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ANALOG DEVICES ADXRS613 handbook

1. Rev 0 Page 3 of 12 ADXRS613 ABSOLUTE MAXIMUM RATINGS Table 2 Parameter Rating Acceleration Any Axis 0 5 ms Unpowered 2000 g Powered 2000 g Voo AVcc 0 3 V to 6 0V Vratio AVcc Output Short Circuit Duration Indefinite Any Pin to Common Operating Temperature Range 55 C to 125 C Storage Temperature Range 65 C to 150 C Stresses above those listed under the Absolute Maximum Ratings may cause permanent damage to the device This is a stress rating only functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied Exposure to absolute maximum rating conditions for extended periods may affect device reliability Drops onto hard surfaces can cause shocks of gt 2000 g and can exceed the absolute maximum rating of the device Exercise care during handling to avoid damage MN RATE SENSITIVE AXIS The ADXRS613 is a Z axis rate sensing device also called a yaw rate sensing device It produces a positive going output voltage for clockwise rotation about the axis normal to the package top that is clockwise when looking down at the package lid RATE AXIS RATE OUT 1 l Cie Seen A rae l LONGITUDINAL pw 1 7 4 75V Vratio 2 RATE IN 4 0 25V LATERAL AXIS 3 Figure 2 RATEOUT Signal Increases with Clockwise Rotation ESD CAUTION ESD electrostatic discharge sensitive device
2. ADXRS613 ADXRS613 AND SUPPLY RATIOMETRICITY The ADXRS613 RATEOUT and TEMP signals are ratiometric to the Vrario voltage that is the null voltage rate sensitivity and temperature outputs are proportional to Vrario Thus the ADXRS613 is most easily used with a supply ratiometric ADC that results in self cancellation of errors due to minor supply variations There is some small error due to nonratiometric behavior Typical ratiometricity error for null sensitivity self test and temperature output is outlined in Table 4 Note that Vratio must never be greater than AVcc Table 4 Ratiometricity Error for Various Parameters Parameter Vs Vratio 4 75 V Vs Vratio 5 25 V ST1 Mean 0 4 0 3 Sigma 0 6 0 6 ST2 Mean 0 4 0 3 Sigma 0 6 0 6 Null Mean 0 04 0 02 Sigma 0 3 0 2 Sensitivity Mean 0 03 0 1 m Sigma 0 1 N Vreme i f T Mean 0 3 0 5 Sigma 0 1 0 1 NULL ADJUSTMENT The nominal 2 5 V null is for a symmetrical swing range at RATEOUT 1B 2A However a nonsymmetrical output swing may be suitable in some applications Null adjustment is possible by injecting a suitable current to SUMJ 1C 2C Note that supply disturbances may reflect some null instability Digital supply noise should be avoided particularly in this case SELF TEST FUNCTION The ADXRS613 includes a self test feature that actuates each of the sensing structures and associated electronics as if sub
3. 2 5 V Null Drift Over Temperature 40 C to 105 C 250 mV Linear Acceleration Effect Any axis 0 1 sec g NOISE PERFORMANCE Rate Noise Density Ta 25 C 0 04 sec VHz FREQUENCY RESPONSE Bandwidth 1 3000 Hz Sensor Resonant Frequency 14 5 kHz SELF TEST RATIOMETRIC ST1 RATEOUT Response STI Pinifrort Logic 0 tor LSgic 1 500 1000 mV ST2 RATEOUT Response FAN ST2 Pin from Logic 0 to Logic 1 500 1000 mV Logic 1 Input Voltage 5 z 0 8 x V V Logic 0 Input Voltage 0 2 x Vratio V Input Impedance To common 50 kQ TEMPERATURE SENSOR RATIOMETRIC Vour at 25 C Load 100 MO 2 35 2 5 2 65 V Scale Factor 25 C Vratio 5 V 9 1 mV C Load to Vs 25 kQ Load to Common 25 kQ TURN ON TIME Power on to 1 2 sec of final 50 ms OUTPUT DRIVE CAPABILITY Current Drive For rated specifications 200 uA Capacitive Load Drive 1000 pF POWER SUPPLY Operating Voltage Vs 4 75 5 00 5 25 V Vratio Input 3 Vs V Supply Current 3 5 5 0 mA TEMPERATURE RANGE Specified Performance 40 105 C 1 Parameter is linearly ratiometric with Vratno 2 The maximum range possible including output swing range initial offset sensitivity offset drift and sensitivity drift at 5 V supplies 3 From 25 C to 40 C or from 25 C to 105 C 4 Adjusted by external capacitor Cour 5 For a change in temperature from 25 C to 26 C Vremp is ratiometric to Vratno See the Temperature Output and Calibration section for more details
4. Charged devices and circuit boards can discharge without detection Although this product features y patented or proprietary protection circuitry damage may occur on devices subjected to high energy ESD 4 A Therefore proper ESD precautions should be taken to avoid performance degradation or loss of functionality Rev 0 Page 4 of 12 ADXRS613 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS PGND AGND Veatio NC SUMJ RATEOUT 06921 003 NC NO CONNECT Figure 3 Pin Configuration Table 3 Pin Function Descriptions Pin No Mnemonic Description 6D 7D CP5 HV Filter Capacitor 100 nF 6A 7B CP4 Charge Pump Capacitor 22 nF 6C 7C CP3 Charge Pump Capacitor 22 nF 5A 5B CP1 Charg Pump Capacitor 22 ng 4A 4B Cp2 Charge Pump Capacitor 22 nF 3A 3B AVcc Positive Analog Supply i 1B 2A RATEOUT Rate Signal Output 1C 2C SUMJ Output Amplifier Summing Junction 1D 2D NC No Connect 1E 2E Vratio Reference Supply for Ratiometric Output 1F 2G AGND Analog Supply Return 3F 3G TEMP Temperature Voltage Output 4F 4G ST2 Self Test for Sensor 2 5F 5G ST1 Self Test for Sensor 1 6G 7F PGND Charge Pump Supply Return 6E 7E Voo Positive Charge Pump Supply Rev 0 Page 5 of 12 ADXRS613 TYPICAL PERFORMANCE CHARACTERISTICS N gt 1000 for all typical performance plots unless otherwise noted PERCENT OF POPULATION PERCENT OF POPULATION PERCEN
5. 10 of 12 ADXRS613 OUTLINE DIMENSIONS A1 CORNER INDEX AREA 7 65 43 2 1 N A1 BALL PAD INDICATOR TOP VIEW o7 muo00o0 gt 0 80 BSC DETAIL A BALL PITCH 3 80 MAX TE DETAIL A 3 30 MAX F4 4 COPLANARITY 0 60 0 15 SEATING IEE PLANE 0 55 0 50 BALL DIAMETER BALL A1 IDENTIFIER IS GOLD PLATED AND CONNECTED TO THE D A PAD INTERNALLY VIA HOLES Figure 24 32 Lead Ceramic Ball Grid Array CBGA BG 32 3 Dimensions shown in millimeters 060506 A a ORDERING GUIDE FAN i Model Temperature Range Package Description Package Option ADXRS613BBGZ 40 C to 105 C 32 Lead Ceramic Ball Grid Array CBGA BG 32 3 ADXRS613BBGZ RL 40 C to 105 C 32 Lead Ceramic Ball Grid Array CBGA BG 32 3 EVAL ADXRS613Z Evaluation Board 1 Z RoHS Compliant Part Rev 0 Page 11 of 12 ADXRS613 NOTES INN D Nh AL 2008 Analog Devices Inc All rights reserved Trademarks and ANALOG registered trademarks are the property of their respective owners D06921 0 2 08 0 DEVICES www analog com Rev 0 Page 12 of 12
6. ANALOG DEVICES 150 sec Yaw Rate Gyroscope ADXRS613 FEATURES GENERAL DESCRIPTION Complete rate gyroscope on a single chip The ADXRS613 is a complete angular rate sensor gyroscope Z axis yaw rate response High vibration rejection over wide frequency 2000 g powered shock survivability Ratiometric to referenced supply 5 Vsingle supply operation 105 C operation Self test on digital command that uses the Analog Devices Inc surface micromachining process to create a functionally complete and low cost angular rate sensor integrated with all required electronics on one chip The manufacturing technique for this device is the same high volume BiMOS process used for high reliability automotive airbag accelerometers Ultrasmall and light lt 0 15 cc lt 0 5 gram The output signal RATEOUT 1B 2A is a voltage proportional Temperature sensor output to the angular rate about the axis that is normal to the top sur RoHS compliant face of the package The output is ratiometric with respect to a provided reference supply A single external resistor between SUMJ and RATEOUT can be used to lower the scale factor An external capacitor sets the bandwidth Other external capacitors are required for operation APPLICATIONS Inertial measurement units Platform stabilization Robotics A temperature output is provided for compensation techniques Two digital self test inputs electromechanically excite the sensor to test proper ope
7. CP1 through CP4 can be omitted and this supply can be connected to the CP5 pin 6D 7D Note that CP5 should not be grounded when power is applied to the ADXRS613 Although no damage occurs under certain conditions the charge pump may fail to start up after the ground is removed without first removing power from the ADXRS613 1 SETTING BANDWIDTH W External Capacitor Cour is used in combination with the on chip Rour resistor to create a low pass filter to limit the bandwidth of the ADXRS613 rate response The 3 dB frequency set by Rour and Cour is f A 1 our 2xmxR xC OUT OUT and can be well controlled because Rout has been trimmed during manufacturing to be 180 KQ 1 Any external resistor applied between the RATEOUT pin 1B 2A and SUMJ pin 1C 2C results in 180 KO x Rip R OUT 180 kQ Ry yp In general an additional hardware or software filter is added to attenuate high frequency noise arising from demodulation spikes at the gyroscopes 14 kHz resonant frequency the noise spikes at 14 kHz can be clearly seen in the power spectral density curve shown in Figure 21 Typically this additional filter s corner frequency is set to greater than 5x the required bandwidth to preserve good phase response ADXRS613 Figure 22 shows the effect of adding a 250 Hz filter to the output of an ADXRS613 set to 40 Hz bandwidth as shown in Figure 21 High frequency demodulation artifacts are attenuated by a
8. EMPERATURE C 80 100 12 Figure 11 Typical Self Test Change over Temperature 30 N a N a 06921 012 3 1 3 3 3 5 mA 3 7 3 9 Figure 12 Current Consumption at 25 C Vratio 5 V Rev 0 Page 7 of 12 VOLTAGE V PERCENT OF POPULATION g OR s ADXRS613 2 40 2 42 2 44 2 46 2 48 2 50 2 52 2 54 2 56 2 58 2 60 VOLTAGE V Figure 13 Vreme Output at 25 C Vratio 5 V a S 3S S 256 PARTS 06921 014 20 40 60 TEMPERATURE C 80 100 12 Figure 14 Vreme Output over Temperature Vratio 5 V 06921 015 770 790 TIME ms 810 830 Figure 15 g and g x g Sensitivity for a 50 g 10 ms Pulse ADXRS613 Is 06921 016 Hz Figure 16 Typical Response to 10 g Sinusoidal Vibration Sensor Bandwidth 2 kHz DUT1 OFFSET BY 200 s Is DUTA GFFSE BY 200 s DI mY l 06921 017 ms Figure 17 Typical High g 2500 g Shock Response Sensor Bandwidth 40 Hz 0 1 s rms 0 01 06921 018 0 001 0 01 0 1 1 10 100 1k 10k 100 AVERAGE TIME Seconds Figure 18 Typical Root Allan Deviation at 25 C vs Averaging Time x 0 0 05 0 10 IsWHz rms Rev 0 P
9. T OF POPULATION 30 25 20 15 10 1 7 2 3 VOLTAGE V col 1 9 2 1 Figure 4 Null Output at 25 C Vranio 5 V Bi 7 2 9 3 1 3 3 0 0 6 0 5 0 4 0 3 0 2 0 1 0 0 1 02 0 3 0 4 0 5 0 6 Is C Figure 5 Null Drift over Temperature Vratio 5 V 11 0 11 5 12 0 12 5 13 0 13 5 14 0 mV s Figure 6 Sensitivity at 25 C Vratio 5 V 06921 004 06921 005 06921 006 Rev 0 Page 6 of 12 PERCENT OF POPULATION PERCENT OF POPULATION PERCENT OF POPULATION 45 15 10 5 0 45 40 10 5 0 PERCENT DRIFT Figure 7 Sensitivity Drift over Temperature i 09 14 0 11 VOLTAGE V Figure 8 ST1 Output Change at 25 C Vratio 5 V 0 6 0 7 0 8 0 9 1 0 1 1 1 2 1 VOLTAGE V Figure 9 ST2 Output Change at 25 C Vratio 5 V 06921 007 06921 008 06921 009 VOLTAGE V PERCENT OF POPULATION PERCENT OF POPULATION 30 N a N o a o 06921 010 145 155 165 CIs 125 135 175 185 195 Figure 10 Measurement Range 1 5 1 0 2 a 06921 011 20 40 60 T
10. age 8 of 12 06921 019 A 0 20 40 60 80 100 120 TIME Hours Figure 19 Typical Shift in 90 sec Null Averages Accumulated over 140 Hours 10 06921 020 600 1200 1800 2400 3000 360 TIME Seconds Figure 20 Typical Shift in Short Term Null Bandwidth 1 Hz 0 1 0 01 0 001 06921 021 0 0001 10 100 1k 10k 100 Hz Figure 21 Typical Noise Spectral Density Bandwidth 40 Hz x THEORY OF OPERATION The ADXRS613 operates on the principle of a resonator gyroscope Two polysilicon sensing structures each contain a dither frame that is electrostatically driven to resonance producing the necessary velocity element to produce a Coriolis force while rotating At two of the outer extremes of each frame orthogonal to the dither motion are movable fingers that are placed between fixed pickoff fingers to form a capacitive pickoff structure that senses Coriolis motion The resulting signal is fed to a series of gain and demodulation stages that produce the electrical rate signal output The dual sensor design rejects external g forces and vibration Fabricating the sensor with the signal conditioning electronics preserves signal integrity in noisy environments The electrostatic resonator requires 18 V to 20 V for operation Because only 5 V are typically available in most applications a charge pump is included on chip If an external 18 V to 20 V supply is available the two capacitors on
11. jected to angular rate It is activated by standard logic high levels applied to Input ST1 5F 5G Input ST2 4F 4G or both ST1 causes the voltage at RATEOUT to change about 1 9 V and ST2 causes an opposite change of 1 9 V The self test response follows the viscosity temperature dependence of the package atmosphere approximately 0 25 C Activating both ST1 and ST2 simultaneously is not damaging ST1 and ST2 are fairly closely matched 5 but actuating both simultaneously may result in a small apparent null bias shift proportional to the degree of self test mismatch ST1 and ST2 are activated by applying a voltage of greater than 0 8 x Vratio to the ST1 and ST2 pins ST1 and ST2 are deacti vated byeapplying a voltage of less than 0 2 x Vrario to the ST1 and ST2 pins The voltage ical ST1 and ST2 must never be greater than AVcc CONTINUOUS SELF TEST The one chip integration of the ADXRS613 gives it higher reliability than is obtainable with any other high volume manufacturing method In addition it is manufactured under a mature BiMOS process with field proven reliability As an additional failure detection measure a power on self test can be performed However some applications may warrant continuous self test while sensing rate Details outlining continuous self test techniques are also available in the AN 768 Application Note Using the ADXRS150 ADXRS300 in Continuous Self Test Mode at www analog com Rev 0 Page
12. pply Ratiometricity eee 10 SPECIIGALIONS yie aa e A 3 NUM Adjustment sinnen a 10 Absolute Maximum Ratings sss ssssssssssssssssssssssssssrsrressssssssssssene 4 Selt Test FUNCHON aer R EERE 10 Rate Sensitive AXiS esessesseeessesscrossersceovseresoosssseeossssssronsssesesnssessee 4 Continuous Self Testine 10 ESD Caution scessisscesics assess oxtasessnaetiecabtaniss astiddnsanisiesnsaetsstaanseaate 4 O tline Dimensions piirsin ra 11 Pin Configuration and Function Descriptions 5 Ordering GUE sesiesss cssstssisssenstaecsdoshanssssaenssdaasvacaautiosasgvaesstanets 11 Typical Performance Characteristics cscsessesseeseseesseseeseene 6 REVISION HISTORY 2 08 Revision 0 Initial Version WA D NAL Rev 0 Page 2 of 12 SPECIFICATIONS All minimum and maximum specifications are guaranteed Typical specifications are not guaranteed ADXRS613 Ta 40 C to 105 C Vs AVcc Vop 5 V Vrario AVcc angular rate 0 sec bandwidth 80 Hz Cour 0 01 uF Iovr 100 pA 1 g unless otherwise noted Table 1 ADXRS613BBGZ Parameter Conditions Min Typ Max Unit SENSITIVITY RATIOMETRIC Clockwise rotation is positive output Measurement Range Full scale range over specifications range 150 sec Initial and Over Temperature 11 25 12 5 13 75 mV sec Temperature Drift 3 Nonlinearity Best fit straight line 0 1 of FS NULL RATIOMETRIC Null 40 C to 105 C
13. pproximately 18 dB 0 1 0 01 0 001 IsHz rms 0 0001 0 00001 06921 022 0 000001 10 100 1k 10k 100 Hz Figure 22 Noise Spectral Density with Additional 250 Hz Filter TEMPERATURE OUTPUT AND CALIBRATION It is common practice to temperature calibrate gyroscopes to improve their overall Ae i ADXRS613 has a tempera x tfe pfoportidfahvoltage output that provides input to such a calibration method Theltemperature sensor structure is shown in Figure 23 The temperature output is characteristically nonlinear and any load resistance connected to the TEMP output results in decreasing the TEMP output and temperature coefficient Therefore buffering the output is recommended The voltage at the TEMP pin 3F 3G is nominally 2 5 V at 25 C and Vranio 5 V The temperature coefficient is 9 mV C at 25 C Although the TEMP output is highly repeatable it has only modest absolute accuracy VTEMP 6921 023 RFixeD RTEMP Figure 23 ADXRS613 Temperature Sensor Structure CALIBRATED PERFORMANCE Using a 3 point calibration technique it is possible to calibrate the null and sensitivity drift of the ADXRS613 to an overall accuracy of nearly 200 hour An overall accuracy of 40 hour or better is possible using more points Limiting the bandwidth of the device reduces the flat band noise during the calibration process improving the measure ment accuracy at each calibration point Rev 0 Page 9 of 12
14. ration of both the sensor and the signal oo conditioning cirguits The ADXRS613 is available in a 7 mm x i i Af 3 NBGA Chip scal package I FUNCTIONAL BLOCK DIAGRAM 5V ADC REF 100nF 4 oy 100nF MECHANICAL SENSOR CHARGE PUMP AND VOLTAGE 100nF REGULATOR Figure 1 Rev 0 Information furnished by Analog Devices is believed to be accurate and reliable However no responsibility is assumed by Analog Devices for its use nor for any infringements of patents or other rights of third parties that may result fromits use Specifications subject to change without notice No One Technology Way P O Box 9106 Norwood MA 02062 9106 U S A license is granted by implication or otherwise under any patent or patent rights of Analog Devices Tel 781 329 4700 www analog com Trademarks and registered trademarks are the property of their respective owners Fax 781 461 3113 2008 Analog Devices Inc All rights reserved ADXRS613 TABLE OF CONTENTS Features i ihe Seance RR O cates 1 Theory of OPeratlO ni anes n a E E E R O 9 Applicaton Snia E R 1 Setting Bandwidth cccescsuscsspenesssorssonscesssvessestvosseersssssenssbeothosuecrs 9 General Description eere a ote ieee ke 1 Temperature Output and Calibration eeeeeeeeeeees 9 Functional Block Diagram sssssssssssssssssssssssssssstessssssssssssereeessssssss 1 Calibrated Performance csseessessesseseessessessessseesessesseeseeseens 9 Revision History ceirnin ia i A E 2 ADXRS613 and Su

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