Agilent Technologies 6999-04-140A Replacing the VS Series Ion Source Board Field Service Manual
Contents
1. NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ie Agilent Technologies R eplacing the VS lon INSTRUCTION MANUAL Source Board Part No 699904140 Rev A October 2008 Replacing the VS lon Source Board Copyright 2008 Varian Inc Replacing the VS lon Source Board Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve 12 months from date of shipment thereof to Customer and Seller s liability under valid warranty claims is limited at the option of Seller to repair replacement or refund an equitable portion of the purchase price of the Product Items expendable in normal use are not covered by this warranty All warranty replacement or repair of parts shall be limited to equipment malfunctions which in the sole opinion of Seller are due or traceable to defects in original materials or workmanship All obligations of Seller under this warranty shall cease in the event of abuse accident alteration misuse or neglect of the equipment In warranty repaired or replaced parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired or replaced parts After expiration of the applicable warranty period Customer shall be charged at the then current prices for parts labor and transporta2. 49 0 6151 703 353 Fax 49 0 6151 703 302 India Varian India Pvt Ltd 205 A A wing of Galleria 2nd floor Hiranandani Gardens Powai Mumbai 400 076 India Tel 91 22 2570 8595 8597 Fax 91 22 2570 8599 Mobile 91 98 679 55969 04 08 Sales and Service Offices Italy Varian Inc via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Toll Free 00 800 234 234 00 Fax 39 011 997 9350 Japan Varian Technologies Japan Ltd 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Toll Free 0120 655 040 Fax 81 3 5232 1710 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Toll Free 080 222 2452 Fax 82 2 3452 2451 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Taiwan Varian Technologies Asia Ltd 14F 6 No 77 Hsin Tai Wu Road Sec 1 Hsi chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Toll Free 0800 051 342 Fax 886 2 2698 96782 UK amp Ireland Varian Ltd 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 United States Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Toll Free 1 800 882 7426 Fax 1
3. ground strap when working with the electronics boards Plan approximately 30 to 40 minutes to complete this replacement Required Tools Q Extended 5 mm hex wrench longer than 8 longer than a standard size 4 mm hex wrench Small flat screwdriver Medium Phillips screwdriver Sheet of paper 812 by 11 and 4 of scotch tape COvovw vo v Paper Cup or equivalent to hold screws removed during disassembly 1 1 Replacing the VS lon Source Board 1 2 1 Using the extended 5 mm hex wrench remove the four 4 screws holding the leak detector rear cover Figure 1 1 Figure 1 1 Rear Cover Screws NOTE If your VS has a wireless remote bend down the antenna as indicated in Figure 1 2 before removing the rear cover The antenna has a flexible knuckle allowing it to lay flat Antenna Bent ee a Down Oo a ra _ qm o n moe ere e ammm a E m s Apron Figure 1 2 Antenna Bent Down Replacing the VS lon Source Board Release the leak detector lower apron from the detector base by pressing down toward the table on the gray plastic bottom with one hand while pulling the rear cover white apron toward you with the other hand Figure 1 2 on page 1 2 This step allows the rear cover to slip off easier Remove the rear cover by grasping the sides with both hands and wiggling it towards you Removing the rear c
4. of exposure to toxic or hazardous materials present in the product CUSTOMER INFORMATION Company name Contact person Ship method Shipping Collect aeee PO eruere Ree peach tes a a Europe only VAT Reg Number USA only OTaxable MNon taxable Customer ship to Customer bill to PRODUCT IDENTIFICATION Product Description Varian Inc Part Number Varian Inc Serial Number TYPE OF RETURN check appropriate box O Paid Exchange O Paid Repair O Warranty Exchange O Warranty Repair O Loaner Return O Credit O Shipping Error O Evaluation Return O Calibration O Other HEALTH and SAFETY CERTIFICATION VARIAN INC CANNOT ACCEPT ANY BIOLOGICAL HAZARDS RADIOACTIVE MATERIAL ORGANIC METALS OR MERCURY AT ITS FACILITY CHECK ONE OF THE FOLLOWING O I confirm that the above product s has have NOT pumped or been exposed to any toxic or dangerous materials in a quantity harmful for human contact O I declare that the above product s has have pumped or been exposed to the following toxic or dangerous materials in a quantity harmful for human contact Must be filled in Print NaM E esien a Signature na T E e NEE E a Dates jusovcotunstieesiege renee PLEASE FILL IN THE FAILURE REPORT SECTION ON THE NEXT PAGE Do not write below this line Notification RA sesesssseseeeeeesens Customer ID o cececeeceeesceseeseeeeeeeeseneeeens Equipment 2 ceececececeeses
5. 25 Record the following data for both filaments Table 1 1 Filament Data Filament 1 Filament 2 lon Emission Gain Offset Replacing the VS lon Source Board This page intentionally left blank y 9001 REGIS TERED Ne Request for Return VARIAN A lt Health and Safety Certification 1 Return authorization numbers RA will not be issued for any product until this Certificate is completed and returned to a Varian Inc Customer Service Representative 2 Pack goods appropriately and drain all oil from rotary vane and diffusion pumps for exchanges please use the packing material from the replacement unit making sure shipment documentation and package label clearly shows assigned Return Authorization Number RA VVT cannot accept any return without such reference 3 Return product s to the nearest location North and South America Europe and Middle East Asia and ROW Varian Inc Varian S p A Varian Vacuum Technologies 121 Hartwell Ave Via F lli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Fax 781 860 9252 Fax 39 011 997 9350 For a complete list of phone fax numbers see www varianinc com vacuum 4 Ifa product is received at Varian Inc in a contaminated condition the customer is held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian Inc employees occurring as a result
6. 781 860 5437 Other Countries Varian Vacuum Technologies via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 Customer Support and Service North America Tel 1 800 882 7426 toll free vtl technical support varianinc com Europe Tel 00 800 234 234 00 toll free vtl technical support varianinc com Japan Tel 81 3 5232 1253 dedicated line vtj technical support varianinc com Korea Tel 82 2 3452 2452 dedicated line vtk technical support varianinc com Taiwan Tel 0 800 051 342 toll free vtw technical support varianinc com Worldwide Web Site Catalog and On line Orders www varianinc com Representatives in most countries ap AK VARIAN
7. center screw by slightly elevating the electronics assembly from its natural rest position Figure 1 14 a Figure 1 14 Electronics Assembly Center Screw e Gently rocking the lon Source board top to bottom to release multi pin feed through 14 Inspect the main board multi pin connector for any damage or broken pins left behind 15 Line up all the pins and seat them evenly with even pressure 16 Replace the five 5 Phillips screws that hold the lon source board in place 17 Place the electronics subassembly back to its original position and reinstall the 3 mm screws 18 Reconnect the ion source board connections 24 VDC 10 position white connector RJ45 with black cover 19 Remove the paper that was placed over the 24 VDC power supply 20 Reconnect all connections on the display subassembly RJ45 with the green cover 24 VDC power with ground screw lug and the speaker audio connection 21 Reinstall the display sheet metal work subassembly onto the VS chassis and tighten with the 4 mm hex screw Adjust the subassembly so that the Start and Vent buttons properly fit into their cutouts 22 Install the front cover ensuring that the cover does not obstruct the operation of the test and vent buttons 23 Install the rear cover 24 Power on the VS leak detector and verify normal operation by initiating a calibration on filament 1 and then initiating a calibration on filament 2 Replacing the VS lon Source Board
8. cumentation conventions WARNING Warnings indicate a particular procedure or practice which j if not followed correctly could lead to serious injury CAUTION Cautions indicate a particular procedure or practice which if not followed could cause damage to the equipment NOTE Notes contain important information Before operating or servicing equipment read and thoroughly understand all operation maintenance manuals provided by Vacuum Technologies Be aware of the hazards associated with this equipment know how to recognize potentially hazardous conditions and how to avoid them Read carefully and strictly observe all cautions and warnings The consequences of unskilled improper or careless operation of the equipment can be serious In addition consult local state and national agencies regarding specific requirements and regulations Address any safety operation and or maintenance questions to your nearest Vacuum Technologies office Replacing the VS lon Source Board This page intentionally left blank Replacing the VS lon Source Board Replacing the VS lon Source Board This document describes replacement of the lon Source board P N R2120301 with the upgraded version P N R2120501 This version of the board prevents the leak detector from reporting the error message GAIN TOO HIGH due to erroneous data WARNING Always unplug the main power cord from the wall before j servicing the unit CAUTION Always wear a
9. e circumstances giving rise to the claim Before any Products are returned for repair and or adjustment written authorization from Seller or its authorized representative for the return and instructions as to how and where these Products should be returned must be obtained Any Product returned to Seller for examination shall be prepaid via the means of transportation indicated as acceptable by Seller Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or has been returned by non acceptable means of transportation When any Product is returned for examination and inspection or for any other reason Customer shall be responsible for all damage resulting from improper packing or handling and for loss in transit notwithstanding any defect or non conformity in the Product In all cases Seller has the sole responsibility for determining the cause and nature of failure and Seller s determination with regard thereto shall be final If it is found that Seller s Product has been returned without cause and is still serviceable Customer will be notified and the Product returned at its expense in addition a charge for testing and examination may be made on Products so returned 3 1 00 Replacing the VS lon Source Board This page intentionally left blank Replacing the VS lon Source Board Preface Documentation Conventions This manual uses the following do
10. ecseeeceeseeseeaeees August 2003 Page 1 of 2 y 9001 REGIS TERED Request for Return ap gt Health and Safety Certification lt VARIAN 8 FAILURE REPORT Please describe in detail the nature of the malfunction to assist us in performing failure analysis TURBO PUMPS AND TURBOCONTROLLERS Claimed Defect Position Parameters O Does not start O Noise O Vertical Power Rotational Speed O Does not spin freely O Vibrations O Horizontal Current Inlet Pressure O Does not reach full speed O Leak O Upside down Temp 1 Foreline Pressure O Mechanical Contact O Overtemperature O Other Temp 2 Purge flow O Cooling defective O Clogging EAEren Operation Time Describe Failure Turbocontroller Error Message ION PUMPS CONTROLLERS VALVES COMPONENTS O Bad feedthrough O Vacuum leak O Error code on display Oj Poor vacuum O Other O High voltage problem O Main seal leak O Solenoid failure O Damaged sealing area O Bellows leak O Damaged flange A Other cssccednscnieesnccehy Describe failure Describe failure Customer application Customer application LEAK DETECTORS g Cannot calibrate O Vacuum system unstable g Failed to start O No zero high background O Cannot reach test mode O Other eec INSTRUMENTS O Gauge tube not working O Communication failure O Error code on display O Display prob
11. lem O Degas not working A Othe errr Describe failure Describe failure Customer application Customer application ALL OTHER VARIAN INC DIFFUSION PUMPS O Pump doesn t start O Doesn t reach vacuum O Pump seized O Noisy pump describe O Overtemperature O Other aoeeoe O Heater failure O Doesn t reach vacuum g Vacuum leak O Electrical problem O Cooling coil damage OREN en en eE Describe failure Describe failure Customer application August 2003 Customer application Page2of2 Canada Central coordination through Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Toll Free 1 800 882 7426 Fax 1 781 860 5437 China Varian Technologies China Ltd Room 1648 Central Tower South Wing Beijing Junefield Plaza No 10 XuanWuMenWai Street Beijing 100052 P R China Tel 86 10 6310 8550 Toll Free 800 820 6556 Fax 86 10 6310 0141 France Varian s a 7 avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Benelux Varian Vacuum Technologies Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Germany amp Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel
12. nnector from the left and right simultaneously Take care when pulling the connector not to stress break the ground screwed to the metal work next to the lon Source board and Main board Figure 1 9 Figure 1 9 lon Source Board Connection Bottom 1 7 Replacing the VS lon Source Board 1 8 12 Remove the lon source board by removing five 5 Phillips screws Figure 1 10 Figure 1 10 lon Source Board Screws NOTE Take care during the disassembly not to damage or bend the feed trough pins 13 Access the lower left hand screw on the ion source board by partially extracting the electronics sub assembly from the main chassis Do this by a Grasping the assembly either from the bottom Figure 1 11 or by the two metal tabs at the top and wiggling the assembly upwards by about 2 1 2 as the cable harness allows me v Figure 1 11 Electronics Assembly Extraction lt Replacing the VS lon Source Board b Holding the assembly upwards with one hand using a medium Phillips screw driver and removing the lower left hand screw being careful not to drop into t VS Figure 1 12 Figure 1 12 Electronics Assembly Left Hand Screw c Removing the lower right hand top right and top left hand screws with the electronic subassembly resting in its original position Figure 1 13 Figure 1 13 Electronics Assembly Right Hand and Top Screw he 1 9 Replacing the VS lon Source Board d Removing the
13. over of the VS leak detector exposes two of the four screws that hold the front cover in place The screws 5 mm hex are located at the left and right side of the unit as indicated in Figure 1 3 CAUTION Be careful when removing the screws so that neither the washers nor the screws fall into the chassis of the leak detector Figure 1 3 Front Cover Screws Inside the VS 1 3 Replacing the VS lon Source Board 4 Remove the front cover by a Removing the two front 5 mm hex screws b Grasping the cover with both hands at the sides and sliding it towards you vana N p 5 Remove the front panel display assembly and metal work by a Removing the 4 mm hex screw on the sheet metal work as indicated in Figure 1 4 Metal Tabs 1 set per side Screw Figure 1 4 Front Panel Display Assembly Replacing the VS lon Source Board b Grasping with both hands the sides of the lower part of the display metal work and flexing it up to release metal tabs at the bottom Rotating the display assembly at an angle until the lower flap of the metal work is parallel to the ground Holding the display assembly in the lifted position slide the assembly 1 2 to the right to release the hinges and gently pull towards you Ensure that you gently pull as the display has as many as wire connections in the back of the electronics board Disconnect the wireless connection if applicable using a small flat screwdriver to
14. remove the DB9 connector See 1 in Figure 1 5 Disconnect the front Panel Display Assembly from the VS by a Disconnecting the internal digital communication network RJ45 connector green cover See 2 in Figure 1 5 Squeezing the speaker connector top and bottom to remove it See 3 in Figure 1 5 Disconnecting the display 24 VDC power connector by squeezing the left and right sides See 4 in Figure 1 5 Using a small Phillips screwdriver remove the chassis ground See 4 in Figure 1 5 Removing the display assembly from the VS a a Figure 1 5 Front Panel Display Assembly Connections 1 5 Replacing the VS lon Source Board 1 6 8 Fold a piece of 8 2 by 11 paper in half and slide it over the open vents of the 24 VDC power supply Figure 1 6 Use some scotch tape to hold the paper in place during the disassembly Figure 1 6 Paper In Place 9 Remove the two 3 mm hex screws holding the VS electronic assembly in place Figure 1 7 Figure 1 7 Electronic Assembly Screws Replacing the VS lon Source Board 10 Disconnect the white 10 position connector and the RJ45 connector black cover on top of the lon Source board Both connectors have a clip in the center that needs to be squeezed towards the connector to release Figure 1 8 Figure 1 8 lon Source Board Connections Top 11 Disconnect the 24 VDC power on the lower left hand side of the lon Source board by squeezing the co
15. tion When products are used with toxic chemicals or in an atmosphere that is dangerous to the health of humans or is environmentally unsafe it will be the responsibility of the Customer to have the product cleaned by an independent agency skilled and approved in handling and cleaning contaminated materials before the product will be accepted by Varian Inc for repair and or replacement Reasonable care must be used to avoid hazards Seller expressly disclaims responsibility for loss or damage caused by use of its Products other than in accordance with proper operating procedures Except as stated herein Seller makes no warranty express or implied either in fact or by operation of law statutory or otherwise and except as stated herein Seller shall have no liability under any warranty express or implied either in fact or by operation of law statutory or otherwise Statements made by any person including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller or its authorized representative Such claims should include the Product serial number the date of shipment and a full description of th
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Agilent Technologies 6999 04 140A Replacing the VS Series Ion Source Board Field Service Manual