schutzart IP 54 aufrechtzuerhalten sind ausschlie lich die mit der Pumpe mitgelieferten Konnektoren zu verwenden F r das Stromversorgungskabel d rfen nur die PN 969 9
31. kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t J rjestelm on varustettu vihre ll LED valolla jota ohjataan tilasignaalilla Vihre LED LD1 joka sijaitsee TURBO V 2K G n perustan paneelissa osoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet palaa jatkuvasti pumppu py rii normaalisti vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa vilkkuu nopeasti noin 200 ms n jakso virhetila Turbo V 2K G pumpun pys ytys Pys yt pumppu yhdell seuraavista tavoista 1 Poista ohessa toimitettu I O liitin 2 Anna STOP et signaali l O liittimell ks Technical Information liitteen kappale J1 REMOTE I O 44 100 K YTT OHJEET 3 Anna STOP et signaali RS232 485 sarjaliit nn n kautta ks Technical Information liitteen kappale RS232 485 Communication Description H t pys ytys Turbo V 2K G on pys ytett v h t tilassa irrottamalla s hk kaapeli ohjausyksik st On kuitenkin otettava huomioon ett sen lis ksi ett t m toiminto katkaisee t ysin k yt st poistetun pumpun virransy t n se my s poistaa k yt st kaikki muut ohjaimen toiminnot kuten Purge ja Vent toimintojen hallinnan ja kommunikointimahdollisuuden sen j rjestelm n kanssa johon pumppu on kyt
32. lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subseguent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will ANSWER whose structure depends from MESSAGE type respond with an the When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE 82 100 NOTE Some error settings are foreseen 0x15 NACK foreseen with Read Write com 0x32 UNKNOWN WINDOW mands 0x33_ BAD DATA TYPE foreseen only 0x34 OUT OF RANGE with Write com 0x35 BAD OPERATION mands NOTE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt 87 900 968 01 E TECHNICAL INFORMATION The controller can answers with the following re Command STOP sponse types Source PC Destination Controller TYPE LENGTH VALUE DESCRIPTION 02 80 30 30 30 31 30 03 42 32 After a read instruction Logic 1 byte RE of a logic window Aller a read Instruction STX ADDR WINDOW WR OFF ETX CRC Numeric 6 bytes NAK of a numeric window After a read instruction Alphanumeric 10 bytes of an alphan
33. przekroczone nast puj ce warunki rodowiskowe e temperatura od 20 C do 70 C e wzgledna wilgo od 0 do 95 bez opar O klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start e czas magazynowania danej pompy turbomolekularnej wynosi 10 miesiecy od daty wysytki IS UWAGA Jezeli z jakiegokolwiek powodu czas magazynowania jest dtu szy nalezy odesta pompe do fabryki W celu jakiejkolwiek informacii prosimy skontaktowa sie z miejscowym przedstawicielem firmy Varian INSTRUKCJA UZYTKOWANIA PRZYGOTOWANIE DO INSTALACJI System Turbo V 2K G jest dostarczany w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu Turbo V 2K G ani nie poddawa go uderzeniom lub wibracjom Zdj obudow konektor w tylko wtedy gdy turbopompa zosta a przymocowana do systemu Z powodu jego ci aru 35 kg aby wyci gn pomp z opakowania nale y zastosowa trzy zaczepy na 120 wkr cone na korpusie pompy Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska DS UWAGA Aby unikn problem w odgazowywania nale y nie
34. 11 28521171 Fax 91 11 28521173 Italy Varian Inc Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 03 06 Sales and Service Offices Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Rd Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 Toll Free 0800 051342 UK and Ireland Varian Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 10U England Tel 44 1865 291570 Fax 44 1865 291571 United States Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Inc Vacuum Technologies Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Customer Support amp Service North America Toll Free 1 800 882 742
35. Jakakolwiek interwencja musi by wykonana przez upowa niony personel N NIEBEZPIECZENSTWO Przed wykonaniem jakiejkolwiek interwencji na systemie nale y od czy go od zasilania otworzy odpowiedni elektrozaw r dla wlotu powietrza odczeka a do ca kowitego zatrzymania wirnika i odczeka a temperatura powierzchni pompy b dzie wynosi a poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Varian lub Varian advanced exchange service kt ry pozwoli na uzyskanie zregenerowanego systemu w zast pstwie uszkodzonego systemu 87 900 968 01 F INFORMACJA Przed wysytka do konstruktora systemu do naprawy lub advanced exchange service nale y obowiazkowo wypetni i przekaza do miejscowego biura sprzeda y karte Bezpiecze stwo i Zdrowie za czon do niniejszej instrukcji Jeden egzemplarz kopia karty musi by w o ony do opakowania systemu przed jego wysy k Je eli system musi by poddany rozbi rce nale y przyst pi do jego eliminacji zgodnie z obowi zuj cymi krajowymi normami w meritum sprawy PRZETWORSTWO ODPADOW Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEE Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi
36. O As mensagens de aten o s o visualizadas antes de procedimentos que se n o efectuados correctamente podem causar danos aparelhagem NOTA As notas cont m informa es importantes destacadas do texto ARMAZENAGEM Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Varian devem ser observadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 n o condensante ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativ las sempre em modalidade Soft Start o tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedic o 13 ATENGAO Se por uma raz o qualquer o periodo de armazenagem for superior ser necess rio enviar outra vez a bomba para o fabricante Para mais informac es contatar o representante local da Varian PREPARA AO PARA A INSTALA AO O Turbo V 2K G amp fornecido numa embalagem protectora especial se esta apresentar sinais de danos gue poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local 20 100 INSTRUC ES PARA O USO Durante a remoc o da embalagem tomar muito cuidado para n o deixar cair o controller e para n o submet lo a choques ou vibrag es Retirar a protecc o dos conector
37. Stickstoff oder Helium zuzuleiten ist siehe Anhang Technical Information ES ACHTUNG Die Pumpe niemals im Beisein von Gas oder korrosiven D mp fen benutzen weil sie das Material im Innern der Pumpe be sch digen k nnten A Wenn die Pumpe zur F rderung von giftigen leicht entflamm baren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden Die Pumpe ist f r einen hohen Durchsatz an Stickstoff Argon und leichteren Gasen konzipiert Falls das Pumpen von Gasen erforderlich ist die schwerer als Argon sind ist mit dem Technischen Kundendienst von Varian R cksprache zu halten Benutzung der Turbo V 2K G Ingangsetzung des Systems Vor der Ingangsetzung des Systems ist zu kontrollieren dass der E A Gegenkonnektor entfernt ist Wenn das System an eine Vor richtung f r die Ferneingabe ausgabe angeschlossen ist ist zu 87 900 968 01 F berpr fen dass das Signal STOP aktiv ist siehe Abschnitt J1 REMOTE I O im Anhang Technical Information Zur Ingangsetzung des Systems sind die folgenden Schritte auszuf hren E A Gegenkonnektor entfernen sofern vorhanden Ger t an das Netz anschlie en Druck in der Vakuumkammer auf 0 1 mbar bringen F r die Erteilung des Signals START an die Turbo V 2K G gibt es die folgenden M glichkeiten
38. Technical information De Turbo V 2K G kan in alle standen worden ge nstalleerd Bevestig de Turbo V 2K G in een stabiele positie en verbind de inlaatflens van de turbopomp met een vaste contraflens die een koppel van 10600 Nm rondom de eigen as kan verdragen De turbopomp met ISO ingangsflens moet bevestigd worden aan de vacu mkamer met behulp van bouten De volgende tabel beschrijft het aantal benodigde bouten en met welk koppel Varian adviseert om ze aan te halen FLENS KLEMTYPE NR AANHAAL KOPPEL ISO 250 F Bout met M10 12 22 Nm schroefdraad OPMERKING De Turbo V 2K G kan niet bevestigd worden via zijn basis Het systeem mag uitsluitend bevestigd worden via ziin ISO 250F flens De bevestiging moet conform de norm ISO 1609 gebeuren Er moeten stalen bouten worden weerstandsklasse van minstens 500 N mm gebruikt met een US ATTENTIE De Turbo V 2K G behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet 26 100 GEBRUIKSAANWIJZINGEN Gebruik de bijgeleverde contraconnectoren om de beveiligingsgraad IP 54 te garanderen De Turbo V 2K G bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen enkel deel onder spanning toegankelijk is Controleer of de inrich
39. n ch st tn ch norm ch V v va Turbo V 2K G je integrovan syst m s turbomolekul rn v v vou a p slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turbina max 33000 ot min poh n n vysoce v konn m trojf zov m elektromotorem Za zen Turbo V2K G neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vy aduj c ist vakuum Je vybaveno p davn mi konektory aby bylo mo n jej ovl dat ze vzd len ho mista pomoc hostite sk ho po ta e prost ednictv m s riov linky RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information Tento manu l pou v n sleduj c standardn protokol A VYSTRAHA V stra n hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v p pad nedodr en mohly zp sobit v n raz IS vAROV N Varovn hl en jsou uvedena p ed postupy kter by v p pad nedodr en mohly po kodit za zen POZN MKA Pozn mky obsahuj d le it informace p evzat z textu USKLADN N Aby byla zaji t na maxim
40. pump The pressure at the vent port must be less than 1 bar above atmospheric pressure For pumping gases containing particulate or aggressive pollut ants for the bearings these pumps are fitted with a special port to allow a steady flow of inert gas like N2 He for pump bearing protection see the appendix Technical Information IS CAUTION Never use the pump with corrosive gases or vapor to avoid damage to the internal materials of the pump msn When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases The pump is designed to pump high throughput of Na Ar and lighter gas Should you need to pump gases heavier than Ar please contact Varian technical support for information Use of Turbo V 2K G How to start the system up Before starting the system please check that the mating I O connector is unplugged If the system is connected to a remote I O make sure the stop signal see para J1 REMOTE of annex Technical Information is given To start the system please follow the following steps 1 unplug if present the system mating I O connector plug on the mains pump the vacuum chamber down to 0 1 mbar give the Turbo V 2K G a start signal by one of the follow ing methods a connecting the provided mating I O connector b giving a remote start signal through the I O connect
41. rt forduljon a Varian m szaki t mogat shoz A Turbo V 2K G haszn lata A rendszer elind t sa A rendszer elind t sa el tt ellen rizze hogy a B K csatlakoz ki van e h zva Ha a rendszer t voli B K hoz van csatlakoztatva ellen rizze hogy stop jel l sd Technical Information f ggel k J1 REMOTE I O bekezd se adva van e A rendszer ind t s hoz k rem k vesse a k vetkez l p seket 1 h zza ki ha jelen van a rendszer B K csatlakoz j t 2 dugja be a t pk belt 3 szivatty zza le a v kuumkamr t 0 1 mbarra 4 adjon a Turbo V 2K G nek start jelet a k vetkez m dszerek valamelyik vel a a mell kelt B K csatlakoz csatlakoztat sa b t voli start jel ad sa a B K csatlakoz n kereszt l l sd Technical Information f ggel k J1 REMOTE I O bekezd se tavoli start jel ad sa az RS 232 485 soros interf szen kereszt l l sd Technical Information f ggel k RS 232 485 kommunik ci leir sa 87 900 968 01 F ms Amikor a t pfesz lts g r van kapcsolva s gy ri 15 t s csatlakoz csatlakoztatva van a Turbo V 2K G automatikusan elindul IS FIGYELEM A vez rl t m r mechanikusan s elektromosan a szivatty hoz csatlakoztatva sz ll tj k A vez rl nek a szivatty r l val lev laszt s t csak jogosult Varian v kuumtechnol giai szem lyzet v gezheti MEGJEGYZ S Amikor legel sz r futtatja a Turbo V 2K G t a vez rl egys g automatikusan
42. s ligeros O para arg n modo predeterminado Para mayores detalles v ase el ap ndice Technical Information A men No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas US ATENCI N Ev tense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta deber ser inferior a 1 bar por encima de la presi n atmosf rica Para bombear gases con part culas o contaminantes agresivos para los cojinetes estas bombas est n dotadas de una puerta espec fica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Helio para proteger los rodamientos v ase el anexo Technical Information US ATENCI N Nunca usar la bomba en presencia de gases o vapores corrosivos que puedan da ar los materiales del interior de la bomba A EE Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos La bomba ha sido proyectada para una
43. turb szivatty m r r gzitve van a rendszerhez Ad EN Ne telep tse valamint ne haszn lja a szivatty t atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett leveg h m rs klete 5 C t l 40 C ig relat v p ratartalom 0 95 nem kondenz l M gneses mez k jelenl t ben a szivatty t v deni kell ferrom gneses pajzs seg ts g vel R szletes inform ci rt l sd Technical Information A Turbo V 2K G t els dleges szivatty hoz kell csatlakoztatni l sd Technical Information A Turbo V 2K G t b rmely helyzetben lehet telep teni R gz tse a Turbo V 2K G t stabil helyzetben a turb szivatty bemeneti karim j t egy r gz tett ellenkarim ra csatlakoztatva amely k pes ellen llni 10600 Nm tengely k r li nyomat knak Az ISO bemeneti karim s turb szivatty t csavarokkal kell r gz teni a v kuumkamr hoz A k vetkez t bl zat a csavarok sz ks ges sz m t s a Varian ltal aj nlott r gz t nyomat kot mutatja R GZ T R GZ T ESZK Z NYOMAT K MEGJEGYZ S A Turbo V 2K G nem r gzitehet az alapj val A rendszer csak ISO 250F karim val r gz thet A r gz t st az ISO 1609 norma szerint kell v gezni Legal bb 500 N mm t
44. voltage of 54 Vac between phases three phase at 555 Hz To avoid rotor overheating an auto matic power management routine is implemented in the control unit microprocessor The user can select through serial line the gas load type be tween Argon and Nitrogen or lighter gases with window 157 O Argon and default 1 Nitrogen When Nitrogen is selected the power limit is fixed at 400 W for Argon selection the user must set the maximum foreseen water cooling temperature Twater max by the window 158 After these set tings the controller will operate as shown in the fol lowing diagram Nitrogen NO 0 NO Normal 400W Fail OverTemp 0 Argon def 0 NO NO Normal 220W YES Fail OverTemp Normal 220 W Normal with Pmax derived from the Figure I 74 100 87 900 968 01 E where e Tb upper bearing temperature e Tbody measured water cooling related tem perature e Tbody lim body temperature corresponding to Twater max according to Figure 2 WIN 118 set the body temperature control Power W 390 Power Limit Applied 20 Tbodylim C 38 Figure 1 Twater max Figure 2 3 un A thermistor sensor is mounted near the upper bearing in order to read the bearing temperature and to prevent the pump from overheating A thermistor sensor is mounted near the water cooling channel in order to evaluate the cooling efficiency
45. w 0 dla Argonu tryb default W celu dodatkowych informacji nale y zapozna sie z dodatkiem Technical Information N NIEBEZPIECZENSTWO Nigdy nie nale y uruchomi pompe w przypadku kiedy kotnierz wejsciowy nie jest podtaczony do komory lub nie jest zamkniety z kolnierzem zamkniecia Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temperatura mo e spowodowa uszkodzenia ciata na osobach IS UWAGA Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza pompy zastosowa powietrze lub oboj tny gaz bez py u lub innych cz stek Ci nienie wej ciowe poprzez odpowiedni wlot musi by ni sze od 1 bara ponad ci nienie atmosferyczne Aby mo liwe by o pompowanie gaz w zawieraj cych cz steczki lub zanieczyszczenia niszcz ce o yska pompy te s wyposa one w odpowiedi wlot poprzez kt ry nale y dostarczy pompie przep yw oboj tnego gazu Azot i Hel dla zabezpieczenia o ysk Patrz dodatek Technical Information IS UWAGA Absolutnie nie wolno stosowa pompy w obecno ci gaz w lub opar w korozyjnych poniewa mog one by przyczyn uszkodzenia wewn trznych element w pompy N NIEBEZPIECZENSTWO Kiedy pompa jest zastosowana do pompowania gaz w toksycznych tatwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego
46. CAB The customer should send by e mail the compressed CAB file every archive time pe riod to Varian Technical support at the following address vtt technical support varianinc com 2 FileDownload c ES Controller Status Monitorr Status Freq Pi NORMAL OPERATION READY 1250 53 1 2 file 9698971 NORMAL OPERATION READY Freq Hz Power w Temp C Current A Voltage V HPS Cycle HPS Tryes 1250 h 58 0 001 33 fo Pump Status Check connection NORMAL OPERATION Pump New archive file created Only for information all files are automatically stored in the directory C Varian 90 100 TECHNICAL INFORMATION PROFIBUS OPTION General The ProfiBus option allow to communicate with the controller as Profibus DP slave device The option works as a bi directional bridge be tween the ProfiBus network and the Varian turbo controller internal link The interface provides input data measures and output data commands to the controller and in addiction provides standard and user related diagnostics in order to allow the user to manage the exceptions Mechanical This option is mounted in the Option space 2 Installation This option can be factory installed or on the field by Varian personnel The profibus connector pin out is reported in the following figure Please in order to obtain best per formance use profibus certified cables
47. Customer application Customer application FAILURE DESCRIPTION Please describe in detail the nature of the malfunction to assist us in performing failure analysis NOTA Su richiesta questo documento disponibile anche in Tedesco Italiano e Francese REMARQUE Sur demande ce document est galement disponible en allemand italien et francais HINWEIS Auf Aufrage ist diese Unterlage auch auf Deutsch Italienisch und Franz sisch erh ltlich France and Benelux Varian s a 7 Avenue des Tropigues Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 84 Fax 33 1 69 86 29 88 From Benelux Tel 31 118 67 15 70 From Benelux Fax 31 118 67 15 69 Canada Central coordination through Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 1 800 882 7426 China Varian Technologies Beijing Rm 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 100052 P R China Tel 86 10 63108550 Fax 86 10 63100141 Toll Free 800 820 6556 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91
48. In der nach stehenden Tabelle sind die Anzahl der erforderlichen Mutter schrauben und die von Varian empfohlenen Anzugsmomente angegeben FLANSCH KLEMMSCHELLE ANZ ANZUGSMOMENT BEE 250 F EEE ETSI Nm mit Gewinde M10 HINWEIS Die Turbo V 2K G kann nicht ber ihren Sockel befestigt werden Zur Befestigung des Systems ist der Flansch ISO 250F zu ver wenden Die Befestigung muss nach ISO 1609 ausgef hrt sein Es sind Mutterschrauben gus Stahl mit einer Festigkeitsklasse von mindestens 500 N mm zu verwenden IS ACHTUNG Der Turbo V 2K G geh rt zur zweiten Installationsklasse berdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung mu daher an eine Speisungsleitung ange schlossen werden die dieser Kategorie entspricht Zur Gew hrleistung der Schutzart IP 54 sind die Gegenkonnek toren zu verwenden Der Turbo V 2K G hat Verbinder f r den Ein und Ausgang und die Schnittstellenkommunikation die an die Au enkreise ange schlossen werden m ssen soda kein Teil unter Spannung zug nglich ist 7 100 GEBRAUCHSANLEITUNG Sicherstellen da die Isolierung der an den Turbo V 2K G angeschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlinie EN 61010 1 vor gesehen wird F r die Installation der Optionsteile siehe im Anhang Technical Information GEBRAUCH In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert V
49. Jamais usar a bomba na presen a de gases ou vapores corrosivos que possam danificar os materiais no interior da bomba EEE Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presen a de gases explosivos A bomba foi concebida para fornecer um elevado caudal de Azoto Argon e gases mais leves Se houver a necessidade de bombear gases mais pesados que o Argon aconselha se a entrar em contacto com a Assist ncia T cnica da Varian para obter maiores informa es Uso da Turbo V 2K G Como activar o sistema Antes do arranque do sistema assegurar se de que o conector conjugado I O n o est montado Se o sistema est ligado a um dispositivo de Input Output remoto assegurar se de que o sinal de STOP est activo consultar o par grafo J1 REMOTE I O no ap ndice Technical Information Para activar o sistema executar as seguintes opera es 1 remover se presente o conector conjugado I O 2 ligar o cabo rede de alimenta o el ctrica 3 deixar aumentar a press o dentro da c mara de v cuo at atingir 0 1 mbars 87 900 968 01 F 4 fornecer a Turbo V 2K G o sinal de START num dos seguintes modos a ligar o conector conjugado I O fornecido de s rie b dar o comando remoto de START utilizando o conector I O consultar o par grafo J1 REMOTE 1 0 no ap ndice Techn
50. NOTA La Turbo V 2K G no puede sufrir da os s lo por quedar expuesta a la acci n de la atm sfera No obstante se aconseja mantener la bomba cerrada y sellada hasta el momento de instalarla en el sistema a fin de prevenir la contaminaci n del mismo El embalaje de la Turbo V 2K G contiene 1 bomba con controlador integrado 2 inlet screen montado 3 el presente manual en CD ROM 4 bolsa con accesorios 5 ensamble de conector de 15 vias REMOTE I O IP 54 que incluye las conexiones necesarias para reactivar la bomba 6 ensamble de conector de 9 v as SERIAL IP 54 a utilizar para efectuar la conexi n serie 7 ensamble de conector de 9 v as Network MoniTorr 8 abrazadera para retener el cable de alimentaci n montada INSTALACI N PELIGRO Siempre a causa de su peso la bomba debe ser manejada utilizando medios espec ficos de elevaci n y desplazamiento Para ello deben utilizarse las correspondientes armellas enroscadas en los respectivos agujeros practicados en el cuerpo de la bomba misma 87 900 968 01 F US ATENCI N No retirar la cubierta empernada antes de haber conectado la bomba de turbina al sistema US ATENCI N Quitar la protecci n de los conectores solamente despu s de haber fijado al sistema la turbobomba I No instalar ni o utilizar la bomba en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo
51. O Significado do log tipo WEEE presente nos r tulos O s mbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este s mbolo v lido apenas para os pa ses da Comunidade Europeia indica gue o produto no gual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e eliminac o ap s a oportuna verifica o dos termos e condi es do contrato de venda 23 100 87 900 968 01 F GEBRUIKSAANWIJZINGEN Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen AN EEZ Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 24 100 87 900 968 01 F ALGEMENE INFORMATIE Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en all
52. WAIT_PRM or SRC_ADDR Message mapping The communication is based on the continuous data exchange capability of the ProfiBus standard where the master sends continuously the entire TECHNICAL INFORMATION slave configuration and reads back the entire slave status For this purpose one Input from slave to master and one Output from master to slave buffers are provided All the needed parameters are mapped inside each buffer The following tables summarise the ProfiBus pa rameter access related to the corresponding win dows serial protocol for this protocol please refers to the serial interface paragraph The interface doesn t any scaling operation on the read written parameters It acts only as a gateway between the ProfiBus network and the pump s controller serial interface As a conseguence of this the scale and the meaning of some parame ters depends directly to the specific model of Turbo Pump controller connected to the interface PROFIBUS MESSAGE MAPPING PARAMETER BUFFER 17 BYTES OFFSET SIZE UNIT BYTE BYTE RES RANGE WIN DESCRIPTION SERIAL 0 1 C 15 35 byte 4 Water Cooling Max Temperature Enter here the max temperature you foreseen for your cooling system this value will set the maximum power provided to the pump see Input Buffer 158 Water Cooling Hysteresis Set here the hysteresys on water cooling measurement default 1 don t change if not necessary 159 Setpoint Hy
53. active close or active open More over ifthe reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity frequency window 101 0 threshold 500 Hz window 102 500 hysteresis 1 window 103 1 activation type active close window 104 1 Set point output 495 500 505 Freguency Hz The set point output stays open until the freguency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes closed and stays colsed until the freguency becomes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to mask the set point checking for a programmable mask time window 103 The SET POINT signal has the following default settings reference quantity controller status thereshold not relevant hysteresis not relevant activation type active close NO delay time 0 second NOTE The Navigator Software ver 3 0 optional or any user developed serial communication software according to RS 232 485 Communication Proto col allows the operator to set all the programma ble feature When no external input output device is available the J1 connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND input 80 100 TECHNICAL INFORMATION Electrical connections exampl
54. aide d crans appropri s Pour tout autre renseigne ment se reporter l opuscule Technical Information Le Turbo V 2K G doit tre connect une pompe primaire Cf sch ma dans Technical Information Le Turbo V 2K G peut tre install e dans n importe quelle posi tion Le fixer dans une position stable en reliant la bride d entr e de la turbopompe une contre bride fixe pouvant supporter un couple de serrage de 10600 Nm autour de son axe La turbo pompe avec collerette d entr e ISO doit tre fix e la chambre vide l aide de boulons Le tableau suivant indique le nombre de boulons n cessaires et le couple de serrage conseill par Varian TYPE DE COLLIER Boulon filet M10 COUPLE DE SERRAGE 22 Nm BRIDE ISO 250 F 12 NOTE La Turbo pompe V 2K G ne peut tre fix e l aide de son so cle Le syst me peut tre fix uniquement l aide de sa bride ISO 250F La fixation doit tre r alis e en conformit la norme ISO 1609 Il est n cessaire d utiliser des boulons en acier ayant une classe de r sistance minimum de 500 N mm IS ATTENTION Le Turbo V 2K G appartient la deuxi me cat gorie d installa tions ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif une ligne d alimentation compatible avec cette cat gorie Utiliser les connecteurs fournis pour garantir le niveau de pro tection IP 54 Le
55. benede kontakt US VIGTIGT Ved levering er styreenheden allerede sluttet mekanisk og elektrisk til pumpen Det er kun personale fra Varian Vacuum Technologies som m fjerne styreenheden fra pumpehuset BEM RK N r Turbo V 2K G startes for f rste gang starter styreenheden automatisk systemet ved at benytte en s rlig procedure som beskytter lejerne mod potentielle skader SOFT START Systemet startes gradvist indtil fuld hastighed n s dette tidsrum varierer fra 10 minutter til 1 time N r systemet har opn et fuld hastighed frakobles soft start proceduren og de efterf lgende starter sker som normalt BEM RK Benyt udelukkende de kontakter som leveres sammen med pumpen for at opretholde IP 54 isoleringsbeskyttelsen Benyt kun str mkablet art nr 969 9957 eller 969 9958 og fastg r str mkablet til styreenheden ved hj lp af den respektive konsol se nedenst ende figur Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at undg elektriske st d og opfylde kravene if lge CE EF normerne Systemet er udstyret med en gr n LED som overv ges af et signal for tilstand Den gr nne LED LD1 der er anbragt p panelet p TURBO V 2K G s fundament angiver systemets funktion ved blink konstant t ndt pumpen er i normal rotation langsomme blink periode p ca 400 ms systemet er i stilling for acceleration bremsing stop eller Wait
56. bez kondenz cie e z kazn k mus pri prvom spusten turbo v vevy v dy pou i re im soft tartu skladovatelnost turbomolekul rnej v vevy je 10 mesiacov odo d a dodania ES UPOZORNENIE Ak zak hokolvek d vodu vypr as skladovatelnosti zariadenia vr te v vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Varian pre predaj a servis PR PRAVA NA IN TAL CIU Turbo V 2K G je dodan v peci lnom ochrannom obale Ak je balenie po koden o sa m e sta napr klad po as prepravy obr tte sa na miestne zast penie spolo nosti Varian 63 100 N VOD K POU ITIU Po as vyba ovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Kryty z konektorov odstr te a po pripevnen turbov vevy k s stave Kv li celkovej v he zariadenia 35 kg v vevu vytiahnite z obalu za skrutky s o kami zaskrutkovan mi na telese v vevy v poloh ch 120 od seba Obalov materi l zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a spi a po iadavky smernice EEC 85 399 US UPOZORNENIE Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu POZN MKA Be n vystavenie okolit m podmienkam nem e Turbo V 2K G po kodi Napriek tomu je e
57. cavilhas montadas nos furos roscados existentes no corpo da bomba 87 900 968 01 F IS ATEN O N o remover a cobertura aparafusada antes de ligar a turbobomba ao sistema US ATEN O Retirar a protecc o dos conectores somente depois gue a turbobomba estiver fixada ao sistema I N o instalar e ou usar a bomba em ambientes expostos a agentes atmosf ricos chuva gelo neve poeiras gases agressivos em ambientes com possibilidade de explos o ou com elevado risco de inc ndio Durante o funcionamento necess rio gue sejam respeitadas as seguintes condic es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 40 C consultar a planilha no ap ndice Technical Information humidade relativa 0 95 n o condensante Na presen a de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information O Turbo V 2K G deve ser ligado a uma bomba prim ria consultar esquema em Technical Information O Turbo V 2K G pode ser instalado em qualquer posi o Fixar o Turbo V 2K G em posi o est vel ligando o flange de entrada da turbobomba a um contra flange fixo capaz de resistir a um torque de 10600 Nm ao redor do pr prio eixo A turbobomba com flange de entrada ISO deve ser fixada c mara de v cuo atrav s de parafusos Damos a seguir uma tabela
58. de pomp op te starten 6 9 pin contraconnector IP 54 voor SERIAL connector die voor de seri le verbinding wordt gebruikt 7 9 pin contraconnector voor Network MoniTorr 8 opsluitbeugel voor het vasthouden van de voedingskabel gemonteerd 87 900 968 01 F INSTALLATIE N GEVAAR De pomp moet in verband met zijn gewicht met speciale hef en transportwerktuigen worden gehanteerd Gebruik hiervoor de speciale oogbouten die zijn vastgeschroefd in de gaten in het pomplichaam IS ATTENTIE Verwijder niet de opgeboute afdekking voordat de turbopomp met het systeem wordt verbonden IS ATTENTIE Verwijder de bescherming van de connectors uitsluitend nadat de turbopomp aan het systeem is bevestigd De pomp mag niet ge nstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig zijn max druk 2 bar boven de atmosferische druk temperatuur van 5 C tot 40 C zie grafiek in de bijlage Technical Information relatieve vochtigheid 0 95 niet condenserend In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie De Turbo V 2K G moet op een primaire pomp aangesloten zijn zie schema in
59. elevada transferencia de nitr geno arg n y gases m s ligeros En caso de que deban bombearse gases m s pesados que el arg n se ruega tomar contacto con la Asistencia T cnica de Varian a fin de recibir mayores informaciones Uso de Turbo V 2K G C mo poner en funcionamiento el sistema Antes de activar el sistema deber retirarse el ensamble conector l O Si el sistema se encuentra conectado a un dispositivo de Input Output remoto verificar que la se al de STOP est activada v ase el apartado J1 REMOTE I O en el ap ndice Technical Information Para poner en funcionamiento del sistema se deber proceder de la manera que a continuaci n se indica 1 retirar si esta presente el ensamble conector I O 2 conectar la alimentaci n de red 3 disponer en 0 1 mbar la presi n en el interior de la c mara de vac o 87 900 968 01 F dar la se al de START a la Turbo V 2K G mediante una de las siguientes formas a conectar el ensamble conector I O suministrado adjunto b dar la se al de START de remoto mediante el conector I O v ase el apartado J1 REMOTE 1 0 en el ap ndice Technical Information c dar la se al de START de remoto mediante la interfaz serie RS 232 485 vease el apartado RS 232 485 Communication Description en el ap ndice Technical Information A PELIGRO Una vez que se conecta la alimentaci n y se activa el ensamble conector de 15 pins suministrado adjunto
60. elinditja a rendszert egy k l nleges elj r ssal amely v di a csap gyakat az esetleges s r l sekt l SOFT START A rendszer l p sr l l p sre fokozatosan indul teljes sebess gig 10 perct l 1 r n bel lig Miutan a rendszer el rte a teljes sebesseget a soft start elj r s le lesz tiltva s a k vetkez indit sok szok sos ton t rt nnek MEGJEGYZ S Az IP 54 v delmi fokozat fenntart s hoz csak a szivatty hoz mell kelt csatlakoz kat szabad haszn lni Haszn ljon PN 969 9957 vagy 969 9958 csatlakoz t t pk belhez s r gz tse a vez rl h z alkalmas tart bilincs seg ts g vel l sd k vetkez bra Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen az EK normat v iban lefektetett biztons gi k vetelm nyeknek A rendszer el van l tve egy z lt llapotled jellel A Turbo V 2K G n elhelyezett z ld LED a villog s nak gyakoris g val jelzi a rendszer zemi k r lm nyeit nem villog sn l a szivatty rendesen forog lassan villog kb 400 ms peri dus a rendszer emelked ben f kez sben ll s vagy kapcsolatra v r llapotban van gyorsan villog kb 200 ms peri dus hibafelt tel A rendszer le ll t sa A szivatty le ll t s hoz a k vetkez m dszerek egyik t haszn lhatja 1 a mell kelt B K csatlakoz kih z sa 2 t
61. en vue d une utilisation profes sionnelle Avant toute utilisation de l appareil il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Varian qui d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non form d op rations non autori s es ou d emploi contraire aux r glementations nationales sp cifiques Le Turbo V 2K G est un syst me int gr constitu d une pompe turbomol culaire con ue pour des applications de vide pouss et ultrapouss et dot d un contr leur Le syst me est en mesure de pomper de nombreux types de gaz ou de com pos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant vitesse lev e 33000 tr min maxi mue par un moteur lectri que triphas haut rendement Le Turbo V 2K G est totale ment exempt d agents polluants et il est par cons quent indiqu pour toutes les applications exigeant un vide propre Il est en outre dot de connecteurs auxiliaires qui permettent de le piloter distance travers un ordinateur central connect travers une ligne s rielle RS232 ou RS485 Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant utili sati
62. ga rotationshastigheten och rotorernas specifika massa det fall fel skulle uppst i systemet ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs ZN VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen foljas noga 33 100 87 900 968 01 F ALLM N INFORMATION Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Varian f re anv ndning av utrustningen Varian tar inget ansvar f r skador helt eller delvis till f ljd av sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala f reskrifter Systemet Turbo V 2K G best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar och en styrenhet Systemet kan pumpa m nga typer av gaser eller gasblandningar Det kan dock inte anv ndas f r att pumpa v tskor eller fasta partiklar Pumpningen stadkoms med hj lp av en h gvarvig turbin max 33000 varv minut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i Turbo V 2K G som d rf r passar f r till mpningar som kr ver ett rent vakuum Systemet r utrustat med hj lpkontakter och via dess
63. interface provides both user diagnostic and static diagnostics functions The standard diagnostic management is fully com pliant with the ProfiBus specification During the start up phase after power on the first byte in the user diagnostic area can assume val ues different from zero This byte has the following meaning e Bit O 1 controller not responds RS485 link broken e Bit 1 1 controller not identified not compati ble with the ProfiBus gateway e Bit 2 1 first loop of requests not ended val ues in the input data are not fully coherent yet So if the first byte is equal to 0 the interface is working properly otherwise there is a problem Each nibble in the bytes following the interface status byte represents the status of the last at tempt to write a parameter with following coding diag status byte Write success Controller response was NACK Controller response was Unknown window Controller response was Bad Data Type Controller response was Over range Controller response was Bad operation Controller response was an unknown response Parameter not supported by the controller TI OU RON O The ProfiBus external diagnosis services are used to report following unexpected situations Controller fail if the controller goes in fail mode an external diagnostic service is re quired and one byte in the diagnostic buffer signals the type of failure e User parameter mismat
64. la Turbo V 2K G parte autom ticamente US ATENCI N El controlador se entrega ya conectado mec nica y el ctricamente a la bomba La separaci n del controlador respecto del cuerpo de la bomba puede ser efectuada nicamente por personal autorizado por Varian Vacuum Technologies NOTA Al activar la Turbo V 2K G por primera vez el controlador activa autom ticamente el sistema mediante un procedimiento especial que protege los cojinetes contra posibles da os SOFT START El sistema se activa paso a paso hasta alcanzar la plena velocidad en un lapso comprendido entre 10 minutos y 1 hora Una vez que el sistema ha alcanzado plena velocidad el procedimiento de soft start se inhabilita y las sucesivas activaciones se efect an de modo normal NOTA Para mantener el nivel de protecci n IP 54 deben utilizarse nicamente los conectores suministrados junto con la bomba Para el cable de alimentaci n utilizar s lo los PN 969 9957 o 969 9958 y fijar el cable al controlador por medio de la correspondiente abrazadera v ase la siguiente figura Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE El sistema cuenta con un LED verde piloteado por una se al de estado 17 100 INSTRUCCIONES DE USO El LED verde LD1 situado en el panel de la base del TURBO V 2K G indica con la frecuen
65. la flangia di ingresso non amp collegata alla camera a vuoto o non chiusa con la flangia di chiusura Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu cau sare lesioni alle persone ES ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa quando in funzione cuscinetti potrebbero danneggiarsi Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attra verso l apposita porta deve essere inferiore a 1 bar oltre la pressione atmosferica Per il pompaggio di gas contenenti particolato o inguinanti ag gressivi per i cuscinetti gueste pompe sono dotate di una ap posita porta attraverso la guale necessario fornire alla pompa un flusso di gas inerte Azoto o Elio per proteggere i cuscinetti vedere l appendice Technical Information IS ATTENZIONE Non usare mai la pompa in presenza di gas o vapori corrosivi che possano danneggiare i materiali interni alla pompa Per l installazione degli accessori opzionali vedere Technical Information USO In questo paragrafo sono riportate le principali procedure ope rative N PERICOLO Quando la pompa viene utilizzata per il pompaggio di gas tos sici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza di gas esplosivi L
66. model 969 9348 or me tallic model 969 9338 NOTE The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to 20 of Ethyl Glycole is suggested PUMP PURGING AND VENTING The Turbo V 2K G pump is eguipped with an inte grated purging and venting valve device Both valves are fed through a single gas port with 1 8 NPT thread or Swagelok connector Purge and Vent Installation To install the gas purge and vent line it is neces sary to unscrew the purge vent port cover and then connect the gas line Pump used with corrosive gases To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge line to the pump The purging device automatically provides 20 sccm when fed with 1 bar 14 psi absolute at mospheric pressure ES CAUTION To prevent bearing damage Varian suggests a minimum purge gas flow rate of 20 sccm 0 33 mbar l s This value can be exceeded according to the process requirements Please contact Var ian for specific applications 99 100 TECHNICAL INFORMATION The purge gas throughput of 20 sccm with the rec ommended forepump allows to achieve a high vacuum pressure in the 10 mbar range The recommended gas flow maintains a pressure into the pump body
67. si automatycznie IS UWAGA Sterownik kontroler jest dostarczony ju po czony mechanicznie i elektrycznie do pompy Odseparowanie kontrolera od korpusu pompy mo e by tylko wykonane przez personel upowa niony przez firm Varian Vacuum Technologies INFORMACJA Kiedy uruchamia si Turbo V 2K G po raz pierwszy kontroler automatycznie uruchamia system ze specjaln procedur kt ra chroni o yska przed mo liwym ich uszkodzeniem SOFT START System zostanie uruchomiony kolejnymi fazami a do uzyskania pe nej pr dko ci w przeci gu odpowiedniego czasu kt ry waha si od 10 minut do 1 godziny Po osi gni ciu pe nej pr dko ci przez system procedura soft start zostaje wy czona i kolejne uruchomienia odbywaj si w normalny spos b INFORMACJA Aby utrzyma poziom zabezpieczenia IP 54 nale y stosowa tylko wy cznie konektory dostarczone razem z pomp Dla kabla zasilania nale y stosowa tylko PN 969 9957 lub 969 9958 i zamocowa kabel do kontrolera odpowiednim wspornikiem patrz niniejszy rysunek Kabel ten pod czy wraz z wtyczk do kontaktu uziemionego celem unikni cia pora e pr dem elektrycznym oraz spe nienia wymog w norm 56 100 INSTRUKCJA UZYTKOWANIA System jest wyposa ony w zielon diod LED pilotowan przez sygna stanu Zielona dioda led znajduj ca si na panelu przednim Turbo V 2K G wskazuje z cz stotliwo ci w asnego migania sta
68. systemet P grunn av vekten 35 kg bruk de tre yeboltene p 120 p pumpehuset for trekke pumpen ut av esken Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse US FORSIKTIG For unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr MERK Vanlig eksponering i milj et kan ikke skade Turbo V 2K G Vi anbefaler uansett oppbevare pumpen lukket og forseglet helt til den skal installeres i systemet Dette vil hindre at systemet forurenses I esken med Turbo V 2K G finnes f lgende Pumpe med innebygd styreenhet Inngangsflens montert Denne veiledningen p CD ROM Pose med tilbeh r 15 veis REMOTE I O IP54 kontakt med de koplingene som er n dvendige for starte opp pumpen 9 veis SERIAL IP54 kontakt til bruk for serietilkoplingen 9 veis Network MoniTorr kontakt Feste for str mkabelen montert RD UNO INSTALLASJON AN ADVARSEL P grunn av pumpens vekt m den flyttes med egnede l fte og flytteredskaper Bruk gyeboltene som er strammet til i de gjengete hullene p pumpehuset 87 900 968 01 F US FORSIKTIG Ikke ta av det fastskrudde dekslet for turbopumpen koples til systemet SF FORSIKTIG Fjern beskyttelsen p koplingsstykket kun ett
69. tabell anges hur m nga bultar som beh vs samt tdragningsmoment som rekommenderas av Varian TYP AV ANT KLAMMER M10 bult OBSERVERA Turbo V 2K G kan inte f stas med hj lp av sitt fundament Systemet kan endast f stas med hj lp av fl nsen ISO 250F Fasts ttningen m ste ske i verensst mmelse med ISO standard 1609 St lbultar med en str ckgr ns p 500 N mm m ste anv ndas IS VIKTIGT Turbo V 2K G tillh r den andra installationsklassen eller versp nningsklassen enligt standard EN 61010 1 Anslut d rf r anordningen till en elledning som uppfyller kraven f r denna klass Anv nd de medlevererade kontakterna f r att uppn kapslingklass IP54 Turbo V 2K G r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon sp nningsf rande del Kontrollera att anordningen som r ansluten till Turbo V 2K G har en l mplig isolering ven vid ett enskilt fel enligt standard EN 61010 1 Installation av tillbeh rsutrustning beskrivs i Technical Information 35 100 BRUKSANVISNING ANV NDNING Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan du anv nder systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppv rms f r temperaturen vid inloppet aldrig verstiga 80 C N r pumpen r i funktion f r temper
70. tegn p skader der kan v re opst et under transporten 30 100 BRUGSANVISNING S rg for at Turbo V 2K G ikke tabes eller uds ttes for st d ved udpakningen Fjern beskyttelsen fra konnektorerne kun efter at turbopumpen er blevet fastgjort til systemet P grund af systemets v gt 35 kg er det n dvendigt at benytte de tre jebolte placeret ved 120 der er fastsp ndt p pumpehuset for at fjerne pumpen fra emballagen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse IS VIGTIGT Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse BEM RK Turbo V 2K G beskadiges ikke hvis den uds ttes for omgivelsesluften Det anbefales dog at holde pumpen lukket og forseglet indtil den skal installeres i systemet Herved undg s kontamination med Turbo V 2 6 indeholder Pumpe med indbygget styreenhed Indgangsflange monteret Cd rom med denne manual Pose med tilbehgr 15 benet REMOTE I O kontakt IP 54 med indbyggede tilslutninger der er n dvendige i forbindelse med start af pumpen 6 9 benet SERIAL kontakt IP 54 til seriel tilslutning af pumpe 7 9 benet Network MoniTorr kontakt 8 Konsol til blokering af str mkabel monteret MR ANS INSTALLATION AN ADVARSEL P
71. teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direktiv nak US FIGYELEM G zkivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alkalmas v delmet MEGJEGYZ S A k rnyezetnek val szok sos kitetts g nem k rosithatja a Torbo V 2K G t M gis aj nlatos azt z rva s t mitve tartani amig nem telepitik a rendszerbe Ez megakad lyozza a rendszer szennyez d s t A Turbo V 2K G csomag a k vetkez ket tartalmazza szivatty be pitett vez rl vel bemeneti sz r felszerelve a k zik nyv CD ROM on tartoz kok zacsk IP 54 15 t s csatlakoz REMOTE I O sz m ra a szivatty indit sahoz sz ks ges sszes vezet kkel IP 54 9 t s csatlakoz soros csatlakoz shoz haszn land SERIAL csatlakoz hoz 9 t s csatlakoz Network MoniTorr hoz Tart bilincs a t pk bel szerelt megtart s hoz NON 6 7 8 TELEP T S A MSZE S lya miatt a szivatty t alkalmas kezel eszk z kkel kell kezelni Haszn lja az alkalmas kezel k szletb l val a szivatty t rzs ben l v lyukakba csavart szemcsavarokat mozgat s 87 900 968 01 F IS FIGYELEM Ne t vol tsa el a csavarozott kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt IS FIGYELEM Csak azut n vegye le a csatlakoz k v d burkolat t ha a
72. then Set Counters You are now prompted to enter a password the password to be entered is VARIAN The following three parameters are displayed with their respective default values 60 seconds 125 minutes 120 seconds e Acquisition time e Save time e Alarm time To change these parameters enter the desired value and then save Provided below is a descrip tion of the parameters that can be modified e Acquisition time Defines the time frame be tween one MoniTorr acquisition and the next It is suggested that you keep this parameter at its default value 87 900 968 01 E e Save time Defines the time frame between two successive storage operations to the Moni Torr s local memory of the acquisition indicated above Every acquisition is summed to previous in order to obtain in memory only the last aver age spectrum e Alarm time Defines the timeout after which an alarm condition is signalled Archive Saving Method Procedure Periodically every Archive Time days the file download program creates a file cab special compressed Microsoft Windows file with the name of the registration day In the file download window the customer can view a new text on green back screen with the date of the registration By clicking on the OK button automatically an explore win dow appears on the screen You will find some acquisition files mon and a compressed archive file named according to the registration day date
73. to the center ring of the ISO 250 F vi ton gasket The screen can be removed as shown in the fol lowing figure 98 100 TECHNICAL INFORMATION The following figure shows the ISO 250 F pump flange section with the protection screen fitted on it As you can see the overall dimensions do not change as the inlet screen remains inside the pump profile S G lt US CAUTION If the chamber of the system is baked at a high temperature a shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 80 C WATER COOLING CONNECTION The pumping system is supplied with a metallic model water cooling kit 87 900 968 01 E Two 9 10 mm internal diameter rubber or plastic tubes from the water supply must be fitted to the two dedicated nozzles NOTE These tubes must be held on the respective noz zles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or us ing a closed circuit cooling system The water temperature must be between 10 C and 35 C with an inlet pressure between 3 and 5 bar In any case the water flow must not be less than 200 I h The customer can alternatively order the 90 bend water cooling kit plastic
74. unng skader p utsyret og forebygge operat rskader m installasjonsanvisningene beskrevet i denne manaulen f lges n ye 37 100 87 900 968 01 F GENERELL INFORMASJON Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren ber lese denne brukerveiledningen og all annen informasjon fra Varian for utstyret tas i bruk Varian kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppfglging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser Turbo V 2K G systemet best r av en turbo molekulasr pumpe for bruk i hay eller ultrahgye vakuumanlegg og en styreenhet Systemet kan pumpe mange typer gass eller gassblandinger men er ikke egnet for pumping av v sker eller faste partikler Pumpingen oppn s med en hgyhastighetsturbin maks 33000 opm koplet til en trefaset elektrisk motor Turbo V 2K G har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum Systemet har i tillegg hjelpekontakter slik at det kan fjernstyres med en vertsmaskin koplet gjennom en serielinje RS232 eller RS485 De folgende avsnitt inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information Denne manualen bruker folgende standardprotokoll N ADVARSEL D
75. vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte m stn servisn st edisko firmy Varian kter m e dodat n hradn repasovan za zen v m nou za porouchan POZN MKA P ed odesl n m v v vy v robci na opravu nebo v m nu za repasovan kus mus te list Health and Safety Zdrav a bezpe nost p ilo en k tomuto n vodu vyplnit a odeslat do kancel e m stn ho prodejn ho odd len P ed odesl n m za zen mus te k za zen p ibalit kopii tohoto listu Pokud se m za zen vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami LIKVIDACE V znam loga WEEE nach zej c ho se na t tku N e uveden symbol odpov d sm rnic m CE pojmenovan m WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nakontaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o kompletn likvidaci uveden ho v robku 87 900 96
76. with these instructions im proper use by untrained persons non authorized interference with the eguipment or any action contrary to that provided for by specific national standards The Turbo V 2K G is an integrated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pump many types of gases or gas compound It is not suitable for pumping liguids or solid particles The pumping action is obtained through a high speed turbine max 33000 rpm driven by a high performance 3 phase electric motor The Turbo V 2K G is free of contami nating agents and therefore is suitable for applications reguir ing a clean vacuum It is eguipped with auxiliary connectors to be controlled from a remote site by means of an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the eguip ment Detailed information is supplied in the appendix Techni cal Information This manual uses the following standard protocol me The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not fol lowed correctly could lead to serious injury IS CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important
77. 0 NW Nominal rotational 33000 rpm speed Recommended gt 40 m h forepump Operating ambient 5 C to 40 C temperature 87 900 968 01 E Maximum flange temperature no process 80 C process 50 C 120 C lt 0 01 um at inlet flange Max rotor temperature Vibration level displacement permanent lubrication Coolant water Minimum flow 200 l h 0 89 GPM Temperature 10 C to 35 C Pressure 3 to 5 bar 45 to 75 psi Power supply Input voltage Input freg Max input power Stand by power Max operating power 208 240 Vac 50 60 Hz 850 VA 30 to 35 W 400 W for Nitrogen and lighter gases 390 W for Argon Protection fuse EN 55011 Radio disturbance characteristics EN 61000 3 2 Limits for har monic current emissions EN 61000 3 3 Limitation of voltage changes voltage fluc tuations and flicker EN 61000 6 2 and EN 61326 Immunity for industrial envi ronments which recall 61000 4 2 Electrostatic discharge phenomena EN 61000 4 3 Radiated high frequency phenomena EN 61000 4 4 EN 61000 4 5 EN61000 4 6 Conducted high frequency phenomena EN 61000 4 11 Voltage fluctuation voltage dips and short interruptions Compliance with 76 100 TECHNICAL INFORMATION With European or NEMA plug 3 meters long optional Serial communication kit RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and
78. 3 F r trykket i vakuumkammeret til 0 1 mbar 4 Gi et startsignal til Turbo V 2K G p en av f lgende m ter a Kople til I O kontakten som f lger med b Gi et fjernstyrt startsignal med I O kontakten se avsnittet J1 REMOTE 1 0 i vedlegget Technical Information c Gi et fjernstyrt startsignal med seriegrensesnittet RS232 485 se avsnittet RS232 485 Communication Description i vedlegget Technical Information 87 900 968 01 F AN ADVARSEL Turbo V 2K G starter automatisk n r strammen er tilkoplet og 15 veis kontakten som f lger med er satt inn US FORSIKTIG Ved levering er styreenheten koplet mekanisk og elektrisk til pumpen Demontering av styreenheten fra pumpehuset m kun utf res av autorisert personale fra Varian Vacuum Technologies MERK N r Turbo V 2K G starter opp f rste gang starter styreenheten automatisk systemet med en spesialprosedyre som beskytter lagrene mot mulige skader SOFT START Systemet kj res trinnvis til full hastighet innen en tidsperiode som varierer fra 10 minutter til 1 time Etter at systemet har n dd full hastighet deaktiveres soft start prosedyren og de neste gangene systemet startes opp gj res det p normal m te MERK For opprettholde IP54 beskyttelsesniv et m kun kontaktene som f lger med pumpen brukes Bruk kun str mkabelen art nr 969 9957 eller 969 9958 og fest den til styreenheten med det bestemte festet se figuren nedenfor Bruk denne kabelen o
79. 5 MODE BEMPEO ut 10 INSTRUCCIONES DE USO rein cote tr acevo neto O 14 INSTRUCOES PARA O USO lei elio enes ademden adi 19 GEBRUIKSAANWIJZINGEN 5 sto L a v i va Aa 24 BRUGSANVISNING ude t dme 29 BRUKSANVISNING trees erneer do o 33 BRUKERVEILEDNING 4 n nn pem neret caen tin atu 37 KAYTTOOFWEET alatus cca Logs ide dl enje 41 PDHGIES CRHSEWS 5 nst dine m ek iii d a TR ER ERR ke 45 HASZNALATIUTASITA Sani eri oo eo ent 49 INSERUKGJA UZYTKONWANIA axo exti e tte etta eur an ai 53 PRINJEKA K POU IT zenek tiia 58 NAVOD POTTI SR A dn 62 NAVODIEA ZA UPORABO a 3 i een a arien aa b 66 INSTRUCTIONS FOR USE tirer tet ee ni 70 TECHNICALINFORMATION x Che emos ete en 74 DESCRIPTION OF THE TURBO V 2K G siennes 74 Pump Description ass annet RR ER Ge 74 Controller Description rdi ec ined rn i ee 75 TECHNICAL SPECIFICATION siennes ej een 75 TURBO V2K G OUTLINE itt RR HERR D HR e Ou be PG on 78 INFERCONNEGTIONS iiiter aa aa Bored ea ede 78 Jl REMOTE VO a E E unne 78 JLS in etat Le t teet e et 81 SERIAL CABLE INSTALLATION na na 81 RS 232 RS 485 COMMUNICATION DESCRIPTION sie 82 Communication Format siri te 82 Gommunicationi Protocol irit otio HE HE 82 Window Meanings aisan dn vak cde dad eed d edad ede rh cde indeed eed KAKA tede tii d d nnd ee 84 MONROE 86 Powering o
80. 5 Driving Freguency 203 Read the rotational speed of the pump 8 2 Hz 0 555 Target Frequency 120 Read the target rotational speed 10 2 Flow Meter Alarm Time 213 Specific option not available on standard models 12 2 Flow Meter Alarm Event 215 Specific option not available on standard models 14 2 0 65536 Cycle Number 301 Number of cycles start and stop done by the pump 16 2 min 0 65536 Last Cycle Time 300 How long the last cycle lasted 18 2 hours 0 65536 Pump Life 302 Total pump running time 20 1 V 0 100 Voltage 201 Voltage provided to the motor 21 1 C 0 70 Pump Bearing Temperature 204 Read the pump upper bearing temperature If gt 60 C the controller goes in fail and the pump is stopped 22 1 C 0 45 Pump Body Temperature 216 Read the pump body temperature close to the water circuit If gt Pump Body Temperature Limit In Buff byte 25 the controller will re duce the Max Allowable Power If gt 38 C the controller goes in fail pump over temperature and the pump is stopped 23 1 C 0 100 Controller Power Section Temperature 222 Read the controller power section temperature if gt 75 C the controller goes in fail controller over temperature 24 1 C 0 100 Controller CPU Section Temperature 211 Read the controller CPU section temperature if gt 80 C the controller goes in fail controller over temperature 25 1 C 15 38 Pump Body Temperature Limit 164 Read t
81. 6 vtl technical support varianinc com Europe Tel 00 800 234 234 00 vtt technical support varianinc com China Toll Free 800 820 8266 vtc technical support varianinc com Japan Toll Free 0120 655 040 vtj technical support varianinc com Korea Toll Free 080 222 2452 vtk technical support varianinc com Taiwan Toll Free 0 800 051 342 vtw technical support varianinc com Worldwide Web Site Catalog and Order On line www varianinc com Representative in most countries ap AS VARIAN
82. 8 01 F N VOD K POU ITIU Bezpe nostn n vod pre Turbomolekul rne v vevy Turbomolekul rne vyvevy ak s n sledovne popisovan obsahuj velk mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora alebo pri zr caniu rotora sa mo e uvolni rota n energia AN EEE Pokyny kin tal cii uveden vtomto n vode musia by pr sne dodr ovan za elom prevencie zranenia obsluhy 62 100 87 900 968 01 F V EOBECN INFORM CIE Toto zariadenie je ur en pre profesion lnych pracovnikov Sk r ne za nete zariadenie pou va pre tajte si n vod na pou itie a v etky al ie pokyny spolo nosti Varian Spolo nos Varian nenesie iadnu zodpovednos za ak kolvek udalosti zapr inen postupom ktor nie je vs lade dokonca ani v iasto nom s lade stymito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek postupom ktor je v rozpore so pecifick mi tandardmi danej krajiny Zariadenie Turbo V 2K G predstavuje integrovan syst m s turbomolekul rnou vyvevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn ch asti V
83. 957 oder 969 9958 verwendet werden Das Kabel ist am Controller mit der hierf r vorgesehenen Schelle zu befestigen siehe nachstehende Abbildung Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschl ge zu vermeiden und den Anforde rungen der EG Richtlinien zu entsprechen 8 100 GEBRAUCHSANLEITUNG Das System wird mit einer gr nen LED geliefert die von einem Statussignal angesteuert wird Die gr ne LED LD1 an der Bodenplatte von Modell Turbo V 2K G gibt mit der H ufigkeit ihres Blinkens die Betriebsbedingun gen des System an Daueranzeige Die Pumpe befindet sich im normalen Be trieb Langsame Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus Stillsetzung der Turbo V 2K G F r die Stillsetzung der Pumpe gibt es die folgenden M glich keiten 1 Mitgelieferten E A Konnektor entfernen 2 Das Signal STOP von der Fernsteuerung ber den E A Konnektor geben siehe Abschnitt J1 REMOTE 1 0 im Anhang Technical Information 3 Das Signal STOP von der Fernsteuerung ber die serielle Schnittstelle RS 232 485 geben siehe Abschnitt RS 232 485 Communication Description im Anhang Techni cal Information Not Aus Zur Stillsetzung in Notsituationen ist vom Controller das Netzkabel abzuziehen Man muss je
84. 99 ES CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Al ways use gloves or other appropriate protection NOTE Normal exposure to the environment cannot damage the Turbo V 2K G Nevertheless it is advisable to keep it closed and sealed until it is installed in the system This will prevent the system from contamination The Turbo V 2K G package includes 9 pump with integrated controller 10 inlet screen mounted 11 this instruction manual on CD ROM 12 accessories bag 13 15 pin mating connector IP 54 for REMOTE I O connec tor with all the interconnections necessary to start the pump 14 9 pin mating connector IP 54 for SERIAL connector to be used for serial connection 15 9 pin mating connector for Network MoniTorr 16 Retaining bracket to retain the power cable mounted INSTALLATION MENINI Cause its weight the pump must be handled by means of suit able moving and handling tools Use the suitable handling kit eyebolts screwed into the holes of the pump body 87 900 968 01 F IS CAUTION Do not remove the bolted cap before connecting the turbopump to the system IS CAUTION Remove connector protections only after fixing the turbopump to the system Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressi
85. A A ES ME 71 1 A a 7 c N A 5 SD AN QQ S N KR SINN NUN V U E DA DS iz 1777 V 2 ANZ ZMV n 77 AA ZIZAL VA EN RZ GN N Po 2 NA FORE VACUUM PUMP CONNECTION A flange KF 40 NW is available to connect the Turbo V2K G pump to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows NOTE The Turbo V 2K G pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming 100 100 TECHNICAL INFORMATION PUMP USED IN PRESENCE OF MAGNETIC FIELDS Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consump tion by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radia tion and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the inten sity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by
86. C ks Technical Information liitteen kaaviota suhteellinen kosteus 0 95 ei tiivist v Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest Turbo V 2K G tulee kytke p pumppuun ks Technical Information liitteen kaaviota Turbo V 2K G voidaan asentaa mihin tahansa asentoon Kiinnitt k Turbo V 2K G vakaaseen asentoon liitt m ll turbopumpun sis ntulolaippa kiinte n vastalaippaan joka kest 10600 Nm n momentin akselinsa ymp ri ISO imulaipalla varustettu turbopumppu tulee kiinnitt tyhj kammioon pulteilla Seuraavassa taulukossa ilmoitetaan tarvittava pulttim r ja Varianin suosittelemat kiristysmomentit KIRISTYS MOMENTTI 22 Nm LAIPPA KIINNIKE M R ISO 250 F Pultti M10 kierteill 12 HUOM Turbo V 2K G pumppua ei voida kiinnitt perustasta J rjestelm voidaan kiinnitt ainoastaan ISO 250F laipasta Se tulee kiinnitt ISO 1609 standardin mukaan K yt ter spultteja joiden lujuusluokka on v hint n 500 Nimm IS Huomio Turbo V 2K G kuuluu toiseen EN 61010 1 s nn sten mukaiseen asennusluokkaan tai ylij nniteluokkaan Kytke laite t m n vuoksi s hk verkkoon joka t ytt t m n luokan vaatimukset K yt ohessa toimitettuja liittimi taataksesi IP54 eristyksen Turbo V 2K G lai
87. EMOTE I O i bilagan Technical Information 36 100 BRUKSANVISNING 3 Skicka en fj rrstyrd stoppsignal via det seriella gr nssnittet RS232 485 se avsnitt RS232 485 Communication Description i bilagan Technical Information N dstopp Dra ut elsladden fr n styrenheten f r att utf ra ett n dstopp av Turbo V 2K G Ut ver att denna operation totalt kopplar fr n pumpens f rs rjning avaktiveras ven alla andra funktioner p styrenheten som till exempel hanteringen av rensningen och den styrda ventilatorn ven kapaciteten att kommunicera med systemet i vilket pumpen integrerats via l Os Seriell eller Profibus avaktiveras Ut ver detta kan inte denna operation garantera ett omedelbart stopp av rotorn vars rotationshastighet minskar i funktion till vakuumet i systemet UNDERH LL Turbo V 2K G r underh llsfritt Allt servicearbete m ste utf ras av auktoriserad personal VARNING Innan n got arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Varian reparationsverkstad eller Varian utbytesservice som kan ers tta systemet med ett renoverat system OBSERVERA Innan systemet l mnas in till tillverkaren f r reparation eller utbyte mot en renoverad enhet m ste h lso och s kerhetsblad
88. ES CAUTION To maintain the IP 54 protection level use the appropriate connector provided with the pump PR pal ProfiBus connector 87 900 968 01 E Configuration Before power on the controller set the Profibus address by the 2 rotary switches Up to 126 different addresses from 0 to 125 can be selected The address value sets by the 2 switches is expressed in hexadecimal notation so value from 00 to 7D are permitted this setting is read by the interface during the power on phase so any change of the switch position after the power on is ignored Indicators Two LEDs are present on the interface one green and one red the red led indicates that the interface is cor rectly powered the green led shows the interface status ac cording the following table 550 ms period gt 1 pulse 2 pulses EN Blink fast EE NM om 1 pulse ProfiBus link established controller link NOT established yet Controller state machine not in Regular data exchange This situation could be normal in the first 45 seconds after the interface power on Controller address searching phase or after the controller power on 2 pulses ProfiBus link not established yet ProfiBus state machine not in Regular data exchange This failure has priority in the indication over the previous Blink fast Gateway fail internal check or wrong ad dress set address g
89. NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem Er Agilent Technologies D MANUALE DI ISTRUZIONI D BEDIENUNGSHANDBUCH Tu r b Oo V 2 K G F NOTICE DE MODE D EMPLOI Pumping Sys tem E MANUAL DE INSTRUCCIONES P MANUAL DE INSTRUC ES Models NL BEDRIJFSHANDLEIDING 969 8871 DK INSTRUKSTIONSBOG 969 8873 S BRUKSANVISNING N INSTRUKSJON MANUAL FIN OHJEK SIKIRJA GR OAHTIES H FELHASZN L I K ZIK NYV PL PODRECZNIK INSTRUKCJI CZ N VOD K POU IT SK N VOD NA OBSLUHU SLO PRIRO NIK ZA NAVODILA 87 900 968 01 F OCTOBER 2008 GB INSTRUCTION MANUAL Turbo V 2K G VARIAN vacuum technologies Dear Customer Thank you for purchasing a VARIAN vacuum product At VARIAN Vacuum Technologies we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report lo us any problem you may have had with the purchase or operation of our product On the back side you find a Corrective Action Request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Co
90. Navi gator software optional 20 C to 70 C IP54 35 77 16 NOTE When the Turbo V 2K G has been stored at a tem perature less than 5 C wait until the system has reached the above mentioned temperature be ore starting the pump 87 900 968 01 E TECHNICAL INFORMATION 900 sccm 800 sccm 700 sccm 600 sccm 500 sccm 400 sccm 300 sccm 10 g e um 8 40 E 3 n o 2 10 n 5 N i 1 71 50 sccm 100 sccm 200 sccm 350 W 100 W 150 W 200 W 250 W 300 W 10 10 107 0 10 Fore Pressure mbar Throughput and power curves for Argon power limit 350 W Data with 80 m h primary pump 600 sccm 800 sccm 1000 sccm 1200 sccm 1400 sccm 1600 sccm 1 ra gas 10 400 W 3 200 W o 2 O 10 350 W 17 EL 300 W s 250 W Os o 100 W L c 10 50 sccm 100 sccm 200 sccm 300 sccm 400 sccm 500 sccm 10 10 1 10 107 Foreline Pressure mbar Throughput and power curves for Nitrogen power limit 400 W Data with 80 m h primary pump 77 100 87 900 968 01 E TURBO V 2K G OUTLINE TECHNICAL INFORMATION The following figure shows the Turbo V 2K G outlines dimensions are in mm inches j VACUUM TECHNOLOGIES Turbo V 2K G INTERCONNECTIONS The following paragraphs describe the Turbo V 2K G interconnections J1 REMOTE At power on the controller goes into
91. Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento amp necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura dell aria da 5 C a 40 C umidit relativa 0 95 non condensante In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Techni cal Information per ulteriori dettagli La Turbo V 2K G deve essere collegata ad una pompa primaria vedere schema in Technical Information La Turbo V 2K G pu essere installata in qualsiasi posizione Fissare la Turbo V 2K G in posizione stabile collegando la flangia di ingresso della turbopompa ad una controflangia fissa capace di resistere ad una coppia di 10600 Nm attorno al pro prio asse La turbopompa con flangia di ingresso ISO deve essere fissata alla camera da vuoto per mezzo di bulloni La seguente tabella descrive il numero di bulloni necessari e con quale coppia di serraggio consigliata da Varian stringerli TIPO DI COPPIA DI FISSAGGIO 5 SERRAGGIO ISO 250 F Bullone con filettatura 22 Nm M10 NOTA La Turbo V 2K G non essere fissata tramite la sua base II sistema pu essere fissato solo tramite la sua flangia ISO 250F II fissaggio deve realizzato in c
92. OUND pin in this condition the pump auto matically starts as soon as the controller recog nises the input supply Plug amp Pump SPEED SETTING PWM input signal to set the pump speed The PWM signal characteristics must be the following frequency 100 Hz 20 amplitude high level from 12 to 24 V duty cycle range from 25 to 75 corresponding to a pump speed from 475 Hz to 555 Hz linearly see the following diagram Duty Cycle NOTE High Speed is the nominal rotational frequency of the pump 555Hz Low Speed 475 Hz corre sponds to the rotational frequency for a stand by status to preserve the bearing life Users can set rotational frequency between these two values If any signal isn t applied no connection the driv ing frequency is set to Maximum excitation fre quency the default value is 555 Hz it is settable via serial line by means of window 121 see the serial command table If a continuous signal is applied pin 5 connected to pin 9 the driving frequency is set to Low Speed the default value is 475 Hz it is settable via serial line by means of window 117 see the serial command table 79 100 TECHNICAL INFORMATION The Low Speed function can also be activated by serial line with win 001 and the low speed value can be adjusted via serial command win 117 Both low speed value win 117 and high speed value win 120 are limited between 475Hz can t
93. Turbo V 2K G dispose de connecteurs pour les en tr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de fa on qu aucune partie sous tension ne soit accessible S assurer que l isolation du dispositif branch au Turbo V 2K G a une isolation appropri e m me en condition de panne indivi duelle selon les termes de la norme EN 61010 1 12 100 MODE D EMPLOI Pour l installation des accessoires en option se reporter Technical Information UTILIZATION Ce paragraphe pr sente les principales proc dures op ration nelles Avant d utiliser le syst me effectuer tous les branchements lectriques et pneumatiques Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 80 C Pendant le fonctionnement de la pompe la temp rature du rotor ne doit jamais tre sup rieure 120 C L op rateur doit veiller adapter le mode de fonctionnement au gaz pomper 1 pour azote et gaz plus l gers O pour Argon mode d faut Pour plus de d tails consulter l appendice Technical Information A EXT Ne jamais faire fonctionner la pompe si la bride d entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre l origine de l sions grav
94. V 2K G le contr leur lance automatiquement le syst me en ex cutant une proc dure sp ciale qui prot ge les paliers contre tout ris que d endommagement SOFT START Le syst me est lanc progressivement jusqu ce qu il atteigne la vitesse maximum en un temps qui peut varier de 10 minutes 1 heure D s que le syst me atteint sa vitesse maximum la proc dure de soft start est d sactiv e et les d marrages suivants sont effectu s en mode normal NOTE Pour garantir l indice de protection IP 54 n utiliser que les connec teurs fournis avec la pompe Pour l alimentation utiliser exclusive ment un c ble type PN 969 9957 ou 969 9958 et le fixer au contr leur l aide de la bride pr vue voir la figure ci dessous Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d charges lectriques et satisfaire les requis des normes CE Le syst me est muni d un LED vert pilot par un signal d tat La LED verte LD1 plac e sur le panneau de la base du Turbo V 2K G indique par sa fr quence de clignotement les conditions op rationnelles du syst me allum e fixe la pompe est en rotation normale clignote lentement p riode d environ 400 ms le systeme est en tat de rampe de freinage de stop ou d attente in terlock clignote rapidement p diode d environ 200 ms condition d erreur Arr t du syst me Pour arr ter la pompe op r
95. Vent valve 0 to 65535 opening delay expressed in 0 2 sec corresponding to 0 to 13107 sec default 15 Set purge 0 close valve 1 open open close default 0 0 Serial 1 Remote default 0 Set valves command source Vent Valve 0 to 65535 bit Opening Time ex pressed in 0 2 sec 0 infinite 1 0 2sec max 13107 sec default 0 152 R W L HPS enable 0 OFF 1 ON default 0 write only in STOP 155 N Power limit Watt applied 157 Gas load type default 0 Max fore C min 15 seen water max 35 cooling tem perature default 34 Twater max Water cool ing hystere Gola default 1 Pump power in W pump current X pump voltage X duty cycle Driving fre quency in 85 100 TECHNICAL INFORMATION Read Data Description Admitted Write Type Values Pump tem Oto 70 perature in 205 N Pump status Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 Error code Bit description see the following figure Pump body temperature Controller temperature Cycle time in minutes zeroed by the reset 0 to 999999 command Cycle num 0 to 9999 ber zeroed by the reset command Pump life in 0 to 999999 hours ze roed by the reset com High Power Start cycles number High Power Start tries number of last 9 CRC OESXXXX EPROM where XXXX QE are variable PASXXXX where XXXX are
96. a zen Ize p ipevnit pouze pomoc jeho p ruby ISO 250F Upevn n mus b t provedeno podle normy ISO 1609 Mus se pou t ocelov rouby o pevnosti nejm n 500 Nimm US VAROV N Podle sm rnice EN 61010 1 pat v v va Turbo V 2K G do druh elektroinstala n nebo p ep ov t dy Za zen p ipojte do nap jec s t kter spl uje uvedenou t du V v va Turbo V 2K G je vybavena vstupn mi a v stupn mi konektory a konektory pro s riovou komunikaci kter se mus p ipojit k extern m obvod m tak aby dn elektrick sou st nebyla p stupn Pro zachov n ochrann ho kryt IP 54 pou ijte odpov daj c dodan konektory Zajist te aby izolace za zen p ipojen ho k v v v Turbo V 2K G byla p im en i v p pad jedin poruchy podle sm rnice EN 61010 1 Chcete li informace o dopl kov m p slu enstv viz Technical Information 60 100 PRIRUCKA K POUZITI POU IT Tento odstavec popisuje podrobnosti z kladn ch pracovn ch postup P ed pou it m syst mu pneumatick p ipojen P i zah v n vakuov komory teplota p vodn p ruby nesm p ekro it 80 C Za chodu v v vy nesm teplota rotoru nikdy p es hnout 120 C U ivatel mus zadat podle od erp van ho plynu p slu n plynov re im 1 pro N2 a leh plyny O pro argon v choz nastaven Viz podrobn informace v p loze Technical In
97. a kan systemet fj rrstyras med hj lp av en centraldator med seriell anslutning RS232 eller RS485 De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical information I bruksanvisningen anv nds f ljande standardrubriker N VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna annat fall finns risk f r sv ra personskador IS VIKTIGT Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst OBSERVERA Detta visar p viktig information i texten F RVARING Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Varian turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet 0 till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift f r f rsta g ngen De turbomolekyl ra pumparna kan lagras i 10 m nader fr n leveransdatumet US VIKTIGT Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Varian terf rs ljaren f r ytterligare in
98. a pompa amp progettata per avere un alto trasferimento di Azoto Argon e gas pi leggeri Nel caso in cui ci fosse la necessit pompare gas pi pesanti dell Argon si prega di prendere contatti con Assistenza Tecni ca della Varian per informazioni Uso della Turbo V 2K G Come avviare il sistema Prima dell avvio del sistema controllare che il controconnettore sia rimosso Se il sistema collegato ad un dispositivo di Inpu Output remoto assicurarsi che il segnale di STOP sia attivo vedere il paragrafo J1 REMOTE I O nell appendice Technical Information Per avviare il sistema eseguire i seguenti passi 1 rimuovere se presente il controconnettore I O 2 collegare l alimentazione di rete 3 portare la pressione all0 interno della camera a vuoto a 0 1 mbar 4 fornire alla Turbo V 2K G il segnale di START in uno dei seguenti modi a collegare il controconnettore I O in dotazione b dare il segnale di START da remoto tramite il connettore I O vedere il paragrafo J1 REMOTE 1 0 nell appendice Technical Infor mation 87 900 968 01 F c dare il segnale di START da remoto tramite l inter faccia seriale RS 232 485 vedere il paragrafo RS 232 485 Communication Description nell appendi ce Technical Information AN PERICOLO Quando viene fornita l alimentazione ed il controconnettore a 15 pin in dotazione inserito la Turbo V 2K G si avvia automa ticamente IS ATTENZIONE I contr
99. a wysoka energie kinetyczna spowodowana bardzo wysoka predko cia obrot w razem z masa wtasciwa wirnik w W przypadku uszkodzenia systemu na przyktad z powodu kontaktu miedzy wirnikiem a stojanem lub z powodu pekniecia wirnika energia obrotowa mo e zwolniona AN NIEBEZPIECZE STWO Aby unikn uszkodzenia aparatury i zapobiec uszkodzeniom cia a operator w nale y obowi zkowo przestrzega zalecenia dotycz ce instalacji opisane w niniejszej instrukcji obs ugi 53 100 87 900 968 01 F OG LNE INFORMACJE Ta aparatura jest przeznaczona do u ytku zawodowego U ytkownik musi przeczyta bardzo uwaznie niniejsza instrukcje ka da dodatkowa informacje dostarczona przez firme Varian przed u ytkowaniem aparatury Firma Varian uchyla sie od jakiejkolwiek odpowiedzialnosci w przypadku czesciowego lub catkowitego braku przestrzegania instrukcji w przypadku niewtasciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowaznionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych System Turbo V 2K G jest zintegrowanym systeme sktadajacym sie z pompy turbomolekularnej dla zastosowa wysokich i ultra wysokich pr zni jak i przez odpowiedni system sterowania tzw kontroler System jest w stanie pompowa wiele typ w gazu lub mieszanek gazowych ale nie jest przystosowany do pompowania ptyn w lub statych czastek Zjawisko pompowania jest uzyskane poprzez obrotowa turbine o wysokiej pr
100. ale a contattare il fornitore del di spositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita 87 900 968 01 F GEBRAUCHSANLEITUNG Sicherheitshinweise f r Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Ge wicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden AN GEFAHR Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise 5 100 87 900 968 01 F ALLGEMEINE INFORMATIONEN Dieser Apparat ist f r den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der nationalen einschl gigen Normen bernimmt die Firma Varian keinerlei Haftung Modell Turbo V 2K G ist ein integriertes System das aus einer Turbomolekularpu
101. are present on the panel displayed on the personal computer monitor As soon as it is activated it starts to scan the net work and it continuously downloads the file when it is ready 89 100 TECHNICAL INFORMATION The program is configured to work with the COM 1 serial port If a change is required click the right mouse button with the cursor on the Varian logo on the right hand side of the windows bar AE 1040 Select the Setup option and the program displays the following p 2 MonitorrSry xl le Active Client Queue Status Event Log Debug Setup Com Port Rx timeout ms 600 Baud Rate bps 115200 Tx retry B Remove echo Gave Defaults Select the COM port of the computer being used and then check whether or not all the other pa rameters are the same as those shown in the ex ample It is also very important to have the same configuration for the Remote Echo option At this point save the Setup and exit from the pro gram Exit also from the FileDownload program The program will be reconfigured the next time the computer is restarted Modifying the Parameters The operator can change the configuration of the Monitorr parameters To change the configurations select one of the Monitorrs connected to the network by positioning the cursor in the row of the Monitorr to be modified and clicking the left mouse button Then click the right mouse button select Remote Device and
102. arian Vacuum Technologies POZN MKA Kdy spou t te v v vu Turbo V 2K G pln poprv ovl dac jednotka spust toto za zen automaticky speci ln m postupem kter chr n lo iska v v ry p ed p padn m po kozen m POZVOLN ROZBEH Za zen se pak postupn rozb h a na nejvy obr tky b hem nastaviteln doby od 10 minut do 1 hodiny Jakmile se za zen rozb hne na pln obr tky re im pozvoln ho rozb hu se vypne a dal starty ji prob haj norm ln POZN MKA Aby byla zachov na ochrana IP 54 mus te pou t pouze konektory dodan s t mto za zen m Pou vejte konektory PN 969 9957 or 969 9958 pro nap jec kabel a p ipevn te jej k regul toru vhodnou p chytkou viz n sleduj c obr zek Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proudem a aby byly zaru en po adavky norem ES Za zen se dod v se zelenou kontrolkou kter signalizuje provozn stav Zelen kontrolka um st n na eln m panelu z kladny v v vy Turbo V 2K G indikuje provozn stavy syst mu blik n m e bez blik n vyv va se ot norm ln e pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokov ni e rychl blik n interval cca 200 ms poruchov stav Jak se za zen zastav
103. aturen p rotorn aldrig verstiga 120 C Anv ndaren m ste vara noga med v lja r tt funktionss tt beroende p vilken gas som ska pumpas 1 f r kv ve och l ttare gaser 0 f r argon standard F r ytterligare information se bilagan Technical Information A man S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad pa plats med l sfl nsen Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador I VIKTIGT Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r ig ng Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser som rfria fr n damn eller andra partiklar Ing ngstrycket mot r tt d rr m steunderstiga 1 bar ut ver det atmosf riska trycket F r pumpning av gaser som inneh ller partiklar eller f roreningar som r aggressiva f r lagren r dessa pumpar f rsedda med en speciell ppning igenom vilken man ska leda en str m av delgas Kv ve eller Helium f r att skydda lagren se bilagan Technical information US VIKTIGT Anv nd aldrig pumpen om det finns fr tande gaser eller ngor som kan skada pumpens inv ndiga material VARNING D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten a
104. be set by the user and Maximum excitation fre quency win 121 555Hz default NOTE The duty cycle percentage is referred to the low level portion of the PWM period SOFT START input signal to activate the soft start function This function must be activated pin 7 shorted with pin 9 if the pump remains unused for 1 month or more and de activated for the next run up The soft Start phase is around 55 minutes long The soft start function is factory enabled for the first sys tem start up After the first pump start up until the normal status the soft start is automatically disabled ANALOG OUTPUT this output signal is a voltage from 0 to 10 Vdc proportional to a reference quan tity frequency or power set by the user through se rial line window 111 The default setting is the frequency see the following example diagram The voltage is provided between pins 14 and 15 An high impedance input should be connected to this output gt 100 kQ Output V Frequency Hz 0 Output V 500 Power W 87 900 968 01 E FAULT this relay output signal is closed when any system fault condition is detected To detect the type of failure the serial protocol is needed see the para RS232 485 Comunication Description SET POINT this relay output signal is enabled when the reference quantity chosen frequency cur rent or time is higher than the set threshold The signal can be
105. bel van de controller losgemaakt worden Men moet er echter rekening mee houden dat hiermee niet alleen de pompvoeding volledig wordt uitgeschakeld maar ook alle andere functies van de controller worden onderbroken zoals bijvoorbeeld het beheer van de Purge en de gestuurde Vent en de mogelijkheid om te communiceren met het systeem waarin de pomp is ingebouwd via l O s seri le of Profibus verbinding Bovendien kan met deze handeling niet gegarandeerd worden dat de rotor onmiddellijk stopt omdat de draaisnelheid ervan afneemt op basis van het vacu mniveau in het systeem ONDERHOUD De Turbo V 2K G is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd A GEVAAR Alvorens werkzaamheden aan het systeem uit te voeren de stekker verwijderen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Varian of de Varian advanced exchange service in te schakelen zo krijgt men een ruilpomp ter vervanging van de defecte pomp OPMERKING Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veiligheid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij d
106. boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van gassen met roetdeeltjes of vervuilende stoffen die de lagers aantasten van een speciale poort voorzien waardoor de pomp een stroom inert gas stikstof of helium ter bescherming van de lagers krijgt geleverd zie bijlage Technical Information US ATTENTIE Gebruik de pomp nooit bij corrosieve gassen of dampen die het materiaal aan de binnenkant van de pomp kunnen beschadigen B TE Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen De pomp is voor een hoge doorvoercapaciteit van stikstof Argon en lichtere gassen ontworpen Indien de noodzaak bestaat om zwaardere gassen dan Argon te pompen wordt u verzocht om contact op te nemen met de Technische Service van Varian voor informatie Gebruik van de Turbo V 2K G Hoe wordt het systeem gestart Controleer alvorens het systeem te starten of de I O contraconncetor verwijderd is Als het systeem verbonden is met een remote I O controleer dan of het STOP signaal actief 87 900 968 01 F is zie paragraaf J1 REMOTE I O in de bijlage Technical Information Start het systeem via de volgende stappen 1 verwijder de I O contraconnector indien aanwezig 2 sluit het voedingsnet aan 3 breng d
107. bt sind 87 900 968 01 F IS ACHTUNG Die angeschraubte Abdeckung darf erst nach Anschluss der Turbopumpe an das System entfernt werden IS ACHTUNG Den Schutz der Steckverbinder erst entfernen wenn die Tur bopumpe am System befestigt ist I Die Pumpe darf nicht in Umgebungen die ungeschutzt vor Wetter Regen Frost Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsf higen oder erh ht brand gef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb m ssen folgende Umgebungsbedingungen ein gehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 40 C siehe Diagramm im An hang Technical Information Relative Luftfeuchtigkeit O 95 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informa tionen siehe im Anhang Technical Information Modell Turbo V 2K G ist an eine Prim rpumpe anzuschlie en siehe Schema in Technical Information Modell Turbo V 2K G kann in jeder beliebigen Position installiert werden Modell Turbo V 2K G ist stabil zu befestigen indem der Flansch am Eingang der Turbopumpe an einen festen Gegen flansch angeschlossen wird der mit einem Drehmoment von 10600 Nm um seine eigene Achse belastbar ist Die Turbopumpe mit dem ISO Eintrittsflansch ist mittels Mutter schrauben an der Vakuumkammer zu befestigen
108. cas e pneum ticas Durante o eventual aquecimento da c mara a v cuo a temperatura no flange de entrada n o deve ser superior a 80 C Durante o funcionamento da bomba a temperatura do rotor deve ser sempre inferior a 120 C O operador deve verificar se o aparelho funciona na modalidade correcta de acordo com o tipo de g s aspirado 1 para Azoto e gases mais leves O para Argon modalidade pr definida Para maiores detalhes consultar o ap ndice Technical Information A EEE Nunca activar a bomba se o flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com o flange de fecho N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode causar les es s pessoas US ATEN O Evitar colis es oscila es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a sa da de ar da bomba utilizar ar ou g s inerte sem poeiras ou part culas A press o de entrada atrav s da porta espec fica deve ser inferior a 1 bar acima da press o atmosf rica Para bombear gases que contenham part culas ou poluentes daninhos para os rolamentos estas bombas est o equipadas com uma porta espec fica atrav s da qual necess rio fornecer bomba um fluxo de g s inerte Azoto ou H lio para proteger os rolamentos consultar o ap ndice Technical Information IS ATEN O
109. ch if the user sets one or more parameters out of their allowed range a ProfiBus external diagnostic service is reguired and some bits in the diagnosis frame signals which parameter is wrong i e over range or under range 97 100 TECHNICAL INFORMATION Diagnostic buffer OFF SET MEANING 0 Bo station non exist set by master B station not ready slave not ready for data exchange B2 cfg fault configuration data doesn t match B3 ext diag slave has external diagnostic data B4 not supported slave doesn t support re quested function Bs invalid slave response slave sets per manent 0 Bs prm fault wrong parameter assignment B master lock slave is parameterised by another master a 1 Bo prm reg slave has to be re E parameterised S Bi stat diag static diagnosis S B fixed 1 B3 wd on response monitoring active B4 Freeze mode received freeze com 5 mand Bs Synch mode received synch com mand Bs reserved Br diag deactivated slave is parameter ised by another master 2 Reserved 3 Master Add master address after parameterisa tion FF without parameter 4 Ident number high 5 Ident number low 6 External diagnosis Header length indication including header m 7 Interface Status Bo Controller not responds Bi Controller not identified B Input data not fully coherent yet Bs Not used B4 Not used 8 B7 Start Stop diag status B3 L
110. cia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de aproximadamente condici n de error 200 ms C mo detener la Turbo V 2K G La detenci n de la bomba podr efectuarse aplicando una de las siguientes modalidades 1 retirando el ensamble conector de I O suministrado adjunto 2 enviando una se al de STOP de remoto mediante el conector I O v ase el apartado J1 REMOTE I O en el ap ndice Technical Information enviando una se al de STOP de remoto mediante el interfaz serie RS 232 485 v ase el apartado RS 232 485 Communication Description en el ap ndice Technical Information Parada de Emergencia Para detener en condiciones de emergencia el Turbo V 2K G es necesario desconectar del controlador el cable de alimentaci n De todas maneras se debe tener en cuenta que esta operaci n adem s de inhabilitar completamente la alimentaci n de la bomba inhabilita todas las otras funciones del controller como por ejemplo la gesti n del Purge y del Vent Controlado y la capacidad de comunicarse con el sistema en el que la bomba se integr mediante l Os Serial o Profibus Adem s esta operaci n no puede garantizar la parada inmediata del rotor cuya velocidad de rotac
111. com o n mero de parafusos necess rios e o tipo de torque de aperto aconselhados pela Varian TORQUE DE APERTO 22 Nm FLANGE ISO 250 F TIPO DE BORNE Parafuso com rosca M10 NOTA A Turbo V 2K G n o pode ser fixada por meio da sua base O sistema pode ser segurado s por interm dio da sua flange ISO 250F A fixac o deve ser realizada de acordo com o estabelecido na norma ISO 1609 Devem ser utilizados parafusos de aco com uma classe de resist ncia de pelo menos 500 N mm IS ATEN O O Turbo V 2K G pertence a segunda categoria de instalac o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimentac o apropriada para esta categoria Utilizar os conectores conjugados fornecidos de s rie para garantir o isolamento IP 54 O Turbo V 2K G tem dois conectores para as entradas saidas e para a comunicac o de s rie gue devem ser ligados aos circuitos externos de modo a n o permitir o acesso s partes sob tens o Assegure se de gue o isolamento do dispositivo ligado ao Turbo V 2K G esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 21 100 INSTRUC ES PARA O USO Para a instala o dos acess rios opcionais consultar Technical Information UTILIZA O Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as liga es el ctri
112. de evitare problemi di degasamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata NOTA La Turbo V 2K G non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comunque di mantenere la pompa chiusa e sigillata fino al momento dell in stallazione sul sistema Questo per prevenire la contaminazione del sistema Nell imballo della Turbo V 2K G sono compresi pompa con controller integrato inlet screen montato questo manuale su CD ROM sacchetto accessori controconnettore a 15 vie REMOTE I O IP 54 con inte grate le connessioni necessarie a far partire la pompa 6 controconnettore a 9 vie SERIAL IP 54 da utilizzare per la connessione seriale 7 controconnettore a 9 pin per il Network MoniTorr 8 staffetta per la ritenzione del cavo di alimentazione mon tata OPEN INSTALLAZIONE AN PERICOLO La pompa a causa del suo peso deve essere maneggiata tramite appositi attrezzi di sollevamento e spostamento Al uopo utilizzare gli appositi golfari avvitati nei fori filettati pra ticati sul corpo pompa IS ATTENZIONE Non rimuovere la copertura imbullonata prima del collegamento della turbopompa al sistema 87 900 968 01 F ES ATTENZIONE Rimuovere la protezione dei connettori solo dopo che la turbo pompa stata fissata al sistema
113. debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y gue por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta 18 100 INSTRUCCIONES DE USO 87 900 968 01 F INSTRUC ES PARA O USO Indicac es de Seguranca para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instruc es t m uma alta quantidade de energia cin tica devida alta velocidade de rotac o unida massa especifica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rotac o pode ser liberada Para evitar danos a aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instrug es de instalac o descritas neste manual 19 100 87 900 968 01 F INFORMAG ES GERAIS Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instru es e todas as informa es adicionais fornecidas pela Varian antes de utilizar a aparelhagem A Varian n o se responsabiliza pela inobserv
114. deve essere eseguito da personale autorizzato N PERICOLO Prima di effettuare gualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo l apposi ta elettrovalvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto amp possibile usufruire del servizio di riparazio ne Varian o del Varian advanced exchange service che per mette di ottenere un sistema rigenerato in sostituzione di guello guasto NOTA Prima di rispedire al costruttore un sistema per riparazioni o advanced exchange service e indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salu te allegata al presente manuale di istruzioni Copia della stes sa deve essere inserita nellimballo del sistema prima della spedizione Oualora un sistema dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifi che SMALTIMENTO Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Eu ropea indica che il prodotto sul guale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente fin
115. dicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa especifica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podr a ser liberada A EEE Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 14 100 87 900 968 01 F INFORMACI N GENERAL Este eguipo es para uso profesional usuario ha de leer atentamente el presente manual de instrucciones y cualguier otra informaci n suplementaria facilitada por Varian antes de usar el aparato Varian se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas El sistema est en condiciones de bombear diferentes tipos de gas y de compuestos gaseosos pero no es adecuado para bombear l guidos ni particulas s lidas efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 33000 r p m m x movida por un motor el ctrico trif sico de alto rendimiento
116. doch in Betracht ziehen dass dieser Vorgang nicht nur die Speisung der Pumpe vollst ndig abschaltet sondern auch alle anderen Funktionen des Controllers wie zum Beispiel die Kontrolle des Purge und des Vent sowie die Kommunikationsf higkeit mit dem System deaktiviert in dem die Pumpe ber I O s serielle Anschl sse oder Profibus integriert ist Au erdem kann dieser Vorgang nicht den sofortigen Stopp des Rotors garantieren dessen Drehgeschwindigkeit aufgrund der Vakuumgr e im System verringert wird WARTUNG Modell Turbo V 2K G erfordert keine Wartung Eventuelle Ein griffe d rfen nur von autorisiertem Fachpersonal ausgef hrt werden A EZRA Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe ber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Tempera tur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Varian Service oder der Varian advan ced exchange service in Anspruch genommen werden der ein general berholtes System als Ersatz f r das defekte System zur Verf gung stellt HINWEIS Bevor Fa Varian ein System zur Reparatur oder den Um tauschdienst eingesandt wird ist das Formular Sicherheit und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpa ckung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung hat unter Beachtung d
117. dotyka go ymi r koma cz ci przeznaczonych do pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie INFORMACJA Turbo V 2K G nie mo e by uszkodzony poprzez wystawienie go na dzia anie atmosfery Zaleca si aby pompa do momentu jej instalacji na systemie pozosta a dobrze zamkni ta Jest to w celu zabezpieczenia przed zanieczyszczeniem systemu W OP zespotu Turbo V 2K G znajduja sie pompa z wbudowanym sterownikiem kontroler inlet screen zamontowany instrukcja na CD ROM woreczek z akcesoriami konektor 15 drogowy REMOTE I O IP 54 z zintegrowanymi potaczeniami potrzebnymi do uruchomienia pompy 6 konektor 9 drogowy SERIAL IP 54 do zastosowania dla potaczenia szeregowego 7 konektror z 9 taczami dla Network MoniTorr 8 wspornik do podtrzymania kabla zasilania zamontowany OLON 87 900 968 01 F INSTALACJA N NIEBEZPIECZENSTWO Pompa z powodu wtasnego cie aru musi by przemieszczana poprzez odpowiedni sprzet do tego celu Do tego celu nale y zastosowa odpowiednie zawiesia wkrecone w gwintowane otwory znajdujace sie na korpusie pompy IB UWAGA Nie zdejmowa zamocowanej rubami pod czeniem turbopompy do systemu pokrywy przed IS UWAGA Zdj obudow konektor w tylko wtedy gdy turbopompa zosta a przymocowana do systemu Nie instalowa i lub u ytkowa pompy w otocze
118. e WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov ele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe 87 900 968 01 F INSTRUCTIONS FOR USE Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released A WARNING To avoid damage to equipment and to prevent injuries to operating per sonnel the installation instructions as given in this manual should be strictly followed 70 100 87 900 968 01 F GENERAL INFORMATION This eguipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Varian before operating the eguipment Varian will not be held responsible for any events occurring due to non compliance even partial
119. e overige door Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De Turbo V 2K G is een ge ntegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen plus bijbehorende controller bestaat Het systeem kan vele soorten gas of gasvormige verbindingen pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 33000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De Turbo V 2K G is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacu m verlangen Het is voorzien van hulpconnectoren waarmee het op afstand aangestuurd kan worden door middel van een host computer die met een seri le lijn RS232 of RS485 is aangesloten In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical information Deze handleiding maakt van de volgende symbolen gebruik A GEVAAR
120. e druk in de vacu mkamer op 0 1 mbar 4 geef aan de Turbo V 2K G het START signaal op een van de volgende manieren a sluit de bijgeleverde I O contraconnector aan b geeft het START signaal op afstand via de I O connector zie paragraaf J1 REMOTE I O in de bijlage Technical Information c geef het START signaal op afstand via de seri le interface RS 232 485 zie paragraaf RS 232 485 Communication Description in de bijlage Technical Information A RESI Wanneer de voeding wordt geleverd en de bijgeleverde 15 pin connector is ingebracht start de Turbo V 2K G automatisch US ATTENTIE De controller wordt reeds mechanisch en elektrisch aan de pomp verbonden geleverd De controller kan slechts van het pomplichaam worden gescheiden door hiertoe bevoegd personeel van Varian Vacuum Technologies OPMERKING Wanneer de Turbo V 2K G voor de eerste keer wordt gestart start de controller automatisch het systeem met een speciale procedure die de lagers tegen mogelijke schade beschermt SOFT START Het systeem wordt via opeenvolgende stappen op volle snelheid gebracht in een tijdsbestek dat van 10 minuten tot 1 uur kan vari ren Nadat het systeem de volle snelheid heeft bereikt wordt de soft start procedure ontmachtigd en worden de volgende starten op de normale wijze uitgevoerd OPMERKING Om de beveiligingsgraad IP 54 te behouden mogen uitsluitend de bij de pomp geleverde connectoren gebruikt word
121. e este cabo e tomada juntos com uma tomada adeguadamente conectada a terra para evitar chogues el ctricos e satisfazer os reguisitos das normas CE O sistema est eguipado com um LED verde comandado por um sinal de estado 22 100 INSTRUC ES PARA O USO A luz piloto verde LD1 posicionada no painel da base do Turbo V 2K G indica atrav s da fregu ncia de intermit ncia as condic es operacionais do sistema acesa fixa a bomba funciona normalmente intermit ncia lenta per odo de aprox 400 ms o sistema est em estado de acelerac o ou de paragem ou de Stop ou de waiting for interlock intermit ncia r pida per odo de aprox 200 ms condi o de erro Como parar a Turbo V 2K G Para parar a bomba poss vel utilizar um dos seguintes m todos 1 retirando o conector conjugado de I O fornecido de s rie 2 dando o comando remoto de STOP atrav s do conector YO consultar o par grafo J1 REMOTE I O no ap ndice Technical Information 3 dando um comando remoto de STOP atrav s do interface s rie RS 232 485 consultar o par grafo RS 232 485 Communication Description no ap ndice Technical Information Paragem de Emerg ncia Para parar o Turbo V 2K G em condic es de emerg ncia necess rio desligar do controller o cabo de alimentac o preciso ter em conta que esta operac o al m de desabilitar completamente a alimentac o da bomba desabilita
122. e pomp in de verpakking worden gevoegd Mocht het systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk 87 900 968 01 F AFVALVERWERKING Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd 28 100 GEBRUIKSAANWIJZINGEN 87 900 968 01 F BRUGSANVISNING Sikkerhedsanvisninger for Molekylaere turbopumper De molekylaere turbopumper der er beskrevet i naervaerende brugsanvisning har en stor kinetisk energi der skyldes den heje omdrejningshastighed kombineret med deres rotorers specifikke veegt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes AN ADVARSEL For at undg materielle skader samt at operat rerne kommer til skade er det strengt
123. e power supply to protocol con verter 12 Launch the file download software 13 Select menu File Download Mode and check the following fields e Trigger 1 e Mode Number of file file 14 Select menu File Archive Time and select the number of days for a periodical file download to be sent for example 7 days 15 Read the Archive Saving Method Procedure Paragraph 16 Start the system NOTE The computer must be always connected to the MoniTorr Please be sure that the PC hasnt automatically Standby or Suspend procedure ac tive 87 900 968 01 E Interconnections The following figure shows the Monitorr s intercon nections Network Connector RS 485 SP N Network connector RS 485 In order to have the IP 54 environment protection use the appropriate connector provided To wire the MoniTorr network please connect all the A terminal toghether and the same for B and Gnd terminals Transmission Channel Characteristics Type RS 485 2 wire gnd optional half duplex levels RS 485 baud rate 115200 57600 38400 19200 9600 4800 2400 1200 300 110 programmable character length 8 bits parity none stop bit 1 bit protocol master PC slave MoniTorr Installing the File Download Software The MoniTorr connectivity kit comes with the soft ware needed to transfer via RS 485 all the data stored To install the software simply insert disk ette No 1 into the pers
124. e syst me est connect un dispositif Entr e Sortie distance s assurer que le signal de STOP soit activ voir paragraphe J1 REMOTE J1 ES A DISTANCE dans l appendice Technical Information Pour d marrer le syst me effectuer les op rations suivantes 1 Retirer si mont le connecteur E S 2 Connecter au r seau 3 Porter la pression l int rieur de la chambre vide 0 1 mbar 4 Donner la pompe Turbo V 2K G le signal de START de l une des fa ons suivantes a Brancher le connecteur E S fourni 87 900 968 01 F b Donner le signal de START distance travers le connecteur E S Cf paragraphe J1 REMOTE E S DISTANCE dans appendice Technical Information c Donner le signal de START distance travers l interface serielle RS 232 485 Cf paragraphe RS 232 485 Communication Description Des cription communication dans appendice Technical Information ENGENE Lorsque le systeme est branch au r seau et que le connecteur a 15 broches est connect la pompe Turbo V 2K G se met automatiquement en marche ES ATTENTION Le contr leur est fourni d j connect connexion m canique et lectrique la pompe La s paration du contr leur du corps de la pompe peut tre effectu e uniquement par le personnel auto ris par la soci t Varian Vacuum Technologies NOTE Lors de la premi re mise en marche de la pompe Turbo
125. ea de al menos 500 N mm US ATENCI N El Turbo V 2K G pertenece a la segunda categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a Para garantizar el aislamiento IP 54 deben utilizarse los ensambles de conectores suministrados adjuntos El Turbo V 2K G tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tensi n quede accesible Controlar que el aislamiento del dispositivo conectado al Turbo V 2K G mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 16 100 INSTRUCCIONES DE USO Para instalar los accesorios opcionales v ase Technical Information USO En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 80 C Durante el funcionamiento de la bomba la temperatura del rotor no deber superar nunca los 120 C El operador deber verificar siempre que el modo de funcionamiento que ha predispuesto sea adecuado para el gas que se debe bombear esto es 1 para nitr geno y gases m
126. echnologies OBSERVERA N r du anv nder Turbo V 2K G f r f rsta g ngen startas systemet automatiskt av styrenheten med en speciell procedur som skyddar lagren mot eventuella skador SOFT START Systemet startas stegvis f r att till slut uppn max hastighet Detta tar mellan 10 min och 1 timme N r systemet har uppn tt max hastighet deaktiveras proceduren f r mjukstart F ljande starter sker d refter p normalt s tt OBSERVERA F r att uppr tth lla kapslingsklass IP54 ska du endast anv nda de kontakter som f ljer med pumpen Anv nd endast str mkabeln art nr 969 9957 eller 969 9958 F st str mkabeln vid styrenheten med hj lp av en l mplig f stbygel se f ljande figur Anv nd sladden och kontakten tillsammans med en jordad anslutning f r att undvika st tar och enligt kr vande EU normer Systemet r utrustat med en gr n LED f r statussignal Den gr na lysdioden LD1 p underdelen av TURBO V 2K G anger genom frekvensen av dess blinkningar hur systemet fungerar e fast sken pumpen roterar normalt e l ngsamt blinkande ungef r var 400 ms systemet r i lage f r acceleration bromsning Stop eller Waiting for interlock e hastigt blinkande ungef r 200 ms feltillst nd Hur du stoppar Turbo V 2K G Systemet kan stoppas p n got av f ljande s tt 1 Ta bort den medlevererade l O kontakten 2 Skicka en fj rrstyrd stoppsignal via l O kontakten se avsnitt 1 R
127. ecibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente ES ATENCI N En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Varian PREPARACION PARA LA INSTALACI N El Turbo V 2K G se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas 15 100 INSTRUCCIONES DE USO Durante la operaci n de desembalaje tener cuidado de que no se caiga el Turbo V 2K G y de no someterlo a golpes o vibraciones Quitar la protecci n de los conectores solamente despu s de haber fijado al sistema la turbobomba Debido a su peso 35 kg para extraer la bomba del embalaje deben utilizarse las tres armellas en 120 que se encuentran enroscadas en el cuerpo bomba No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente US ATENCI N Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada
128. edkosci max 33000 obr min napedzana przez elektryczny silnik tr jfazowy o wysokiej wydajnosci Turbo V 2K G jest catkowicie bez czynnik w zanieczyszczajacych i dlatego te jest odpowiedni do zastosowan gdzie jest wymagana tzw czysta pr nia Poza tym posiada pomocnicze konektory poprzez kt re mo liwe jest zdalne pilotowanie go przy pomocy g wnego komputera po czonego z lini szeregow port RS232 lub RS485 W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information W tej instrukcji zastosowano nast puj ce umowne znaczenia N NIEBEZPIECZENSTWO Komunikaty niebezpiecze stwa przyciagaja uwage operatora co do danej procedury lub danego postepowania kt rego nieprawidtowe wykonanie mogtoby spowodowa powazne uszkodzenia ciata IS UWAGA Komunikaty zwi kszonej uwagi s wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury INFORMACJA S to wa ne informacje wyci gni te z tekstu MAGAZYNOWANIE W celu zagwarantowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekularnych Varian musz by przestrzegane nast puj ce zalecenia O podczas transportu przesuniecia i magazynowania pomp nie mog by
129. eherbir si oszt ly ac lcsavarokat kell haszn lni US FIGYELEM A Turbo V 2K G a m sodik telepit si vagy t lfesz lts g kateg ri hoz tartozik az EN 61010 1 direkt va szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zathoz A Turbo V 2K G nek olyan bemeneti kimeneti s soros kommunik ci s csatl z sai vannak amelyeket gy kell k ls aramk r kh z csatlakoztatni hogy elektromos r szek ne legyenek hozz f rhet k Haszn lja a mell kelt csatlakoz kat az IP 54 v delmi fokozat fenntart s hoz Gy z dj n meg r la hogy a Turbo V 2K G hez csatlakoztatott eszk z megfelel egyes hiba eset n is az RN 61010 1 direkt va szerint HASZN LATI UTAS T S Opcion lis tartoz kok telep t s hez v lassza a Technical Information HASZN LAT Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra meleg t se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 80 C ot A szivatty m k dtet sekor a rotor h m rs klete soha nem haladhatja meg a 120 C t A felhaszn l nak gyelnie kell hogy a szivatty zott g z szerint be ll tsa a helyes g zm dot 1 az N s k nnyebb g zokhoz 0 az argonhoz alap rtelmez s R szletek rt l sd Technical Information A mv Soha ne haszn lja a turb szivatty t amikor a bemeneti kari
130. en Gebruik voor de voedingskabel uitsluitend de PN 969 9957 of 969 9958 en bevestig de kabel aan de controller met behulp van de hiervoor bestemde opsluitbeugel zie volgende figuur Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen Het systeem is voorzien van een groene LED die door een statussignaal wordt aangestuurd 27 100 GEBRUIKSAANWIJZINGEN De groene LED LD1 op het paneel van de basis van de Turbo V 2K G geeft door de frequentie van zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop of waiting for interlock knippert snel periode van circa 200 ms fouttoestand Hoe wordt de Turbo V 2K G gestopt Om de pomp te stoppen kan n van de volgende methoden worden gebruikt 1 verwijdering van de bijgeleverde I O contraconnector 2 verzending van een STOP signaal op afstand via de I O connector zie paragraaf J1 REMOTE I O in de bijlage Technical Information 3 verzending van een STOP signaal op afstand via de seri le interface RS 232 485 zie paragraaf RS 232 485 Communication Description in de bijlage Technical Information Noodstop Om de Turbo V 2K G in noodomstandigheden te stoppen moet de stroomtoevoerka
131. endige antal bolte samt Varians anbefalede tilsp ndingsmoment DREJNINGS LANGE KLEMMETYPE ANT MOMENT ISO 250 F Bolt med M10 gevind 12 22 Nm BEM RK Turbo V 2K G pumpen kan ikke fastg res ved hj lp af dens sokkel Pumpen kan kun monteres ved hj lp af dens ISO 250F flange Fastg relsen skal opfylde kravene i ISO 1609 standarden Benyt st lbolte med en modstandsklasse p min 500 N mm IS VIGTIGT Turbo V 2K G h rer til den anden installationsklasse eller oversp ndingsklasse jf normen EN 61010 1 Slut derfor anordningen til en forsyningslinie som opfylder kravene i denne klasse Benyt de medleverede kontakter for at sikre opretholdelse af IP 54 isoleringsbeskyttelsen Turbo V 2K G er forsynet med konnektorer til ind udgange og til seriel kommunikation Konnektorerne skal tilsluttes de eksterne kredsl b s ledes at det ikke er muligt at opn adgang til de sp ndingsf rende dele Kontroll r at anordningen der er tilsluttet Turbo V 2K G har en passende isolering Dette gaelder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedrgrende installation af ekstraudstyret 31 100 BRUGSANVISNING ANVENDELSE Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet b r samtlige elektriske og pneumatiske tilslutninger udf res forbindelse med opvarmning af vakuumkammeret
132. er Reading 223 Specific option not available on standard models 29 1 BO Start Stop Status 000 0 Stop 1 Start B1 Low Speed Status 001 Read the Low Speed function status Out Buff byte 0 B6 0 off the target speed In Buff byte 8 is high speed Out Buff byte 1 1 on the target speed In Buff byte 8 is low speed Out Buff byte 3 B2 Soft Start Status 100 0 on 1 off this function is active at first pump run up and can t be deactivated by the user after first run up activate this function only if the pump has been stopped for at least3 months this procedure will take 1h B3 Vent Valve Status 122 0 close 1 open B4 Purge Valve Status 145 0 close 1 open B5 Set Point Status 221 0 open 1 closed B6 Flow meter Alarm Status 212 Specific option not available on standard models B7 Not Used NOTE In order to don t overload the controller s internal serial link following precautions are taken e The parameters are written from the gateway to the controller only when their value changes e The parameters are never read back from the controller to the interface The controller s response at the write command ACK NACK etc is used to establish if the writing succeed or not 96 100 87 900 968 01 E Diagnostic management In addition to the ProfiBus six byte standard diag nostic the
133. er at turbopumpa er festet til systemet Ikke installer eller bruk systemet i miljger som utsettes for regn sng eller is stov aggressive gasser eksplosjonsfarlige miljger eller milj er med stor brannfare Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 5 C til 40 C se diagram i tillegget Technical Information relativ fuktighet O 95 uten kondens Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Technical Information for detaljer Turbo V 2K G m koples til en hovedpumpe se skjema i Technical Information Turbo V 2K G kan monteres i en valgfri stilling Fest Turbo V 2K G i en stabil stilling med inngangsflensen festet mot en fast koplingsflens med et dreiemoment p 10600 Nm rundt aksen Turbopumpen med ISO inngangsflens m festes til vakuumkammeret med bolter Tabellen nedenfor oppgir antall bolter som kreves og strammemomentet anbefalt av Varian STRAMME FLENS TYPE KLEMME ANT MOMENT ISO 250 F Bolt med M10 12 22 Nm gjenge MERK Turbo V 2K G kan ikke festes med bruk av bunnen Systemet kan kun festes med ISO 250F flensen Festingen m utf res i henhold til ISO 1609 standarden Det m brukes st lbolter med en styrkeklasse p minst 500 N mm US FORSIKTIG Turbo V 2K G h rer til installasjonsklasse eller overspenningsklasse nummer 2 i f lge EN 61010 1 standarde
134. er dans l un des modes suivants 1 D brancher le connecteur E S 13 100 MODE D EMPLOI 2 Envoyer un signal de STOP distance travers le connecteur E S Cf paragraphe J1 REMOTE I O E S DISTANCE dans l appendice Technical Information 3 Envoyer un signal de STOP 8 distance via l interface s rielle RS 232 485 Cf paragraphe RS 232 485 Com munication Description dans l appendice Technical In formation Arr t d urgence Pour arr ter le Turbo V 2K G en conditions d urgence il faut d brancher le cordon d alimentation du contr leur II faut ce pendant rappeler que cette op ration d shabilite non seule ment l alimentation de la pompe mais aussi toutes les autres fonctions du contr leur comme par exemple la gestion de la Purge et du Vent contr l ainsi que la communication avec le syst me dans lequel la pompe a t int gr via les E S s rie ou profibus De plus cette op ration ne peut garantir l arr t imm diat du rotor dont la vitesse de rotation diminue en fonction du degr de vide pr sent dans le syst me ENTRETIEN Le Turbo V 2K G n exige aucun entretien particulier Toute intervention doit tre effectu e par un personnel agr A EXT Avant toute intervention sur le syst me le d brancher refouler l air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe s
135. er ein schl gigen nationalen Vorschriften zu erfolgen 87 900 968 01 F ENTSORGUNG Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Eguipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontak tieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat 9 100 GEBRAUCHSANLEITUNG 87 900 968 01 F MODE D EMPLOI Normes de s curit pour Pompe Turbomol culaires Les pompes Turbomol culaires d crites dans le Manuel d instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e AN DANGER Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions installation d crites dans ce manuel 10 100 87 900 968 01 F INDICATIONS GENERALES Cet appareillage a t concu
136. es US ATTENTION Lorsque la turbopompe fonctionne viter tout choc oscillation ou d placement brusque car les paliers pourraient se d t rio rer Pour le refoulement de l air de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 1 bar au del de la pression atmosph rique Pour le pompage de gaz contenant des particules ou des pol luants agressifs pour les paliers ces pompes sont dot es d une porte sp ciale travers laquelle il est n cessaire de fournir la pompe un flux de gaz inerte Azote ou H lium pour prot ger les paliers voir l appendice Technical Information US ATTENTION Ne jamais utiliser la pompe en pr sence de gaz ou de vapeurs corrosives pouvant endommager les composants internes de la pompe A EXT Lorsque la pompe est utilis e pour le pompage de gaz toxi ques inflammables ou radioactifs suivre les proc dures typi ques de chaque gaz Ne pas utiliser la pompe en pr sence de gaz explosifs La pompe est con ue pour garantir un transfert lev de l azote de argon et des gaz plus l gers En cas de pompage de gaz plus lourds que argon contacter le service technique Varian pour informations Utilisation de la pompe Turbo V 2K G Mise en marche du syst me Avant la mise en marche du syst me contr ler que le connecteur E S soit d branch Si l
137. es e Start Stop or Interlock Pin 1 i Open Stop 24V K x Inside Outside controller controller Pin 9 24Vdc Pin 1 Open Stop Pin 15 Gnd Inside Outside controller controller Instead of switch is possible to use transistor e Soft Start Speed Setting Purge Vent Pin 9 24Vdc Pin 7 K A i Pin 15 Gnd Inside Outside controller controller Pin 7 24V Inside Outside controller controller 87 900 968 01 E PURGE VENT VALVES the pump integrates the purge and vent valves The two valves are Normally Closed so if a power fail occur the valves will remain closed TECHNICAL INFORMATION In remote mode you can open the purge valve N C connecting pin10 of J1 to pin 9 or supplying 24 Vdc between pin 10 and pin 15 The same thing occurs for the vent valve with pin 12 Note that the vent and purge valve can also be controlled by means of the serial connection see the following diagram for details 1 OnCommand 1 Remote I O Pin 10 Low gt Purge Close Pin 10 High gt Purge Open Pin 12 Low gt Vent Close Pin 12 High gt Vent Open 0 Serial def 0 Auto def Win 126 set the Vent Valve Opening Delay from 0 to 65535 1bit 0 2s def 10s 50bit Win 147 set the Vent Valve Open Time from 0 to 65535 1bit 0 2s def 0 infinite ef Le et eo al Purge wi
138. es somente depois que a turbobomba estiver fixada ao sistema Devido ao seu peso 35 kg para retirar a bomba da embalagem amp necess rio utilizar as tr s cavilhas fixadas a 120 ao corpo da bomba N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protecc o do meio ambiente IS ATEN O Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados a exposic o do v cuo Utilizar sempre luvas ou outra protec o adequada NOTA A normal exposi o ao ar n o pode danificar a Turbo bomba V 2k Aconselha se no entanto mant la selada e bem fechada dentro da caixa at ao momento da instala o no sistema para evitar que se suje com poeiras A embalagem da Turbo V 2K G cont m 1 bomba com controller integrado 2 inlet screen montado 3 este manual em CD ROM 4 sacos dos acess rios 5 conector conjugado de 15 vias REMOTE I O IP 54 com todas as liga es necess rias para activar a bomba 6 conector conjugado de 9 vias SERIAL IP 54 a utilizar para a liga o s rie 7 conector conjugado de 9 vias Network MoniTorr 8 bra adeira de fixa o do cabo de alimenta o montada INSTALA O Devido ao seu peso a bomba deve ser manuseada com a ajuda de equipamentos de levantamento e desloca o espec ficos Para tal utilizar as respectivas
139. et som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen Skrotning av pumpen skall ske enligt g llande lagstiftning BORTSKAFFNING Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de l nder som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tilsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor 87 900 968 01 F BRUKERVEILEDNING Sikkerhetsanvisninger for Turbomolekyl r Pumper Turbomolekylaer pumpene som er beskrevet i den f lgende Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt A B LGET For
140. et firma eller en forhandler som s rger for oppsamling og eliminering etter ha kontrollert avtal og betingelser i kj pekontrakten 87 900 968 01 F K YTT OHJEET Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa pyorimisenergia saattaa vapautua ZN BETTE T ss k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v ltt miseksi 41 100 87 900 968 01 F YLEISI TIETOJA T m laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Varianin toimittamat lis tiedot Varian ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st Turbo V 2K G on kokonaisj rjestelm joka muodostuu valvojalla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan monen tyyppisi kaasuja tai kaa
141. first time and 0 for the following Set Point 0 Frequency type 1 Current 2 Time 3 Status default 3 84 100 TECHNICAL INFORMATION Read Data Description Admitted Write Type Values Set Point threshold expressed in Hz mA or s default 500 Set Point mask time between the pump start and the set point check seconds 0 to 99999 default 0 Set Point 0 active close signal acti N O vation type 1 active open the signal N C can be N O or default 0 NC 0 to 100 default 2 Set point hysteresis in of threshold 600 0 1200 1 2400 2 4800 3 9600 4 default 4 Baud rate Pump life To reset write 1 cycle time cycle num ber reset Analog out put type output volt age signal proportional to frequency or power R W N Purge gas 0 N type 1 Ar 0 frequency 1 power default 0 Threshold sccm flowmeter 475 to win 121 default 475 Low speed setting Hz Body ther mistor en able 475 to win 121 default 555 High speed setting Hz 475 to 555 default 555 Maximum excitation freguency in Hz active only in Stop condition Set vent 1 open valve 0 close open close N C default 0 87 900 968 01 E Read Data Description Admitted Write Type Values 0 auto default 1 on command Valves oper ating mode see win 146
142. formation F RBEREDELSER F R INSTALLATIONEN Turbo V 2K G levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att Turbo V 2K G inte tappas eller uts tts f r st tar vid uppackningen 34 100 BRUKSANVISNING Ta bort kontakternas skydd endast efter att turbopumpen har satts fast p systemet P grund av dess vikt 35 kg b r du anv nda de tre 120 lyft glorna p pumphuset f r att ta upp pumpen ur f rpackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd IS VIKTIGT Komponenter som skall uts ttas f r vakuum f r inte hanteras med bara h nder p g a kontamineringsrisken Anv nd alltid handskar eller liknande skydd OBSERVERA Pumpen Turbo V 2K G skadas inte av normal luftp verkan Det rekommenderas dock att h lla pumpen st ngd och f rseglad tills den installeras i systemet Detta f r att f rebygga f rorening av systemet Turbo V 2K G f rpackning inneh ller Pump med inbyggd styrenhet Intagsfl ns monterad Denna bruksanvisning p CD ROM P se med tillbeh r 15 polig kontakt IP54 REMOTE med inbyggda anslutningar som beh vs f r att kunna starta pumpen 9 polig kontakt IP54 SERIAL som anv nds f r den seriella anslutningen 9 polig k
143. formation prove te v echna elektrick a NTS Turbov v vu nikdy nepou vejte nebude li vstupn p ruba p ipojen k vakuov komo e B hem zah v n se turbov v vy ani jej ho p slu enstv nedot kejte Vysok teplota m e zp sobit pop leniny IS VAROV N B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr vac m otvoru mus b t men ne 1 bary nad atmosf rick m tlakem Pro erp n plyn s obsahem stic nebo zne i uj c ch l tek agresivn ch v i lo isk m jsou tyto vyv vy vybaveny speci ln m otvorem kter umo uje plynul p tok inertn ho plynu dus k nebo helium pro ochranu lo isek v v vy viz p lohu Information IS VAROVANI Nikdy nepou vejte v v vu v p tomnosti korozivn ch plyn nebo v par kter by mohly po kodit materi ly pou it uvnit v v vy A V STRAHA Pokud pou v te v v vu pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn V v va je ur ena pro vysoce v konn od erp v n N2 Ar a leh ho plynu Pokud byste pot ebovali od erp vat plyny t ne Ar kontaktujte techn
144. g st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overholde EU forskriftene Systemet leveres med en gr nn LED styrt av et statussignal Den gr nne lysdioden LD1 p TURBO V 2K G basepanel angir systemets funksjon ved hjelp av blink den lyser fast pumpen roterer normalt den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock den blinker hurtig ca hver 200 ms feiltilstand Hvordan stoppe Turbo V 2K G Stopp pumpen p en av f lgende m ter 1 Kople fra I O kontakten som f lger med 2 Gi et fjernstyrt stoppsignal med I O kontakt se avsnittet J1 REMOTE I O i vedlegget Technical Information 40 100 BRUKERVEILEDNING 3 Gi et fjernstyrt stoppsignal med seriegrensesnittet RS232 485 se avsnittet RS232 485 Communication Description i vedlegget Technical Information N dstopp Trekk ut nettkabelen fra styreenheten for stoppe Turbo V 2K G i en n dsituasjon Det m i alle tilfeller tas med i beregningen at dette inngrepet foruten koble ut pumpens mating fullstendig kobler ogs ut alle andre funksjoner for kontrolleren som for eksempel styring av Purge og kontrollert Vent samt evnen til kommunisere med systemet der pumpen er integrert ved hjelp av I Os Serialport eller Profibus Dessuten kan dette inngrepet ikke garantere at rotoren hvis rotasjonshastighet vil senkes
145. gas o di composto gassoso ma non adatto per il pompag gio di liquidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocit 33000 giri min max mossa da un motore elettrico trifase ad alto rendimento La Turbo V 2K G total mente priva di agenti contaminanti ed quindi adatta per ap plicazioni che richiedono un vuoto pulito Ha inoltre dei connettori ausiliari tramite i quali possibile pilo tarlo da remoto tramite un computer host collegato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni ne cessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nel l appendice Technical information Questo manuale utilizza le seguenti convenzioni N PERICOLO messaggi di pericolo attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali IS ATTENZIONE messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparec chiatura NOTA Le note contengono informazioni importanti estrapolate dal testo IMMAGAZZINAMENTO Per garantire il massimo livello di funzionalit ed affidabilit delle pompe Turbomolecolari Varian devono essere osservate le seguenti prescrizioni e durante il trasporto l
146. grammable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Controller SLAVE e e The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where NOTE When a data is indicated between two quotes it means that the indicated data is the correspond ing ASCII character lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device num ber 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric char acter indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write into the window TECHNICAL INFORMATION lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table DATA TYPE FIELD VALID LENGTH CHARACTERS Logic L 0 OFF 1 ON Numeric N right justified with 0 Alphanumeric A
147. grund af dens veegt skal pumpen h ndteres ved hj lp af passende l fte og transportudstyr Benyt gjeboltene der er fastspaendt i gevindhullerne p pumpehuset 87 900 968 01 F IS VIGTIGT Fjern f rst den fastboltede afsk rmning n r turbopumpen er blevet sluttet til systemet IS VIGTIGT Fjern beskyttelsen fra konnektorerne kun efter at turbopumpen er blevet fastgjort til systemet A A Installer og anvend ikke pumpen i miljger der uds ttes for p virkninger fra atmosf ren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj F lgende krav til omgivelsesforholdene geelder ved drift max tryk 2 bar over det atmosf riske tryk temperatur fra 5 C til 40 C se illustrationen i bilaget Technical Information relativ luftfugtighed 0 95 ikke kondenserende Hvis pumpen er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes Se bilaget Technical Information for yderligere oplysninger Turbo V 2K G skal tilsluttes en hovedpumpe se skemaet Technical Information Turbo V 2K G kan installeres i en hvilken som helst position Fastg r Turbo V 2K G i en stabil position ved at slutte turbopumpens indl bsflange til en fast kontraflange der t ler et moment p 10600 Nm omkring akselen Turbopumpen med ISO indgangsflange skal fastg res p vakuumkammeret ved hj lp af bolte Nedenst ende tabel angiver det n dv
148. he body temperature limit calculated from the Water Cooling Max Temperature parameter buffer byte 0 26 1 0 6 BO B3 Status 205 0 Stop 1 Waiting for interlock interlock connections on remote I O connector missing 2 Ramp the pump is increasing the speed 3 Auto tuning the speed has been reduced because the gas load is higher than the Power Limit 4 Braking the pump is reducing the speed using the motor 5 Normal operation the pump is at target speed 6 Fail see error code byte Input Buffer Byte 27 B4 B7 Reserved 27 1 Bit Field Error Code bit field 206 B7 Too High Load the gas load is too high for the pump B6 Short Circuit a short circuit happened between the two of the three motor phases B5 Over voltage not used 95 100 87 900 968 01 E TECHNICAL INFORMATION OFFSET SIZE UNIT WIN BYTE BYTE RES RANGE DESCRIPTION SERIAL 4 Verify Line Select the auto voltage selection mismatch the real input voltage B3 Power Fail internal circuitry failure 2 Controller Over Temperature Controller Power Section Temperature or Controller CPU Section Tem perature are over the limit B1 Pump Over temperature Pump Bearing Temperature or Pump Body Temperature are over the limit BO Check Connection To Pump the connection between controller and pump missing 28 1 Sccm Flow Met
149. her liguids b Purge or flush all gasses c Wipe off any excess residues in or on the eguipment d Package the eguipment to prevent shipping damage for Advance Exchanges please use packing material from replacement unit 4 Make sure the shipping documents clearly show the RA and then return the package to the Varian location nearest you North and South America Europe and Middle East Asia and ROW Varian Vacuum Technologies Varian SpA Varian Vacuum Technologies 121 Hartwell Ave Via Flli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Phone 1 781 8617200 Phone 39 011 9979111 Fax 1 781 8609252 Fax 39 011 9979330 CUSTOMER INFORMATION COMPANY NAME san ep ae ee a Contact person Name ses ne PAX ey E Mail aans zen 2040422 ent ans Ship Method Shipping Collect H BOM asutaan Europe only VAT reg Number USA only Taxable Non taxable Customer Ship To Customer Bill To sei sense PRODUCT IDENTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair I Warranty Exchange 7 Warranty Repair Loaner Return Credit O Shipping Error Evaluation Return Calibration O Other
150. hervorgehoben werden LAGERUNG Um ein H chstma an Effizienz und Zuverl ssigkeit der Varian Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten e W hrend des Transports der Handhabung und der Einla gerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden e Temperatur von 20 C bis 70 C e Relative Feuchtigkeit von O bis 95 nicht kondensie rend e Der Kunde hat die Turbomolekularpumpen nach dem Emp fang bei Erstinbetriebnahme stets im Modus Soft Start in gangzusetzen e Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum IS ACHTUNG Falls die Lagerdauer aus verschiedentlichen Gr nden die ge nannte Frist berschreiten sollte ist die Pumpe an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Varian Vertreter VOR DER INSTALLATION Modell Turbo V 2K G wird in einer speziellen Schutzverpa ckung geliefert Eventuelle Transportsch den sind der zust n digen rtlichen Verkaufsstelle zu melden Modell Turbo V 2K G 6 100 GEBRAUCHSANLEITUNG ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St en und Vibrationen zu sch tzen ist Das Verpa ckungsmaterial ist vorschriftsgem zu entsorgen Den Schutz der Steckverbinder erst entfernen wenn die Tur bopumpe am System befestigt ist F r die Entnahme der Pumpe aus ihrer Verpackung sind auf grund des hohen Ge
151. higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V 2K G pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system Turn off the Turbopump 4 Open the Turbo V 2K G vent electro valve up to the atmospheric pressure in the system 5 When the Turbo V 2K G pump and the back ing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating Z e 5 Purge gas line Pressure regulator Purge and vent port Forevacuum pump Turbopump Water line DA BON Purge and vent layout 87 900 968 01 E HIGH VACUUM FLANGE CONNECTION To connect the Turbo V 2K G pump to the ISO F inlet flange position the integrated inlet screen centering ring as shown in the figure INLET SCREEN Es Then fix the two flanges with the bolts as shown in the following figures according to Norm ISO 1609 N R N N _ N W NIAS T
152. hteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st IS Huomio Jos varastointiaika on jostain syyst pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Varian edustajalta VALMISTELUT ASENNUSTA VARTEN Turbo V 2K G toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti Turbo V 2K G putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n 42 100 K YTT OHJEET Poista liittimien suoja ainoastaan sen j lkeen kun turbopumppu on kiinnitetty j rjestelm n Pumpun painosta 35 kg johtuen se tulee nostaa pakkauksesta k ytt m ll kolmea 120 silmukkapulttia jotka on ruuvattu pumpun runkoon Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta FT HUOMIO Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta HUOM Turbo V 2K G ei vaurioidu ilmalle altistuessaan On kuitenkin suositeltavaa
153. i Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot 87 900 968 01 F Ol TO AN TOU
154. i n disminuir en funci n del grado de vac o presente en el sistema MANTENIMIENTO El Turbo V 2K G no necesita ning n mantenimiento Cualquier operaci n deber ser realizada por personal autorizado ES Antes de realizar cualquier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de averia se podr utilizar el servicio de reparaci n Varian o el Varian advanced exchange service que permite obtener un sistema regenerado para sustituir el averiado NOTA Antes de enviar al fabricante un sistema para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de gue el sistema se tenga gue desguazar eliminarlo respetando las normas nacionales especificas 87 900 968 01 F ELIMINACI N Significado del logotipo WEEE presente en las etiguetas El s mbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este s mbolo v lido s lo para los pa ses miembros de la Comunidad Europea indica gue el producto sobre el cual ha sido aplicado NO
155. ia Purge a odvzdu ovania Vent zru i schopnos s riovej komunik cie komunik cie prostredn ctvom zbernice Profibus alebo prostredn ctvom l Os so syst mom do ktor ho bolo erpadlo vstavan Okrem toho t to oper cia nedok e zaru i okam it zastavenie rotora r chlos ktor ho klesne v z vislosti od stup a v kua v syst me DR BA Zariadenie Turbo V 2K G nevy aduje iadnu dr bu Ak ko vek pravy a opravy syst mu mus vykona autorizovan person l N VAROVANIE Sk r ne za nete okolvek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte kontaktn stredisko spolo nosti Varian kde v m pokazen syst m vymenia POZN MKA Sk r ne syst m odo lete na opravu alebo v menu mus te vyplni dotazn k Zdravie a bezpe nos Dotazn k pripojen k n vodu na pou itie je potrebn vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia syst mu mus prebehn v s lade so pecifick mi predpismi danej krajiny LIKVID CIA V znam loga WEEE nach dzaj ceho sa na t tkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu E s n zvom WEEE Tento symbol plat
156. ical Information c dar o comando remoto de START utilizando o interface s rie RS 232 485 consultar o par grafo RS 232 485 Communication Description no ap ndice Technical Information A EEE Quando o aparelho est ligado rede de alimentac o el ctrica e o conector conjugado de 15 pinos fornecido de s rie est introduzido a Turbo V 2K G activa se automaticamente IS ATEN O O controller fornecido com todas as ligac es mec nicas e as conex es el ctricas com a bomba j instaladas O controller pode ser separado do corpo da bomba exclusivamente por pessoal autorizado pela Varian Vacuum Techmologies NOTA Ouando se activa a Turbo V 2K G pela primeira vez o controller activa automaticamente o sistema com um processo especial gue protege os mancais contra poss veis danos SOFT START O sistema entra em funcionamento com uma segu ncia de operac es sucessivas at atingir o regime m ximo num intervalo de tempo gue oscila entre 10 minutos e 1 hora Depois de o sistema chegar velocidade de regime m xima o processo de soft start desabilitado e os arrangues posteriores realizam se na modalidade normal NOTA Para manter o n vel de protecc o IP 54 utilizar exclusivamente os conectores fornecidos com a bomba Para o cabo de alimentac o usar unicamente os PN 969 9957 ou 969 9958 e fixar o cabo ao controller utilizando a bracadeira especifica ver a figura gue se segue Utiliz
157. ickou podporu firmy Varian a dejte informace Pou v n za zen Turbo V 2K G Jak se za zen uv d do provozu P ed spu t n m za zen zkontrolujte pros m jestli je rozpojen konektor I O Je li za zen p ipojeno k n jak mu vzd len mu modulu I O zkontrolujte p vod sign lu pro zastaven viz odstavec J1 REMOTE I O v p loze Technical Information P i spou t n tohoto za zen postupujte podle t chto krok 1 odpojte od za zen p ipojen I O konektor je li 2 zapojte do s ov z suvky 3 vy erpejte podtlakovou komoru na 0 1 mbar 4 jedn m z n sleduj c ch zp sob p ive te do v v vy Turbo V 2K G spou t c sign l a p ipojte dodan odpov daj c I O konektor b prive te do konektoru I O spou t c signal ze vzd len ho m sta viz odstavec J1 REMOTE I O v p loze Technical Information c p ive te spou t c sign l ze vzd len ho m sta prost ednictv m s riov ho rozhran RS 232 485 viz odstavec Popis komunikace RS232 RS 485 v p loze Technical Information N VYSTRAHA 87 900 968 01 F Jakmile bude p ipojeno nap jen a zasunut souhlasn 15 kol kov konektor dodan v robcem v v va Turbo V 2K G se rozb hne automaticky US VAROV N Regul tor je ji mechanicky a elektricky vybaven pro p ipojen k t to v v v Odpojen regul toru od v v vy mus prov d t jenom opr vn n pracovn ci firmy V
158. ination PC STX ADDR WINDOW WR ON ETX CRC 02 80 06 03 38 35 STX ADDRI ACK ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 83 100 87 900 968 01 E Command READ PUMP STATUS Source PC Destination Controller with address 3 02 83 32 30 35 30 03 38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 132130 35 30 30 30 30 30 30 03 138137 STX ADDR WINDOW DATA STATUS ETX CRC Command READ SERIAL CONFIGURATION Source PC Destination Controller with address 3 in 485 mode 02 83 35 30 34 30 03 38 31 STX ADDR WINDOW RD ETX CRC Source Controller Destination PC 02 83 35 30 34 30 31 03 42 30 STX ADDR WINDOW RD DATA ETX CRC Window Meanings Read Data Ben Admitted Write Type Values in remote mode the window is a read only 0 OFF 1 ON default 0 Remote Remote 1 default or Serial O Serial con figuration default 1 Low speed activation Soft Start YES 1 write only in NO 0 Stop condi tion default 1 the
159. information taken from the text STORAGE In order to guarantee the maximum level of performance and reliability of Varian Turbomolecular pumps the following guide lines must be followed e when shipping moving and storing pumps the following environmental specifications should not be exceeded e temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing e the turbomolecular pumps must be always soft started when received and operated for the first time by the cus tomer e the shelf life of a turbomolecular pump is 10 months from the shipping date ES CAUTION If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Varian Vacuum Sales and Service representative for informations PREPARATION FOR INSTALLATION The Turbo V 2K G is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it INSTRUCTIONS FOR USE Remove connector protections only after fixing the turbopump to the system Cause its weight 35 kg use the three eyebolts screwed at 120 on the pump body to extract the pump from the package Do not dispose of the packing materials in an unauthorized manner The material is 10096 recyclable and complies with EEC Directive 85 3
160. ing for interlock hurtige blink periode p ca 200 ms fejl Afbrydelse af Turbo V 2K G Benyt en af folgende metoder for at afbryde pumpen 1 Fjern den medleverede I O kontakt 2 Overf r et fjernstyret stopsignal ved hj lp af I O kontakten se afsnittet JI REMOTE I O i bilaget Technical Information 32 100 BRUGSANVISNING 3 Overf r et fjernstyret stopsignal ved hj lp af den serielle gr nseflade RS232 485 se afsnit RS232 485 Communication Description i bilaget Technical Information Nodstop Afbrydelse af Turbo V 2K G i ngdsituationer sker ved at koble ledningen fra styreenheden Det er vigtigt at notere at denne operation ud over at afkoble fuldstaendigt pumpens tilforsel afkobler desuden ogs alle de andre controller funktioner som for eksempel drift af Purge og af den Kontrollerede Ventilation og muligheden for at kommunikere med systemet hvortil pumpen er blevet tilsluttet ved brug af I Os Seriel eller Profibus forbindelse Desuden kan denne operation ikke sikre det omg ende stop af rotoren dens hastighed saenkes i henhold til vakuummet Der findes inde i systemet VEDLIGEHOLDELSE Turbo V 2K G behover ikke nogen vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale AN ADVARSEL Inden der foretages noget som helst indgreb p systemet skal str mmen f rst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotore
161. isfy the above category The Turbo V 2K G has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Use the provided mating connectors in order to maintain the IP 54 protection level Be sure that the insulation of the device connected to the Turbo V 2K G is adequate even in the case of single fault as per directive EN 61010 1 For installation of optional accessories see Technical Informa tion 72 100 INSTRUCTIONS FOR USE USE This paragraph details the fundamental operating procedures Make all electrical an pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 80 C While operating the pump the rotor temperature must never exceed 120 C The user must be sure to set the correct gas mode according to the pumped gas 1 for N and lighter gases 0 for Argon default See the annex Technical Information for details A WARNING Never use the turbopump when the inlet flange is not con nected to the vacuum chamber or is not blanked Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns ES CAUTION Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or inert gas free from dust or particles for venting the
162. isse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke folges kan medfgre alvorlige skader US FORSIKTIG Denne advarselen vises foran fremgangsm ter som dersom de ikke folges kan fore til at utstyret skades MERK Merknadene inneholder viktig informasjon som er hentet fra teksten LAGRING For garantere optimal drift og p litelighet for Varian turbomolekyl re pumper m folgende anvisninger folges e Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges e Temperatur fra 20 C til 70 C e Relativ fuktighet fra O til 95 uten kondensering e Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang e Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato US FORSIKTIG Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Varian forhandleren for informasjon KLARGJ RE TIL INSTALLASJON Turbo V 2K G leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r Turbo V 2K G pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for st t 38 100 BRUKERVEILEDNING Fjern beskyttelsen p koplingsstykket kun etter at turbopumpa er festet til
163. k Vyvevu preplachujte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na preplachovacom vstupe V vevy s vybaven peci lnym vstupom na vy erp vanie plynov sobsahom astic alebo zne i tujucich l tok agres vn ch vo i lo isk m ktor umo uj stabiln tok inertn ho plynu dus k a h lium kv li ochrane lo sk v vevy pozri dodatok Technical Information US UPOZORNENIE Nikdy nepou vajte v vevu v pre koroz vne plyne alebo v pary ktor by mohli po kodi materi ly pou it vo vn tri v vevy N VAROVANIE Ak vyvevu pou vate na vy erp vanie toxick ch horfav ch alebo r dioaktivnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov Vyveva je navrhnut pre ve k prietoky dus ka arg nu a ahk ch plynov Ak potrebujete erpa plyn a ako arg n informujte sa u technickej podpory firmy Varian Pou itie zariadenia Turbo V 2K G Ako zariadenie spusti Pre spusten m syst mu skontrolujte i je pripojen pr slu n I O konektor Ak je syst m pripojen ku vzdialen mu I O preru te sign l pozri odstavec J1 REMOTE 1 0 dodatku k Technical Information Syst m na tartujte sledom nasledovn ch krokov 1 odpojte ak je pripojen I O konektor 2 zasu te nap jaciu n ru 3 vy erpajte v kuov komoru na 0 1 mbar 4 Dajte
164. kan beskadige pumpens indvendige dele N ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser fglges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Pumpen er projekteret til at sikre en hgj pumpekapacitet for kvaelstof argon og lettere gasarter Kontakt Varians tekniske servicecenter vedrgrende yderligere oplysninger hvis det er n dvendigt at pumpe gasarter som er tungere end argon Brug af Turbo V 2K G Start af systemet Kontroll r at I O kontakten er blevet fjernet inden start af systemet Kontroll r at stopsignalet er aktiveret hvis systemet er tilsluttet en fjernstyret I O anordning se afsnittet J1 REMOTE I O i bilaget Technical Information Ger folgende for at starte systemet 1 Fjern kontakten hvis den er monteret 2 Tilslut str mmen 3 Indstil trykket i vakuumkammeret til 0 1 mbar 4 Overf r startsignalet til Turbo V 2K G p en af f lgende m der a Tilslut den medleverede I O kontakt b Overf r det fjernstyrede startsignal ved hj lp af I O kontakten se afsnittet J1 REMOTE I O i bilaget Technical Information c Overf r det fjernstyrede startsignal ved hj lp af den serielle graenseflade RS232 485 se afsnittet 87 900 968 01 F RS232 485 Communication Description i bilaget Technical Information A ADVARSEL Turbo V 2K G starter automatisk efter tilslutning af str m og inds ttelse af den medleverede 15
165. ketty I O sarja tai Profibus portin v lityksell Lis ksi toimenpide ei takaa roottorin v lit nt pys htymist koska py rint nopeus laskee suhteessa j rjestelm n alipaineen m r n HUOLTO Turbo V 2K G ei vaadi lainkaan huoltoa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi ZN VAARA Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Varianin korjauspalvelua tai Varian advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle HUOM Ennen j rjestelm n l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla H VITT MINEN Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisest
166. ko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine maks 33000 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor Turbo V 2K G ne vsebuje onesna evalnih agentov in je primeren za isto vakuumiranje Opremljen je z auksiliarnimi prikljucki ki jih lahko krmilite iz oddaljene lokacije z gostiteljskim ra unalnikom povezanim preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information Navodila so napisana po naslednjem standardnem protokolu N OPOZORILO Opozorila so za to da pritegnejo pozornost uporabnika na do lo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i IS POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme OPOMBA Opombe vsebujejo pomebne informacije iz besedila SHRANJEVANJE Da bi zagotovili maksimalni u inek in zanesljivost rpalk Varian Turbomolecular se morate dr ati naslednjih vodil Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij e temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti O do 95 brez kondenza e Turbomolekularne r
167. kontrolna enota samodejno za ene sistem s posedbno proceduro ki zavaruje te aje proti po kodbam SOFT START Sistem se po korakih za ene do polne hitrosti v asu od 10 minut do 1 ure Ko sistem dose e polno hitrost se mehki zagon onemogo i in naslednji zagoni so normalni OPOMBA Za vzdr evanje IP 54 za itnega nivoja morate uporabljati samo priklju ke ki so bili zraven rpalke Uporabite priklju ke PN 969 9957 ali 969 9958 za napetostni kabel ki ga pritrdite na upravljalec s posebnim nosilcem glej naslednjo skico Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Sistem ima zeleni statusni signal Zelena LED dioda ki se nahaja na sprednji plo i Turbo V 2K G s hitrostjo utripanja ozna uje delovne pogoje sistema e Brez utripanja rpalka je normalno vrti e Po asno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v stanju Waiting for interloc e Hitro utripanje perioda pribli no 200 ms Napaka Zaustavljanje sistema Za zaustavljanje sistema lahko uporabite eno od naslednjih metod 1 priklju ite prilo en I O priklju ek 2 oddajte oddaljeni signal za zagon preko I O priklju ka glej odstavek J1 REMOTE v prilogi Technical Information 3 Oddajte oddaljeni signal za zagon preko RS 232 485 serijskega vmesnika glej odstavek RS232 RS 485 Opis komunikacij
168. l to RS232 converter In order to install and operate the MoniTorr card of the Turbo V 2K G it s necessary to get the Monitor Connectivity Kit P N 969 9260 The user should install it on any windows based PC with at least one RS232 port 87 900 968 01 E MoniTorr Connectivity Kit Installation Procedu re 1 Install the File VT Serial Address Configurator on PC launch VT SAC setup exe on CD Rom Connect the RS232 cable between the PC serial port and the first TV 2KG serial port 3 Launch the VT Serial Address Configurator program 4 Set the Serial Communication as following a Baudrate 9600 b COM Port Your PC COM Port Number generally COM1 c Numeric a different address for each pump 0 1 2 31 d Click on Set the new address button COM Fort Number Baud Rate 8600 y A Serial Address 5 Close the VT Serial Address Configurator pro gram 6 Repeat all operations from the point 2 choos ing a new address for each pump 7 Install the MoniTorr File Download Program PC FileDW Setup exe on CD rom see In stalling the File Download Software paragraph 8 Connect the RS232 cable from PC to Protocol Converter 9 Connect the RS485 cable between the proto col converter and the network connector of each pump 87 100 TECHNICAL INFORMATION 10 Check if Baud Rate of protocol converter is fixed at 115K2 switch between 9 position and F position 11 Connect th
169. laku teplota vzduchu od 5 C do 40 C relat vna vlhkos 0 95 bez kondenz cie V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie Turbo V 2K G sa mus pripoji k prim rnej v veve pozri Technical Information Zariadenie Turbo V 2K G m e by nain talovan v ubovo nej polohe Upevnite Turbo V 2K G do stabilnej polohy pripojen m vstupnej pr ruby turbov vevy k pevnej pr rube upevnenej tak aby vydr ala nam hanie kr tiacim momentom 10600 Nm okolo svojej osi Turbov veva so vstupnou pr rubou ISO mus by pripojen k v kuovej komore pomocou skrutiek Nasleduj ca tabu ka uv dza potrebn po et skrutiek a relevantn u ahovac to iv moment PR RUBA UPEV OVAC PO ET U AHOVAC MECHANIZMUS KR TIACI MOMENT POZN MKA Turbo V 2K G nemo no upevni pomocou jej z kladnej dosky Syst m mo no upevni len pomocou jeho ISO pr ruby 250F Upevnenie mus by preveden pod a normy ISO 1609 Musia by pou it oce ov skrutky s pevnos ou v ahu najmenej 500 N mm ES UPOZORNENIE Zariadenie Turbo V 2K G patr do druhej in tala nej prep ovej kateg rie pod a smernice EN 61010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Zariadenie Turbo V 2K G m konektory pre vstup v st
170. lder detaljerede oplysninger I brugsanvisningen anvendes f lgende standardrubrikker ZN ADVARSEL Advarselsmeddelelserne informerer operatgren om at en speciel procedure eller en vis type arbejde skal udfgres preecist efter anvisningerne modsat fald er der risiko for sv re personskader IS VIGTIGT Denne advarselsmeddelelse vises f r procedurer der skal f lges n je for ikke at risikere maskinskader BEM RK Dette g r opm rksom p vigtig information i teksten OPBEVARING Det er n dvendigt at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Varian e S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne e temperatur fra 20 C til 70 C e relativ fugtighed fra O til 95 ikke kondenserende e Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for f rste gang e De turbomolekylaere pumper m opbevares i 10 m neder fra forsendelsesdatoen IS VIGTIGT Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger f s ved henvendelse til den lokale Varian repr sentant FORBEREDELSE F R INSTALLATION Turbo V 2K G leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser
171. lier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 87 900 968 01 F DESCRIPTION OF THE TURBO V 2K G The Turbo V 2K G pumping system consists of a pump with a dedicated controller fixed to it The system has an ISO 250 F high vacuum flange and an on board controller supplied at 208 240 Vac The system is also available only on reguest with an on board controller supplied at 120 Vac The system model part numbers are 969 8871 with Monitorr 969 8873 with Monitorr and ProfiBus options The following figure shows the Turbo V 2K G TECHNICAL INFORMATION Pump Description The pump consists of a high frequency motor driv ing a turbine fitted with 5 bladed stages and 2 Macrotorr stages The turbine rotates in an anti clockwise direction when viewed from the high vacuum flange end The turbine rotor is supported by permanently lu bricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are made of alumin ium alloy These are supported and accurately po sitioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy During normal operation the motor is fed with a
172. livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local 11 100 MODE D EMPLOI Pendant l op ration d ouverture de l emballage veiller tout par ticuli rement ne pas laisser tomber le Turbo V 2K G et ne lui faire subir aucun choc et aucune vibration Enlever la protection des connecteurs seulement apr s avoir fix e la turbopompe au syst me Compte tenu de son poids 35 kg il est n cessaire d utiliser les trois anneaux de levage 120 viss sur le corps de la pompe pour l extraire de son emballage Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement US ATTENTION Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e NOTE La Turbo V 2K G ne peut tre endommag e par une exposition environnementale normale Toutefois il est conseill de main tenir la pompe ferm e et scell e jusqu son installation dans le syst me Ceci afin de pr venir toute contamination du syst me La pompe Turbo V 2K G comprend 1 Pompe avec contr leur int gr 2 Protection d entr e mont e 3 CD Rom contenant cette n
173. ln aby zariadenie pred mont ou zostalo hermeticky uzavret To zabr ni jeho kontamin cii Turbo V 2K G zahr uje v veva s integrovan m kontroln m modulom vstupn mrie ka tento n vod na pou itie na CD kabela s prislusenstvom 15 kol kov konektor IP 54 ako protikus pre konektor dialkoveho ovl dania REMOTE I O obsahuj ci v etky spojenia potrebn pre spustenie v vevy 6 9 kol kov konektor IP 54 ako protikus pre s riov konektor pou van pre s riov spojenie 7 9 kolikowy konektor protikus pre Network MoniTorr 8 Uchytna svorka a pre nap jac k bel namontovan BON 2 INSTAL CIA AN VAROVANIE Kv li jej v he s vyvevou manipulujte s pomocou vhodn ch pom cok a n strojov Pou ite z vesn o k zaskrutkovan do otvorov v telese v vevy 87 900 968 01 F ES UPOZORNENIE Neodstra ujte priskrutkovan ochrann kryt sk r ne pripoj te turbov vevu k syst mu ES UPOZORNENIE Kryty z konektorov odstr te a po pripevnen turbov vevy k s stave V vevu nein talujte ani nepou vajte v prostred vystavenom vonkaj m vplyvom d sneh ad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny pretlak 2 bary nad rov ou atmosf rick ho t
174. ln provozuschopnost a spolehlivost turbomolekul rn ch v v v firmy Varian mus te dodr ovat n sleduj c pokyny P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rn v v vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rn v v vy je 10 m s c ode dne doru en IS VAROVANI Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Varian P PRAVA K INSTALACI Za zen Turbo V 2K G se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky po kozen k n mu mohlo doj t b hem p epravy kontaktujte va i m stn prodejn pobo ku P i vybalov n d vejte pozor aby za zen nespadlo a chra te jej p ed v emi nenad l mi n razy ot esy nebo vibracemi 59 100 P RU KA K POU IT Odejm te zakryt konektor a pot co bude turbov v va p ipevn n k syst mu Pro vyjmut v v vy z obalu a tak kv li jeho hmotnosti 35 kg pou ijte t i rouby s okem na roubovan na t lese v v vy s rozte 120 Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l Ize 100 recykl
175. m indl bsflangens temperatur ikke overstige 80 C Rotorens temperatur m aldrig overskride 120 C i forbindelse med brug af pumpen Operat ren skal kontrollere at den korrekte funktion er indstillet i forhold til gastypen som skal pumpes 1 til kv lstof og lettere gasarter O til argon default indstilling Vedr rende yderligere detaljer henvises til bilaget Technical Information AN ADVARSEL Pumpen m aldrig aktiveres hvis indl bsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen R r aldrig turbopumpen eller dens tilbeh r i forbindelse med opvarmningsprocedurerne Den h je temperatur kan resultere i skade p personer IS VIGTIGT Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller delgasser der ikke indeholder st v eller faste partikler Indgangstrykket ved den specielle d r skal v re mindre end 1 bar over atmosf risk tryk I forbindelse med pumpning af gasser der indeholder partikler og andre aggressive foruredningsmidler der skader lejerne er disse pumper udstyret med en d r igennem hvilken det er n dvendigt at forsyne pumpen med delgasser kv lstof eller helium for at beskytte lejerne se bilaget Technical Information IT VIGTIGT Pumpen m aldrig bruges hvis der er gasser eller tsende dampe der
176. m nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h m rs klettartom ny 20 C 70 C relativ p ratartalom 0 95 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti Egy turbonukle ris szivatty rakt rozhat si ideje 10 h nap a sz ll t s d tum t l IS FIGYELEM Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty t vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Varian v kuumkereskedelmi s szolg ltat si k pviselethez EL K SZ T S TELEP T SRE A Turbo V 2K G t k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz 50 100 HASZN LATI UTAS T S A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Csak azut n vegye le a csatlakoz k v d burkolat t ha a turb szivatty m r r gzitve van a rendszerhez A s lya miatt 35 kg haszn lja a szivatty t rzs be 120 ban becsavart h rom szemcsavart a szivatty nak a csomagb l val kih z s hoz Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag
177. m the Existing Groups list Pubblicazione guidata sul Web QuickTime eal SAP Frontend 4 54 87 900 968 01 E NOTE It is suggested that you maintain the proposed program group so as to facilitate the identification of the program Select continue to go on with the installation The following screen is displayed on the personal com puter monitor Monitorr File Download Setup Select OK to conclude the installation NOTE If during installation the program finds some sys tem files that are out of date you will be prompted to restart the computer In this case proceed to re start the computer and repeat the installation pro cedure Operating Procedure Proceed as follows to correctly use the controller e Power on the system The related LED on the front panel will come on The MoniTorr detects when the pump s maxi mum rotation speed is reached At this point the acquisition and analysis of the data deriving from the pump begins and is signalled by the flashing of the Data Acquisition LED yellow Download Software The File Download program acquires the file from the MoniTorrs connected in the network and stores them on hard disk This is automatically performed by the program when it is launched or at regular intervals depending on the parameters set Functionality As soon as it is activated file download estab lishes a connection with the MoniTorrs on the net work and updates the data that
178. ma nincs csatlakoztatva a v kuumkamr hoz vagy nincs kiiktatva Ne rintse meg a turb szivatty t vagy annak tartoz kait a melegitesi folyamat k zben Magas h m rs klet g st okozhat US FIGYELEM Ker lje a szivatty teset r z s t vagy durva mozgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leveg t vagy k z mb s g zt a szivatty szell ztet s hez A szell z porton l v nyom snak 1 barn l kisebbnek kell lennie a l gk ri nyom s f l tt A csap gyakra szennyez vagy r szecsk ket tartalmaz g zok szivatty z s hoz ezek a szivatty k fel vannak szerelve egy olyan k l nleges porttal amelyen kereszt l a csap gyak v delme rdek ben a szivatty hoz k z mb s g zt Nitrog n vagy H lium kell ramoltatni l sd Technical Information f ggel k US FIGYELEM A szivatty t soha ne haszn ljuk olyan korrod l g z vagy g z jelenl t ben haszn lni amely k ros thatja a szivatty belsej ben l v anyagokat A mv Amikor a szivatty t m rgez gy l kony vagy radioaktiv g zok szivatty z s ra haszn lja k rem k vesse az egyes g zok rtalmatlan t s hoz sz ks ges elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben A szivatty t No Ar s k nnyebb g zok nagyteljes tm ny szivatty z s hoz tervezt k Ha az Ar n l nehezebb g zokat kell szivatty znia k rem inform ci
179. maa tai jalokaasua joissa ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 1 baaria yli atmosf risen paineen Pumput on varustettu laakereille hiukkasia tai niit saastuttavia aineita sis lt vien aggressiivisten kaasujen pumppausta varten aukolla jonka l pi pumppuun kuljetetaan jalokaasuja Typpi tai Helium laakereiden suojaamiseksi katso Technical Information liite IS HUOMIO l k yt pumppua sy vytt vien kaasujen tai h yryjen l heisyydess ne saattavat vahingoittaa pumpun sis materiaaleja A VAARA Kun pumppua k ytet n myrkyllisten radioaktiivisten kaasujen pumppaamiseen jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell Pumppu on suunniteltu kuljettamaan suuria m ri typpe argonia ja kevyit kaasuja Jos joudut pumppaamaan argonia painavampia kaasuja pyyd lis tietoja Varianin teknisest palvelusta paloherkkien tai noudattakaa Turbo V 2K G pumpun k ytt J rjestelm n k ynnistys Tarkista ennen j rjestelm n k ynnistyst ett l O liitin on poistettu Jos j rjestelm on kytketty I O et laitteeseen varmista ett STOP signaali on p ll ks Technical Information liitteen kappale 91 REMOTE 1 0 K ynnist j rjestelm seuraavasti 1 Poista jos asennettu I O liitin 2 Kytke s hk p lle 3 Vie tyhj kammion paine arvoon 0 1 mbar
180. mpe f r Hoch und H chstvakuum anwendungen integriert mit einem entsprechenden Controller besteht Das System kann viele Arten von Gas oder gasf rmi gen Gemischen pumpen ist jedoch nicht f r das Pumpen von Fl ssigkeiten oder Festk rperpartikeln geeignet Die Pumpwirkung wird durch eine hochtourige Turbine max 33000 1 min erreicht die von einem Hochleistungs drehstrommotor angetrieben wird Modell Turbo V 2K G enth lt keinerlei umweltsch dliche Substanzen und eignet sich des halb auch f r Anwendungen die ein sauberes Vakuum erfor dern Es verf gt des Weiteren ber Hilfskonnektoren ber die es von einem Host Rechner mit seriellem Anschluss RS232 oder RS485 ferngesteuert werden kann In den folgenden Abschnitten sind alle erforderlichen Informati onen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben A EE Die Gefahrenhinweise lenken die Aufmerksamkeit des Bedie ners auf einen Vorgang oder eine bestimmte Ausf hrungswei se die bei unkorrekter Ausf hrung schwere Verletzungen her vorrufen k nnten IS ACHTUNG Die Warnhinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten HINWEIS Die Hinweise enthalten wichtige Informationen die aus dem Text
181. n iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skontaktoval s dod vate om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja N Y EN 87 900 968 01 F NAVODILA ZA UPORABO Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija NIOPOZORILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 66 100 87 900 968 01 F SPLO NE INFORMACIJE Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Varian Varian ni odgovoren za dogodke ki bi nastali zaradi neupo tevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi Turbo V 2K G je integriran sistem s turbomolekularno rpalko za viso
182. n operacyjny systemu za wiecona na state pompa znajduje si w stanie normalnych obrot w miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie Waiting for interlock miga szybko okres 200 ms stan b du Jak zatrzyma Turbo V 2K G Aby zatrzyma pompe mo na zastosowa jeden z niniejszych sposob w 4 wyjmujac konektor I O na wyposazeniu 5 przesytajac sygna STOPU zdalnie poprzez konektor I O patrz paragraf J1 ZDALNE I O w dodatku Technical Information 6 przesy aj c sygna STOPU zdalnie poprzez interfejs szeregowy RS 232 485 patrz paragraf RS 232 485 Opis Komunikacji w dodatku Technical Information Zatrzymanie Alarmowe Aby zatrzyma natychmiast w stanie alarmowym zesp Turbo V 2K G nale y od czy kabel od zasilania W zwi zku z tym nale y pami ta e ta operacja nie tylko zupe nie odcina zasilanie pompy ale wy cza r wnie wszystkie inne funkcje sterownika na przyk ad nadzorowanie kontrolowanych funkcji Purge i Vent oraz mo liwo komunikowania sie z uk adem do kt rego pompa zosta a wbudowana za po rednictwem 05 linii szeregowej lub Profibus Ponadto ta operacja nie mo e zagwarantowa natychmiastowego zatrzymania wirnika kt rego pr dko b dzie si zmniejsza a w zale no ci od stopnia pr ni w uk adzie KONSERWACJA Zesp Turbo V 2K G nie wymaga adnej konserwacji
183. n Kople derfor anordningen til en hovedledning som tilfredsstiller kravene for denne klassen Bruk kontaktene som f lger med for garantere IP54 beskyttelsen Turbo V 2K G er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som m koples til de ytre str mkretsene slik at ingen deler under spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til Turbo V 2K G har en egnet isolering ogs under forhold med en enkel feil i f lge EN 61010 1 standarden For installasjon av tilleggsutstyr vises det til Technical Information 39 100 BRUKERVEILEDNING BRUK Alle instruksjoner for korrekt bruk finnes i dette avsnittet Les n ye gjennom denne manualen f r systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 80 C Mens pumpen er i funksjon m rotorens temperatur aldri overstige 120 C Brukeren m passe p innstille riktig driftsmodus i henhold til gassen som pumpes 1 for nitrogen og lettere gasser 0 for argon standardmodus For ytterligere detaljer se vedlegget Technical Information AN ADVARSEL Ikke start pumpen hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen Ikke beror turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader IS FORSIKTIG Unng st t svingninger eller plutselige bevegelser av t
184. n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning 29 100 87 900 968 01 F GENEREL INFORMATION Dette udstyr er beregnet til professionel anvendelse Brugeren bor lese denne brugsanvisning og anden yderligere information fra Varian f r udstyret anvendes Varian tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler Turbo V 2K G systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed Systemet er egnet til pumpning af mange forskellige former for gas eller gasholdige blandinger men kan ikke benyttes til pumpning af v sker eller faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine 33000 omdr min Turbinen drives af en elektrisk trefasemotor med h j effekt Turbo V 2K G er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum Endvidere er systemet udstyret med kontakter som g r det muligt at fjernstyre systemet ved hj lp af en host computer der er tilsluttet med seriel linie RS232 eller RS485 De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeho
185. n 122 0 Vent Close def win 122 1 Vent Open win 145 0 Purge Close def win 145 1 Purge Open Stop Command Fail gt Vent and Purge lt Closed Power Fail gt Purge and Vent lt Closed Stop Ramp Normal AutoTun Stop Breaking Start Command If win 147 0 J2 Serial This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the Turbo V K G 81 100 SIGNAL NAME 1 RESERVED TX RS232 RX RS232 SPARE GND A RS485 SPARE B RS485 O O NO a AJOJN RESERVED A serial communication kit with a serial cable and the Navigation software is available optional SERIAL CABLE INSTALLATION In order to maintain the IP 54 protection level please use a certified IP 54 connector or the one provided by Varian 87 900 968 01 E RS 232 RS 485 COMMUNICATION DESCRIPTION Both the RS 232 and the RS 485 interfaces are available on the connector P2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navi gator software Communication Format 8 data bit e no parity 1 stop bit baud rate 600 1200 2400 4800 9600 pro
186. n er standset og til temperaturen p pumpens overflade er under 50 C tilf lde af skader p systemet kontaktes et Varian reparationsv rksted eller Varian advanced exchange service der udskifter systemet med et repareret system BEM RK Inden systemet sendes til reparationsv rkstedet eller Varian advanced axchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af systemet skal foreg i overensstemmelse med det p g ldende lands s rlige love BORTSKAFFELSE Betydningen af WEEE logoet p m rkaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun g ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverand ren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter n je at have kontrolleret betingelserne i salgskontrakten N Y EN 87 900 968 01 F BRUKSANVISNING S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h
187. n the MoniTorr x ee Haar a 86 Operatio za i e 86 Maintenance uuu ca i VN Va 86 MoniTorr Installation on the Network and on the Main PC 86 MoniTorr Connectivity Kit Installation Procedure 87 Interconnections lesionada 88 Network Connector RS 485 nn cr naar nn cc het 88 Installing the File Download Software lt enm 88 Operating Procedure wisi shah ANI Nr 89 Download Software sci sea yess A neces oba dit 89 Eunctionalityz ca tina lalla ch ended waters lea 89 Modifying the Parameters a naan a kaan aa kaa KRKA VRAK a RAR NNK 89 Archive Saving Method Procedure eene meer 90 iei eau 90 General et dte tetti pee E A AND SAE AR 90 Mechanical m a 90 Installation uses n ka bee tuat diete edda goes 90 Gonflg ratior x adi petet ec dete d ete m esu 91 Indicators insnet eenen nt e ER n ty e Rt eta Namnet 91 Software operation and state machine ss 91 Diagnostic manageme seara r AE 97 Diagnostic BUNGE ee EE 97 INLET SCREEN INSTALLATION ke e rodent tiet lee n n bb i b Me eg eds 98 WATER COOLING CONNECTION 98 PUMP PURGING AND VENTING i 99 Purge and Vent Installation ss 99 Pump used with corrosive gases i 99 HIGH VACUUM FLANGE CONNECTION 100 FORE VACUUM PUMP CONNECTION 100 PUMP USED IN PRESENCE OF MAGNETIC FIELDS
188. natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki zroznicowanej Dlatego tez poleca sie uzytkownikowi po uprzedniej weryfikacji terminu i warunkow zawartych w kontrakcie sprzedazy nawiazac kontakt z dostawca lub sprzedawca urzadzenia w celu uruchomienia procesu zbiorki i przerobu Y 57 100 INSTRUKCJA UZYTKOWANIA 87 900 968 01 F P RU KA K POU IT Bezpe nostn n vod pro Turbomolekul rn v v vy Turbomolekul rn v v vy jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie ZN V STRAHA Pokyny k instalaci uveden v tomto n vodu mus b t p sn dodr ov ny za elem prevence zran n obsluhy 58 100 87 900 968 01 F V EOBECN INFORMACE Toto za zen je ur eno pro odborn ky U ivatel by si m l p ed pou it m za zen p e st tento n vod a v echny dal informace dodan firmou Varian Firma Varian neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do za zen nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v p slu
189. ncia total ou parcial das instru es pelo uso indevido por parte de pessoas n o treinadas por opera es n o autorizadas ou pelo uso contr rio s normas nacionais espec ficas O Turbo V 2K G um sistema integrado constitu do por uma bomba turbomolecular para aplica es de alto e ultra alto v cuo integrada no relativo controller O sistema est em condi es de bombear muitos tipos de gases ou de compostos gasosos mas n o adequado para aspirar l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade 33000 r p m m x movida por um motor el ctrico trif sico de alto rendimento O Turbo V 2K G totalmente isentos de agentes contaminadores e portanto adequado para aplica es que requerem um v cuo limpo Al m disso est equipado com conectores auxiliares com os quais poss vel comand lo dist ncia atrav s de um computador host ligado com linha s rie RS232 ou RS485 Nos seguintes par grafos est o descritas todas as informa es necess rias para garantir a seguran a do operador durante o uso da aparelhagem Informa es detalhadas s o fornecidas no ap ndice Technical Information Este manual utiliza as seguintes conven es EEE As mensagens de perigo chamam a aten o do operador para um procedimento ou uma pr tica espec fica que se n o efectuada correctamente pode provocar graves les es pessoais IS ATEN
190. niach wystawionych na czynniki atmosferyczne deszcz mr z nieg py y gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dzia ania obowi zkowo nale y przestrzega nast puj ce warunki otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym temperatura powietrza od 5 C do 40 C wzgl dna wilgo 0 95 bez opar W obecno ci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg owego zapoznania si z tematem patrz dodatek Technical Information Turbo V 2K G musi by pod czony do g wnej pompy patrz schemat w Informacjach Technicznych Turbo V 2K G mo e by zainstalowany w jakiejkolwiek pozycji Zamocowa Turbo V 2K G w stabilnej pozycji cz c ko nierz wej ciowy turbopompy do ko nierza sta ego wytrzyma ego na obci enie 10600 Nm wok w asnej osi Turbopompa z ko nierzem wej ciowym ISO musi by zamocowana do komory pr niowej poprzez ruby mocuj ce Niniejsza tabela opisuje ilo potrzebnych rub i na jaki moment zalecany przez firm Varian nale y je dokr ci TYP MOCOWANIA ruba mocuj ca z gwintem M10 MOMENT DOKR CENIA 22 Nm KO NIERZ INFORMACJA Turbo V 2K G nie mo e by zamocowany poprzez w asn podstaw System mo e by zamocowany tylko poprzez w asny ko nierz ISO 250 F Mocowanie musi by zrealizowane zgodnie
191. o spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti con dizioni ambientali e temperatura da 20 C a 70 C e umidit relativa da 0 a 95 non condensante e il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start guando ricevute e messe in funzione per la prima volta e il tempo di immagazzinamento di una pompa turbomoleco lare di 10 mesi dalla data di spedizione ES ATTENZIONE Se per gualsiasi ragione il tempo di immagazzinamento supe riore occorre reinviare la pompa in fabbrica Per ogni informazio ne si prega di contattare il locale rappresentante della Varian PREPARAZIONE PER L INSTALLAZIONE La Turbo V 2K G viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verifi cati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la Turbo V 2K G e a non sotto porla ad urti o vibrazioni 2 100 ISTRUZIONI PER L USO Rimuovere la protezione dei connettori solo dopo che la turbo pompa amp stata fissata al sistema A causa del suo peso 35 kg per estrarre la pompa dall imballo utilizzare i tre golfari a 120 avvitati sul corpo pompa Non disperdere l imballo nell ambiente materiale comple tamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente ES ATTENZIONE On
192. obr zok T to n ru so z str kou pou vajte spolu s vhodne uzemnenou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Syst m je vybaven zelenou stavovou LED di dou Zelen LED di da LD1 na z kladnom elnom paneli Turbo V 2K G base ukazuje frekvenciou blikania sp sob innosti syst mu iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t chto stavov st panie klesanie brzdenie Stop alebo v re ime akanie na spojenie r chle blikanie interval asi 200 ms chybov stav Ako zariadenie zastavi V vevu m ete zastavi jedn m z nasleduj cich sp sobov 1 odpojen m dodan ho I O konektora opa n ho pohlavia 65 100 N VOD K POU ITIU 2 poslan m vzdialen ho sign lu stop cez I O konektor pozri odstavec J1 REMOTE 1 0 dodatku k Technical Information 3 poslan m vzdialen ho sign lu stop cez rozhranie RS 232 485 pozri odstavec Popis komunik cie cez RS232 RS 485 dodatku k Technical Information N dzov zastavenie Ak chcete zariadenie Turbo V 2K G okam ite vypn v stave n dze mus te vytiahnu k bel nap jania zo z suvky zdroja nap jania Je v ak potrebn ma na pam ti e t to oper cia okrom toho e plne vypne nap janie vyraden ho erpadla i v etky ostatn funkcie kontroln ho zariadenia ako napr spr vu riaden ho preplachovan
193. ock must be present to run the pump 1 at start the interlock must be present only at start command B3 Setpoint Logic 104 0 active close NO 1 active open NC B4 Heather Jacket Mode Auto man Specific option not available on standard models B5 Gas Load Type 157 0 Ar 1 No B6 Purge Gas Type 0 N 1 Ar B7 Reserved 114 16 1 BO B1 Reserved B2 B3 Start Stop Interlock Mode 151 Change the logic of Start stop and Interlock inputs Ask to Varian personnel for this option B4 B5 Set Point Type 101 0 frequency 1 current 2 time 3 status normal operation B6 B7 Analog Output Type 111 Set the analog output on remote I O connector proportional to 0 frequency 1 power 93 100 87 900 968 01 E TECHNICAL INFORMATION OUTPUT BUFFER 5 BYTES OFFSET SIZE UNIT WIN BYTE BYTE RES RANGE DESCRIPTION SERIAL 0 1 B7 Start Stop 000 0 Stop 1 Start B6 Low Speed 001 0 off set the target speed In Buff byte 8 at high speed Out Buff byte 1 1 on set the target speed In Buff byte 8 at low speed Out Buff byte 3 B5 Soft Start 100 0 off this function is active at first pump run up and can t be deactivated by the user after first run up activate this function only if the pump has been stopped for at least 3 months 1 on B4 Active Stop 107 0 off after a s
194. of vacuum present in the system MAINTENANCE The Turbo V 2K G does not reguire any maintenance Any work performed on the system must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate electro valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Varian service center who can supply a reconditioned system to replace that broken down NOTE Before returning the system to the constructor for repairs or replacement with a reconditioned unit the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be in serted in the system package before shipping If a system is to be scrapped it must be disposed of in accor dance with the specific national standards DISPOSAL Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Eguipment Directive This symbol valid only in countries of the European Com munity indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supp
195. oit inf rieure a 50 C En cas de panne il est possible de b n ficier du service r pa rations Varian ou du Varian advanced exchange service qui permet d obtenir un syst me r g n r en remplacement du syst me endommag NOTE Avant de renvoyer une pompe au constructeur pour r paration ou advanced exchange service remplir et faire parvenir au bureau Varian de votre r gion la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche de vra tre mise dans l emballage de la pompe avant l exp dition En cas de mise au rebut de la pompe proc der son limina tion conform ment aux r glementations nationales concernant la gestion des d chets MISE AU REBUT Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la direc tive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Com munaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut VA W 87 900 968 01 F INSTRUCCIONES DE USO In
196. oller viene fornito gi connesso meccanicamente ed elettricamente alla pompa La separazione del controller dal corpo pompa pud solo essere effettuata da personale autoriz zato dalla Varian Vacuum Technologies NOTA Quando si avvia la Turbo V 2K G per la prima volta il controller automaticamente avvia il sistema con una procedura speciale che protegge i cuscinetti da possibili danni SOFT START II sistema viene avviato a passi successivi fino alla piena velocit in un tempo che varia da 10 minuti fino ad 1 ora Dopo che il sistema ha raggiunto la piena velocit la procedura di soft start viene disabilitata e gli avvii successivi vengono eseguiti nel modo normale NOTA Per mantenere il livello di protezione IP 54 utilizzare esclusiva mente i connettori forniti con la pompa Per il cavo di alimenta zione utilizzare solo i PN 969 9957 or 969 9958 e fissare il cavo al controller con l apposita staffetta vedere la figura se guente Utilizzare guesto cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i reguisiti delle norme CE Il sistema fornito di un LED verde pilotato da un segnale di stato Il LED verde posto sul pannello frontale della Turbo V 2K G indica con la freguenza del suo lampeggio le condizioni opera tive del sistema acceso fisso la pompa in rotazione normale lampeggiante lentamente periodo di circa 400 ms il
197. on de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants EXT Les messages de danger attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui effectu e de fa on impropre risque de provoquer de graves l sions I ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareillage NOTE Les notes contiennent des renseignements importants extrapo l s du texte STOCKAGE Pour garantir les performances et la fiabilit maximales des pompes turbomol culaires Varian il est indispensable de res pecter les instructions suivantes e Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions am biantes suivantes e temperature de 20 C 70 C e humidit relative de 0 95 non condensante e A la premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start e Le temps de stockage d une pompe turbomol culaire est de 10 mois a compter de la date d exp dition US ATTENTION En cas de d passement du temps de stockage la pompe doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Varian de zone PREPARATION POUR L INSTALLATION Le Turbo V 2K G est
198. onal computer drive and run the Setup program If the personal computer uses with Windows 2000 Professional Operating System copy the three diskettes into a temporary directory in the PC and then run the W2000 bat file from the hard disk 88 100 TECHNICAL INFORMATION In the two cases the following screen will be dis played on the personal computer Monitorr File Download Setup ZA Monitor Flo Download Setup 2 Welcome to the Montorr Setup cannot instal system files or Before proczedn wa recommend shared Hes they are in use lon any you mary be running you Close all the applications and then select OK The following screen will now be displayed on the per sonal computer monitor Monitorr File Download Setup TOTO Meg the man by eny the butan ak w GS thes button to natali Monton Fle Download software to the pechod destination directory Demon Prog amei Tara finden rase 1 Change Directory NOTE It is suggested that you maintain the proposed di rectory and path so as to facilitate the identification of the files generated by the system Click on the figure to continue with the installation At this point the following screen is displayed on the personal computer monitor Monitorr File Download Setup 2 Monitorr File Download Choose Program Group Setup will add items to the group shown in the Program Group box You can enter a new group name or select one fro
199. onformita alla norma ISO 1609 Devono essere usati bulloni in acciaio con una classe di resisten za di almeno 500 N mm FLANGIA ES ATTENZIONE La Turbo V 2K G appartiene alla seconda categoria di installa zione o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria Utilizzare i controconnettori in dotazione per garantire l isola mento IP 54 La Turbo V 2K G ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibi le Assicurarsi che isolamento del dispositivo connesso alla Tur bo V 2K G abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 ISTRUZIONI PER L USO Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 80 C Durante il funzionamento della pompa la temperatura del rotore non deve mai superare i 120 C L operatore deve assicurarsi di predisporre il corretto modo di funzionamento in funzione del gas da pompare 1 per Azoto e gas pi leggeri 0 per Argon modo di default Per ulteriori det tagli vedere l appendice Technical Information N PERICOLO Non far funzionare mai la pompa se
200. ontakt Network MoniTorr Kabelklammer f r att h lla fast str mkabeln HRANE o ON INSTALLATION A KESTER P grund av vikten m ste pumpen flyttas med hj lp av l mpliga lyft och flytthjalpmedel Anv nd lyft glorna som r fastskruvade i de g ngade h len p pumphuset 87 900 968 01 F US VIKTIGT Ta inte bort skruvlocket f rr n turbopumpen ansluts till systemet ES VIKTIGT Ta bort kontakternas skydd endast efter att turbopumpen har satts fast p systemet Installera och anv nd inte pumpen i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift maximitryck 2 bar ver atmosf riskt tryck temperatur fr n 5 C till 40 C se bild i Technical Information relativ luftfuktighet 0 95 utan kondens n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical information f r ytterligare upplysningar Turbo V 2K G m ste anslutas till en huvudpump se schemat i Technical information Turbo V 2K G kan installeras i valfri position F st pumpen i ett stabilt l ge genom att ansluta pumpens intagsfl ns till en fast fl ns som m ste t la ett vridmoment p 10600 Nm kring sin axel Turbopumpen med ISO intagsfl ns m ste f stas vid vakuumkammaren med bultar I f ljande
201. or see para J1 REMOTE I O of annex Technical In formation giving a remote start signal via the serial RS 232 485 interface see para RS232 RS 485 Communication Description of annex Technical Information msn When power is supplied and factory default 15 pin mating con nector is inserted the Turbo V 2K G will start automatically 2 3 4 87 900 968 01 F IS CAUTION The controller is furnished already mechanically and electrically connected to the pump Detaching of the controller from the pump must be carried out by authorized Varian Vacuum Tech nologies personnel only NOTE When you run the Turbo V 2K G for the very first time the con trol unit automatically starts the system with a special proce dure which protects the bearings from possible damages SOFT START The system is launched step by step at full speed in a time variable from 10 mins up to 1 hour After the system has reached the full speed the soft start procedure is disabled and following starts are performed in the normal way NOTE In order to maintain the IP 54 protection level you must use only the connectors provided with the pump Use connectors PN 969 9957 or 969 9958 for the power cable and fix it to the controller by means of the suitable retaining bracket see the following figure Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE requirements
202. or Benutzung des Systems sind alle elektrischen und pneu matischen Anschl sse auszuf hren W hrend der eventuellen Aufheizung der Vakuumkammer darf die Temperatur am Eingangsflansch 80 C nicht berschreiten W hrend des Pumpenbetriebs darf die Temperatur des L ufers niemals 120 C berschreiten Der Bediener hat sich zu vergewissern dass die richtige Be triebsart in Abh ngigkeit von dem zu pumpenden Gas einge stellt ist 1 f r Stickstoff und leichtere Gase 0 f r Argon vor eingestellte Betriebsart F r ausf hrliche Informationen siehe im Anhang Technical Information A Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlu flansch verschlossen ist W hrend des Aufheizens d rfen weder die Pumpe noch even tuelle hei e Zubeh rteile ber hrt werden Es besteht Verbren nungsgefahr IS ACHTUNG W hrend des Betriebs sind StoR und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel f tungsanschlu soll unter 1 bar ber dem atmosph rischen Druck betragen Zum Pumpen von Gasen mit Partikeln oder aggressiven Schadstoffe f r die Lager sind die Pumpen mit einer ffnungs klappe ausgestattet ber die zum Schutz der Lager Inertgas
203. otice d utilisation 4 Sachet d accessoires 5 Connecteur 15 voies REMOTE 1 0 IP 54 avec toutes les connexions n cessaires la mise en marche de la pompe 6 Connecteur 9 voies SERIAL IP 54 utiliser pour la connexion s rielle 7 Connecteur 9 voies Network MoniTorr 8 Bride de retenue du c ble d alimentation mont e INSTALLATION EXT tant donn son poids la pompe doit tre manipul e l aide des quipements de levage et de d placement appropri s Utiliser les anneaux de levage viss s dans les orifices filet s sur le corps de la pompe US ATTENTION Ne jamais retirer la protection boulonn e avant le branchement de la turbo pompe au syst me 87 900 968 01 F US ATTENTION Enlever la protection des connecteurs seulement apr s avoir fix e la turbopompe au syst me Ne pas installer et ou utiliser la pompe dans des milieux expo s s aux agents atmosph riques pluie gel neige la pous si re aux gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique temp rature de 5 C 40 C Cf graphique dans Tech nical Information humidit relative 0 95 non condensante En pr sence de champs magn tigues la pompe doit tre pro t g e l
204. ovat a spl uje po adavky sm rnice EEC 85 399 US VAROV NI Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu POZN MKA V norm ln m prost ed se v v va Turbo V 2K G nem e po kodit P esto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalov na do syst mu T m se zamez zne i t n tohoto za zen Balen Turbo V 2K G obsahuje 1 erpadlo s vestav n m regul torem 2 vstupn s to namontov no 3 tento n vod k pou it na CD ROM 4 bra na s p slu enstv m 5 15 p lov konektor IP 54 pro p ipojen ke konektor REMOTE d lkov vstupy a v stupy s ve ker m propojen m nezbytn m pro spu t n erpadla 6 9 kol kov konektor IP 54 pro p ipojen ke konektoru SERIAL kter se pou ije k s riov mu p ipojen 7 9 kolikowy konektor pro p ipojen za zen Network Moni Torr 8 P chytka pro uchycen nap jec ho kabelu namontov na INSTALACE NT Kv li sv hmotnosti je t eba p i manipulaci s v v vou pou vat odpov daj c n stroje a n ad Pou vejte p slu n rouby s okem na roubovan do otvor v t lese v v vy 87 900 968 01 F IS VAROV N P ed p ipojen m turbomolekularni vyv vy do syst mu nesundavejte roubovaci
205. ow Speed diag status 9 B7 Soft Start diag status B3 Active Stop diag status 10 B 4 Vent Valve diag status 2 Purge diag status 11 B Heater Jacket diag status 2 B3 Stop Speed Reading diag status 12 B High speed setting diag status 5 B3 Low speed setting diag status x 13 B Water Cooling Max Temp diag status Bs Water Cooling Hyst diag status 14 B Set Point Hyst diag status B3 Heater Jacket Setting diag status 15 B7 Flow Meter Threshold diag status B3 Reserved diag status 16 B7 Set Point Value diag status B3 Set Point Delay diag status 17 B Vent Valve Open Delay diag status B3 Vent Open Time diag status 87 900 968 01 E SET MEANING 18 B7 4 Vent Purge Auto Man diag status Bs o Vent Purge Remote Profibus diag status 19 B Interlock Mode diag status Bs o Set Point Logic diag status 20 B7 4 Heater Jacket Mode diag status 2 Bs o Load Gas Type diag status 5 21 B Purge Gas Type diag status S Bs o Start Stop Interlock Mode diag status 5 22 B7 4 Set Point Type diag status X B3 o Analog Out Type 23 B Reserved Bs o Reserved INLET SCREEN INSTALLATION The inlet screen mod 969 9138 prevents the blades of the pump from being damaged by debris greater than 5 2 mm diameter The inlet screen however does reduce the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure It is welded
206. p grunnlag av graden vakuum som finnes i systemet vil stanses yeblikkelig VEDLIKEHOLD Turbo V 2K G er vedlikeholdsfritt Alt arbeid p systemet m kun utf res av autorisert personell AN ADVARSEL F r noe arbeid gj res p systemet m det frakoples tilf rselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Varians reparasjonservice eller med Varians avanserte bytteservice som kan tilby overhalte system til erstatning for det delagte systemet MERK F r systemet returneres til produsenten for reparasjon eller som innbytte for et overhalt system m det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser ELIMINERING Betydelsen av symbolet p logo WEEE p etikettene Symbolet nedenunder som finnes er anvendt i henhold til EC direktiv kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverand ren av anordningen som kan v re
207. palke morate pred prvo uporabo zmerja zagnati mehko e ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja IS POZOR e zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Varian Vacuum PRIPRAVA ZA MONTA O Naprava Turbo V 2K G je dobavljena v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno NAVODILA ZA UPORABO Odstranite za ito spajal samo potem ko je turbo rpalka e priklju ena na sistem Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne stresajte Zaradi te e 35 kg uporabite tri vijake ki jih postavite 120 na ohi je rpalke da jo izvle ete iz embala e Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 IS POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito OPOMBA Normalna izpostavljenost na okolje ne more po kodovati Turbo V 2K G naprave Vendarle je priporo ljivo da je naprava zaprta dokler je ne namestite v sistem S tem boste onemogo ili onesna enje sistema Turbo V 2K G paket vsebuje rpalko z vgrajenim upravljalcem zaslon vg
208. rajen navodila za uporabo na CD ROMu vre ka s pripomo ki 15 pinski priklju ek IP 54 za REMOTE priklju ek z vsemi medpovezavami potrebnimi za zagon rpalke 6 9 pinski priklju ek IP 54 za SERIAL priklju ek ki se uporablja za serijsko povezavo 7 9 pinski priklju ek za Network MoniTorr 8 Nosilec za napetostni kabel vgrajen OPEN MONTAZA A Zaradi te e je treba za rokovanje s rpalko uporabiti primerne naprave za premikanje Uporabite vijake ki se nahajajo v luknjah na telesu rpalke 87 900 968 01 F IS POZOR Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem IS POZOR Odstranite za ito spajal samo potem ko je turbo rpalka e priklju ena na sistem Napravo name ajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere Temperatura zraka od 5 C od 40 C Relativna vla nost 0 95 brez kondenza V prisotnosti magnetnih polje mora rpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical Information Turbo V 2K G morate priklju iti na primarno rpalko glej Technical Information Turbo V 2K G lahko names
209. red uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 80 C Med delovanjem rpalke rotor ne sme prese i temperature 120 C Uporabnik mora nastaviti pravilen na in plina v skladu s plinom ki se rpa 1 za N2 in la je pline 0 za Argon privzeto Za dodatne informacije glejte prilogo Technical Information AN OPOZORILO Turbo rpalke ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline IS POZOR Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manj i od 1 bara nad pritiskom atmosfere Za rpanje plinov ki vsebujejo trdne delce ali agresivnih onesna evalnikov za le aje so te rpalke opremljene s priklju kom ki omogo a stalen pretok inertnih plinov Du ik ali Helij za za ito nosilcev glej prilogo Technical Information IS POZOR rpalke nikoli ne uporabljajte v prisotnosti razjednih plinov ali hlapov ki bi lahko po kodovali inertne materiale rpalke A Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje
210. rian szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett MEGJEGYZ S Miel tt javit sra vagy cserere visszak ldi a rendszert a gy rt hoz az ehhez a g pk nyvh z csatolt Eg szs g s biztons g lapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz A lap egy m solat t sz llit s el tt be kell illeszteni a rendszercsomagba Ha a rendszert le kell selejtezni azt rtalmatlan tani kell a konkret nemzeti szabvanyoknak megfelel en MEGSEMMISITES A cimken jelenl v WEEE logo jelent se Az al bb l that szimb lum az EK WEEE elnevez s ir nyel v vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z sseg orsz gai ban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmisitesre hanem azt egy szelekt v hulladekgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jtesi s megsemmisitesi elj r s beindit sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad 87 900 968 01 F INSTRUKCJA UZYTKOWANIA Wskaz wki dotyczace bezpiecze stwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obstugi posiadaj
211. rrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely fl d 2 pco NM ae ud Sergio PIRAS Vice President and General Manager VARIAN Vacuum Technologies Note Fax or mail the Customer Request for Action see backside page to VARIAN Vacuum Technologies Torino Quality Assurance or to your nearest VARIAN representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO VARIAN VACUUM TECHNOLOGIES TORINO QUALITY ASSURANCE FAX XXXX 011 9979350 ADDRESS VARIAN S p A Via F lli Varian 54 10040 Lein Torino Italy E MAIL marco marzio varianinc com COMPANY FUNCTION ADDRESS TEL NS E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by VARIAN VTT XXXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc AK VARIAN ISTRUZIONI PER LUSO V ona Senna Gti 1 GEBRAUGHSANEEITUNG vaksne
212. rt veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de Turbo V 2K G niet kan vallen en geen stoten of trillingen te verduren krijgt Verwijder de bescherming van de connectors uitsluitend nadat de turbopomp aan het systeem is bevestigd Vanwege het gewicht 35 kg van de pomp moet deze uit de verpakking worden verwijderd met behulp van de drie oogbouten die op 120 op het pomplichaam zijn vastgeschroefd Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 IS ATTENTIE Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacu m in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming OPMERKING De Turbo V 2K G kan niet beschadigd raken door normale blootstelling aan de omgeving Men adviseert echter om de pomp afgesloten en verzegeld te houden tot het moment van installatie in het systeem Dit om contaminatie van het systeem te voorkomen In de verpakking van de Turbo V 2K G zijn aanwezig 1 pomp met ge ntegreerde controller 2 inlet screen gemonteerd 3 deze handleiding op CD ROM 4 zak met accessoires 5 15 pin contraconnector IP 54 voor REMOTE 1 0 connector met alle geintegreerde aansluitingen die benodigd zijn om
213. s ilytt pumppu suljettuna ja sinet ityn kunnes se asennetaan j rjestelm n Siten estet n j rjestelm n likaantuminen Turbo V 2K G pumpun pakkauksessa on pumppu sis nrakennetulla valvojalla sis ntulon laippa asennettu t m ohjekirja CD ROM lla varustepussi 15 tieliitin REMOTE IO 1P54 jossa on pumpun k ynnistykseen tarvittavat sis nrakennetut liit nn t 9 tieliitin SERIAL IP54 jota k ytet n sarjaliit nt n 9 tieliitin Network MoniTorr s hk kaapelin kannatin asennettu OVO OND ASENNUS ZN VAARA Pumppua tulee sen painosta johtuen k sitell asianmukaisilla nosto ja siirtolaitteille K yt erityisi silmukkapultteja jotka on ruuvattu pumpun runkoon tehtyihin kierteitettyihin reikiin 87 900 968 01 F IS Huomio l poista pulteilla kiinnitetty kantta ennen turbopumpun kytkemist j rjestelm n IS Huomio Poista liittimien suoja ainoastaan sen j lkeen kun turbopumppu on kiinnitetty j rjestelm n Ad A Pumppua ei tule asentaa ja tai k ytt ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen jaan tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen l mp tila 5 C 40
214. sferred to a PC by means of the File Download program where are stored and where can be analyzed by Varian s specialised person nel 86 100 TECHNICAL INFORMATION Maintenance The MoniTorr card doesn t reguire any mainte nance Any intervention must be carried out by authorised personnel In case of failure the Varian Repair Service is available or Advanced Exchange Service that pro vides you with a regenerated controller in re placement of the faulty one MoniTorr Installation on the Network and on the Main PC The RS 485 interface allows connecting more than one system in network up to 32 In this way it is possible to download all the spectrums data with a single PC through a protocol converter not yet available which operate as a gateway from 485 to 232 link The controller provides the serial address of the MoniTorr option Every controller must therefore have a different serial address so as to avoid con flicts on the network Every controller has 0 de fault serial address So the user must set the controller s address The following figure shows the connection of the MoniTorr to the RS485 network MoniTorr MoniTorr ana MoniTorr Addr 0 Addr 1 Addr 31 Network J1 RS 232 converter J2 RS 485 Network connection NOTE The protocol converter is not strictly needed for MoniTorr operation It is also possible to use the standard RS232 to RS485 converter and the stan dard optica
215. si stema in stato di rampa o di frenata o di Stop o di Wai ting for interlock lampeggiante velocemente periodo di circa 200 ms con dizione di errore Come arrestare la Turbo V 2K G Per arrestare la pompa si pu usare uno dei seguenti metodi 1 togliendo il controconnettore di I O in dotazione 2 inviando un segnale di STOP da remoto tramite il connet tore I O vedere il paragrafo J1 REMOTE I O nell ap pendice Technical Information 4 100 ISTRUZIONI PER L USO 3 inviando un segnale di STOP da remoto tramite l interfac cia seriale RS 232 485 vedere il paragrafo RS 232 485 Communication Description nell appendice Technical In formation Arresto di Emergenza Per arrestare immediatamente in condizioni di emergenza la Turbo V 2K G occorre staccare il cavo di alimentazione dall a limentazione Occorre per tenere conto che questa operazione oltre a disabilitare completamente l alimentazione della pompa disabilita anche tutte le altre funzionalit del controller come ad esempio la gestione del Purge e del Vent Controllato e la capa cit di comunicare con il sistema in cui la pompa amp stata inte grata via I Os Seriale o Profibus Inoltre questa operazione non pu garantire l arresto immedia to del rotore la cui velocit di rotazione diminuir in funzione del grado di vuoto presente nel sistema MANUTENZIONE La Turbo V 2K G non richiede alcuna manutenzione Qualsiasi intervento
216. sign l pre spustenie v vevy Turbo V 2K G jedn m z nasledovn ch sp sobov a pripojen m dodan ho protikusu I O konektora b poslan m vzdialen ho sign lu spustenia cez I O konektor pozri odstavec J1 REMOTE 1 0 dodatku k Technical Information c poslan m vzdialen ho sign lu spustenia cez rozhranie RS 232 485 pozri odstavec Popis komunik cie cez RS232 RS 485 dodatku k Technical Information 87 900 968 01 F N VAROVANIE Ak funguje nap janie a je pripojeny prislusny v chodz 15 kol kov konektor zariadenie Turbo V 2K G sa spust automaticky ES UPOZORNENIE Kontroln modul sa dod va mechanicky aj elektricky pripojen k v veve Odpojenie kontroln ho modulu od v vevy treba zveri autorizovan m servisn m technikom firmy Varian Vacuum Technologies POZN MKA Pri prvom spusten v vevy Turbo V 2K G kontroln modul automaticky na tartuje syst m zvl tnym postupom ktor chr ni lo isk syst mu pred po koden m SOFT START Syst m sa dosiahne pln r chlos postupne v asovom intervale od 10 min t do jednej hodiny Ke syst m dosiahol pln r chlos re im soft tartu je zablokovan a al ie spustenia prebiehaj norm lnym sp sobom POZN MKA Pre z skanie rovne ochrany IP 54 pou ite konektory dodan s v vevou Pou ite konektory PN 969 9957 alebo 969 9958 pre nap jaciu n ru a pripevnite ich ku kontroln mu modulu vhodn mi svorkami pozri nasleduj ci
217. steresis Set the hysteresis on set point output see set point out paragraph 105 Heather Jacket Temperature Setting Specific option not available on standard models 113 Sccm Flowmeter Threshold Specific option not available on standard models 5 2 Reserved Hz mA s Setpoint Value Set the threshold for the set point out Setpoint Mask Time Set the time during the controller does not drive the set point out 11 2 Vent Valve Opening Delay Set the delay time between the stop command and vent opening Valid only in purge vent auto mode Parameter Buffer byte 15 B1 0 default 15 0 infinite the valve will never open 13 0 2 s Vent Valve Open Time Set how long the vent will remain open then both purge and vent will be closed Valid only in purge vent auto mode Parameter Buffer byte 15 B1 0 0 infinite the valve remain open till a start command 147 92 100 87 900 968 01 E TECHNICAL INFORMATION OFFSET SIZE UNIT WIN BYTE BYTE RES RANGE DESCRIRTIOM SERIAL 15 1 Bit Filed BO Vent amp Purge Auto Man 125 0 Auto the controller drives purge and vent valves 1 Manual see Par Buff byte 15 B2 B1 Vent amp Purge Remote Profibus 146 0 Serial or Profibus see Out Buff byte 0 B3 and B2 1 Remote the valves are driven by the inputs on remote I O connector B2 Interlock Type 110 0 continuos the interl
218. suyhdisteit mutta se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 33000 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori Turbo V 2K G j rjestelm ss ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin Lis ksi pumpussa on apuliittimet jotka mahdollistavat sen kauko ohjauksen is nt tietokoneella joka on kytketty siihen sarjakaapelilla RS232 tai RS485 Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information T m k sikirja k ytt seuraavanlaisia merkint j VAARA Vaara merkit saavat k ytt j n kiinnitt m n huomion erityiseen k ytt tai toimintatapaan jonka v r nlainen suoritus voi johtaa vakaviin henkil vaurioihin IS Huomio Huomio merkit varoittavat toiminnoista joiden laiminly nti voi johtaa laitteen vahingoittumiseen HUOM Huomautukset sis lt v t t rke tekstiss k sitelty tietoa VARASTOINTI Noudata seuraavia ohjeita jotta Varian turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C su
219. t 0x7D or address not stable during power on Blink slow Gateway operating properly Software operation and state machine From the software point of view the interface can be seen as two devices one for ProfiBus and the other for the internal link linked together 91 100 TECHNICAL INFORMATION Each device has its own state machine to manage the device operation Profibus link state machine PROFIBUS STATE MACHINE Status Meaning POWER ON Interface set up WAIT PRM Wait for parameterisation from the master WAIT CFG Wait for configuration from the master DATA EX Regular data exchange Internal link state machine INTERNAL LINK STATE MACHINE Status Meaning POWER ON Interface set up SRC ADDR Search for the controller serial address IDENTIFY Identify controller model and protocol DATA EX Regular data exchange 87 900 968 01 E The two machines continuously share I O data with the relative bus and interact each other only in following conditions e ProfiBus Data Exchange is suspended static diagnosis activated if the internal serial link in not established e Internal serial link Data Exchange is sus pended only for output data if the ProfiBus State machine is not in Data Exchange mode As a general rule unrecoverable communication errors make each machine to jump to the state immediately following the power on state
220. tamb m todas as outras func es do controller como por exemplo a gest o do Purge e do Vent Controlado e a capacidade de comunicar se com o sistema no qual a bomba foi integrada via I Os Serial ou Profibus Al m disso esta operac o n o pode garantir a paragem imediata do rotor cuja velocidade de rotac o diminuir em func o do grau de v cuo presente no sistema MANUTEN O O Turbo V 2K G n o requer qualquer manuten o Todas as opera es devem ser efectuadas por pessoal autorizado A EEE Antes de executar qualquer opera o no sistema deslig lo da alimenta o introduzir ar na bomba abrindo a v lvula espec fica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Varian ou do Varian advanced exchange service que permite obter um sistema regenerado que substitua a bomba com defeito NOTA Antes de reenviar ao fabricante um sistema para as repara es ou o advanced exchange service indispens vel preencher e enviar ao escrit rio de vendas local a ficha Seguran a e Sa de anexa ao presente manual de instru es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedi o Caso uma bomba deva ser destru da proceder sua elimina o respeitando as normas nacionais espec ficas 87 900 968 01 F INSTRUC ES PARA O USO ELIMINAC
221. the motor in high vacuum opera tion no particular problem should be expected However if the effect is greater than the case should be carefully reviewed by Varian s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and ap plied to the rotor ORDERABLE PARTS DESCRIPTION PART NUMBER Turbo V 2K G system with Monitorr op 969 887 1 tion Turbo 2K G with ProfiBus and MoniTorr 969 8873 options Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and T Plus Software 969 9883 Protocol Converter RS 232 lt gt RS 485 969 9258 wire Inlet screen ISO 250 with center ring vi 969 9138 ton Water cooling kit for 6x8 IDxOD flexible 969 9348 tube plastic model 969 8960 969 8850 969 9260 IP 54 Accessory kit Type 1 Turbo V Remote Panel MoniTorr Connectivity kit Water cooling kit for 3 8 in ID flexible 969 9338 tube metallic model 87 900 968 01 E a gt lt ar Request for Return 9001 VARIAN REGISTERED 1 A Return Authorization Number RA WILL NOT be issued until this Request for Return is completely filled out signed and returned to Varian Customer Service 2 Return shipments shall be made in compliance with local and international Shipping Regulations IATA DOT UN 3 The customer is expected to take the following actions to ensure the Safety of workers at Varian a Drain any oils or ot
222. ting verbonden met de Turbo V 2K G goed ge soleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn GEBRUIK In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Breng alle elektrische en pneumatische aansluitingen tot stand alvorens het systeem te gebruiken Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 80 C bedragen Tijdens de werking van de pomp mag de temperatuur van de rotor nooit 120 C overschrijden De gebruiker moet controleren of de correcte bedrijfswijze is ingesteld afhankelijk van het te pompen gas 1 voor stikstof en lichtere gassen 0 voor Argon default Voor meer details wordt verwezen naar de bijlage Technical Information A GEVAAR Laat de pomp nooit draaien als de inlaatflens niet op de vacu mkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken US ATTENTIE Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 1 bar
223. tite v poljuben polo aj Turbo V 2K G namestite v stabilem polo aj tako da pove ete vhodno prirobnico turbo rpalke na pritrjeno tevno prirobnico ki lahko prenese navor 10600 Nm okoli svoje osi Turbo rpaklo z dovodno ISO prirobnico je treba fiksirati na vakuumsko le i e s pomo jo primerne Varian strojne opreme Spodnja tabela prikazuje tevilo potrebnih vijakov in pripadajo i navor NAPRAVA ZA PRIROBNICA PRITRJEVANJE N NAVOR ISO 250 F M10 vijaki 12 22Nm OPOMBA Naprave Turbo V 2K G ni mo pritrditi s svojo osnovo Sistem lahko pritrdite samo preko ISO 250F prirobnice Pritrjevanje morate izvesi v skladu z ISO 1609 normo Uporabiti morate jeklene vijaki z najmanj o mo jo 500 N mm IS POZOR Po direktivi EN 61010 1 spada Turbo V 2K G v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo Naprava Turbo V 2K G ima vhodne izhodne in serijske priklju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Za vzdr evanje IP 54 za itnega nivoja uporabite prilo ene priklju ke Prepri ajte se da je izolacija naprave priklju ene na Turbo V 2K G primerna tudi v primerno ene napake kar je opisano v direktivi EN 61010 1 Za namestitev opcijski dodatkov glej Technical Information 68 100 NAVODILA ZA UPORABO UPORABA Ta odstavek opisuje osnovne postopke za uporabo P
224. top command the controller stop driving the motor the pump will decrease its speed by friction with gas load 1 on after a stop command the controller will brake the pump using the motor activate this function only if you don t use the vent valve and for few cycles at week B3 Vent Valve On Off 122 0 close 1 open Valid only if in Parameter buffer Byte 15 B1 1 and Byte 15 B2 0 B2 Purge Valve On Off 145 0 close 1 open Valid only if in Parameter buffer Byte 15 B1 1 and Byte 15 B2 0 B1 Heather Jacket Enable 112 Specific option not available on standard models BO Stop Speed Reading 167 0 no after a stop command the user can t know the real pump speed 1 yes after a stop command the user can know the real rotor speed see In Buff Byte Offset 6 this function is available for the latest controllers otherwise will be ig nored 1 2 Hz 475 555 High Speed Value 120 Set the high rotational speed default 555 3 2 Hz 475 555 Low Speed Value 117 Set the low rotational speed default 475 94 100 87 900 968 01 E TECHNICAL INFORMATION INPUT BUFFER 15 WORDS OFFSET SIZE UNIT WIN BYTE BYTE RES RANGE DESCRIPTION SERIAL 0 2 mA 0 10000 Current 200 Motor current consumption 2 2 W 0 500 Power 201 Motor power absorption 4 2 W 0 400 Power Limit Applied 155 Maximum allowable power 6 2 Hz 0 55
225. tteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan p st k siksi Varmista ett Turbo V 2K G laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla Ks Technical Information liitett lis varusteiden asentamista varten 43 100 K YTT OHJEET K YTT T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 80 C tta Pumpun toiminnan aikana roottorin l mp tila ei saa koskaan olla yli 120 C K ytt j n tulee varmistaa oikea toimintatapa pumpattavan kaasun mukaan 1 typelle ja kevyille kaasuille 0 argonille oletustapa Ks lis tietoja Technical Information liitteest VAARA lk k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia IS HUOMIO V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n il
226. uje V v vu m ete zastavit n kter m z n sleduj c ch zp sob 1 odpojte dodan odpov daj c I O konektor 2 p ive te do konektoru I O zastavovaci sign l ze vzd len ho mista viz odstavec J1 REMOTE 1 0 v p loze Technical Information 61 100 P RU KA K POU IT 3 p ive te zastavovaci signal ze vzd len ho m sta prost ednictv m s riov ho rozhran RS 232 485 viz odstavec Popis komunikace RS232 RS 485 v p loze Technical Information Nouzov zastaven Chcete li v v vu Turbo V 2K G v nouzov situaci okam it zastavit je t eba p eru it s ov nap jen Je v ak t eba m t na pam ti e tato operace nejen kompletn vypne nap jen erpadla ale zru i v echny ostatn funkce kontroln ho za zen jako nap spr vu zen ho proplachov n Purge a odvzdu n n Vent zru i schopnost s riov komunikace komunikace prost ednictv m sb rnice Profibus nebo prost ednictv m I Os se syst mem do kter ho bylo erpadlo vestav no Krom toho tato operace nedok e zaru it okam it zastaven rotoru jeho rychlost klesne v z vislosti na stupni vakua kter se nach z v syst mu DR BA Za zen Turbo V 2K G nevy aduje dnou dr bu Ve ker pr ce na tomto za zen mus prov d t opr vn n osoby A MERUN Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v
227. ul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer sokfajta t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 33000 fordulat perc biztos tja A Turbo V 2K G szivatty szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra Fel van szerelve seg dcsatlakoz kkal amelyeket t voli helyr l kell ir ny tani soros vonalon RS232 vagy RS485 kereszt l csatlakoztatott gazdag p seg ts g vel A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben Ez a k zik nyv a k vetkez szabv nyos protokollt haszn lja A mv A figyelmeztet zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfelel en s lyos s r l shez vezethet IS FIGYELEM A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem k vetnek a berendez s k rosod s t okozhatj k MEGJEGYZ S A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak T ROL S A Varian Turbomolecular szivatty k maxim lis teljes t
228. umeric Source Controller window Destination PC The command execu ACK 1 byte 0x6 tion has been success fully completed 02 80 06 03 38 35 The command execu NASK 1 byte 0x15 tion has been failed STX ADDR ACK ETX CRC Unknown The specified window 1 byte 0x32 in the command is not Window a valid window The data type specified in the command Logic Command SOFT START ON Data Type Numeric or Alphanu Error 1 byte 0x33 meric is not pes SO e Destination Controller with the specified Win dow The value expressed 02 80 31 30 30 31 31 03 42 32 0x34 during a write com Out of Range 1 byte mand is out of the STX IADDR WINDOW WR ON ETX CRC range value of the specified window The specified window Source Controller is Read Only or tempo i a rarily disabled for ex Destination PC ample you can t write the Soft Start when the 02 80 06 03 38 35 Pump is running Win Disabled 1 byte 0x35 STX ADDR ACK ETX CRC NOTE The RS 485 is a 2 wire gnd optional half duplex Source PC Destination Controller Examples 02 80 31 30 30 31 30 03 42 33 Command START STX ADDR WINDOW WR OFF ETX CRC Source PC Destination Controller Source Controller 02 80 30 30 30 31 31 03 42 33 Dest
229. up a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj m okruhom tak aby nebola dostupn iadna elektrick s as Pre z skanie rovne ochrany IP 54 pou ite dodan protikusy konektorov Presved ite sa i zariadenie pripojen k Turbo V 2K G m adekv tnu izol ciu aj pre pr pad samostatnej chyby pod a smernice EN 61010 1 64 100 N VOD K POU ITIU O in tal cia doplnkovej v bavy pozri pr ru ku Technical Information POU ITIE T to as popisuje z kladn sp soby pou itia zariadenia Sk r ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory nesmie prekro i 80 C Po as prev dzky v vevy teplota rotora nesmie prekro i 120 C Pou vate mus zvoli spr vny plynov re im pod a ak plyn sa erp 1 pre Na a ahk plyny 0 pre arg n v chodzie nastavenie Podrobn inform cie sa nach dzaj v dodatku Technical Information N VAROVANIE Nikdy nepou vajte turbov vevu ak vstupn pr ruba nie je pripojen k v kuovej komore alebo nie je zablendovan V priebehu zahrievania sa nikdy nedotykajte turbovyvevy ani iadneho pr slu enstva Vysok teploty m u sp sobi pop leniny IS UPOZORNENIE Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa poSkodit lo is
230. urbinpumpen n r den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 1 bar over atmosf risk trykk Ved pumping av gasser som inneholder partikler eller stoffer som er forurensende for lagrene er disse pumpene utstyrt med en spesiell d r som det er n dvendig bruke for mate pumpen med en str mning av uvirksom gass nitrogen eller helium for beskytte lagrene se vedlegget Technical Information US FORSIKTIG Bruk aldri pumpen med etsende gasser eller damp som kan skade materiale inne i pumpen AN ADVARSEL N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene folges Pumpen skal ikke brukes i eksplosjonsfarlige miljger Pumpen er utviklet for pumpe store mengder med nitrogen argon og lettere gasser Hvis det er ngdvendig pumpe gasser som er tyngre enn argon vennligst kontakt Varian s tekniske service for informasjon Bruk av Turbo V 2K G Hvordan starte opp systemet F r systemet startes kontroller at I O kontakten er fjernet Hvis systemet er koplet til en fjernstyrt O anordning forsikre deg om at stoppsignalet er aktivert se avsnittet J1 REMOTE 1 0 i vedlegget Technical Information G frem p f lgende m te for starte systemet 1 Fjern I O kontakten hvis finnes 2 Kople til str mmen
231. v explosiva gaser Pumpen r konstruerad f r att pumpa stora m ngder kv ve argon och l ttare gaser Om du skulle beh va pumpa gaser som r tyngre n argon kontakta Varians tekniska service f r information Anv ndning av Turbo V 2K G Hur du startar systemet Kontrollera innan du startar systemet att l O kontakten har tagits bort Om systemet r anslutet till en fj rrstyrd l O enhet m ste du kontrollera att stoppsignalen r aktiv se avsnitt J1 REMOTE I O i bilagan Technical Information Starta systemet p f ljande s tt 1 Ta bort I O kontakten om s dan finns 2 Anslut pumpen till eln tet 3 Pumpa ned trycket i vakuumkammaren till 0 1 mbar 4 Skicka startsignal till Turbo V 2K G p n got av f ljande s tt a Anslut den medlevererade l O kontakten b Skicka en fj rrstyrd startsignal via I O kontakten se avsnitt J1 REMOTE 1 0 i bilagan Technical Information c Skicka en fj rrstyrd startsignal via det seriella gr nssnittet RS232 485 se avsnitt RS232 485 Communication Description i bilagan Technical Information 87 900 968 01 F ZA HETEN N r str mmen r p slagen och den 15 poliga kontakten medf ljer vid leveransen r isatt startar Turbo V 2K G automatiskt IS VIKTIGT Styrenheten levereras mekaniskt och elektriskt ansluten till pumpen Fr nkoppling av styrenheten fr n pumpen f r endast g ras av auktoriserad personal fr n Varian Vacuum T
232. v prilogi Technical Information NAVODILA ZA UPORABO Zaustavitev v sili Za zaustavitev naprave Turbo V 2K G v sili morate odstraniti napetost Treba je vsekakor upo tevati dejstvo da ta operacija ne le popolnoma onemogo i napajanje rpalke temve onemogo i tudi vse druge funkcije krmilnika kot so na primer upravljanje nadzorovanega i enja in Izpusta in sposobnost sporo anja s sistemom v katerem je rpalka vgrajena s serijskim ali profibus om 05 Ta operacija tudi ne more zagotoviti hitro zaustavitev rotorja igar hitrost vrtenja bo pojenjala skladno s stopnjo vakuuma v sistemu VZDR EVANJE Turbo V 2K G ne potrebuje vzdr evanja Kakr no koli delo na sistemu mora opraviti avtorizirano osebje AN OPOZORILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Varian servisni center ki vam lahko zamenja pokvarjen sistem z novim OPOMBA Preden odnesete sistem na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je prilo en navodilom in ga poslate lokalni prodajni pisarni Pred po il janjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uni iti v skladu z dolo enimi nacionalnimi stan dardi ODLAGANJE OPADKOV Pomen znamk
233. variable CRC Pa ram PA 502 Reserved to Varian service 503 R W N RS 485 ad 0 to 31 dress default 0 Serial type 0 RS 232 select 1 RS 485 default 0 87 900 968 01 E TOO HIGH LOAD NO CONNECTION PUMP OVERTEMP CONTROLL OVERTEMP POWER FAIL SHORT CIRCUIT OVERVOLTAGE VERIFY LINE SELECT Window N 206 Bit Description MONITORR An integrated MoniTorr card is suitable for the Turbo V 2K G This feature allows the pump s vi bration spectra acquisition and download The necessary hardware is totally integrated into the controller and consists of one PCB card and one accelerometer fixed on the controller s side The MoniTorr card allows to perform programmed maintenance on the tur bopump continuously monitor the turbopump operating conditions identify the wear conditions of one or two bear ings Powering on the MoniTorr At pump s power on the POWER LED comes on and the system proceeds with its self configuration routine Data acquisition and processing will be automatically activated at the moment in which the turbo pump reaches its maximum speed Normal Operation The MoniTorr card is powered from the controller Operation At predefined intervals the Monitorr will also ac quire the data related to the vibration spectrums power and temperature in addition to other data detected by the Turbo controller All the data must be tran
234. ve gases or in explosive environments or those with a high fire risk Dur ing operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure air temperature from 5 C to 40 C relative humidity 0 95 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The Turbo V 2K G must be connected to a primary pump see Technical Information The Turbo V 2K G can be installed in any position Fix the Turbo V 2K G in a stable position connecting the inlet flange of the turbopump to a fixed counter flange capable of withstanding a torque of 10600 Nm around its axis The turbopump with ISO inlet flange must be fixed to the vac uum chamber by means of bolts The following table shows the necessary number of bolts and the relevant fixing torque as recommended by Varian FIXING FIXING FESNGE DEVICE N TORQUE ISO 250 F M10 bolts 12 22 Nm NOTE The Turbo V 2K G cannot be fixed by means of its base The system can only be fixed through its ISO 250F flange Fixing must be done according to ISO 1609 norm Steel bolts with a strength class at least of 500 N mm must be used ES CAUTION The Turbo V 2K G belongs to the second installation or over voltage category as per directive EN 61010 1 Connect the device to a mains line that sat
235. viko IS VAROVANI Odejm te zakryti konektoru a pote co bude turbovyv va p ipevn n k syst mu V v vu neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem teplota vzduchu od 5 C do 40 C relativn vlhkost 0 95 bez sr en V p tomnosti magnetick ch pol se v v va mus chr nit feromagnetick m st n n m Viz podrobn informace v p loze Technical Information V v va Turbo V 2K G se mus p ipojit k prim rn mu erpadlu viz Technical Information V v vu Turbo V 2K G Ize instalovat v libovoln poloze V v vu Turbo V 2K G upevn te v n jak stabiln poloze a p vodn p rubu turbov v vy p ipojte k pevn protip rub kter snese torzn moment 10600 Nm kolem sv osy Turbomolekul rn v v va se vstupn p rubou ISO se mus p ipevnit k vakuov komo e rouby N sleduj c tabulka uv d nezbytn po et roub a p slu n utahovac moment kter doporu uje firma Varian er PRICHYTNE A UTAHOVAC PRIRUBA ZA ZEN POCET MOMENT ISO 250 F rouby M10 12 22 Nm POZN MKA V v vu Turbo V 2K G nelze p ipevnit pomoc jej podstavy Toto z
236. voli stop jel ad sa a B K csatlakoz n kereszt l l sd Technical Information f ggel k J1 REMOTE 1 0 bekezd se 52 100 HASZN LATI UTAS T S 3 t voli stop jel ad sa az RS 232 485 soros interf szen kereszt l l sd Technical Information f ggel k RS 232 485 kommunik ci le r sa V szle ll t s A Turbo V 2K G v szhelyzetben val azonnali le ll t s hoz le kell kapcsolni a t pfesz lts get Mindig figyelni kell arra hogy ez a m velet azonfel l hogy teljesen kikapcsolja a szivatty t pl l s t kikapcsolja a controller minden egy b funkci j t is mint p ld ul a Purge s az Ellen rz tt Vent vez rl st s azt a k pess get hogy kommunik lni lehessen azzal a rendszerrel ahov a szivatty integr lt k I O Seriale vagy Profibus tj n Ezenfel l ez a m velet nem biztos thatja a rotor azonnali le ll s t Ennek forg si sebess ge a rendszerben l v v kuumszint f ggv ny ben fog cs kkenni KARBANTART S A Turbo V 2K G nem ig nyel karbantart st A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie N IGY ZAT A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel elektromos szelep kinyit s val v rjon amig a rotor forgasa le ll s amig a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Va
237. vsakega plina rpalke ne uporabljajte v prisotnosti eksplozivnih plinov rpal ka je narejena za hitro rpanje Na Ar in la jih plinov e elite rpati pline ki so te ji od Ar prosimo da kontaktirate Varian tehni no podporo za ve informacij Uporaba Turbo V 2K G Zagon sistema Preden sistem za enete se prepri ajte da je l O priklju ek izklju en Ce je sistem povezan na oddaljen I O se prepri ajte da je na voljo stop signal glej odstavek J1 REMOTE I O v prilogi Technical Information Za zagon sistema sledite naslednjim korakom 1 izklju ite e je na voljo sistemski I O priklju ek priklju ite napetost iz rpajte vakuumsko posodo do 0 1 mbar 2 3 4 oddajte signal za za etek z enim od naslednjih na inov a Priklju ite prilo en I O priklju ek b Oddajte oddaljeni signal za zagon preko priklju ka glej odstavek J1 REMOTE I O v prilogi Technical Information c Oddajte oddaljeni signal za zagon preko RS 232 485 serijskega vmesnika glej odstavek RS232 RS 485 Opis komunikacij v prilogi Technical Information AN OPOZORILO Ko je dovedena napetost in je vstavljen tovarni ko privzeti 15 pin se Turbo V 2K G samodejno za ene IS POZOR Upravljalec je mehansko in elektronsko povezan na rpalko Odstranjevanje upravljalca iz rpalke mora izvesti samo poo bla eno osebje Varian Vacuum Technologies 87 900 968 01 F OPOMBA Ko prvi za enete Turbo V 2K G
238. wichtes 35 kg die drei um 120 versetz ten senschrauben zu benutzen die am Pumpenkorpus ange schraubt sind Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz US ACHTUNG Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefa t werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden HINWEIS Die Turbo V 2K G kann durch ledigliche Einwirkung von atmo sph rischen Bedingungen nicht besch digt werden Es wird indes empfohlen die Pumpe bis zur Installation am System geschlossen und versiegelt zu halten Auf diese Weise kann der Verunreinigung des Systems vorgebeugt werden Verpackungsinhalt der Turbo V 2K G 1 Pumpe mit integriertem Controller 2 Inlet Screen montiert 3 Betriebsanleitung auf CD ROM 4 Beutel mit Zubeh r 5 Gegenkonnektor mit 15 PINs REMOTE I O IP 54 mit integrierten Anschl ssen f r den Pumpenanlauf 6 Gegenkonnektor mit 9 PINs SERIAL IP 54 f r den se riellen Anschluss 7 Gegenkonnektor mit 9 PINs Network MoniTorr 8 Halteschelle f r das Stromversorgungskabel montiert INSTALLATION A EE Die Pumpe ist aufgrund ihres hohen Gewichtes mit geeigneten Hebe und F rderzeugen zu handhaben Zu diesen Zwecken sind die senschrauben zu benutzen die in die Gewindeboh rungen am Pumpenkorpus eingeschrau
239. y erp vanie zabezpe uje ve mi r chla turb na max 33000 ot ok min tu poh an vysokov konn m 3 f zov m elektrick m motorom Zariadenie Turbo V 2K G neobsahuje iadne kontamina n inidl a preto sa hod pre aplik cie vy aduj ce ist v kuum Zariadenie je vybaven pomocn mi konektormi kv li mo nosti ovl dania zo vzdialen ho miesta pomocou hostite sk ho po ta a pripojen ho cez s riov komunika n linku RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka vpriebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information N vod na pou itie obsahuje tieto tandardn ozna enia N VAROVANIE Varovania maj s stredit pozornost pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie ES UPOZORNENIE Upozornenia ozna uj postupy nedodr anie ktor ch m e sp sobit po kodenie zariadenia POZN MKA Pozn mky upozor uj na d le it inform cie z textu UCHOV VANIE Ak chcete aby turbomolekul rne v vevy zna ky Varian pod vali maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C az 70 C rozsah relat vnej vlhkosti O a 95
240. y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario gue se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 40 C v ase gr fico en el anexo Technical Information humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles El Turbo V 2K G ha de conectarse a una bomba primaria v ase diagrama en Technical Information Turbo V 2K G puede instalarse en cualquier posici n Fijar el Turbo V 2K G en posici n estable conectando la brida de entrada de la turbobomba a una contrabrida fija que puede resistir a un par de 10600 Nm alrededor de su eje La bomba de turbina con brida de entrada ISO debe fijarse por medio de pernos a la c mara de vacio En la siguiente tabla se indican el n mero de pernos necesarios y el par de apriete aconsejado por Varian para fijarlos TIPO DE PAR DE BRIDA MORDAZA m APRIETE ISO 250 F Perno con rosca M10 NOTA La Turbo V 2K G no puede ser fijada por medio de su base En efecto el sistema puede fijarse nicamente mediante su brida ISO 250F La fijaci n debe realizarse de conformidad con lo establecido por la norma ISO 1609 Deben utilizarse pernos de acero cuya clase de resistencia s
241. z norm ISO 1609 Musz by zastosowane ruby mocuj ce ze stali z klas wytrzyma o ci co najmniej 500 N mm 55 100 INSTRUKCJA UZYTKOWANIA US UWAGA Turbo V 2K G nale y do drugiej kategorii instalacii lub nadnapiecia przewidzianej przez norme EN 61010 1 Dlatego te podtaczy urzadzenie do linii zasilania kt ra spetni te wymogi Zastosowa konektory na wyposa eniu aby zagwarantowa odizolowanie IP 54 Turbo V 2K G posiada konektory wejsciowe wyjsciowe i dla komunikacji szeregowej kt re musza by podtaczone do obwod w zewnetrznych w spos b aby Zadna czes znajdujaca sie pod napieciem nie mogta by dostepna Nalezy upewni sie Ze izolacja podtaczonego urzadzenia do Turbo V 2K G posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 Aby zainstalowa opcjonalne akcesoria nale y zapozna sie z Technical Information U YTKOWANIE W tym paragrafie zostaty przedstawione gt wne procedury operacyjne Przed zastosowaniem systemu nale y wykona wszystkie potaczenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pr niowej temperatura na ko nierzu nie mo e przekroczy 80 C Podczas dzia ania pompy temperatura wirnika nie mo e nigdy przekroczy 120 C Operator musi upewni sie Ze urzadzenie jest przygotowane do prawidtowego sposobu dziatania w zaleznosci od gazu do pompowania 1 dla Azotu i lekkich gaz
242. z gaz w Nie stosowa pompy w obecnosci gaz w wybuchowych Pompa jest zaprojektowana aby posiadata wysoki przeptyw Azotu Argonu i innych I ejszych gaz w 87 900 968 01 F W przypadku kiedy zaistnieje potrzeba pompowania cie szych gaz w od Argonu w celu informacji nale y skontaktowa sie z Serwisem Technicznym firmy Varian U ytkowanie Turbo V 2K G Jak uruchomi system Przed uruchomieniem systemu nale y skontrolowa czy konektor I O jest zdj ty Je eli system jest pod czony do zdalnego urz dzenia wej wyj Input Output nale y upewni sie e sygna STOP jest aktywny patrz paragraf J1 ZDALNE I O w dodatku Technical Information Aby uruchomi system nale y wykona nast puj ce czynno ci 1 zdj je li jest obecny konektor I O 2 pod czy zasilanie sieci 3 doprowadzi ci nienie wewn trz komory pr niowej na warto 0 1 mbar 4 dostraczy do Turbo V 2K G sygna STARTU w jeden z nast puj cych sposob w a pod czy konektor I O na wyposa eniu b poda sygna START zdalnie poprzez konektor I O patrz paragraf J4 ZDALNE I O w dodatku Technical Information c poda sygna START zdalnie poprzez interfejs szeregowy RS 232 485 patrz paragraf RS 232 485 Opis Komunikacji w dodatku Technical Information A NIEBEZPIECZE STWO Kiedy zostanie dostarczone zasilanie i konektor 15 czy na wyposa eniu jest pod czony Turbo V 2K G uruchomi

Agilent Technologies Turbo-V 2K-G System 969-8873 Manual

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