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HEWLETT PACKARD HP 4145B SEMICONDUCTOR PARAMETER ANALYZER OPERATION MANUAL

1. SOURCE MODE SOURCE FUNCTION or USER FUNCTION can be accomplished only by positioning the field pointer at the field to be changed New information ean then be entered with the appropriate front panel keys or softkeys Positioning of the field pointer is controlled by the CURSOR keys FAST cannot be used on this When one of these keys is pressed the field pointer will move one field in the direction of the arrow labelled on the key Also each time new information is entered into a field the field pointer will automatically move to the next field as shown in Figure B Figure 3 23 CHANNEL DEFINITION Page Sheet 1 of 4 3 39 SECTION 3 40 Model 4145B Cae CHANNEL DEFINITION NAME and USER FUNCTION Entry 1 Position the fleld pointer at the desired field 2 Key in the desired name or user function expression it will appear on the Keyboard Input Line on the CRT as you do so 3 Press ENTER The name or expression will be moved from the Keyboard Input Line te the field at whieh the field pointer is positioned and the field pointer will move to the next field Note V 1 and USER FCTN NAME be up to six characters long of which the first character must be alphabetic and the remaining characters must be alphanumeric NAME can be used only once on this page USER expressions ean be up to sixty characters long and ean contain channel names Y or
2. AUTO SEQUENCE MENU SETUP Fig 5 30 OUTPUT SEQUENCE SETUP CHANNEL DEFINITION SOURCE SETUP Fig 3 MEASRDIZP MODE SETUP Fig 3 25 Fig 3 26 Fig 3 27 Fig 3 28 Fig 3 29 Fig 3 31 41458 FILE CATALOG Fig 3 32 OPERATION GULDE Fig 3 33 DIAGHOSTICS Fig 3 34 ifthe PREV key is pressed on these pages display returns to the MENU page MEMU key can be used to return to the MENU page at any time Figure 3 21 Page Flow and the Relationship 3 34 Model 4145 3 50 MENU PAGE 3 51 The start up menu is displayed when the instrument is turned on and each time the MENU key is pressed Displayed on the MENU page are the accessible pages corresponding softkey prompts SKP the instrument s present HP IB status line frequency filter setting and the status of each SMU A detailed description of the MENU page is given in Figure 3 22 3 52 CHANNEL DEFINITION PAGE 3 53 The CHANNEL DEFINITION page is displayed when softkey 1 or the NEXT key is pressed while the MENU page is displayed On this page the operator must define the name mode and function of each channel that is to be used in the measurement User functions are also defined on this page A detailed description of the CHANNEL DEFINITION page is given in F igure 3 23 3 54 SOURCE SETUP PAGE 3 55 The SOURCE SETUP page is displayed when softkey 2 is pressed on the MENU page or when the NEXT ke
3. a 4lxb 3 7 Y axis VAR2 MIN e 20xd where START value of VARI b STEP value of VARI START value of VARZ d STEP value of VAR when STEP 0 MIN and START Figure 3 25 MEAS amp DISP MODE SETUP Page Sheet 5 of 6 3 51 SECTION Model 4145B 2 SWEEP MODE of VARI is LOG p X axis VARI MIN MAX axlo 7 3 8 Y axis VAR2 MIN e MAX e 20xd where START value of VARI amp Number of steps per decade 10 25 50 e START value of VAR d STEP value of VARI Note Equation 3 8 applies only when START 5 STOP When START gt STOP X axis MAX value is calculated as X axis 0 3 0 Figure 3 25 MEAS amp DISP MODE SETUP Page Sheet 4 of 6 Model 41458 SECTION GRAPHICS PLOT PAGE hgalereeee GRAPHICS PLOT 7 LET 1 0 0 11 Ff T 1 1 t Funetion of this page le Graphically display measurement results 2 Allow analysis of measurement results with the softkeys and arithmetic capabilities MEASUREMENT Each time this page is displayed the results of the previous measurement are automatically re displayed regardless of the display mode used in the previous measurement If any change is made on the CHANNEL DEFINITION page or SOURCE SETUP pag
4. Data Area End Data Area Start 1 Data Area Start The Data Area Start bytes contain the starting address of a channel s measurement data in the Measurement Data Sector 2 Data Area End The Date Area End bytes contain the last address of a channel s measurement data in the Measurement Data Sector Note Data Area Addresses are 1300H through 24FFH Figure 3 71 DACH Structure 3 145 SECTION Model 4145B byte fofi Disp Mode eas Mode 1 Meas Mode The Meas Mode byte contains the measurement mode s sweep or time domain measurement setting 00H Sweep Measurement 01H Time Domain Measurement 2 Disp Mode The Disp Mode byte contains the display mode setting that is assigned on the MEAS amp DISP MODE SET UP page 01H Graphie Plot 02H List 04H Matrix 08H Sehmoo Plot Figure 3 72 DCB Structure 3 146 Model 41458 SECTION a is 15 amp i7 jua ra byte 5 Upper Limit i Lower Limit Seale CH Address L Channel L Funetion Status Symbolic 1 Symbolic Name Status Function Channel and CB address These bytes contain the ID TABLE data that is to be displayed on the GRAPHIC PLOT page as X Y or Ys axies 2 Seale This Scale byte contains the scale setting for The GRAPHIC PLOT page OOH Linear Log increasing Log decreasing 3 Lower Limit Upper Limit These bytes contain
5. 58 1 0 size 3 5 larger value lt 4 xl 5 size 4 larger value 5 2 0 size 5 larger value 5 127 29 x2 5 size Four line types are selectable as follows 0 Line with dot at the last point 1 2 Short dashed line 3 6 Long dashed line 7 Solid line Four beam intensities are selectable as follows 0 Blank 1 Din 2 Half brightness 3 Full brightness Four bean speeds are selectable as follows 5 0 05 inch yusec 10 0 10 inch psec 15 0 15 inch psec 20 0 20 inch psec Tick length is fixed at 0 8 of P2x Plx or P2y Ply Model 41458 SECTION Table 3 11 HE GL Commands Sheet 3 of 3 IP OP and IW are fixed at Pl 0 0 P2 2047 2047 Also the limits of the GRAPHICS PLOT page is LL 220 493 UR 1570 1725 Default condition is as follows DR Relative Direction of SR Relative Character Size KI size LT Line Type Solid line SF Select Pull brightness VS Velocity Select 0 20 inch psec IM Input Mask 2215 Error number that occurs first is output Error meanings are as follows 1 Instruction is not recognized mask valuezl 2 Wrong number of parameter mask value 2 3 Bad parameter mask values4 4 Illegal character mask values 7 All of the display memory has been used mask value 64 Status values output from the CRT status byte have the following meanings more than one may exist 1 Beam is ON B Initialized 32 Error ORIGINAL INSTRUCTI
6. MASUREMENT DISPLAY SETUP AND STORAGE FUNCTIONS Measurement Display Setup Interactive fill in the blank programming of channel definitions source outputs and mensurement display modes Measurement Setup Storage The existing measurement setup can be stored in the user area on the micro flexible dise and recalled later by using the SAVE RE SAVE and GET keys Measurement Date Storage The existing measurement results can be stored in the user area on the micro flexible dise and recalled later by using the SAVE RE SAVE and GET key Auto Sequenee Program series of different measurements can be programmed for automatic execution The maximum number of program steps is 50 and i useable commands are GET P SINGLE SAVE D RSAVED PLOT CPLOT PRINT i PAUSE WAIT and PAGE Storage Medium 3 5 in double sided double density micro flexible die User area 622k bytes Number of user records 2432 records number of recorded files up to 240 files Record Allocation Measurement setup file type 5 records Measurement data file type DJ 23 records Auto sequence program file type S 4 records Operating System 254 records Initialization function for the storage medium Initialization Used to generate the directory Format type Logical Interface Format Operating System Copy Used to copy the operating system onto the initialized disc 1 11 SECTION 1 Model 41455 Table 1 1 Specif
7. TT TT TTT LII LITT ILIA 4 4 1080 0 V9 Sx MAX Figure C When setup for LINEAR sealing the X axis has 10 divisions and the Y axes 11 The value per division is calculated as Max Min 10 When LINEAR has been selected and 0 is within the MIN MAX range 1 MIN lt 0 lt MAX the MIN and MAX values specified on the MEAS DISP MODE SETUP may be different from those displayed on the GRAPHICS PLOT page This occurs when the MIN or MAX value is not multiple of Value div in equation 3 6 Division sealing is always in reference to 0 For example if the MIN and MAX values on the MEAS DISP MODE SETUP page are 2 and 1 respeetively the MIN and MAX values displayed on the GRAPHICS PLOT page are 12 and 96 respectively Value div 3 6 When LOG has been selected the number of divisions depends on the number of decades between the MIN and MAX values For example when the MIN and MAX values are 1 and 9 respectively only one division is displayed and the displayed MIN and MAX values are 1E00 and 1E 01 when the MIN and values are 0 9 and 10 respectively two divisions are displayed and the displayed MIN and MAX values are 1E 01 and 1 01 Notes 1 If Yi and have different scale modes SCL the division lines displayed on the GRAPHICS PLOT page are for Y and Y2 will have a separate set of tick marks In LOG seale an extra decade may be displayed because of the quantum error a
8. Voltage Source Model 41458 3 26 NM Sources Vs and Voltage Monitors Vm 4 21 Simplified circuit diagrams of the voltage sources Vs and the voltage monitors Vm are shown in Figures 3 11 and 3 12 respectively Output woltage from each Vs be held eonstant or be swept linearly or logarithmically by specifying source function CONST or VARI VARI VAR respectively in the SOURCE FUNCTION field on the CHANNEL DEFINITION page see Figure 3 23 Refer to paragraph 3 34 for details on swept measurements Maximum output voltage 120V with 1m resolution Up to 201 can be measured by the voltage monitors There are two measurement ranges 20V and 2V Resolution for each range is ImvV and 100p respectively 3 28 Measurement Ranges and Resolution 3 29 The 41458 measures de voltage and current with the voltage moniter funetion of each SMU the current monitor funetion of each SMU and the voltage monitors Vm The measurement ranges and resolution for the 8MUs and voltage monitors are shown in Figure 3 13 Bate VAR outputs all sweep steps at the lowest range that includes START and STDP except for log sweeps VAR for log sweeps and VARZ output each sweep step at the lowest range that incledes each sweep step value COKST cutputs at the lowest range that incledes the specified Current Monitor Welrage Meni rar SMU OUT Figure 3 9 Simplified Circuit Diagram of One of
9. and compliance is 105 SOURCE MODE selection can be made only with the softkeys and only when the field pointer is in the SOURCE MODE ealumn SOURCE Each SMU and each Vs used in the measurement must be assigned a SOURCE Four SOURCE FCTNs are available VARI main sweep VARI synchronous sweep VARZ subordinate sweep and CONST constent source SOURCE selection be made only with the softkeys and only when the field pointer is in the SOURCE FCTN column Refer to paragraph 3 34 for details on VARI VARI and VAR Note If the SOURCE MODE of an SMU is COM SOURCE FCTN is automatically set to CONST USER The user function is an extremely versatile useful analysis aid It is a user defined arithmetic expression consisting of variables V NAMES and 1 NAMES only and constants and is executed at each measurement point during measurement The results can be displayed GRAPHICS PLOT LIST MATRIX SCHMOQO along with measurement results Any of the arithmetic operators listed in Table 3 5 plus A and parentheses can be used in USER expressions The only variables that can be used im a USER FCTN expression are the names listed in the V NAME and I NAME columns on the CHANNEL DEFINITION page Two USER FCTNHs can be defined and each can be up to 60 characters long SOFTKEY PROMPTS and SOFTKEYS FUNCTIONS The softkey prompts SKP displayed on the CRT automatically change
10. Model 4145B Of the six source channels four SMUs two Vs any combination of three can be automatically swept in a linear or logarithmic stairease manner within the range of each channel Hold times from 0 to 650 seconds and delay times from 0 to 6 5 seconds be programmed a multi channel sweep setup channel functions as the main sweep channel One of the other channels can be swept synchronously with the main channel while one other channel can be swept subordinately to the main channel SMUs not swept can be used as constant current or constant voltage sources The two Vm channels are used to measure voltages up to 20V results measurement setups operator prompts error messages and diagnosties are displayed on a fully interactive microprocessor based graphics display Measurement results can be displayed in one of four modes graphic list matrix and sehmoo Front Panel softkeys provide wide range of automatie display control functions such as AUTO SCALE STORE RECALL CURSOR MARKER vertical and horizontal ZOOM LINE two GRAD 1 GRAD X intercept Y intercept and INTERPOLATE Softkeys are used in all phases of instrument operation from measurement setup to measurement analysis and make overall instrument operation quick and easy By pressing the PLOT key or PRINT key the presently displayed sereen whether a measurement result or measurement setup can be dumped directly onto
11. Setting Resolution Voltage 4 1 2 digits ImV max Current 4 digits max Measurement Resolution Voltage 4 1 2 digits ImV Current 4 digits 50fA max Ranging Automatic Current Voltage Limiting Compliance Current output from an SMU operating as a voltage source and voltage output from an SMU operating current source can be limited Compliance Range i Current 50pA to maximum allowable output current of each voltage range Voltage OV to maximum allowable output voltage of each current range Accuracy Current compliance accuracy of current source 1 of range l pA Voltage complianes accuracy of voltage source Residual Resistance Voltage Source Current Measurement 0 40 Input Resistance Current Souree Voltage Measurement Mode z 10 t Capacitive Load 21000pF Model 41456 Model 41456 Table l Specifications Sheet 3 of 8 Voltage Sources Vs Two Vs channels Each Vs can be programmed to function as a variable or constant DC voltage source Output ranges resolution and aeecurmey specifications are given in the table below Supe Vols age We Output Impedanee Less than 0 20 Capacitive Load 5 1000pF Voltage Monitors Vm Two Vm channels Output ranges resolution and accuracy specifications are given in the table below Yoon a of Input Impedance Capacitance in Parallel
12. Incentif ieation Output Format Ie the remote program eode ID is sent the 4145B outputs data in following ormat ID 41458 X X X X o 1 The revision number of the ROM 2 The revision number of the Operating System Figure 3 34 Indentification Output Format 3 117 SECTION Model 41458 3 136 SERVICE REQUEST STATUS BYTE 3 137 The 41458 outputs an RQS Request Service signal whenever bit 1 2 3 4 6 or 8 of the Service Request Status Hyte is set The make up of the Status Byte is shown in Figure 3 55 Emergency Bit 7 RQS indicates whether or not a service request exists Following are the service request states of the 41458 Bit 1 Data Ready This bit i set when complete measurement data i ready for output onto the HP IB It i reset when data transfer starts or when the 4145B receives program eode BC Buffer Clear Syntax Error This bit is set when the 41458 receives errorneous remote program eode If this bit is set while bit is set it has another meaning Refer to the deseription for bit B End Status This bit is set when Self Test PLOT or PRINT is completed Illegal Programm This bit is set when the 4145 receives an invalid program If this bit is set while bit 8 is set it has another meaning Refer to the description for bit B Busy This bit is set when measurement or auto calibration amp being performed It is automatically reset when measurement or calibrati
13. if the ferrite beads on adjacent leads come in contact with each other or if a ferrite bead touches the device s case or another lead leakage current will increase reducing the accuracy of measurement results Figure 3 39 Preventing Transistor Oscillation 3 89 SECTION 3 80 FLOATING MEASUREMENT 3 81 When the DUT amp grounded or when the external voltage source of shield case for DUT is connected to ground measurement can not be performed of measurement results may be affected by ground loops The 41458 be used for floating measurements by disconnecting the shorling bar on the rear panel In this condition the measurement and source circuit is floating above chassis ground and voltages over 442V may be present on the OOM terminal WARNING A POTENTIAL SHOCK HAZARD MAY EXIST WHEN COMMON 18 NOT CON NECTED TO GROUND SHORTIN G BAR DISCON NECTED DO NOT REGARDLESS OF THE OUTPUT VOLTAGE TOUCH THE COMMON TERMINAL OR OUTER CONDUCTOR OF THE SMU Vs OR CONNECTORS DURING A FLOATING MEASUREMENT SHORTIN G BAR DISCONNECTED CAUTION DO NOT FLOAT THE INSTRUMENT AT VOLTAGES EXCEEDING 42V Hote When the 16058A Test Fixture is used floating measurements can not be made because source common is connected to chassis ground inside the test fixture Comes ip rhe DUT a 1 Cnnduct mor Model 41458 3 92 GUARDING 3 83 When low eurrenl measu
14. is intended for use with user fgbrieated of user furnished test fixtures For best measurement results the test fixture should be enclosed in a shielding box and the connector plate should be mounted on the box as shown in Figure 3 37 This significantly reduces the effects of RFI and EMI and is especially important when making low ecurrent measurements on wafers at the probe station The procedure for connecting the connector plate shielding box and 41458 given in Figure 3 37 Mounting the Connector Plate and Connecting the 41458 l Drill the holes required to mount the connector plate onto the shielding box Hole spacing B given in Table 1 3 Mount the connector plate on the shielding box Make sure there is good electrical contact between the plate and the box Turn off the 4145B Conneet the furnished 24 pin Shorting Conneetor P N 04145 61823 to the System Cable eonneetor labelled TO 16058A TEST FIXTURE on the rear panel Note If the Shorting Conneetor is connected output from the SMUs not limited to 242V that is the 41458 assumes fixture lid closed condition Connect the 41458 to the connector plate with the four furnished 3 meter triaxial cables P N 04145 61622 and the four furnished 3 meter cables P N 04145 61630 as shown below mum zum EE NR GEAR Aum mm nal Shorting Connector Figure 3 37 DUT Conneetion Using the Conneetor Plate Sheet 1 of 2 3 8
15. 4145B The BS amp DM File Creation Software enables you to create the BS amp DM data format from the 4145B s unique data format The HP 92192A Double sided Micro Flexible Dise can be used for data storage or operating system copy 1 97 Warranty Limitation for Accessories Personality Board P N 16058 60003 and eight Boards P N 16058 60004 through 16058 60005 16058 60007 through 16058 60011 and 16147 60002 furnished with the 16058A Test Fixture are warranted against defects in material and workmanship for a period of three months from the date of delivery During the warranty period Hewlett Packard Company will at its option either repair or replace components which prove to be defective This warranty does not apply to defects resulting from improper use inadequate maintenance Model 41456 1 Table 1 1 Specifications Sheet 1 of 8 Specifications listed below are for the 41458 only 16058A specifications refer to the 15058 Operation Note GENERAL INFORMATION Basic Functions Measures the DC current through vwoltage biased devices and the DC voltage across current biased devices Arithmetic calculation Displays measurement results and calculation results on built in CRT display graphics analysis capabilities storage and recall of measurement setups measurement data and auta sequence programs Source and Measurement Units Source Weniter Units SM Four SWU chansels Each SMU can be progr
16. Figure 3 41 Plot Funetion Sheet 2 of 3 3 92 Model 41458 SECTION Selection When a multi color plotter is used pen selection E as follows Grid Lines Recalled and Curve Plot Traces Existing Traces Plot rea Frame Marker Cursors Lines Note Refer to paragraph 3 140 for instruetions covering HP IB controlled plot operation Figure 3 41 Plot Funetion Sheet 3 of 3 SECTION Model 4145B PRINT 3 97 The 4145B directly print out measurement data on an HP IB printer without the aid of controller Note The printer must have a LISTEN ONLY ALWAYS mode Operating instructions for the PRINT function are given in Figure 3 42 Connection to the Printer Refer to steps 1 through 4 of Connection to the Plotter in Figure 3 41 Printing 1 Press the PRINT key PRINT will be displayed on the Keyboard Input Line 2 Press the EXECUTE key to start printing Printing will be displayed on the CRT s System Message Line During printing the 4145B is in TALK ONLY mode and TLK lamp HP IB status indicators will be lit In this condition only the PLOT or PRINT key is available 3 measurement data stored in the Data Buffer is printed out Note If no data is in the data buffer nothing will be printed 4 When printing is completed the instrument automatically returns to normal operation mode Note To stop the PRINT press the PRINT key or PLOT key If the CLEAR k
17. Figure 3 67 ID TABLE Structure lof 2 3 139 SECTION Model 4145B 5 CB Address The CB Address bytes contain detailed channel address information as follows If Varl Var2 or Varl is used these bytes contain the SVCBV s address If a constant is used these bytes contains SVCBC s address If a channel is set to Monitor these bytes contains DACB s address If a channel is set to User Function these bytes contain the UFCB s address Figure 3 67 ID TABLE Structure 2 of 2 3 140 Model 41458 SECTION bit EEEE e 00000000000 Sign Exponent Exponent 2 s complement binary 28 Exponent 5127 Sign 1 I B OF Mantsa Normalized 2 s complement binary 0 5 x 2 sMantissa lt 1 x 22 Real Value REAL Value 1 2 x Sign x Mantissa x 2Exponent 23 7239 means that the decimal point of the mantissa amp set at bit 23 2 129 lt IREAL Value lt 21 27 Following is a sample program to transform 4byte Floating Point Data Format values to REAL values INTEGER Bytel Byte2 Byte3 Byted mam Mantissa Exponent Reail Exponent FNSigned Bytel 23 Mantissa FNSigned Bytae2 255 Byte3 256 Byted Reall Mantissa 2 Exponent DISP Reali END DEF FNSigned INTEGER Byte IF 7 THEN RETURN By te 256 ELSE 5 RETURN Byte D IF 10 20 30 40 50 50 70 80 30 101 11 12 13 14 15 16 17 18 0 0 0 0 0 0 0 0 FNEND Figure 3 68 HP 41458
18. File type File comments File address Number of records used User area files o DAT DAT DREHER Functions of this Page Display information pertaining to files stored on the disc PURGE delete files from the user area Initialize the blank disc Copy the Operating System Software Operating System Copy to the initialized disc Transfer the all files from the 4145A s mass storage media or another 4145B s mass storage media to that on the 4145B The system dise furnished with the 4145B has user area in which up to 2178 records or 240 files can be stored The initialized dise has a user area in which up to 2432 reeords or 240 files ean be stored The number of records per file depends on the file type as listed below Program files measurement setups 5red file Data files measurement results with setups 23red file ASP files auto sequence program files 4red file Information for up to 11 files can be displayed on this page To display information on other files press the ROLL UP or ROLL DOWN softkey or press the NEXT SCREEN or PREV SCREEN Softkeys When the ROLL UP or ROLL DOWN softkey is pressed and held movement through the displayed files is continuous Each item through g in Figure A is described below Figure 3 32 4145B FILE CATALOG Page Sheet 1 of 4 3 72 Model 4145B SECTION Available records Shows the number of available records File name Lists the names of all file
19. N NNNN N NNNN TERM OG 4 G _ 1 SOURCE MODE DV or DI DV Voltage Source DI Current Source 2 SMU channel number 1 4 3 Output Range For voltage source 0 3 0 AUTO 1 20V 2 40V 3 100V For current source 0 9 0 AUTO 1 lnA 2 10nA 3 100nA 4 1 5 10 pA 6 100pA 7 ImA 8 10 i 9 100 4 Output value 5 COMPLIANCE value If nothing is specified after the channel number the channel is turned off NOT USE Figure 3 52 Remote Program Codes and Parameter Setting Sheet 7 of 9 3 109 SECTION Model 4145B Output command for Vs DS tN NNNN TERM a 2 2 Vs channel number 1 or 2 2 Output value Triggering Measurement XX N 1 2 1 Measurement mode of the channel to be triggered TV Voltage Monitor TI Current Monitor 2 Channel number SMUL SMU2 SMU3 SMU4 Vml Vm2 Graphics Language GL2 Mode GL2 Graphie Display mode ON GLO Graphic Display mode OFF Note In User Mode measurement cannot be performed with the fixture lid open because of the protective function To perform the measurement without elosing the fixture lid use the Shorting Conneetor as shown in Figure 3 37 Figure 3 52 Remote Program Codes and Parameter Setting Sheet 8 of 9 3 110 Model 4145 SECTION COMMON PROGRAM CODES Following program codes are available in the System Mode or in the User Mode INTEGRATION TIME ITI SHORT IT
20. P WAIT TIME 3 00 sec INTERVAL 1 2 00 sac NO OF RONGS 10 Figure 3 19 Time Domain Measurement 3 40 INTEGRATION TIME j 4l To prevent line frequency noise and other noise sources from affecting the accuracy of measurements the 41458 is equipped with three digital integration times whieh are selectable from the front panel Each is deseribed below SHORT Digital integration is not performed MEDIUM Measurement result is the average value of 16 samples taken during one line frequency period LONG Measurement result is the average value of 258 samples taken during sixteen line frequency periods Integration time can be changed during measurement but cannot be changed while the 414538 is in TALK mode PLOT or PRINT when the dise drive s read write lamp first comes on or during auto sealing In time domain measurements only SHORT integration time is available 3 32 3 42 AUTO CALIBRATION 3 43 both monitor and compensate for transient changes in output voltage and current caused by ambient temperature changes each SMU equipped with an auto calibration funetion This function allows each SMU to periodically monitor its own output and if necessary provide appropriate compensation 3 44 The aute calibration function of the SMUs is controlled by the AUTO CAL key on the front panel With AUTO CAL turned on key indicator lamp on calibration is automatically performed every five minutes for a
21. START value 3 STEP value 4 Number of steps 8 COMPLIANCE value Setup for CONSTANT SMUSs XX N M NNNH H NNNNH TERM Ths w 1 SOURCE MODE of the channel VC or IC VC Voltage Source IC Current Source 2 SMU channel number 1 4 3 Output value 4 COMPLIANCE value Setup for CONSTANT Vs SC N NNHN TERM m m 1 Vs ehannel number 1 or 2 2 Output value Figure 3 52 Remote Program Codes and Parameter Setting Sheet 3 of 9 3 105 SECTION Model 41458 HOLD TIME Setting TERM i1 HOLD TIME DELAY TIME Setting DT N NN TERM 1 DELAY TIME VARI RATIO OFFSET Setting EN WAC TERM 1 RATIO OFFSET RT or RT RATIO F8 OFFSET 2 Value MEAS amp DISP MODE SETUP Page program code SM Time Domain Measurement Setup only when VARI is not selected on the CHANNEL DEFINITION page WAIT TIME Setting WT ANN TERM 1 WAIT TIME INTERVAL Setting IN N NN TERM INTERVAL Time NO OF RDN GS Setting NR NNN TERM 1 1 of Readings DISPLAY MODE Selection DM1 GRAPHICS DMZ LIST DM3 MATRIX DM4 SCHMOO Figure 3 52 Remote Program Codes and Parameter Setting Sheet 4 of 9 3 106 Model 41458 SECTION Setup for GRAPHICS mode DMI XX XXXXXX N iN NNN 2N NNN TERM 4 7 7 71 T 11 11 AXES XM X axis Yl axis YE Y 2axis X axis for time domain measurement
22. Stack Reg ister overflow Improper calculation was atte example the divisor is zero Disc not inserted or not correctly inserted The dise is write protected i file name or file type The file name specified in the SAVE command has already been reserved for the specified file type Number of total files exceeds Number of total records exceeds User may be lost Copy immediately onto another dise The dise was not initialized for the 41458 INITIALIZE failed much tracks fownd The disc is defective damage or dirty The dise is not System Insert the System Disce The program specified by the GET command in the auto sequence program contains an error Press CONT to perform the next step of the autao sedquenee program The SINGLE command ean be executed fram the GRAPHICS MATRIX LIST or SCHMOO page only Press CONT to perform the next step of the auto sequenee program 3 15 SECTION Model 41458 Table 3 3 Operational Error Codes Sheet 2 of 2 PLOT or PRINT was performed by the suto sequenee program but mo printer plotter amp connected to the 41458 or the printer plotter ik not set to LISTEN Press CONT to perform the next step of the auto sequence program Error 2704 The test fixture lid open during auto sequence program in which the output voltage may exceed 42V Press CONT to perform the next step of the auto sequence progra
23. Sueep start FNGet real ProgdS 171 8 Sueep end FHGet raealtPrag45t 2 171 12 Sueep step FHNGat _real Prag4s 171 16 Tmin FNGet_roal Prog45 42744 12 Yoau FMGet_real ProgfS 423 16 10 120 10 90 HINDOH Swaap_start Sweep_end Tmin Tmax VarlsSueep start F R Data ptr Data start Data end 1 STEP 4 Vary FNGet data Data45t Data ptr Flag Stat Ch SELECT Flag CASE 01 Data IF Prev valid THEM DRAH Jar Vary ELSE MOVE Vari Vary END IF Prev valide CASE 1 Varl Sweep_start Prev_valid 0 CASE 1 Figure 3 78 Sample Program for Reading Data File Sheet 1 of 4 83 153 SECTION Model 41458 _ 19 0 EXD SELECT VarisVarl Sueep stap Data ptr ELSE END IF HEXT Channel ELSE DISP Not measurement channel MT END IF END IF 1 MASS STORAGE IS Haorkdir DEF FHGet realt INTEGER Array Pointer e ARR INTEGER Byte_let Byte_2nd Byte_3rd Byte_4th REAL Real value Byte_Ist FNGet_byte Array Pointer 0 Byte_2nd FNGet_byte Array Pointer tl Byte_drd FNGet_byte Array Pointer 2 Byte AtheFNGet hbyte firray Pointar 3 Byte to realiByte lst Byte 2nd Byte 3rd Byte A4th Real value Real value INTEGER Byte ist Byte Pet J3rd Byte 4th REAL Raal waluse Ayte_lst FNGet_byte Array Pointer 0 Byte _2nd FFNGet_byte Array Pointers Byte 3rdeFMNGet _ Ar Byte Athe FHMGet byteifirray e Pointer By
24. VAR CONSTANT SOURCE COMPLIANCE e LL LL Figure B Parameter Entry When entering numeric values on this page it is not necessary to enter the value unit The unit for voltage values is V volt for eurrent values A ampere and for time values s seconds For example the key strokes required to enter a current value of 10 5mA are DOE m ENTER This value 10 5m will be displayed on the Keyboard Input Line When the ENTER key is pressed the entered value will be moved to the field at which the field pointer is located and the unit A will be automatically entered Voltage and current limits for the SMUs and voltage sources Vs are listed below Refer to Table 3 6 for specifiable voltage and eurrent Voltage Range 0 to 100V SMU Current Range 0 to 100mA Voltage Range 0 to 20V Note Values ean be entered in fixed decimal format or floating decimal format scientific notation SWEEP MODE Selection SWEEP MODE can be selected only with the softkeys and only when the field pointer is in the SWEEP MODE row of the VARI column LINEAR Linear staircase sweep at the specified STEP value LOG 10 LOG 25 roni stairease sweep at 10 25 or 50 measurements per decade LOG 50 Figure 3 24 SOURCE SETUP Page Sheet 2 of 4 3 44 Model 41458 SECTION START STOP STEP Values for VARI START and STOP determine the sweep range for the VARI source channel START value ean be less than e
25. VAR STEP value Note If VAR START gt S8TOP the exponent in the equation for X axis Max becomes ns follows X axis Max a x 10 Figure 1 29 SCHMOO PLOT Page Sheet 2 of 3 3 65 SECTION Model 4145B Softkey Functions This page has only one softkey prompt shown in Figure A The function of each softkey is described below RSOR Similar to the CURSOR on the GRAPHICS PLOT page The eursor highlights the symbol at a measurement point To move the eursor use the CURSOR keys The cursor can be used to simplify keyboard calculations Note When the cursor is moved to a part of the plot area where there are no symbols is displayed and no Z axis value is displayed Same as the COMMNT softkey on the other display pages STORE Stores displayed measurement results Replaces displayed measurement results with stored measurement results These softkeys are similar to the STORE and RECALL softkeys on the GRAPHICS PLOT page Figure 3 26 The only difference is that recalled measurement results are not displayed over the existing measurement results that is only one set of measurement results is displayed When the frame around the RECALL softkey prompt is highlighted only stored measurement results are displayed Conversely when the frame is not highlighted only the results of the last measurement are displayed STORE and RECALL operations on this page are unrelated to those on the GRAPHIC
26. x2 LI J Vertical zoom out x2 These softkeys are used in conjunction with the LONG and SHORT cursors to goom in on of zoom aout from the cursor location When one of these keys is pressed the cursor will be repositioned at the center of the plot area and the whole plot area including the plotted curves will be enlarged or reduced in the indicated direction The relative position of the cursor and plotted curves remains the same That is when the cursor is centered by the zoom funetion the plotted curves are moved in reference to the cursor Vertical zooming is performed on the Y axis only Moves the LONG CURSOR or SHORT CURSOR to the center of the plot area maintaining the relative position of the cursor and plotted curves Displays the SHORT CURSOR When this softkey is pressed the frame around the softkey prompt will be highlighted and the SHORT CURSOR will be displayed at the center of the plot area The CURSOR can be moved to any point in the plot area by pressing the appropriate CURSOR keys Pressing the FAST CURSOR key while pressing one of the directional keys moves the cursor faster The X Yi and Y coordinates of the cursor location are digitally displayed above the plot area The SHORT CURSOR is turned off by pressing this softkey again by turning on the LONG CURSOR or by pressing the PREV or MENU key Note When the LINE is displayed and either SHORT or LONG CURSOR is on the location of the CURSO
27. 1 numeries and arithmetic operators SOURCE MODE and SOURCE FCTN Entry 1 Position the field pointer at the desired field 2 Select the desired mode or function from those listed on the softkey prompts The softkey prompts will change depending on the location of the field pointer 3 When the softkey is pressed the selected mode or funetion will appear in the field and the field pointer will move to the next field Note SOURCE MODE and SOURCE ean be entered only with the softkeys Figure 3 23 CHANNEL DEFINITION Page Sheet 2 of 4 41458 SECTION V NAME and I NAME These are unique names used to identify each channel that is to be used in the measurement Each SMU has two names one for its souree function and one for its monitor function Both must be entered if the SMU has been assigned SOURCE MODE If no V NAME is entered for voltage source Vs or voltage monitor Vm the channel is considered as not used The NOT USE softkey can be used to delete the HAMEs SOURCE MODE and amp OURCE of a channel and effectively turn it off The NOT USE softkey is available only when the field pointer is in the V NAME column SOURCE MOLDE Each SMU used in the measurement must be assigned SOURCE MODE Three SOURCE MODEs are available W voltage source current monitor I current source voltage monitor and COM common COM source is regarded as voltage souree whose output is
28. 2 HEWLETT PACKARD OPERATION MANUAL HP 4145B SEMICONDUCTOR PARAMETER ANALYZER SERIAL NUMBERS This manual applies directly to instruments with serial number 2830J and above With changes described in Section VII Service Manual also applies to instruments with serial numbers prefixed 2508J For additional important information about serial numbers see INSTRUMENTS COVERED BY MANUAL in Sec tion this manual Copyright Hewlett Packard Co 1986 1989 All Rights Reserved Reproduction adaptation or translation without prior written permission is prohibited except as allowed under the copyright laws Manual Part 04145 90310 Microfiche Part No 04145 90360 Printed April 1989 Manual Organization The Operation Manual and Service Manual are supplied with the HP 4145B These manuals are organized as follows HP 4145B Operation Manual Section 1 General Information Section 2 Installation Section 3 Operation 4145B Service Manual Section 4 Performance Tests Section 5 Adjustment Section 6 Replaceable Parts Section 7 Manual Changes Section 8 Service The Operation Manual and Service Manual are necessary for servicing the HP 4145B CERTIFICATION Hewlett Packard Company certifies that this product met its published specifica tions at the time of shipment from the factory Hewlett Packard further certifies that its calibration measurements are traceable to the United States National Bu rea
29. 4byte Floating Point Data Format 3 141 SECTION Model 41458 Leompliance Value Number of Steps Step Value Start Value Sweep Mode Maode Range I Channel L Status Reserved 1 Status The Status byte contains variable s used or not used setting OOH Not used 80H Used 2 Channel The Channel byte eontains the channel setting that coresponds to the variable used OOH SMUL lH SMU 02H SMUS 03H 5MU4 O4H Vel 05H Vez 3 Mede Range The Mode Range byte contains variable s V source I source and source range setting bit D through 4 transform binary to decima number 7 100V range 10 100mA range B 40 range 11 1 0mA range 8 20V range 12 1m range 13 100 range 14 10 range 15 10 range 18 100nA range 17 10n range 18 1nA range bit 5 and 6 always 0 bit 7 0 V mode 1 I mode Figure 3 68 VARI VARZ and VARI Structure 1 of 2 3 142 Model 41458 SECTION 4 Sweep Mode The Sweep Mode byte contains a variable s linear sweep or log sweep setting that assigned on the SOURCE SETUP page If a variable is set to log sweep this byte shows the number of the steps for one decade Transform 2 s complement binary to amp REAL value DOH OAH 04H D2H F6H FCH FEH Linger Sweep Logl inereasing 10 steps for one decade Logis inereasing 4 steps for one decade Log50 inereasing 2 steps for one decade L
30. C2 CO C9 GO QU GO CO CO CQ CO w w 3 102 3 102 Table of Contents Section 3 128 3 130 3 132 3 134 3 136 3 138 3 140 3 142 3 144 3 146 3 148 3 150 3 152 3 155 3 157 3 159 3 161 3 163 TABLE OF CONTENTS Title Page HP GL COMMANDS 3 112 DEVICE CLEAR 3 116 DATA OUTPUT 3 116 IDENTIFICATION OUTPUT 3 116 SERVICE REQUEST STATUS BYTE LI e Des 3 118 Programming Guide for TASB rco dura 3 120 PLOT PRING Operation Using HP IB Controller 3 125 External Display 3 126 Disc Initializing 3 127 Operating System Copy 3 128 DISC COPY 3 129 FILE TRANSFER 3 130 Data File Structure 3 132 BDAT System Sector 3 132 File Comment Sector 3 132 Setup Data Sector 3 132 Measurement Data Sector 3 133 Reading Data Files 3 133 Model 4145B Model 41458 SECTION 1 SECTION GENERAL INFORMATION 1 1 INTRODUCTION 1 2 This mamual contains the information required to install and operate the Hewlett Packard Model 41458 Semiconductor Parameter Analyzer Figure 1 1 shows the intrument and supplied accessories This section covers specifications instrument ident i fication description options accessories and other basic informat joa 160584 0145 61622 J 04145 60001 04145 61630 1 3 Listed on the title page of this m
31. Measurement Time Domain Measurement Integration Time Auto Calibration Display Pages Page Control MENU PAGE CHANNEL DIFINITION PAGE SOURCE SETUP PAGE MEAS amp DISP MODE SETUP PAGE ever euer erus GRAPHICS PAGE LIST DESPLAY PAGE MATRIX DISPLAY PAGE SCHMOO PLOT PAGE AUTO SEQUENCE SETUP PAGE OUTPUT SEQUENCE SETUP PAGE USER FILE CATALOG PAGE OPERATION GUIDE PAGE DIAGNOSTICS PAGE SOFTKEY PROMPTS SKP 3 36 SYSTEM MESSAGES 3 36 TIME DOMAIN MEASUREMENT SETUP ve sues s 3780 DUT CONNECTION 3 82 DUT Connection Using the 16058A 3 82 DUT connection Using the Connector Plate 3 86 SMU OSCILLATION 3 88 FLOATING MEASUREMENT 3 90 GUARDING 3 90 PLOT 2291 PRINT 3 94 APPLICATIONS PACKAGE 3 95 MEASUREMENT EXAMPLE 3 98 HP IB INTERFACE 3 101 CONNECTION TO HP IB 3 101 HP IB STATUS INDICATORS 3 101 LOCAL KEY 3 101 HP IB CONTROL SWITCH 3 101 HP IB INTERFACE CAPABILITIES HP IB CONTROL MODES Remote Program Codes and Parameter Setting 3 103 HP GL CONTROL OF THE CRT 3 112 lt Onan CO CO Oo ee Sua W WW CO CO P2 1 C9 CO CO CO CO
32. Model 4145B Table 3 9 Application Package Setups Sheet 2 of 2 SWEEP MODE LINEAR LINEAR LINEAR START 000V 000V 2 5000V STOP 1 000V 1 000V 2 5000 V STEP 010V 010V 0500V COMPLIANCE 100 0mA 100 0mA 20 00mA START 10 00 A STEP 10 004A NO OF STEP 5 COMPLIANCE 2 0000V VS SOURCE COMPLI 0V 105mA 0V 105mA 0V 105mA 0V 105mA NAME SOURCE COMPLI 0V 100mA NAME SOURCE COMPLI SOURCE 1 DISPLAY MODE GRAPHICS VCE VDS VF LINEAR LINEAR LINEAR LINEAR 0000V 0000 V 2 5000 V 5000V 1 0000 V 1 0000V 2 5000V 2 0000V I3 16 IF LINEAR LINEAR LINEAR LINEAR 000A 000A 000A 10 00mA 10 00mA 10 00mA 1 0004 40 00mA 3 96 Model 41458 GENL General setup assigning all names and 1 names B Tr VCE IC Setup for measurement of NPN bipolar transistors When the transistor is connected to the 16058 test fixture as shown below V Ic eolleetor emitter voltage eollector current characteristics common emitter Bipolar Transistor can be measured Also IC TH is assigned as the User Funetion FET YDS ID Setup for measurement of N channel junction FETs Field Effeet Transistor When the FET is connected to the 16056A test fixture as shown below Vos I drain source voltage drain current characteristics of a common drain FET be measured D DIODE VF IF Setup for measureme
33. Office for service and repair to ensure that safety features are maintained DANGEROUS PROCEDURE WARNINGS Warnings such as the example below precede potentially dangerous procedures throughout this manual Instructions contained in the warnings must be followed WARNING Dangerous voltages capable of causing death are present in this instru ment Use extreme caution when handling testing and adjusting SAFETY SYMBOLS General Definitions of Safety Symbols Used On Equipment or In Manuals WARNING CAUTION Instruction manual symbol the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument Indicates dangerous voltage terminals fed from the interior by voltage exeeeding 1000 volts must be so marked Protective conductor terminal For protection against electri cal shock in case of a fault Used with field wiring terminals to indieate the terminal which must be connected to ground before operating equipment Low noise or noiseless clean ground earth terminal Used for a signal common as well as providing protection against elec trical shock in case of fault A terminal marked with this symbol must be connected to ground in the manner described in the installation operating manual and before operating the equipment Frame or chassis terminal connection to the frame chas sis of t
34. Prompt SKP32 is displayed on this page 2 Self Test Two Self Tests are performed when this softkey is pressed They are as follows 1 MPU Test Cheeks the ROMs and RAMs If an abnormality is detected an error eode will be displayed in the center of CRT 2 SMU Test Cheeks 8MUs 1 through 4 and their control circuit If an abnormality is detected CHAN 11 1 DOWN 11 or CHAN 10 20 31 40 will be displayed In the latter SMU3 is down If the SELF TEST detects an abnormality contact the nearest Hewlett Packard Sales or Service Office Figure 3 34 DIAGNOSTICS Page Sheet 1 of 3 TT SECTION III Model 41458 2 Feet Front Panel Test This softkey is used for testing the operation of the front panel controls When this key is pressed the display will change to that shown in Figure B and the front panel lamp test will begin In the lamp test all lamps on the front panel are momentarily turned on and then turned on one at that time During the lamp test no keyboard operations ean be performed When the lamp test is completed the rotary dial test and key test can be performed To perform the rotary dial MARKER test rotate the dial and observe the COUNT display on the CRT Rotating the dial clockwise 360 degrees increases COUNT by 120 rotating the dial counterclockwise 360 degrees decreases COUNT by 120 COUNT can be reset to zero by pressing the CLEAR key In the key test NEXT KEY shows number of the key th
35. Set the THOA to Standard mode Connection to the Plotter 1 Equipment HP IB plotter setable to LISTEN ONLY and an HP IB Cable e g 108338 2 Interconnect the 4145B and the plotter as shown below 41458 3 Turn off the plotter 4 Set the plotter to LISTEN ONLY mode and then turn it on Plotting all the existing display 1 Select the desired page If the GRAPHICS PLOT LIST DISPLAY MATRIX DISPLAY or SCHMOO PLOT page is to be plotted measurement can be made before the plot 2 Press the PLOT key 3 The following will be displayed on the Keyboard Input Line Upper righr X v PLOT 200 200 7400 4800 Xmin Ymin Xmax Ymax These values represent the lower left Xmin and Ymin and upper right Xmax and coordinates of the plot area that was used in the last PLOT operation Lower lett K T Figure 3 41 Plot Function Sheet 1 of 3 3 01 SECTION Model 4145B Note The values displayed the Keyboard Input Line when the PLOT key E pressed are in 025mm units Note that the maximum value of the X coordinate and Y coordinate for the recommended plotters are different Refer to the plotter s manual 4 If necessary change the displayed values with the EDIT Keys ENTER key is not required The following limitations must be observed Xmin Ymin and Ymax must not exceed 32767 B The specified plot area must be within the limits of the plotter C Each valu
36. These keys control the positioning of the field pointer P and the long and short cursors They do not control the cursor on the Keyboard Input Line Field Pointer Control Pressing the 4 G key moves the field pointer M in the indicated direction The FAST key cannot be used for field pointer control Long Shert Cursor Control Pressing the gt 41 or key moves the cursor in the indicated direction Movement continues until the key is released Two direction keys can be pressed simultaneously to move the eursor diagonally Pressing the FAST key in conjunction with one or two of the direction keys causes the cursor to move more rapidly E SECTION MARKER Control Dial This dial controls the marker or on the GRAPHICS PLOT page Rotating the dial clockwise moves the marker from the sweep start point to the sweep stop paint AUTO CAL KEY This key enables continuous auto calibration of the 4145B The AUTO CAL funetion is set to ON key indicator lamp on when the instrument is turned on Refer to paragraph 3 42 for details 8 17 18 DATA ENTRY Keys These keys are used to enter numeric values arithmetic operators and engineering units Data entered with these keys is displayed on the CRTs Keyboard Input Line and entered into the display buffer by pressing the ENTER key An arithmetic expression entered with these keys is executed by pressing the EXECUTE
37. These keys start and stop the ASP Auto Sequence Program listed on the SETUP AUTO SEQUENCE page Refer toa paragraph 3 66 for details on Auto Sequence Programs START STOP Starts the ASP from line 1 If pressed during the ASP the ASP stops immediately Once stopped the ASP cannot be continued from the stop point CONT If the ASP contains PAUSE statement this key continues the program from the line immediately follow ing tha PAUSE statement INTEG TIME Keys These keys are used to select the digital integration time When MED or LONG integration amp selected the integration time is an integral number of the line frequency period eliminating line frequency noise SHORT is the initial control setting The integration time can be changed at any time even during measurement SHORT Measurement data is stored directly into memory without integration Integration time is set to one line frequency period Sixteen samples are taken at each Measurement point Integration time set to sixteen line frequency periods total of 256 samples are taken at emeh measurement point Figure 3 2 Front Panel Features Sheets 2 of 6 3 3 SECTION 3 4 HP IB Status Indicators and LOCAL Key These four LED lamps SRQ LISTEN TALK and REMOTE indieate the status of the 414568 when interfaced with a controller via the HP IB of connected directly to a printer plotter The LOCAL
38. V 2 I _ 3 5 SOURCE FUNCTION 1 4 1 VARI 2 VAR2 3 CONST 4 VARI nothing is specified after the channel number the channel is turned off NOT USE ek When SOURCE MODE is set to 3 COM SOURCE FUNCTION must be set to 3 CONST Setup for Vs and Vs2 VS N XXXXXX N TERM 1 2 3 1 Vs channel number 1 or 2 2 V NAME up to 6 characters 3 SOURCE FUNCTION 1 4 1 VARI 2 VAR2 3 CONST 4 VARI If nothing is specified after the channel number the channel is turned off NOT USE Setup for Vm1 and VM N TERM 1 2 1 Vm ehannel number 1 or 2 2 V NAME up to 6 characters Tf nothing is specified after the channel number the channel is turned off NOT USE Figure 3 52 Remote Program Codes and Parameter Setting Sheet 2 of 9 3 104 Model 41458 SECTION SOURCE SETUP Page program code 5 Setup for VARI XX M 2NN NNN M NNMN N NNNN N NNM TE TH m m uu dj 1 SOURCE MODE of VARI VR or IR VR Voltage Source IR Current Source 2 SWEEP MODE 1 4 Ls LINEAR 2 LOG 10 T LOG 25 4 LOG 0 3 START value 4 STOP value 5 STEP value 8 COMPLIANCE value If SWEEP MODE 2 is set to 2 3 or 4 omit STEP 5 Setup XX N NNNN iN NNNN NN N NNN TERM GI WI 1 SOURCE MODE or the VP or IP VP Voltage Source Current Source 2
39. and waits as if a PAUSE command was executed Refer to Table 3 3 for meaning of the error ecde To continue the program press the CONT key The program continues from the next line Hate If the length of PLOT command exceeds 26 characters line number is not displayed when the ASP is exeuted Figure 3 30 AUTO SEQUENCE SETUP Page Sheet 4 of 4 3 70 Model 4145B SECTION OUTPUT SEQUENCE SETUP PAGE L pl OUTPUT SEQUENCE SET UP SDURCE NAME CHANNEL Voltage ourrent sources are outomotioslly turned on aooonrding to the eequenoe Function of this page Specify the order in which source channels begin output When measurement begins the source channels used in the measurement are turned on in the order specified on this page The source channels output sequence is important when measuring devices such as MOSFET transistors or operational amplifier ICs that have FET inputs Setup When the instrument is turned on the output sequence setup is as shown above change the setup use the CURSOR keys to move the field pointer and the softkeys Note To inelude the OUTPUT SEQUENCE SETUP when storing 8 measurement setup onto the dise you must return to the MENU after setting up this page Only then will the new OUTPUT SEQUENCE SETUP be valid for SAVE P operation Figure 3 31 OUTPUT SEQUENCE SETUP Page 3 11 SECTION Model 4145 USER FILE CATALOG PAGE Available records File name
40. and does not advance to the next page or automatically changes the settings Returns the display to the previous page Each time the key is pressed the instrument cheeks the presently displayed page for any illegal settings MEASUREMENT Keys These keys start and stop the measurement After all measurement conditions have been set and the GRAPHICS PLOT page LIST DISPLAY page MATRIX DISPLAY page or SCHMOO PLOT page displayed measurement i started by pressing SINGLE REPEAT or APPEND Measurement can be stopped by pressing STOP Measurement E sequential operation eonsiting of voltage OF current sweep Measurement and storage of the measurement result SINGLE When this key is pressed results of the previous measurement are erased from memory the new measurement is made and the results are stored in memory REPEAT When the key pressed measurement amp repeatedly made until STOP is pressed Results of the previous measurement are updated during each new mea surement APPEND Functions similarly to the SINGLE key except that results of the previous measurement are not erased from memory of the CRT Results of measurement made using this key are stored in the remaining unused portion of memory and are displayed over loverlay plot the previous plot Measurement ean be made using this key until Buffer full displayed SECTION STOP Immediately stops the measure ments AUTO SEQ Key
41. be copied with this funetion User Area and Operating System Copy 1 Same procedures s that are steps 1 to 3 of Figure 3 61 2 Press the COPY DISC softkey 3 When Copy dise OK is displayed press the EXEC softkey If the QUIT softkey is pressed before pressing the EXEC softkey the Dise Copy operation is cancelled Note The System Dise must be in the 4145B s dise drive if the QUIT softkey is pressed in the cancel procedure 4 Insert the Master Disc dise to be copied and press the EXEC softkey portion of the user area files will be loaded into the 4145B s RAM Thi takes few seconds 5 Insert the Copy Dise target dise and press the EXEC softkey The files loaded into the 4145B s RAM in step 3 will be eopied onto the target disc Note Write protect the Master Dise to protect the files from operational errors B Repeat steps 4 and 5 if instructed to do sa T Copy is finished To copy additional dises press the EXEC softkey and repeat steps 4 and 6 To return to the MENU page press the QUIT softkey insert the System Dise and presa the EXEC or QUIT key Note Do mot use the Dise that cannot complete the Dise Copy operation for the 41458 Note j If you want to copy one file the procedure given below Copy One File 1 Turn on the 21458 2 Load a desired file using the GET function 3 Change dises and store the file by using the SAVE function Figure
42. because source mode has been changed from Y to I INTERVAL or NO OF RDNGS Enter correct value for a time domain measurement Up to 1 for INTERVAL and from 1 to 1024 is set to 0 for NO OF RDNGS Duplications on the OUTPUT Rearrange the output sequence SEQUEN CE SETUP page Buffer full Measurement data exceeds the Data buffer capacity is 1024 measurement capacity of the data buffer points for a single sweep or up to 1150 depends on the number of monitor channels used VAR stepa and the number of times APPEND is used in other cases 3 13 SECTION Model 41458 Table 3 2 Error Messages Sheet 2 of 2 Syntax error An ilegal name was entered in The first character of a file name must be a GET SAVE or RE SAVE alphabetic and all succeeding characters eom mand must be alphanumeric PLOT area not specified Re enter the PLOT area correctly eontains one or more alpha betic characters or is miss ing coordinate delimiters comma or space Hegal file type Use P D or 5 for the file type Bus Auto eallbration being per Auto calibration is performed every 5 formed minutes PRINT Key was pressed with no Perform measurement measurement date in the data buffer No printer or plotter is con Connect the printer or plotter nected to the instrument or the printer or plotter is nat set to LISTEN The discs used in the Copy the Operating System onto the operation have differ
43. both of which appear on the manual s title page Complimentary copies of the Supplement are available from Hewlett Packard If the serial prefix or number of an instrument is lower than on the title page of this manual see Section VII Manual Change 1 20 For information concerning serial number prefix that is not listed on the title page or in the Manual Change supplement contact the nearest Hewlett Packard office 1 21 OPTIONS 1 22 Options are modifications to the standard instrument that implement the user s special requirements for minor functional changes The 4145B has following Options Option 050 For 50 Hz Line Frequency Option 060 For 60 Hz Line Frequeney Option 907 Front Handle Kit Option 908 Rack Flange Kit Option 909 Rack Flange and Front Handle Kit An extra copy of the Operation and Service Manual Option 910 Installation procedures for option 907 908 and 909 are given in Section II 1 4 01 98 The Model 4145B 1 23 ACCESSORIES SUPPLIED 1 94 The Model 4145B Semiconductor Parameter Analyzer along with its furnished accessories is shown in Figure 1 1 In addtion an Operation and Service Manual is furnished with the 41458 1 25 ACCESSORIES AVAILABLE 1 26 HP 16267A File Transfer Software HP 16268A BS amp DM File Creation Software and HP 92192A Double sided Micro Flexible Dises are available The File Transfer Software enables you to transfer files from the 4145A to the
44. circuit is functioning properly and thus measurement can not be made Softkey Prompts 5 The MENU page has two softkey prompts SKP1 and SKP2 as shown in Figure SKPI is displayed when the MENU page first appears To display SKP2 press the EXTN softkey to re display SKP1 press the EXTN softkey again Note If the instrument is turned on after experiencing an extreme change of ambient temperature one of error code may be displayed In this case allow the instrument to fully warm up lignor the displayed error code and then turn it off and on one time Figure 3 22 MENU Page Sheet 2 of 2 4 34 Model 41458 SECTION CHANNEL DEFINITION PAGE Figure A Purpose and funetion of this Page 1 assign voltage V and current I names to each channel that will be used in the measurement 2 To set the source mode of each SMU Determines whether the SMU will be used V source or I source 3 To set the source funetion of each SMU Determines whether the SMU will be used as constant SOuree or variable source 4 To define User Functions Initial Condition When the 4145B is turned on the CHANNEL DEFINITION page is automatically setup shown in Figure and the field pointer will be located in the V column of i SMUI This setup is the GENL measurement setup stored on each dise Refer to paragraph 3 98 Field Pointer amp Changing or entering V
45. key Engineering Unit Keys Four engineering units are available m milli 1073 miero 1075 n nano 10 9 and p pico 10 1 for use with the numeric keys Arithmetic Operator and Funetion Keys Nine arithmetic operators and functions are avallahle J7 A EEX seientifie notation for use in arithmetic calculations Five additional operator and functions are available with the alphabetic blue keys exponentiation LOG LN naturel log EXP naturel base and ABS absolute The SPACE key is also ineluded in this key group Humerie Keys These keys 0 through 9 and decimal peint are used for entering measurement parameter values and for making quick arithmetic calculations Figure 3 2 Front Panel Features Sheets 4 of 6 3 5 SECTION 19 3 6 EDIT Keys These keys are used to edit data displayed on the Keyboard Input Line BACK FORWARD DELETE Moves the Keyboard Moves the Keyboard Input Line cursor left position If this key is pressed while the eursor is at the left most position the displayed text will move to the right Input Line cursor right position If this key is pressed while the cursor is at the right most position the displayed text will move to the left Causes the charaeter at the position of the cursor to be deleted The cursor remains at the same position and all text to the right of
46. key when pressed releases the 41458 from remote HP IB control and enables eontrol from the front panel The LOCAL key does not funetion when the instrument is set to local lockout by the controller or in the GL mode PLOT and PRINT Keys The PLOT key is used to dump whatever is displayed on the CRT direetly onto an HP IB graphics plotter eg HP7440A without controller A measurement curve be plotted from the GRAPHIC PLOT page by pressing the green key before pressing the PLOT key Plot area can be set from the 4145B s front panel Plotting starts when EXECUTE pressed Pressing FLOT second time stops the plot immediately Refer to paragraph 3 94 for more information on the PLOT funetien The PRINT key functions similarly to the PLOT key except that a printer is used instead of plotter and only alphanumeric data is output If the PRINT key is used to output the results of a graphie plot for example only the numerik value of eech measurement point is printed Refer to paragraph 3 96 for more information on the PRINT function Model 41456 10 BLUE Key and GREEN Key These keys are used to eccess additional key functions Additional key funetions mre labeled in blue and green BLUE Key Thi key amp wed when entering comments varia bles and program names Onee this key is pressed key indicator lamp on it remains on until pressed again When the CHANNEL DEFINITION page is di played or when
47. monitor channels 3 Set up the display parameters MEASUREMENT MODE The exiting MEASUREMENT MODE SWEEP TIME DOMAIN displayed on this page but eannot be ehanged on this page MEASUREMENT MODE depends on whether or not VARI is assigned to source channel SMU or Vs on the CHANNEL DEFINITION page If VARI is assigned MEASUREMENT MODE is SWEEP if not MEASUREMENT MODE is TIME DOMAIN Refer to paragraph 3 80 for details on TIME DOMAIN measurements DISPLAY MODE Selection When this page is initially displayed the field pointer amp will be located on the DISPLAY MOLDE line and the display modes GRAPHICS LIST MATRIX SCHMOO will be listed in the softkey prompt area of the CRT The table below the DISPLAY MODE line will change depending on which display mode is selected The field pointer will automatically move as names are selected and values are input and the softkey prompts will change depending on the location of the field pointer DISPLAY MODE can be selected only when the field pointer is on the DISPLAY MODE line To select the DISPLAY MODE press the desired softkey The field pointer will automatically move to the NAME field of the DISPLAY MODE table Figure 3 25 MEAS amp DISP MODE SETUP Page Sheet 1 of 6 3247 SECTION Model 41458 GRAPHICS PLOT Setup Pressing the NEXT key when this page is amp s shown in Figure A will display the GRAPHICS PLOT p
48. monitors in paragraph 3 25 SECTION z 5 g Source and Measurement Channels of the 41458 Figure 3 8 1 22 Protection against Hazardous Voltage Exceeding 42V 3 23 To inure operator safety the 41458 is equipped with a high voltage detect cireuit that shuts dawn the SMUs and voltage sources when potentially dangerous condition exists If the lid of the 18058A Test Fixture not closed at the start of measurement in which there is a possibility thar the voltage out put from at least one SMU will equal or exceed 471 or if the lid is opened during such measurement the measurement will be aborted as if the STOP key had been pressed A switch inside the 1 5 Test Fixture detects whether the fixture lid is open or closed When the lid is closed the switeh connects the OPEN CLOSE line of the system cable to ground allowing the output voltage from any all of the SMUs te exeeed 242V When the lid is open however the OPEN CLOSE line is open circuited limitting output voltage to 42 When the 4145B is used for an application that does not require the 16058A Test Fixture the Shorting Conneetor P N 04145 61623 furnished with 4145B should be connected to the system cable connector on the 41458 rear panel The Shorting Connector grounds the OPEN CLOSE to allow maximum output from the 3 21 SECTION Source Monitor Units SMU 4 25 A simplified circuit
49. not connected to the SMUs The Connection Switch is as shown Example 4 Blank Teflon Board This board is used when measuring high resistance components or components that can not be measured with the other Socket Boards To connect the component use the miniature elip lends P N 16058 61602 Figure 3 36 DUT Connection Using the 18058 Sheet 3 of 4 Model 41458 SECTION 5 Turn the 41458 and set up the measurement as required B Close the test fixture lid and press SINGLE REPEAT or APPEND to start the measurement Not If the output voltage from an SMU or Vs will exceed 142V during the measurement the test fixture lid must be closed to start the measurement If an attempt is made to start the measurement while the test fixture lid is open Close the fixture lid will be displayed on the CRT and measurement will not begin Note If the test fixture lid is opened during a measurement in whieh the output voltage exceeds 42V measurement will stop immediately and all sources will be turned off 0V as if the STOP key had been pressed 7 The figure below shows the connections between the 41458 and the 160584 Shu rting bar on the rear panel Figure 3 36 DUT Connection Using the 16058 Sheet 4 of 4 3 85 SECTION Model 41458 3 86 DUT Connection Using the Connector Plate 3 87 The furnished connector plate P N 04145 60001 has four BNC connectors and four triaxial connectors
50. of a complete measurement system in the laboratory or on the production line 1 6 For device stimulation and characteristics measurement the 4145B has eight channels Channels 1 through 4 are Source Monitor units SMU ehannels 5 and 6 are voltage souree units Vs and channels 7 and 8 are voltage monitor units Vm Each SMU channel has three modes of operation voltage source eurrent monitor V current source voltage monitor 1 and COM Souree voltage and souree eurrent can be held constant or swept linearly or logarithmically When used as a voltage sourece current monitor V mode each SMU can be programmed to output DC voltages from 0 to 100V over three 0 to 19 999V 20 to 39 998V and 40V to 100V with a resolution of 1mV 2mV and 5mV respectively When used as eurrent source voltage monitor I mode each SMU can be programmed to output currents from 1 to 100mA over nine ranges with a resolution of 1 max current measurement resolution is 50fA max depending on the current range Current through the sample in V mode and voltage across the sample in I mode can be limited to prevent damage to the sample The two Vs channels are programmable voltage sources Output voltage can be held constant or linearly or logarithmically swept from OV to 20V with 1 resolution The voltage sources are used when many bias and voltage sources are required 1 7 Measurement
51. or delete an existing comment For example to delete comment press the COMMNT softkey CLEAR the Keyboard Input Line and press ENTER RIGHT Shifts the monitor channel columns to the right Shifts the monitor channel columns to the left Rolls the list 2 Rolls the list down These softkeys allow the operator to view all measurement results Refer to Figure B When the ROLL UP or ROLL DOWN softkey is pressed and held line movement is continuous Note When ROLL UP DOWN is performed during measurement which has more than 100 steps displayed values may include rounding errors Figure 3 27 LIST DISPLAY Page Sheet 3 of 3 3 61 SECTION Model 4145 MATRIX DISPLAY PAGE SKP25 8 VARISTART STOP STEP values MATRIX DISPLAY sx 2 888V tn ia EE t2 oen b VAR2START STOP STEP values Monitor Channel or User Function NAME d Line number of the top line e VARI step values f Measurement results obtained at each VARI and VAR2 step re 2 step values Figure A Function of this page 1 Display the measurement results obtained at each VARI and VAR2 step for the monitor channel selected the MEAS DISP MODE SETUP page 2 Allow analysis of measurement results with the softkeys and arithmetic eapabilities MEASUREMENT Each time this page is displayed the results of the previous measuremen
52. page and on the Z axis limits as defined on the MEAS amp DISP MODE SETUP page SCHMOO DCH data is contained in an ll byte data group that has the same structure as the ID TABLE strueture shown in Figure 2 87 Z axi limits are written using the 4145B s 4 byte floating point data format shown in Figure 3 68 TBCB Time Base Control Block bytes 571 through 582 TECE contains Wait Interval and Number of Steps data Each data group is written using the 4l45B s 4 byte floating point data format shown in Figure 3 68 Figure 3 74 shows TECE structure and provides more information MCCB Measurement Channel Control Block bytes 615 through 623 This block contains measurement mode measure not use measurement range data Data is contained in S byte data group Figure 3 75 shows MCCB structure and provides more detailed information OSEQ OUTPUT SEQUENCE bytes 625 through 630 Thi block contains channel SMUs 1 a 4 and V52 output sequence data Figure 3 76 shows strueture and provides more detailed informat ion SECTION 13 DATA ST DATA STORE byte 760 This byte shows whether the Measurement Data sector contains measurement data or not no data lH date 3 181 Measurement Data Sector 3 152 This sector contains Measurement date and data header information The measurement data portion contains SMU status and channel number data in addition to the measuremen
53. paragraph 3 84 and connection using the furnished connector plate in paragraph 3 86 4145B 3 84 DUT Connection Using the 16058 3 85 The 18058 Test Fixture is designed to connect packaged devices such as transistors diodes and ICs to the SMUs voltage sources and voltage monitors om the 41458 Eight different interchangeable DUT Socket Boards are furnished with the 18058A Connection between the 41458 and 16056A is shown in Figure 3 36 Also shown are examples using four of the furnished DUT Socket Boards The procedure for connecting the 18058 is as follows 1 Turn off the 41458 If the 24 pin Shorting Connector P N 04145 61623 is connected ta the System Cable connector on the rear panel remove it 2 Connect the 16058A to the 41458 as shown below Use the furnished System Cable P N 16058 61604 and triaxial cables P N 16058 61603 The System Cable eontains the Va lines Vm lines and the fixture lid open detection line CAUTION THE SYSTEM CABLE CONNECTOR AND THE HP IB CON NECTOR BOTH OF WHICH ARE LOCATED ON THE 4145B 8 REAR PANEL ARE IDENTICAL DO NOT CONNECT THE 160584 TO THE HP IB CONNECTOR OR THE CABLE TO THE 4145655 SYSTEM CABLE CON NECTOR 3 Select a DUT Socket Board suitable for the device to be measured and insert it into the 16058A s Personality Board To insert the board pull out the two black fasteners place the soeket board on the Personality Board so that it co
54. printer plotter External CRT Output Connectors Three BNC f connectors for connection to an external X Y Z display Refer to paragraph 3 142 Figure 3 3 Rear Panel Features Sheet 2 of 2 3 9 SECTION 3 5 MICRO FLEXIBLE DISC HANDLING 3 6 One system dise is furnished with the 41458 The system dise contains the 41458 and 573k bytes of user ares Precautions on handling and storing the Micro Flexible Dies are given below 1 Make sure the shutter i closed when the dise not in use 2 Store dises in clean dry fireproof cabinet Do not expose to direct sunlight extremes of temperature or humidity or magnetic field 3 Do not touch the exposed surface of the disc 4 Use soft felt tip pen to label your disc and be careful to write only in the label ares 5 Do not try to clean the die Note There is always amp chance of losing disc data The best protection against data loss of system data loss is frequent back up of your files Refer to paragraph 3 144 Initializing Disc 3 146 Operating System Copy information on the disc Write protect discs that contain valuable programs and data Write protecting ensures that the disc drive cannot write over or delete TO WETE DATA TO THE Diii SLIDE THE PLASTIC BUTTON UP Model 41458 Precaution on inserting and removing the Micra Flexible Dises are given below Insert the dise with the metal shutter toward the dri
55. right and left front of instrument with screws provided 4 HANDLE AND RACK MOUNTING Attach front handle and rack mount flange together to sides at right and left front of instrument with serews provided 5 When rack mounting 3 and 4 above remove all four feet lift bar at inner side of foot and slide foot toward the Figure 2 3 Rack Mount 2 5 Model 41456 SECTION SECTION Ill OPERATION 3 1 INTRODUCTION 3 2 This section provides all the information necessary to operate the Model 41456 Semiconductor Parameter Analyzer Included ere deseriptions of the front and rear panels graphics display lamps and connectors discussions on operating procedures and measuring techniques for typical applications and instructions on the instruments self test funetion and HP IB capabilities A breakdown of the contents of this section B given in Figure 3 1 Warnings and cautions are given throughout they must be observed to insure operator safety and continued instrument serviceability WARNING BEFORE THE INSTRUMENT 1 TURNED ON ALL PROTECTIVE EARTH TERMINALS EXTENSION CORDS AUTO TRANSFORMERS AND DEVICES CONNECTED TO THE INSTRUMENT MUST BE CONNECTED Basic Operation paragraphs 3 3 through 3 44 Graphies Display paragraphs 3 45 through 3 81 Measurement Basies paragraphs 3 82 through 3 99 Measurement Example paragraphs 3 100 through 3 109 TO PROTEC
56. shows DACE date group structure and provides more detailed information DCH Display Control Block bytes 401 and 402 This block eontains display mode data Figure 3 72 shows DCB structure and provides more detailed information GRAPHIC PLOT DCH bytes 403 through 463 This block contains data on the ID TABLES to be diplayed on the GRAPHIC PLOT page and on the X Yl and Y2 axes ID TABLE data and data for each axis is contained in a 20 byte long data group and all groups have the same strueture Figure 3 73 shows GRAPHIC PLOT DCB structure and provides more detailed information If the first byte in a data group is space that axis is not used Model 41458 7 8 8 10 11 12 LIST DCB bytes 463 through 528 The LIST DCE contains date on the ID TABLES to be displayed on the LIST page Data for each Measurement Channel contained in an ll hbyte long date group and all groups have the same structure as the ID TABLE structure shown in Figure 3 87 If the first byte in data group spare that Measurement Channel i not used MATRIX DCB bytes 528 through 533 Ths block contains data on the ID TABLE to be displayed the MATRIX page MATRIX DCB data contained in an ll byte data group that has the same structure as the ID TABLE structure shown in Figure 3 67 SCHMOO DCB bytes 540 through 570 This block contains date on the ID TABLE to be displayed the SCHMOO PLOT
57. the Four SMUs Model 41458 Table 3 8 SMU Source Ranges The 100 range consists of three subranges CAUTION NEVER APPLY VOLTAGE OR CURRENT EXCEEDING LIMITS SHOWN IN THIS FIGURE Figure 3 10 Specifiable Voltage Current Output SECTION 3 23 SECTION Model 41458 Source Voltage MenitTar va Figure 3 11 Simplified Circuit Diagram of Vs Figure 3 12 Simplified Circuit Diagram of Vm SMU s Voltage Monitor DV 1mVY to 2100V 3 ranges j j m M 1 l0mV 10mV 1V 10V 100V Mate The SM voltage monitor range is auto matically set to the lowest range that includes the specified COMPLIANCE b Voltage Monitor Vm UV 0 1mV to 20V 2 ranges n 7 1V Includes OV 1v Figure 3 13 Measurement Ranges and Resolution 3 24 Model 41456 SECTION SMU s Current Monitor 0 0 05pA to 105 Sranges Range 1 5uA SpA 10 20 9 100 5nA Auto ranging 1 5 0 is included 1 Hote The maximum range in auto ranging mode is the lowest range that includes the specified COMPLIANCE Figure 3 13 Measurement Ranges and Resolution 3 25 SECTION 3 30 Resolution and Format for Displayed Data and Data Output 3 31 The 4145B manipulates the raw data with user functions to calculate or GM for example or analysis functions such as Mark
58. the base emitter voltage VE will be lineary swept from OV to 0 9V in 10mV steps Press the Key 3 106 On this MEAS amp DISP MODE SET UP page the mode for displaying the measurement results are selected Four mode are available GRAPHICS LIST MATRIX and SHMOO For this measurement the GRAPHICS display mode is used To set up this page shown in Figure 3 48 perform the following key sequence SS 9 2 a ae C0 0 22 COO 3 Press the key 3 107 All measurement conditions have been set and the 41458 is now ready to make the measurement Close the test fixture lid shields the DUT from RFI AND EMI sourees and press the key The 41458 will begin sweeping the base emitter voltage VE from UY to 0 9 in l mV steps The resultant eolleetor current and base current IB will be measured at each VE step and plotted on the CRT as shown in Figure 3 49 The curve with the more acute slope is collector current and the other curve is base current SECTION HHHHHH SET UF HHHHHM Figure 3 47 Source Setup Example MEAE DI amp EP HODE ue Figure 3 49 Measurement and Display Example 3 99 SECTION 94 108 Measurement results at each measurement step can be digitally displayed by pressing the softkey When the MARKER dial is rotated marker will move along the plotted curve and the X Yl and Y2 coordinates will be
59. with Output 150pF 10 SECTION SECTION 1 Model 41458 1 8 Table 1 1 Specifieations Sheet 4 of 8 SPECIFICATIONS COMMON TO ALL CHANNELS Maximum Withstand Voltage LOOV SMU guard terminal Vs and Maximum Vollage Between Common and GND Less than 432V Source Modes SMUs Only V voltage source current monitor I current source voltage monitor and COM Source Funetions 8MUs Only VARI staircase sweep VARI synchronous VARI stalrease sweep VAR2 subordinate VARI staircase sweeps CONST constant source voltage or current n COM mode output voltage is 0V and compliance is 105 Voltage Current Sweep Output from each SMU voltage or current and each Vs voltage can be swept by assigning source function VARI VARI or VAR Max Number of St t 512 in single sweep measurements up to 575 in multi sweep measurements VARI Mainsweep Linear or logarithmic sweep is selectable Linear Sweep Staircase sweep in accordance with the user specified START Sror and STEP values Log Sweep Staircase sweep in accordance with the user specified START and STOP values and selected LOG step 10 25 or 50 points per decade VAR Subordinate linear staircase sweep in accordance with the user speci fied START STEP an NO OF STEPS values VARZ source channel output is intremenebed one STEP each time the VARI source channel completes one sweep VARI Staircase sweep synchronized with the VA
60. 2 MEDIUM IT3 LONG SELF TEST SF Data Ready Service Request If DR1 is sent Data Ready Service Request ON bit 1 Data Ready and bit 7 RQS of the 4145B s STATUS BYTE are set to 1 when measurement data is valid DR0 OFF DR1 ON HP IB Data Buffer Clear To clear the HP IB data output buffer and bit 1 Data Ready of the Status Byte Buffer Clear must be performed before data output from the 4145B BC Auto Calibration CA0 OFF CAl ON Auto calibration in the User Mode is performed only once when CAI is sent Also if the mode is changed Auto Calibration is set to OFF PLOT function PL NNN NNN NNNN TERM a 2 3 4 Xmin Ymin Xmax Ymax PLOT funetion OFF Refer to paragraph 3 140 for instruction covering HP IB controlled plot operations Note After PF is sent send the following statement to set the ATN line to Inactive SEND 7 UNT UNL TALK 17 LISTEN 5 DATA Address of the 4145B 17 Address of the plotter 5 ID Identification output Refer to paragraph 3 134 Figure 3 52 Remote Program Codes and Parameter Setting Sheet 9 of 9 3 111 SECTION 3 126 HP GL CONTROL OF THE CRT 3 127 The 4145B s CRT ean be controlled via the HP IB by using HP GL Hewlett Packard Graphics Language commands There are two HP GL modes GLl which can be used only when the 4145B is operating in System Mode and GL2 which can be used only in User Mode Each HP GL mode is
61. 3 63 Disc Copy Procedures 39 SECTION Model 41458 3 150 FILE TRANSFER 3 151 The 41458 can transfer all of the files Program file Data file and ASP file from the 4145 or another 4145B s dise without the aid of controller When the files are transfered from 4145A HP 16267A File Transfer Dise for the 4145 not furnished is needed Operating instructions for the FILE TRANSFER funetion are given in Figure 3 64 From the HP 41454 Connection 1 Equipment HP 162678 File Transfer Software Dise for the 41454 and HP IB cable 2 Interconnect the 4145H and 4145 4 as shown below 41454 41458 Note Except for the 4145A and 41458 nothing is with the HP IB cable Transfer i rie the HP 18267A File Transfer Software Disc to the 4145A built in dise rive Turn the 41454 on Insert the System Dise and turn the 4145B on For the 4145A press the CATALOG softkey For the 41458 press the CATALOG softkey on the MENU page and press the EXTN softkey For the 4145A remove the File Transfer Software Die and insert the disc containing the setup programs Auto Sequence Programs and measurement results to be copied to the 4145B s Disc For the 4145B insert the copy disc target disc For the 4145A press the SEND DATA softkey and for the 4145B press the DATA softkey The filename of the file being transferred will be displayed If the ABORT softkey on the 4145A or 41458 is pressed before the transfer is complet
62. 4145B s dise When the files ere transfered from 41454 HP 16267A File Transfer Software Dise for the 41454 not furnished amp needed The procedures are given in paragraph 3 150 This softkey is used for transfering all of the files from the 4145B s onto another 41458 dise The procedures are given in paragraph 3 150 PE This softkey is used for deleting all files from the dsie To purge all files press the PURGE ALL softkey and press the EXEC softkey If the QUIT softkey is pressed before EXEC softkey the PURGE ALL operation is cancelled Figure 3 312 4145B FILE CATALOG Page Sheet 4 of 4 1 15 SECTION Model 41456 OPERATION GUIDE PAGE OPERATION GUIDE ses DIRLA rm OIN 3n Function of this page Provide basic operating instructions Included are descriptions of the display control keys display relationships amd amp list of error messages and error codes This page has seven sereens To view screens 2 through use the NEXT or PREV key Construction Sereen flow is as shown below The MENU key ean be pressed at any time Figure 3 33 OPERATION GUIDE Page Model 41458 SECTION DL AGCHOSTICS REGULAR SELFTEET FARE FROHT TEST GRAPHIC TEST PATTER UUUUBE ED Functions of this page 1 Perform Self Test 2 Perform Front Panel Test 3 Perform Graphic Display Test softkey funetions One Softkey
63. 50 Cabe HF 120 1565 Plug 1014P 103 15 Cable HP A1 1378 Plur 7 11 2507 Cable 6127 1196 OPTION 817 Plug DHCR 107 220 Cable amp 30 2956 OPTION 318 Flug JIS C 8303 125 15A Cable HF 8120 4753 Plug option 905 is frequently used for interconnecting system components and peripherals Figure 2 2 Power Cables Supplied SECTION Ii 2 23 STORAGE AND SHIPMENT 2 24 ENVIRONMENT 2 25 The instrument may be stored or shipped in environments within the following limits Storage Not including the mass storage medium Temperature 22 C to 455 C Humidity 8 to 80 RH Including the mass strorage medium Temperature 4 C to 53 C Humidity 8 to 80 RH Shipment Not including the mass storage medium Temperature 40 C to 62 C Humidity 8 to 80 RH Including the mass storage medium Temperature 40 C to 60 C Humidity 8 to 80 RH The instrument should be protected from temperature extremes which cause condensation inside the instrument 2 26 PACKAGING 2 27 Original Packaging Containers materials identical to those used in factory packaging are available from Hewlett Packard If the instrument is being returned to Hewlett Packard for servicing attach a tag indicating the type of service required return address model number and full serial number Also mark the container FRAGILE to assure eareful handling In any corresponde
64. 5B be operated on the bench or in rack mount The 4145B is ready for beneh operation as shipped from the factory For bench operation two leg instrument stand is used For use the instrument stands are designed to be pulled towards the front of instrument 2 21 Installation of Options 907 908 and 909 2 22 The 4145B can be installed in a rack and be operated as a component of a measurement system Rack mounting information for the 4145B is presented in Figure 2 3 240 OPERATION 220V I20V 220 120V 240v 100V 240V 100V Tr 220 OPERATION A H Fuse 1 25A 250V HP P N 2110 0305 Figure 2 1 Voltage and Fuse Selection 2 2 Model 4145B OFTION 900 Dsited Kingdom Line Flug BS IDEIA 290 Cable 1 20 151 OPTION 902 European Continent Plug CEE VII 2507 Cable HP 8120 1439 OPTION 04 U S Canada Lise 1 Plug 6 15P 250 15A Cable HP 2120 0698 OFTION 906 Sii heeded Plug DB11 1959 24507 Type 12 250 Cable HP 2120 2134 OPTION 817 India Republie of S ATrica Heuteal Plug SARS 164 2507 Cable 8120 4111 Ench option number includes Yamily of corda and connectors of various materials and plug body configurations straight 90 ete SECTION OPTION Bol Australia Zealand Nt F Meutral Plug HESS BBH AS C112 2
65. 94 sets of measurement results or 240 Auto Sequence Programs be stored in the user area of the System Dise by executing a SAVE or RE SAVE and ean be recalled later by executing a GET 1 9 instrument functions are handled by high speed mieroprocessor under the control of the operating system software stored on each furnished micro flexible dise Measurement setup display mode selection graphic sealing diagnostics operation guide menu and catalog are arranged as individual display pages The MENU PREV and NEXT keys control movement through the individual display pages Instructions softkey labels and error messages and codes are displayed on each page Also the 4145B is remotely controllable via the HP IB and the 4145B s display be used as independent display via the HP IB 1 10 Furnished with the 4145B is the 16058A a specially designed shielded test fixture which connects to the 4145B s rear panel Eight different interchangeable DUT boards provided allowing measurement of diodes 3 terminal and 4 terminal transistors 8 pin 10 pin and 12 pin devices and 18 pin and 28 pin DIP ICs The 16058A is equipped with a light shielded lid to allow stable measurement of light sensitive devices such as photo diodes photo transistors and photo resistors Also to insure operator safety when potentially dangerous voltages are applied to a sample a warning will be displayed on the 4145B if the test
66. A 1 channels VAR2 however can be Il i m selected if desired WARI can not be used Because VARI is not assigned on the CHANNEL DEFINITION page the VARI column on the SOURCE SETUP page is blank Enter the SOURCE and COMPLIANCE values for each CONSTANT source If VAR is to be used enter the sweep SSS TT parameters WAIT TIME Identical to the HOLD TIME of a VARI sweep measurement Settable range is 0 to 100 seconds with 10 millisecond resolution INTERVAL The time between measurements Settable range is 01 te Ld seconds with 10 millisecond resolution HO OF RDNGS The number of measurements to be made If VAR is used this is the number of measurements to be made at each VAR step Settable range is 1 to 1024 However if VAR HO OF STEP x OF RDNGS 1140 buffer full will be displayed when measurement is made 3 80 Model 41458 SECTION Example Measure ment Note If INTERVAL is too short error code e g Error 008 will be displayed In this case data is meaningless because the next measurement begins before the present measurement is completed This meaningless data is not displayed Figure 3 35 Time Domain Measurement Setup Sheet 2 af 2 3 81 SECTION 3 82 DUT CONNECTION 3 83 DUTs ean be connected to the 41458 through the 160584 Test Fixture or through the furnished connector plate P N 04145 80001 Connection using the 16058 described in
67. Analyzer meets the radio frequency interference requirements of directive 1046 84 The German Bundes post has been notified that this equipment was put into circulation and was granted the right to check the product type for compliance with these requirements Note If test and measurement equipment is operated with unshielded cables and or used for measurements on open setups the user must insure that under these operating condi tions the radio frequency interference limits are met at the border of his premises SAFETY SUMMARY The following general safety precautions must be observed during all phases of op eration service and repair of this instrument Failure to comply with these pre cautions or with specific warnings given elsewhere in this manual violates safety Standards of design manufacture and intended use of the instrument Hewlett Packard Company assumes no liability for the customer s failure to comply with these requirements GROUND THE INSTRUMENT To minimize shock hazard the instrument chassis and cabinet must be connected to an electrical ground The instrument is equipped with a three conductor ae power cable The power cable must either be plugged into an approved three contact electrical outlet or used with a three contact to two contact adapter with the grounding wire green firmly connected to an electrical ground safety ground at the power outlet The power jack and the mating plug of the power cable meet
68. HICS LIST MATRIX SCHMOO and TIME DOMAIN GRAPHICS Display Two axes X Y or three axes Y Y Y plot of measured parameters and USER FUNCTION calculations LIST Display Used in conjunction with VARI sweep Up to six measure ment parameters and USER FUNCTION results ean be displayed for each step of the VARI source channel MATRIX Display Used in conjunction with VARI and VAR sweeps Up to six columns of sweep dependent measurement results or USER FUNCTION results ean be displayed SCHMOO Display Used in conjunction with VARI and VAR2 sweeps Sweep dependent measurement results or calculation results are displayed on an X Y Z graph TIME DOMAIN Display Measurement and calculation results are displayed on two axes X Y or three axes X Y Y4 graph as funetion of time VARI sweep is replaced by time Parameters Initial Wait Time 0 to 100 seconds 10 resolution Measurement Interval 10ms to 10 seconds l ms resolution Number of Readings 1024 1 9 SECTION 1 Model 41458 Table 1 1 Specifications Sheet 6 of ARITHMETIC AND ANALYSIS FUNCTIONS Arithmetic Funetions Arithmetic expressions can be entered and executed directly from the front panel Results are displayed on the CRT Arithmetic Operators EXP Napierian constant LOG common log LN natural log exponentiation ABS absolute EEX notation and A differential ealeulatian Keyboard Operat
69. I START STOP and STEP softkeys are disabled when VAR has not been assigned e g Time Domain measurement and when VARI is assigned VAR2 START and STEP softkeys are disabled when VARZ has not been assigned VARI STEP is disabled in log sweeps Also HOLD TIME and DELAY TIME are disabled in Time Domain measurement Figure 3 26 GRAPHICS PLOT Page Sheet 6 of 6 Model 4145B SECTION LIST DISPLAY PAGE SKP24 LApl LIST DISPLAY www 1 0988 in 1 ec SB in 18 QUA Step a VARI START STOP STEP values b VAR2 START STOP STEP values VAR2 value for measurement results in the top row of the list 9 Line number of the measurement results in the top row of the list e VARI step values f Measurement results obtained at each VARI and step Figure A Function of this page l Display the measurement results obtained at each VARI and VAR2 if used step for all monitor channels selected on the MEAS DISP MODE SETUP page 2 Allow analysis of measurement results with the softkeys and arithmetie eapabilities MEASUREMENT Each time this page is displayed the results of the previous measurement are automatically re displayed regardless of the display mode used in the previous measurement If any change is made on the CHANNEL DEFINITION page or SOURCE SETUP page or if NAME on the MEAS DISP MODE SETUP page is changed the results of the previous measure
70. International Electrotechnical Commission IEC safety standards DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard KEEP AWAY FROM LIVE CIRCUITS Operating personnel must not remove instrument covers Component replacement and internal adjustments must be made by qualified maintenance personnel Do not replace eomponents with power cable connected Under certain conditions dan gerous voltages may exist even with the power cable removed To avoid injuries always disconnect power and discharge circuits before touching them DO NOT SERVICE OR ADJUST ALONE Do not attempt internal service or adjustment unless another person capable of rendering first aid and resuscitation is present USE CAUTION WHEN EXPOSING OR HANDLING THE CRT Breakage of the cathode ray tube CRT causes a high velocity seattering of glass fragments implosion To prevent CRT implosion avoid rough handling or jarring of the instrument Handling of the CRT shall be done only by qualified main tenanee personnel using approved safety mask and gloves DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Because of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the instrument Return the in Strument to a Hewlett Packard Sales and Service
71. LAY SCHMOO PLOT Error DXX _ 3 16 Model 41458 SECTION Table 3 4 Hardware Related Error Codes POS The ROM Read Only Memory i amp not functioning properly Error Error 01 POS One of the ten RAMs Ramdom Access Memory is not funetioning Error POT Pil properly Error P21 and P22 MPU s Microprocessor Unit peripheral circuit b not funetioning properly Error M22 MSU Mass Storage Unit Flexible Die and drive amp not functioning properly Try another dise Error Ail SMU controller not functioning properly CHAN DOWN 111 CHAN XX XX XX XX SMU itself is not functioning properly XX shows SMU number and error code Refer to Fig 3 22 If a momentary power loss occurs the 4145B s display may go blank To recover turn off the instrument wait few seconds end then turn on the instrument Hote The 4145B will funetion properly even though error M13 or M14 is displayed SECTION 3 13 INITIAL CONTROL SETTINGS 3 14 To fae itate operation the instrument is automatically set to the following initial control settings each time it is turned on Front Panel Controls MEASUREMENT keys s OFF AUTO SEQ OFF INTEG TIME keys SHORT PLOT PRINT keys e OFF AUTO CAL eee ON BLUE Key enn OFF Internal Setup CRT Display ssc MENU Measurement Program er GENL see note PLOT JArneBeemrin aaa aere menn Lower lef
72. MINAL 15 CONNECTED TO THE NEUTRAL POLE OF THE POWER SUPPLY Line Voltage amd Fuse Selection CAUTION BEFORE TURNING THE 4145B LINE SWITCH TO ON VERIFY THAT THE INSTRUMENT 15 SET TO THE VOLTAGE OF THE POWER TO HE SUPPLIED 2 9 Figure provides instructions for lime voltage and fuse selection The 41408 is ship ped from the factory with the fuse and lime voltage selection switch setting appropriate for the geo graphic area in which the instrument will be used CAUTION USE PROPER FUSE FOR LINE VOLTAGE SELECTED CAUTION MAKE SURE THAT ONLY FUSES FOR THE REQUIRED RATED CURRENT AND OF THE SPECIFIED TYPE ARE USED FOR REPLACEMENT THE USE OF MENDED FUSES AND THE SHORT CIRCUITING OF FUSE HOLDERS MUST BE AVOIDED 2 10 LINE FREQUENCY FILTER 2 11 To reject the effects of line frequency noe set the FILTER switeh on the rear panel to the frequency of the ac power source 2 1 SECTION II 2 12 POWER CABLE 2 13 To protect operating personnel the National Electrical Manufacturer s Association NEMA recommends that the instrument panel and cabinet be grounded The Model 4145B is equipped with a three conductor power cable which when plugged into an appropriate receptacle grounds the instrument The offset pin the power cable is the ground wire 2 14 To preserve the protection feature when operating the instrument from a two contact outlet use a three prong to two prong adapter Japan Part N
73. Model 4145B SECTION III 6 Turn the 4145B and make the necessary measurement setup 7 The figure below shows the connections between the 4145B and the connector plate 4145B 04145 60001 Shorting bar on the rear panel WARNING POTENTIAL SHOCK HAZARD EXISTS WHEN THE SHORTING CONNECTOR IS CONNECTED TO THE 4145B DO NOT TOUCH THE OUTPUT TERMINAL OR INNER CONDUCTOR OF SMU DURING MEASUREMENT Note Do not connect the inner shield guard of SMU to ground 2 or common Figure 3 37 DUT Connection Using the Conneetor Plate Sheet 2 of 2 3 87 SECTION 3 83 SMU OSCILLATION 3 89 The SMUs of the 41456 are high speed amplifiers and es such may osci late under eertain load conditions Devices that exhibit negative resistance characteristics such as tunnel diodes and unijunetion transistors are especially troublesome in this regard since they are almost certain to cause an SMU to oscillate When measuring such devices you must take certain precautions to prevent oscillation Figure 3 38 shows two methods of preventing Model 41456 Oselllationg are not limited to the SMUs the test sample itself may alsa oscillate due to the residual inductances and stray capacitances of the connection cables and test fixture or probe Bipolar transistors that have high hFE amd wide bandwidth are especially susceptible to oselllation Test device oscillation cannot be detected by the SMU s internal det
74. Monitor channel for the specified axis must be one of the monitor channel names specified on the CHANNEL DEFINITION page SCALE la LINEAR zs Low MIN value MAX value axis is optional AT EN KNH EN NNN TERM iystax is TT Setup for LIST mede DM2 LI XXXXXX XXXXXX XXXXXX XXXXXX XXXXXX TERM 1 4 3 r 15 1 Monitor channel NAMES At least NAME must be specified must be the moniter channel names specified on the CHANNEL DEFINITION page Setup for MATRIX mode DMI MX XXXKXX TERM m 1 Monitor channel NAME must be one of the monitor channel names specified on the CHANNEL DEFINITION page Setup for SCHMOO mode DM4 SH XXXXXX NN NN iNN NNN tN NNNN sN NNNN TERM 1 x lei 5 T E i51 Monitor channel NAME must be one of the monitor channel names specified on the CHANNEL DEFINITION page Minimum value for Minimum value A Minimum value for Minimum value for Tf no minimum value is specified for 2 3 4 or 5 the corresponding symbol will not be used in the SCHMOO PLOT comma must be entered however MEASUREMENT Codes program eode MD MEI SINGLE ME2 REPEAT APPEWD MEA STOP The GET Group Execute Trigger command can be used in place of the ME program code An example of the GET command is the TRIGGER command on the 85A or 8845 A Figure 3 52 Remote
75. ON Group controls the vector memory using the memory pointer The vector memory outputs to the CRT the display data at the address designated by the memory pointer The memory pointer scans the vecter memory Using MA MI MC and MK the display can be controlled 3 115 SECTION Model 41458 3 130 DEVICE CLEAR 3 134 IDENTIFICATION OUTPUT 3 131 The 4145B s control settings return 31 135 The 414568 outputs the identification te the initial control settings deseribed in external devices hi the HP IB The paragraph 3 13 when it receives a Selected identification is output when the 4145B recieves Device Clear or Group Device Clear program code ID The output formats are shown in Figure 3 1 132 DATA OUTPUT 3 133 The 41458 outputs measurement and status data to external devices via the HP IB The data output format depends on whether the 41458 set to System Mode or User Mode In System Mode all measurement and status data stored in the data buffer are output when the 4145B receives program code DO In user mode measurement and status data for the triggered channel are output when the 41458 receives program eode DO The output formats are shown in Figure 3 53 Data Output Format for the System Mode When the remote program eode DO is sent the 41458 outputs data in following format X EtNM XtNN NNHEEHN XSNN NNNESNN CR LE G E 1 Dat
76. Program Codes and Parameter Setting Sheet 5 of 9 3 107 SECTION 4145 Following progam codes are valid on any page AUTO SEQ codes 51 START AS2 CONTINUE AS3 STOP SAVE Function SV X XXXX XXXXXX TERM 5 File type P Program file D Program Data file mE S ASP file 2 Space 3 File name up to 6 characters 4 Space 5 Comment up to 8 characters _ 4 and 5 are optional GET Function GT X D a 1 File type 2 Space 3 File name Assignment of Data Output Channel DO XXXXX 0 Monitor channel NAME must be one of the monitor channel names specified on the MEAS amp DISP MODE SETUP page PRINT Function PR PRINT function ON PF PRINT function OFF After PF is sent send the following statement to set the ATN line to Inactive SEND 7 SUNT UNL TALK 17 LISTEN 1 DATA Address of the 4145B 17 Address of the printer 1 Graphies Language GL1 only on the GRAPHICS PLOT Page GL1 Graphies Display mode ON GLO Graphics Display mode OFF Figure 3 52 Remote Program Codes and Parameter Setting Sheet 6 of 9 3 108 4145 SECTION USER MODE PROGRAM CODES Following program codes are used when the 4145B is set to User Mode User Mode US User mode ON release the 4145B from this mode send a page command DE SS SM or MD or a device clear command Output command for SMUs XX
77. R may change if AUTO SCALE ZOOM or MOVE WIN DOW is performed Figure 3 26 GRAPHICS PLOT Page Sheet 4 of 6 3 56 Model 4145 Moves the LONG CURSOR or SHORT CURSOR to the position of the MARKER MARKER must be turned on mE Turns on the instrument s graphies analysis funetions LINE 1 LINE 2 GRAD MODE GRAD VALUE and CHANGE POINT When this softkey is pressed LINE 1 solid line and two SHORT CURSORS are displayed The GRAD 1 GRAD X intercept and Y intercept values are also displayed below the plot area The graphies analysis functions are available only when this softkey is turned on frame highlighted Displays LINE 1 solid line Displays LINE 2 dashed line Each line has two SHORT CURSORS One cursor is moveable and the other is fixed The gradient or slope of each line ean be changed by moving the moveable cursor with the CURSOR keys Both lines ean be displayed at the same time but only one frame highlighted ean be moved The gradient GRAD gradient reciprocal 1 GRAD X intercept and Y intereept values for both lines are displayed below the plot area The moveable cursor and fixed cursor ean be interchanged by pressing the CHANGE POINT softkey EE Fixed gradient value When this key is pressed the fixed cursor is turned off only the moveable cursor remains and the line moves at a constant gradient value Line gradient entry The desired line gradient can be entered fr
78. RI sweep Sweep is made with user specified fixed ratio or offset value VARI output is calculated as VARI sax VARI fixed ratio VARI b VARI fixed offset where a js the user specified ratio from 20 01 to 210 and b is the user specified offset value Ratio and offset must be such that the VARI source channel does not exceed its maximum output limit HOLD TIME 0 to 650 seconds l ms resolution max Accuracy is 0 5 0ms DELAY TIME 0 to 6 5 seconds Ims resolution Accuracy is 0 1 5xN for GRAPHICS and SCHMOO plots and 0 09 10xN for LIST and MATRIX displays Where N is the number of measurement channels used in the measurement Output Sequence The order in which the source channels begin output is fully programmable Measurement Modes SINGLE REPEAT APPEND Integration Time at each measurement point SHORT 3 6ms MED Z ms at 50Hz line frequeney 16 7ms at 60Hz line frequency LONG 14 times MED Model 41458 SECTION I Table 1 1 Specifications Sheet 5 of 8 DISPLAY FUNCTIONS Display CRT Electrostatic focus and deflection post accelerated Alu minized P 31 phosphor Sereen Size 16em 6 25in diagonal Sereen Resolution 2048 x 2048 points Display Characters and Symbols Uppercase alphabetic characters numerics comma 8 0 g ideg i 9 k bh M n fiw of All are entered from the front panel Display Modes GRAP
79. S PLOT page For example measurement results stored on the GRAPHICS PLOT page cannot be recalled on this page Figure 3 29 SCHMOO PLOT Page Sheet 3 of 3 Model 41458 SECTION AUTO SEQUENCE SETUP PAGE Funetion of this page Set up or edit an auto sequenee program Auto Sequence Program auto sequence program is setup written by the operator and ean perform series of instrument operations without operator assistance An auto sequence program ean call pre stored measurement setups from the dise GET P command perform SINGLE measurement SINGLE command store measurement results onto the dise SAVE D command store measurement results onto the dise under amp n existing filename RSAVED command dump measurement results onto an HP IB plotter PLOT commandi dump only measurement curves onto an plotter CPLOT command print out measurement results onto an HP IB printer PRINT command half exeeution until CONT is pressed PAUSE command wait a specified time WAIT command and advance the page on HP IB plotter PAGE command Figure 3 30 AUTO SEQUENCE SETUP Page Sheet 1 of 4 SECTION Model 41458 Programm ing Setting up the auto sequenee programs requires no special programming knowledge When this page is first displayed the field pointer will be on line 1 and the aute sequence commands will be listed in the softkey prompt area of the CRT To enter a command simpl
80. SAVE GET operation COMMENT operation or PURGE operation is being performed the BLUE key i automatically set t ON key indicator lamp on GREEN Key This key used when entering physieal constants certain special symbols and when two special functions CURVE PLOT and are executed must be pressed each time a unction whieh requires pressing the green key executed Figure 3 2 Front Panel Features Sheets 3 of 6 Model 41458 ENTER Key This key amp used to enter parameter values alphanumeric characters special charac ters and unit indicators displayed on the Keyboard Input Line see Figure 3 5 into the internal display buffer When this key is pressed date displayed on the Keyboard Input Line moved to the display field indicated by the field pointer and stored in the display buffer Data stored in the display buffer by the ENTER key ean be recalled re displayed on the Keyboard Input Line by pressing the RECALL Key Up to 60 characters can be entered into the buffer but only 27 characters can be displayed at one time To display the rest of the buffer contents use the BACK key or FORWARD key EXECUTE Key Ths key executes GET SAVE RE SAVE PRINT PLOT CURVE PLOT and PURGE commands and arithmetic expressions displayed on the Keyboard Input Line The PURGE command amp avaiable only when the USER FILE CATALOG is displayed Hote CURSOR Control Keys
81. SCHMOO at the reserved Zi record location 3 Auto sequence program files file type 5 Specifying file type in the SAVE or command reserves 4 records on the die and stores the existing Buto sequence program at the reserved 4 record location For more information on file types number of records used ete refer to Figure 3 32 4145B FILE CATALOG Page Four filing operations SAVE RE SAVE GET PURGE and PURGE ALL ce amp n be performed from the front panel Each deseribed below SAVE Used to store the existing measurement setup except INTEG TIME AUTO CAL and softkey funetions the existing auto sequence program output sequence setup or the measurement results SAVE cannot be used when the die B write proteeted Before saving measurement setup page check must be performed refer to paragraph 3 19 SAVE file press the SAVE key SAVE will Bppesr on the Keyboard Input Line of the CRT and input the file type P D or 5 and file name The file name can contain up tc six characters of which the first must be alphabetic and the last five must be alphanumeric RE 5AVE Used to store the measurement setup the Buto sequenee program output sequence setup or measurement results by the file name that already exists on the dic Follow the same procedure deserebed for the SAVE operation Model 41458 Note In the SAVE and RE SAVE operation if the file name exceeds six charact
82. TIVE EARTH GROUNDED SOCKET ANY INTER RUPTION OF THE PROTECTIVE EARTH GROUNDING WILL CAUSE A POTENTIAL SHOCK HAZARD THAT COULD RESULT IN SERIOUS PERSONAL INJURY ONLY FUSES OF THE REQUIRED RATED CURRENT AND OF THE SPECIFIED TYFE SHOULD BE USED DO NOT USE REPAIRED FUSES OR SHORTED FUSEHOLDERS TO DO 80 CAN CAUSE A SHOCK FIRE HAZARD CAUTION BEFORE THE INSTRUMENT I TURNED IT MUST BE SET THE VOLTAGE OF THE POWER SOURCE MAINS OR DAMAGE TO THE INSTRUMENT MAY RESULT Extended Capabilities paragraphs 3 110 through 3 164 PLOT Funetion PRINT Funetion HP IB Capabilities External Display Dise Initial is ing Operation System Copy Die Copy File Transfer Dise Data Format Figure 3 1 Contents of Section SECTION 3 4 PANEL FEATURES The front and rear panels of the 41458 are briefly deseribed in Figures 3 2 and 3 3 respectively Detailed information amp given starting in paragraph 1 5 D LINE ON OFF Applies line power to the instrument when set to the ON position Removes ac line power when set to the OFF UR position SELF TEST is performed each time the instrument is turned on After SELF TEST is performed the start up MENU is displayed CRT DISPLAY 3 2 Displays all measurement setups measure ment results softkey labels special user functions operator messages error codes and messa
83. When switching into 10nA or 1 range 10mV 100 10 Cx mV where Cx load capacitance pF when switching into all other ranges 10mV Guard Capacitance lt 700pF Guard Potential Offset 1mV typical Guard Current Induced Potential Error 100QxIg Ig guard current Voltage Sources Vs Output Noise 6 mVrms typical Voltage Monitors Vm Noise Level 0 3mVp p at 2V range when Integration time is set to MED or LONG 3mVp p at 20V range REFERENCE DATA COMMON TO ALL UNI TS Noise Rejection Integration time set to MED or LONG Normal Mode Rejection gt 60dB typical Common Mode Rejection all values typical Current Source Measurement 1pA 1V Model 4145B 16058 60003 16058 60004 16058 60005 16147 60002 16058 60007 16058 60008 16058 60009 16058 60010 16058 60011 16058 61600 16058 61601 16058 61602 16058 61603 16058 61604 16058 60100 SECTION I Table 1 2 Reference Data Sheet 3 of 3 ACCESSORIES FURNISHED WITH 4145B 16058A Test Fixture includes the following subeomponents Personality Board Teflon Blank Board Socket Board Transistor Socket Board 28 pin DIP Soeket Board 18 pin DIP Socket Board Diode Soeket Board 8 pin package Soeket Board 10 pin package Socket Board 12 pin package Connection Cable large to small Twelve 16058 61600s are furnished Connection Cable small to small Eight 16058 61601s are furnished Miniature Clip Lead Ei
84. a Status 2 Measurement Data 3 Exponent 4 Comma data delimiter 5 Data Terminator 1 Date Output Format for the User Mode When the remote program code TI or TV is sent the SMU makes a measurement and the 41458 outputs data in the following format X X X tNN NNN E NM m mm uw EUN 1 Data Status Monitor Channel B mode V or I 4 Measurement data 5 Exponent 4 Data Terminator Figure 3 53 Data Output Format Sheet of 2 3 116 Model 41458 SECTION The order of data output is the same as the displayed order 2 Data Status indicates the condition of the monitor channel and is output in eode as listed below N Normal Li INTERVAL is too short V A D converter saturation X Oscillation This channel compliance error T Other channel compliance error Priority is as follows L2V gt X2C gt T gt 3 Scientific notation is used 10 Succes B cIbRRSU RESUURRSU RRBRU RRSEd RS 4 The delimiter bit switch on the HP IB Control Switeh Figure 3 50 is set at the factory to comma This causes the 4145B in the System Mode to output all data as a continuous string When the data delimiter is set t CR LF carriage return and line feed signal is output after each field This is useful when outputting data to certain peripherals such as atrip printer Figure 3 53 Date Output Format Sheet 2 of 2
85. age shown in Figure The name and sealing of each axis is determined by the NAME SCL MIM and MAX information appearing on the MEAS DISP MODE SETUP page Chel DCRAPHICE PLOT or sd mew ee Figure B NAME Can be entered only with the softkeys Determines the channels that will be used in the measurement Only those channels whose names are listed in the softkey prompt area can be selected The channel names or user funetion names press EXTN selected on this page will be X Yi and if used Ys axes on the GRAPHICS PLOT page SCL Scale Determines the grid sealing on the GRAPHICS PLOT page LINEAR or LOG ean be selected with the softkeys Not related to the SWEEP MODE seleeted on the SOURCE SETUP page MIN MAX Determines the minimum and maximum values of each axis Value units V or Al are automatically entered by the instrument Note MIN and MAX must have the same sign for an axis that is to be displayed with LOG sealing Also if 0 is entered for MIN or MAX in LOG seale 0 lmV 01pA or 1E 35 is assumed GRAPHICS DISPLAY Scaling Sealing on the GRAPHICS PLOT page depends on the selected SCL and the MIN and values 1 When LINEAR has been selected and 0 is not within the MIN MAX range ie DAMIN of MAX 20 MIN and MAX will be located as shown in Figure Figure 3 25 MEAS amp DISP MODE SETUP Page Sheet 2 of 6 3 48 Model 4145B SECTION III vi MAx 3 i amp 29
86. alyze the measurement results with the softkeys detailed description of the LIST DISPLAY page is given in Figure 3 27 3 62 MATRIX DISPLAY PAGE 3 63 The MATRIX DISPLAY page is dis played when the MEAS DISP MODE SETUP page has been set up for MATRIX mode display and the NEXT key is pressed On this page the operator ean make the measurement by pressing the SINGLE REPEAT or APPEND key and ean analyze the measurement results with the softkeys A detailed description of the MATRIX DISPLAY page is given in Figure 3 28 3 64 SCHMOO PLOT PAGE 3 65 The SCHMOO PLOT page is displayed when the MEAS DISP MODE SETUP page has been set up for SCHMOO mode display and the NEXT key is pressed On this page the operator ean make the measurement by pressing the SINGLE or REPEAT key and ean analyze measurement results with the softkeys A detailed deseription of the SCHMOO PLOT page is given in Figure 3 29 3 35 SECTION AUTO SEQUENCE SETUP PAGE 2 67 The AUTO SEQUENCE SETUP page is displayed when softkey 4 is pressed on the MENU page On this page the operator can set up auto sequence program A detailed description of the AUTO SEQUENCE SETUP page b given in Figure 3 30 OUTPUT SEQUENCE SETUP PAGE 3 59 The OUTPUT SEQUENCE SETUP page displayed when softkey 5 is pressed on the MENU page this page the operstor can specify the order in which the SMUs and voltage sources begin output A detailed descrip
87. ammed to function as a Variable or constant DE voltage source currest monitor as variable or constant DC cerrest source woltage monitor Voltage Sources Vs Two Vs channels Each Vs can be programmed to function as variable or constant DC voltage source Voltage Monitors Vm Two Wm channels Each Vm measure DC voltages up to 20V SOURCE MONITOR FUNCTIONS Measurement and output accuracies are specified at 23 5 C after the instrument has been allowed to warm up for at least 40 minutes with AUTO CAL set to ON INTEG TIME set to SHORT and referenced to SMU common Specified accuracy doubles for operation between 10 and 40 Source Monitor Units SMU Four SMU channels Each SMU measures current when operating as voltage source or measures voltage when operating as current source Souree Band measurement ranges resolution and accuracy specifications are given in the tables below Accuracy specifications in the below tables are given as of specified output or measured value n of range value Jo is output current I Vo is output voltage vi _ 2318098 SECTION SECTION I 1 6 Table 1 1 Specifications Sheet 2 of 8 Accuracy 0 35e 1001A 2uA Vo 34 100nA 2nA Vo e seo gt 5 40V gt 20mA 100V S20mA
88. an HP IB compatible printer plotter providing clear inexpensive hard copies The plot area is user selectable within the limits of the printer plotter and if a multi pen plotter is used multi color plots be made automatically All PLOT and PRINT operations are done automatically without a controller Also the 4145B s display is equipped with X Y Z outputs to allow connection of a large sereen graphies display The 4145B is fluent in HP GL Hewlett Packard Graphies Language permitting external control of its display via the HP IB Cursor and marker positioning is user controllable via the front panel and X Y1 Y2 coordinates are digitally displayed on the CRT Model 4145B 1 8 The 4145B is equipped with a micro flexible dise drive unit that accommodates double sided double density 3 5 in 630K byte dise One system dise which contains the necessary operating system software four general purpose measurement programs and 973k byte of user area is furnished with the 4145B The 4145B features an initializing funetion as well as an operating system copy funetion After initialization the dise can be used for storing measurement results setup programs or Auto Sequence Program plograms For archival purposis the 4145B operating System ean be onto an initialized disc using either the 4145B or an HP series 200 300 Desktop Computer initialized format should be LIF Up to 240 measurement setup programs
89. annels that were assigned the CONST SOURCE on the CHANNEL DEFINITION page are listed in the CONSTANT column on this page The order in which they are listed is identical to the order on the CHANNEL DEFINITION page To enter the SOURCE value move the field pointer to the desired field key in the value and press ENTER The SOURCE value for a COM source channel is set to OV by the instrument and cannot be changed COMPLIANCE Value COMPLIANCE i special feature for protecting samples against over voltage or over eurrent damage Refer to paragraph 3 32 It limits the current output from voltage source or the voltage output from a current source COMPLIANCE for a COM source set to 105mA by the instrument The COMPLIANCE for CONSTANT Vs is 10mA but is not displayed on this page Softkey Prompta SKP Depending on the position of the field pointer the softkey prompts automatically change Figure C shows the relationship between the position of field pointer and softkey prompts 28 x a 10000000 Figure 3 24 SOURCE SETUP Page Sheet 4 of 4 3 46 Model 41458 SECTION MEAS amp DISP MODE SETUP PAGE SKP 14 SKPIS SEPIE SKPIT ligera Emm CJ Jg B Ed 20 11916 EE H LI C EXIT m Figure A Purpose and funetion of this page 1 Select the Display Mode for the measurement 2 Select the
90. anual is a microfiche part number that ean be used to order 4 x amp inch microfilm transparencies of the manual Each mierofiche contains up to 60 photo duplieates of the manual pages The microtiche package also includes the latest manual changes supplement as well as all pertinent service notes To order an additional manual use the part number listed on the title page of this manual m J Oe Power Cable gt 04145 61504 Figure 1 1 Model 41458 and Accessories 1 1 1 1 4 DESCRIPTION 1 5 The Hewlett Packard Model 4145B Semiconductor Parameter Analyzer is a fully automatie high performance programmable test instrument designed to measure analyze and graphically display the DC characteristics of a wide range of semiconductor devices such as diodes bipolar transistors field effect transistors wafers ICs ete Main applications include computer aided design CAD of ICs new device evaluation materials evaluation component selection for circuit design ineoming outgoing inspection semiconductor process control quality control and quality assurance It is equipped with four programmable Source Monitor units SMU two programmable voltage source units Vs two voltage monitor units Vm a fully interactive graphies display removable flexible disc storage softkeys full arithmetic keyboard and HP IB And it ean be used the bench or as part
91. as the field pointer is moved to different areas of the page The relationship between field pointer location and the softkey prompts is shown in Figures C and D For example when the field pointer is at in Figure C SEP in Figure D will be displayed on the CRT SEP 8 and 9 are displayed only after the CHAN ASSIGN softkey has been pressed on SKP3 Figure 3 23 CHANNEL DEFINITION Page Sheet 3 of 4 SECTION P d Model 41458 Ciel CHANNEL DEFINITION E uu Go 081006010 co E Ed E Cag Channel Assignment fn This softkey allows you to quickly rearrange the SMU and Vs channel assignments without having to reassign channel names V and I SOURCE MODES and SOURCE FCTHs It is extremely helpful when DUT connections have been made or when measuring devices which require the same measurement setup but which have different pin outs The procedure is given below 10 Move the field pointer to area T in Figure 8 3 in Figure D will be displayed 2 Press the CHAM ASSIGN softkey The field pointer will automatically move to the first row in the CHAN column rows 1 through 6 in the CHAN eolumn will be blank and will be displayed Assign the channel numbers in the desired order The field pointer will move down the CHAN column as you do so When the field pointer reaches the fifth row SKP9 will be displayed Press the CHAN ASSIGN softkey again to ente
92. at should be pressed next LAST KEY shows the number of the key that was just pressed Key numbers are shown in Figure C To perform this test press key 1 LAST KEY should change to and NEXT KEY to 2 Continue in this manner until all the keys have been checked When key 66 EXECUTE is pressed NEXT KEY and LAST KEY will both be 66 and when key 66 is released the display will change back to that shown in Figure A ce rwr OLAGHOSTICS soe Figure 3 34 DIAGNOSTICS Page Sheet 2 of 3 5 78 Model 41458 SECTION 8 Graphie Display Test This softkey is used for INTENSITY and FOCUS adjustments Adjustment procedure is given in Figure 3 6 Figure 3 34 DIAGNOSTICS Page Sheet 3 of 3 2 78 SECTION II 41458 3 80 TIME DOMAIN MEASUREMENT SETUP 3 81 The 4145B can measure voltage or current function of time This is called a time domain measurement and is made possible by replacing the main sweep VARI with time Measurement is made at constant user specified time intervals and results can be displayed on the GRAPHICS PLOT LIST DISPLAY MATRIX DISPLAY or SCHMOO PLOT page just as in a normal VARI sweep measurement f results are to be displayed on SCHMOO PLOT VARZ must be used The page by page setup for amp typical time domain measurement along with measurement results is shown in Figure 3 35 De not select VARI as the source funetion for any of the source mex pamrah DEFIBITIM
93. aving spaces To enter this command press the CURVE PLOT softkey CPLOT is displayed on the program line key in the scaling parameters and press ENTER PRINT This command outputs measurement results to an HP IB printer To enter this command press the PRINT softkey PAUSE This command halts program execution until the CONT key is pressed While the program is halted the operator can change paper on the plotter change test samples ete To enter this command press the PAUSE softkey ears WAIT time This command stops program execution for the specified time Specifiable time is from 0 to 85535 seconds Fractional values are rounded to the nearest whole number To enter this command press the WAIT softkey key in the desired wait time and press ENTER FAGE This command advances the plotter paper to the top of the next page The plotter used must be equipped with automatic paper advance Program Edit Funetians There are three program edit funetions ASP CLEAR LINE DELETE LINE INSERT They are available with the softkeys only Each is described below IN an CLEAR Clears the entire auto sequenee program and returns the field pointer to line 1 BE Ere Deletes the program line indicated by the field painter TASER Inserts one blank line between the line at which the field pointer is located and the preceeding lime The field polnter remains at the blank line and a new eommand ea
94. bout six seconds If one of the MEASUREMENT keys or the AUTO CAL key is pressed during auto calibration Busy will be displayed on the CHT until auto calibration amp completed Model 41458 3 45 DISPLAY PAGES 3 46 The 41458 displays thirteen different screens Each sereen is called page and each has different purpose in relation to instrument operation By changing from one page to another different funetions and capabilities such measurement set up measurement diagnostics certain filing functions ete are made available PAGE control is described in paragraph 3 47 Detailed explanations of each page are given Figures 3 22 through 3 34 3 47 PAGE CONTROL 3 48 Display paging is controlled by the PAGE CONTROL keys MENU NEXT and PREV or the softkeys as shown in Figure 3 20 Softkeys for PAGE control are available only when the MENU displayed Page flow and the relationship between pages are shown in Figure 3 21 The solid lines show page changes that are posible with the NEXT key or PREV key the dashed lines show page changes that are possible with the softkeys To go to the GRAPHICS LIST MATRIX or SCHMOO page from the MEAS DISP MODE SETUP page it first necessary to select the desired display mode with the softkeys and then press the NEXT key SECTION All pages except the GRAPHICS LIST MATRIX and SCHMOO pages ean be displayed directly from the MENU page by p
95. ch amp s transistors Model 4145B SECTION I Table 1 3 Accessories Supplied Sheet 2 of 5 Dimension of Socket Unit in mm HP P N and Description 16147 60002 Soeket Board for 28 pin DIP ICs 16058 60007 Socket Board for 18 pin DIP ICs 16058 60008 Soeket Board with two pairs of sockets for measurement of axial lead devices such as diodes 16058 60009 Soeket Board with an 8 pin socket 16058 60010 Soeket Board with 10 socket 16058 60011 Soeket Board with 12 pin socket SECTION I Model 4145B Table 1 3 Accessories Supplied Sheet 3 of 5 Dimension of Socket Unit in mm HP P N and Description Cable length Approx 115 16058 61600 Connection Cable large to Small used for interconnecting the Personality Board to the Socket Board Twelve 16058 61600s are furni shed Cable length Approx 115 16058 61601 Connection Cable small to small used for interconnecting the Connection Switch to the Socket Board Eight 16058 61601s are fur nished Cable length Approx 115 16058 61602 Miniature Clip Lead used for direct con nection to DUT Eight 16058 61602s are furnished 16058 60100 Carrying ease for all 16058A accessories Configuration Description Connector Plate 04145 60001 Connector Plate for measurements made without the 16058A For example direct connection for a wafer probe Dimensions are
96. d into the string variable G PLOT 4145B LB Release the 4145B from GL1 mode This program modification makes overlay plots as shown below 3 122 444344 GRAPHICS PLOT ss Figure 3 56 Sample Program 1 Sheet 2 of 2 Model 41458 SECTION Sample Program 2 Description This program is an example of remote control data output in the User The program has three capabilities 1 Control of an SMU via the HP IB 2 Trigger of the SMU via the HP IB 3 Date output from the SMU via the HP IB series 200 300 Program DIM A 30 OUTPUT 717 US OUTPUT TIT IT CAI BC 1 5 OUTPUT 717 DVI 1 I 1E 3 OUTPUT 717 DV2 1 0 1E 3 OUTPUT 717 Til ENTER 717 A DISP Ag OUTPUT 717 DV1 DV2 END This program performs the following Line Deseription Define string variable A to store measurement data Set the 4145B to User US Set measurement integration time auto calibration CAI and data buffer elear BC Set up 8MUI DVI Set up 5MU2 DV2 Trigger for measurement of SMUI TII Enter measurement data into the string variable A Display the string variable A STOP the output for SMU1 and 8MUZ Also CRT Display can be used as Graphie Display when program code GL2 is sent and HP GL program codes are used as shown in Figure 3 57 Figure 3 57 Sample Program 2 3 123 SECTION Model 41456 Sample Program 3 Des
97. date obtained after compliance is reached may not be valid The reason for this is that once a source channel reaches compliance it tends to act as a constant source Consider for example an SMU that set to SOURCE MODE V voltage souree eurrent monitor and SOURCE FCTN VARI variable voltage source START voltage STOP voltage and COMPLIANCE are OV 20V and 10mA respectively Also assume that the device under test has a resistance of 1000 ohms When the measurement is started the SMU will be begin sweeping its output voltage toward 20V Hut when the output voltage reaches 10V the current through the device under test i Compliance has been reached The SMU will continue to try to sweep toward the 20V STOP voltage but because the current through the deviee under test is now constant at l mA the voltage across it must be constant at 10V The specified compliance is valid for positive and negative values less of the polarity specified in the COMPLIANCE field that i specifying current compliance of say 40mA as in Figure 3 15 amp valid for 40mA and ADmA Output currents greater than 4 mA shaded areas in Figure 3 15 are not possible 3 28 Model 41456 Current m Do set the SMU s voltage compliance too high I mode or the current compllance too low Y mode Figure 3 15 Voltage Current Output Specified by the COMPLIANCE 41458 3 34 SWEEP MEASUREMENT 3 35 Out
98. described below 1 Mode Overlay Write This mode is set by sending program code GLI It is available only in the System Mode and only on the GRAPHICS PLOT page In mode additional information such as labels comments lines and curves ean be displayed on graphs plotted by the 4145B Also in GL1 mode the 4145B is set to local lockout 2 GL2 Mode Blank This mode is set by sending program code GL2 It is available only in the User Mode programming code US In GL2 mode the CRT is completely independent from the 4145B s CRT control circuit and be operated as a stand alone graphics display If the display RAM contains too much display data the 1345A may not be able to complete the display process within one refresh cycle The display will be incomplete To exit from the GLI mode or GL2 mode send program code GLO To exit from the GL1 mode GL2 mode send program eode GLO 3 128 HP GL COMMANDS 3 129 HP GL eommands that can be used when the 4145B is set to User Mode refer to paragraph 3 122 are listed in Table 3 11 For more detailed information on HP GL refer to the operation manual of any HP IB compatible plotter 3 112 Model 4145B Model 41458 Table 3 11 HP GL Commands Sheet 1 of 3 SECTION VECTOR Group PU Pen Up PD Fen Down PA Plot Absolute Flot Relative CHARACTER Group cs SR Designates Standard Character Set Label Relat
99. diagram of one of the four SMUs is illustrated in Figure 3 9 Each SMU ean be set up to function as voltage source current monitor current source voltage monitor source common by specifying source mode V 1 or COM respectively in the SOURCE MODE field on the CHANNEL DEFINITION page see Figure 3 23 Output voltage SOURCE MODE V and output current SOURCE MODE 1 ean be held constant or ean be swept linearly or logarithmically by specifying source function CONST or VARI VARIS VAR respeetively in the SOURCE field on the CHANNEL DEFINITION page When the source mode i COM source function is automatically set to CONST Refer to paragraph 3 34 for details on swept measurements Output in either SOURCE MODE is internally limited to 2 watts on each output range Refer to Table 3 6 for range limits range resolution and output limits Figure 3 10 graphically lustrates the specifiable voltage eurrent out put Voltages and currents enclosed by the bold line can be specified Output voltage and eurrent sweep mode linear or log START STOP STEP and COMPLIANCE for each SMU are specified on the SOURCE SETUP page see Figure 3 24 Note 1 Range change automatically performed 2 If the Current Source can t output specified current output voltage inereases up to its voltage compliance 3 If voltage exceeding 100 applied to the 199 997 may be displayed as the measurement result
100. displayed above the plot area The marker ean be used to simplify keyboard calculations For example to calculate hpg at the marker position in Figure 3 49 key in not necessary to Input the numeric values 3 108 Pressing the softkey displays solid straight line LINE 1 or dashed straight line LINE 2 between two short cursors as shown in Figure 3 50 Both lines can be displayed at the same time but only one can be moved The gradient GRAD inverse gradient GRAD X axis intereept and Y axis intercept of each line are displayed below the plot area Of the two cursors displayed with each line one will be highlighted and can be moved line also moves by the CURSOR keys 5 and To move the other eursor press the softkey The line gradient can be input directly from the keyboard by fist pressing the 2 softkey For example to disply a line whose gradient is e perform the following key sequence DSOooo 0 0 e 2 Another helpful function i amp the softkey When pressed marker must be the cursor will automatically move to the marker position 3 100 _ Figure 3 50 Using Example of the Line Model 41458 and Curser Funetions Model 41458 3 110 INTERFACE 1 111 The 4145B can be remotely controlled via the HP IB carefully defined instrument interface which simplifies integration of instruments and a calculator or comput
101. e first excess digit is checked and if its value is amp or greater the digit te the left the fifth digit amp ineremented rounded up by one if its value is 5 r less the fifth digit is unchanged For example executing 1 1 00001 will result in 2 0000E 00 but executing 1 1 00006 will result in 2 0001E 00 Arithmetic hierarchy amp as follows exponentiation multiplication and division addition and subtraction Parentheses can be used to change the hierarchy when used they take highest priority However parentheses cannot be used for implied multiplication The operator must always be used to Indicate multiplication Thus executing 2 3 5 will result in error E01 The correct format B 2 3 5 A delta 5 funetion is also provided but it is not intended for general keyboard calculations It E used in defining user funetions see paragraph 3 19 or in certain Keyboard calculations on the GRAPHICS MATRIX LIST or SCHMOO page There are limits to the size of arithmetic expressions that be executed Refer to Figure 3 7 3 20 Model 41458 Work area 110 bytes The maximum allowable length of an arithmetic expression i amp determined by the number of bytes it contains not by the number of characters If an expression contains more than bytes error E03 object buffer overflow will appear on the CRT below the expression when EXECUTE The work area for user funetion ar
102. e the Pile Transfer operation is aborted After pressing the ABORT softkey the catalog of the existing files on the dise is displayed Transfer completed is displayed when the File Transfer operation is finished Figure 3 84 File Transfer Procedures Sheet of 2 3 130 Model 41458 SECTION From another 4145B Connection 1 Equipment Another 4145B and an HP IB cable 2 Interconnect the 4145B s with the HP IB cable as shown in the above figure Transfer 3 Turn both 4145B s on and press the CATALOG softkey on the MENU page When the CATALOG page is displayed press the EXTN softkey 4 Insert the dise containing files to be copied into one 41458 and insert the copy dise target dise inte the other 4145B 8 Press the SEND DATA softkey on the 41458 from which the files will be Press the REC DATA softkey the 41458 that will be receiving the iles 6 The filename of the file being transferred will be displayed If the ABORT Softkey is pressed on either 41458 before the transfer is complete the File Transfer operation will be aborted T Transfer completed is displayed when the File Transfer operation is finished Figure 3 84 File Transfer Procedures Sheet 2 of 2 3 131 SECTION 1 152 Data File Strueture 2 153 Data files stored on dises can be read on HPS00D Series 200 and 300 computers running BASIC 3 0 or 4 0 Paragraphs 3 154 through 3 162 explain the structure
103. e must be delimited by comma h or space Press the EXECUTE Key to start plotting Plotting will be displayed on the CRTs System Message Line During plotting the 4145B is in TALK ONLY mode and the TLE lamp HP IB status indicators will be lit In this condition only the PLOT or PRINT Key is available Also the Xmin Y min Xmax and Ymax values in effect when the EXECUTE key is pressed are stored on the dise exeept when the dise amp write protected When the plot is completed the instrument automatically returns to normal operation mode Note To stop the PLOT press the PLOT key or PRINT key If the CLEAR key is pressed before the EXECUTE key is pressed the PLOT operation will be cancelled Plotting ean not be temporarily stopped PLOT Contents 1 Following are not plotted A Softkey Prompts B Date on the Keyboard Input Area C Data the System Message Line 2 Following are plotted when the CRT i displaying the GRAPHICS PLOT LIST DISPLAY MATRIX DISPLAY or SCHMOO PLOT page A Setup conditions for VARI VARZ and CONSTANT Sources User Function expresions Plotting the only measurement curve on the GRAPHICS PLOT page 1 Select the GRAPHICS PLOT page The measurement should be made before the curve plot 2 Press the GREEN key then press the PLOT key 3 The following will be displayed on the Keyboard Input Line Later procedures are same as Plotting the all existing display procedures from 4 to
104. e or if NAME on the MEAS DISP MODE SETUP page is ehanged the results of the previous measurement are erased from the data buffer and new measurement must be made To make a new measurement press the SINGLE REPEAT or APPEND key Measurement results will be displayed as the measurement progresses Notes 1 If the X axis value or Y axis value of measurement point is outside the plot area no trace will be drawn between it and the previous and succeeding measurement points 2 In LOG seale if the measurement data has two polarities result is not correctly displayed 3 1151 measurement points can be displayed Softkey Prompts Softkey prompts displayed on the GRAPHICS PLOT page are shown in Figure B 18 is displayed when this page is first displayed The other SKPs 19 through 23 be displayed by pressing the EXTM softkey When EXTN is pressed on SKP23 SKPIBisdisplayed 5 23 blank ean be used when taking photographs of the CRT Figure 3 26 GRAPHICS PLOT Page Sheet 1 of 6 SECTION Model 4145 SKP I8 SKP 19 SKP20 SKP2I SKP 22 SKP 23 Ex Ex Ex i EHE me enr mg co co m Lia L1 Figure Softkey Functions Stores displayed measurement results Recalls re displays stored measurement results These two softkeys provide overlay comparisons of two measurement results To store the results of a measurement
105. e programs for the HP series 200 300 Desktop Computer Figures 3 56 3 57 and 3 58 respectively 3 3 120 Hote Specifie information for HP IB programming with the HP series 200 300 is provided in the HP serjes 200 300 programming manual Equipment required for these sample programs includes HP series 200 300 Computer with Basic 2 0 3 0 or 4 0 system Before executing sample program 2 close the fixture lid or connect the Shorting Connecter are provided in Model 41456 Model 41458 SECTION Sample Program 1 Deseription This program is an example of remote control date output for Bi polar Transistor measurement made in the System Mode The program has three capabilities 1 Control of the 4145B via the HP IB 2 Measurement via the HP IB 3 Data output from the 41458 via the HP IB Set the HP IB control switeh as follows Address 17 Delimiter comma HP series 200 300 Program 10 DIM 11 20 OUTPUT 717 CAl DRO BC 30 OUTPUT 717 DE CHI VE TE 3 3 CH2 VB IB 2 2 CH3 V C IC 1 1 CH 40 OUTPUT 717 V81 V82 YMI 50 OUTPUT 717 58 VR1 0 1 05 50 E 33IP 10E 6 10E 6 4 3 60 OUTPUT 717 SM DM XN YC 1 0 1 YA IC 1 0 QE 3 70 OUTPUT 717 MD MEI B A SPOLL T1T 90 0 0 THEN 80 100 OUTPUT 717 DO 110 ENTER 717 120 DISP A 130 END This program performs the following Line Descript ion 10 Define string variab
106. ection eireuits So it s important to guard against test sample oscillation For transistors the best way to do this E by using ferrite beads as shown in Figure 3 38 SMU oscillation when measuring negative resistance devices Voltage Conirolled Negative Resistance Measurements bd ae The parallel conductance G effectively cancels the negative resistance of test sample Y whose I V characteristics are graphed on the right If the value of G is known you can calculate the current through the sample at any value of V from the following equations It is possible to display the IY directly with the User Funetion of the CHANNEL DEFINITION page refer to Figure 3 23 Iyzl GV Current Controlled Negative Resistance Measurement The series resistance effectively cancels the negative resistance of the test sample Z whose I V eharaeteriaties are graphed on the right If the value of R is known you ean egleulate the voltage across the sample at any value of from the following equation It i possible to display the directly with the User Function of the CHANNEL DEFINITION page refer to Figure 3 23 VgsV RI Figure 3 38 Negative Resistance Measurements 3 88 Model 4145B SECTION Ferrite Beads available from Hewlett Packard order PN 9170 0029 Positon the ferrite beads as close as possible to the device under test In some instances it may be necessary to use two ferrite beads to stop oscillation Also
107. ent sys the ilegal dic or turn into the Data tem labels or ome of the dies not 41458 useable dise The fixture lid i amp open at the Close the lid or ehange the setup Make fixture lid start af measurement exceed sure the system cable is properly con 242V or lid open during nected the User Mode See Fig 52 Output The fixture lid was opened Close the fixture lid and make the men disabled during 4 measurement in which surement Do not open the fixture close the the output voltage may exceed lid during measurement Make sure the fixture Lid 42 system cable is properly connected Indicates that there was mo When a power loss occurs during meagsure mentaly power loss ment output is shut down Press MEA SUREMENT key to continue the measure ment Change START value STOP value or STEP value disabled softkey was The softkey cannot be used in the pressed exiting measurement setup 3 14 Model 41458 SECTION Table 3 3 Operational Error Codes Sheet 1 of 2 EXECUTE was pressed with no executable text on the Keyboard Input Line Objeet buffer overflow Improper Aldelta operation User function is used in the expression User function cannot be used in an arithmetic expression No variable constant following an arithmetic operator Arithmetic contains an undefined variable Too P signs or parentheses Constant value is too large
108. er Cursor and Line Display resolution may differ depending on the measurement resolution because of errors inherent in the digital data manipulatios The data is stored using a 3 byte 2 s complement format one byte has 8 bits the first byte is for the exponet the second and third bytes are for the mantissa Therefore the display resolution may be higher than that given the specifications because of the conversion from 2 s complement to decimal format The number of output display digits and the display format are listed in Tables 3 7 and Figure 3 14 Table 3 7 Number of Output Display Digits Qutput Display Functions Marker Cursor in GRAPHICS Display LIST Display Line in GRAPHICS Display 3 a Digits Format c Format 3 26 Display Digits and Format not available Model 41458 Model 41458 Voltage Display Format 5 digits Min 0 19 1 lt v lt 100 Polarity blank or Numeric 0 to 9 Decimal paint Unit volt b Current Display Format 4 digits Min 0 05 5 Polarity blank or d Numeric 0 to 9 or dicimal point u Engineering unit m n or p A Unit Ampere User Function Display Format 3 digits 1 00 lt Mantissa lt 99 9 sdddnE tm 100 lt Mant ssa lt 999 Polarity blank or Numeric 0 to 9 or decimal point n Numeric O to 9 Exponent digit ex
109. er connection between the 16058A Test Fixture and the 4145B Vsl Vs2 Vm1 Vm2 and the fixture lid open detector connected to this connector When the 16058A is not used this connector should be terminated with the furnished shorting termination if voltages exceeding 42V are to be output WARNING WHEN THE SHORTING TERMINATION IS CONNECTED TO THE SYSTEM CABLE CONNECTOR THE 4145B S PROTECTIVE CIRCUIT IS DISABLED VOLTAGES AT THE SMU AND Vs OUTPUTS CAN REACH z100V 207 RESPECTIVELY DO NOT TOUCH THE POINT OR POINTS AT WHICH THE SMU S OR VOLTAGE SOURCES ARE CONNECTED LINE FUSE Holder The 4145B s power line fuse is installed in this holder 100V 120V operation 2 5AT 250V HP P N 2110 0015 200V 240V operation 1 25AT 250V HP P N 2110 0305 SECTION LINE VOLTAGE SELECTOR Switches These switches select the appropriate ac operating voltage Selectable voltages are 100 120 10 and 220V 10 240V 59 10 48 66Hz Refer to paragraph 2 5 LINE Input Receptacle AC power is connected to this receptacle Refer to paragraph 2 5 HP IB Control Switch This switch sets the 4145B s HP IB address 0 30 data output format COMMA or CR LF and interface capability EOI ON or OFF Specific information on this switch is given in paragraph 3 118 HP IB Connector Twenty four pin connector connects the 4145B to the HP IB for remote operations Also used to connect a
110. er into system HP IB is Hewlett Packard s imple mentation of IEEE Std 488 Standard Digital Interface for Programmable Instrumentation 3 112 CONNECTION TO 3 113 The 4l45B can be connected into an HP IB bus configuration with or without controller with or without an HP caleulator In an system without controller the instrument functions as talk only device refer to paragraph 3 94 and 3 96 3 114 STATUS INDICATORS 3 115 The HP IB Status Indicators are four LED lamps located on the front panel When lit these lamps show the existing status of the 41456 in the HP IB system as follows SRQ SAQ signal from the 41458 to the controller is on the HP IB line Refer to paragraph 3 138 LISTEN The 41458 is set to listen TALK The 41456 is set to talk REMOTE The 4145B is under remote control 3 118 LOCAL KEY 3 117 The LOCAL key releases the 41458 from HP IB remote control and allows measurement conditions ta be set from the front panel The REMOTE lamp will go off when this key is pressed LOCAL control is mot available when the 4145B is set to local lockout status by the controller The 41458 is set to local lockout when the 41458 amp in GLI mode SECTION 3 118 HP IB CONTROL SWITCH 3 119 The HP IB Control Switeh located the rear panel has seven bit switehes as shown in Figure 3 51 Each bit has two settings logical 0 down positio
111. eription 3 124 This program is an example of moving measurement results from the 4145B s internal micro floppy dise to a Desktop Computer while the 4145B is in the System mode This funetion has the following capabilities 1 Control of the 41458 via the HP IB 2 Data output from the data buffer via the HP IB Set the HP IB control switeh as follows 1 20 40 40 50 70 au 90 100 Address 17 Delimiter CR LF HP series 200 300 Program OPTION BASE 1 DIM A 575 Points 505 OUTPUT 717 GT D VDID OUTPUT 717 DO FOR 21 to Points ENTER 717 PRINT NEXT I END ma program performs the following ine Deseription 10 20 Define a string variable A 575 to store buffer data Define the number of data Send a get data GT command to get the data with the file name VDID Send a data output 00 command to obtain the buffer data from the ehannel Enter the buffer data into the string variable A 575 Print the string variable Figure 1 59 Sample Program 3 Model 41456 SECTION 3 140 PLOT PRINT Operation Using HP IB Controller Note 3 141 When performing a PLOT or PRINT operation using an HFP IB controller use the lf the controller attempts an HP IB operation following procedure during plot or print operation an error may result or data may be incorrectly plotted or 1 Set the plotter or printer to addressable printed Therefore you cann
112. ers the caracters are treated gs below example SAVE PABCDEFGHIJKLMNOP File Name File Comment ignored ET Used to recall user stored files from the dise GET cannot be used ta recall any of the furnished measurement programs To GET amp file from the user area of the dise press the GET key GET will appear on the Keyboard Input Lime of the CRT and input the file type P D or 8 and file name URGE Used to delete user stored files from the dise PURGE cannot be used with write protected disc nor can it be used to delete any of the furnished measurement programs It is available only when the 4145B FILE CATALOG page is displayed To PURGE a file from the user area of the disc go to the MENU and select CAT softkey When the 41458 FILE CATALOG page appears on the display press the PURGE softkey PURGE will appear on the Keyboard Input Line of the CRT and input the file type P D or S and file DO NOT turn off the instrument during PURGE SECTION PURGE ALL Used to delete all user stored files from the die Conditions for use ere the same as these given for PURGE To PURGE ALL files from the user area of the dise go to the MENU and select CAT softkey When the CATALOG page appear on the display press EXTN softkey then press the PURGE ALL softkey When PURGE ALL OK is displayed press the EXEC softkey Do not turn off the instrument during PURGE ALL If the QUIT softkey is pressed befo
113. et 2 of 4 3 13 SECTION Model 4145 Softkeys This page has two softkey prompts shown in Figure A The function of each softkey is deseribed below SKP 30 PURGE This softkey is for deleting files from the disc To purge a file press the PURGE softkey key in the file type and file name and press EXECUTE If the CLEAR key is pressed before EXECUTE the PURGE operation is cancelled CAT If the dise is changed while the FILE CATALOG page is displayed this softkey displays the FILE CATALOG of the new disc This softkey rolls down the file page 2 T This softkey rolls up the file list If this softkey is pressed and held continuous roll up is performed D This softkey rolls down the file list If this softkey is pressed and held continuous roll down is performed This softkey is used for copying the user area files and operating system onto the another system dise or initialized dise The procedure is given in paragraph 3 148 vi is softkey is used for copying the operating system onto the initialized disc e procedure is given in paragraph 3 146 INIT DIsc This softkey is used for initializing the blank dise The procedure is given in paragraph 3 144 Figure 3 32 4145B FILE CATALOG Page Sheet 3 of 4 3 74 Model 41458 SECTION This softkey is used for transfering all of the files from the 4145A s dise or 4145875 dise onto the
114. ey is pressed before the EXECUTE key is pressed the PRINT operation is cancelled Printing can not be temporarily stopped Print Contents 1 Setup conditions for 1 VAR2 and CONSTANT Sources 2 Measurement data Note User functions printed out Note Refer to paragraph 3 140 for instructions covering HP IB controlled print operations Figure 3 42 Print Function 3 94 41458 SECTION 3 98 APPLICATIONS PACKAGE 3 99 Each dise furnished with the 41458 contains the following four setups for frequently made measurements GENL B Tr VCE IC FET VDS ID DIODE VF IF i bh When the 41458 amp turned GENL is automatically loaded The other furnished measurement setups can be loaded by pressing the appropriate softkey on the CHANNEL DEFINITION page These furnished setups can not be loaded with the GET command nor can they be purged from the dise The contents channels used sweep parameters ete of each furnished measurement setup are listed in Table 3 8 Connection examples for each setup are given in Figure 4 43 Table 3 8 Application Package Setups Sheet 1 of 2 NAME I VEITE 8118 MODE FCTN COM CONST COM CONST 1 VDS ID 2 V NAME I MODE FCTN suu SMU3 V NAME I NAME S MODE FCTN Wel NAME FOTN V amp I CONST Yez NAME VS2 00NST 3 95 SECTION
115. f the CRT display There are eight softkeys and the softkey prompts for the lower seven keys change depending on the page being displayed and the position of the Field Pointer on the CHANNEL DEFINITION SOURCE SETUP and MEAS DISP MODE SETUP pages The softkey prompt of the top softkey amp always EXTN lextended regardless of the page being displayed or the position of the Field Pointer EXTN is displayed only when additional softkey funetions exist 3 78 SYSTEM MESSAGES 3 78 System messages are instructions to the operator and are displayed on the System Message Line refer to Figure 3 5 which is located at the bottom of the CRT display System messages guide the operator through all phases of instrument operation and make measurement setup simple matter of filling in blanks on the CHANNEL DEFINITION SOURCE SETUP and MEAS DISP MODE SETUP pages Model 41458 SECTION MENU PAGE Che dur CHANNEL GEF INIT LOH SOURCE SET UP MEAS DISP MODE SET LP AUTO SEQUENCE SET UP OUTPUT SEQUENCE SET UP FILE CATALOG OPERATION GUIDE OrAGMOETICE 4 5 3 n WP Gdr Om DOT ISO CHAM ED Initial Condition When the 41458 is turned on the display will be blank while SELF TEST is being performed When SELF TEST has been completed and no fatal error have been detected the MENU page will be displayed as shown in Figure A The status
116. f the four SMUs Model 41458 SECTION Table 3 2 Error Messages Sheet 1 of 2 No source SMU that hes been assigned name a source mode COM V or I has been assigned a If the source mode is COM or V enter amp source name in the V column if the source mode E enter a source name in the column corresponding V or I source Duplicate Two or more channels have the Re gssign the channel names name sume name Illegal VARI VARI or VAR2 is speci Specify VARI VARI and VAR only funetian fied more than once once VARI and VARI gre not in the Set VARI and VARI tothe same source same source mode mode Number of steps for VARI Change the value of START STOP or STEP exceeds 1024 An attempt was made to input Enter value that E within specified value that E outside limits specified Limits No name name is entered in the Select name from those displayed in NAME field on the MEAS DISP the softkey prompt area MODE SETUP page No monitor No monitor channel name is Select a monitor channel name from channel entered in the NAME field on those displayed in the softkey prompt the MEAS DISP MODE SETUP Brea page ar the name entered in the NAME field cannot be used gs monitor channel START and Change one of the signs set up STOP MIN and MAX values have different signs Current value is too high Change the current I value setting
117. fications nor does it include Test Fixture specifications Measurement Time Setting time ranging time integration time l point measurement Settling Time The following calculation is applicable where current range does not change settling and set up time SMU wait time Settling and Set Up Time SMU Wait Time 100nA 100mA 0 215 1 10nA Ranging Time 4ms 74ms depending on range Measurement Time Ranging time must be added Settling and Delay Ranging Integration Set Up Time Time Time Time 3 6ms 2 320ms Example Minimum measurement time 2 7ms 0 2ms 3 6ms 6 5ms In the Graphics Display Mode write time 5 6ms must be added 1 Model 4145B Table 1 2 Reference Data Sheet 2 of 3 SOURCE MONITOR UNIT SMU Offset Current when operated as a Voltmeter 6pA 2pA x Vo 100 Offset Voltage when operated as a Current Meter 10mV 0 49 x Io Noise Characteristics all values typical Voltage Source Noise 0 01 of range RMS Current Source Noise 0 1 of range 3pA 0 0lpAxCg RMS Cg Guard capacitance in pF Voltage Monitor 0 02 of range peak to peak Current Monitor 0 3 of range 10pA peak to peak Output Overshoot all values typical Voltage Souree Overshoot 5mV Current Source Overshoot 1 or less Current Range Switehing Transient Noise All values typical Range Increment 0 01 of voltage range 10mV Range Decrement
118. fixture lid is open and measurement will not be made until the lid is closed For user fabricated test fixtures and jigs a special connector four 3 meter triaxial cables and four 3 meter coaxial cables are also furnished 1 14 The Model 4145B SECTION I 1 11 SPECIFICATIONS 1 12 Complete specifications of the Model 4145B Semiconductor Parameter Analyzer are given in Table 1 1 These specifications are the performance standards or limits against which the instrument is tested The test procedures for the specifications are covered in Section IV Performance Tests Table 1 2 lists Reference Data Reference Data are not specifications but are typical characteristies included as additional information for the operator When the 4145B Semiconductor Parameter Analyzer is shipped from the factory it meets the specifications listed in Table 1 1 1 13 SAFETY CONSIDERATIONS Semiconductor Parameter Analyzer has been designed to conform to the safety requirements of an IEC International Eleetromechanieal Committee Safety Class I instrument and is shipped from the factory in a safe condition 1 15 This operation contains information eautions and warnings whieh must be followed by the user to ensure safe operation in a safe eondition 1 16 INSTRUMENTS COVERED BY MANUAL 1 17 Hewlett Packard uses a two section nine character serial number which is stamped on the serial number plate Figure 1 2 attached to the instrume
119. ges and warnings All displays ean be dumped directly onto an HP IB plotter without controller by pressing the PLOT key 8 If an HP IB controller fluent in HP GL Hewlett Packard Graphies Language i amp connected the CRT can be used as an independent graphies display Refer to paragraph 3 126 and 3 128 for details Model 41458 3 SOFTKEYS These eight keys are used for measurement setup parameter selection and funetion selection The function of each softkey is defined by the operating system software and changes depending on displayed ftkeys labels gre displayed on the CRT i prompt SKP Each time the SKP changes the of the corresponding softkey changes Pressing the EXTN extended displays additional softkey description for each softkey function is provided in the deseription of the page on which it appears PAGE CONTROL Keys These three keys control paging on the CRT Refer to paragraph 3 45 for deseription of the PAGE concept MENU When pressed returns the display to the start up menu Can be used anytime except during measure ment or amp uto calibration of other funetioning Figure 3 2 Front Panel Features Sheets of 6 Model 41458 Advances the display to the next page Each time this key is pressed the instrument checks the presently displayed page for any illegal settings and if it detects any errors it displays the corresponding error code or error message
120. ght 16058 61602s are furnished 1 5m Triaxial Cable Four 16058 61603s are furnished Fixture System Cable Accessory Case 1 04145 60001 04145 61622 04145 61630 04145 61623 04145 61501 Connector Plate 3m Triaxial Cable Four 04145 61622s are furnished 3m BNC Cable Four 04145 61630s are furnished Shorting Connector System Dise B OPTIONS Option 050 For 50Hz Line Frequeney Option 060 For 60Hz Line Frequeney Option 907 Front Handle Kit Option 908 Rack Flange Kit Option 909 Rack and Handle Kit Option 910 Extra Operation and Service Manual SECTION Model 41458 Table 1 3 Accessories Supplied Sheet of 5 l amp 58A Test Fixture Shielded Test Fixture for measurement of diserete components Equipped with safety lid Following subcomponents are furnished with the 16058A Personality Board 15058 60002 Triaxial Cable 16055 61601 dea System Cable 15058 61504 Socket Hoard Conneetion Cable Set Contents are shown below t Socket Board Connection Cable Set included in the 160584 e HHH ty ole Pg eff fas goad fan e 5 a jV eth d gu j L D ES Dimension of Socket Unit in mm HP P N and Description 16058 80004 Blank teflon board for measurement of high resistance devices 16058 60003 Socket Board with two sockets For measurement of four pin devices su
121. given below Model 41458 Configuration SECTION I Table 1 3 Accessories Supplied Sheet 4 of 5 Description Triaxial Cable 04145 61602 Triaxial a cable for connection between the 4 45E terminal and the Connector Plate Cable length is Pour 04145 61622 are furnished Refer to Figure 3 37 for the Usage Cable 04145 61620 m cable for conmection between the A 45B Ys or Vp terminal and the Connector Plate Cable length is dm Four 04145 61620 are furnisihed Shorting Connector 04145 61623 When measurement is made without the 16056A thi Conneetor should be connected to the terminal on the rear panel WARNING A POTENTIAL SHOCK HAZARD EXISTS WHEN THE SHORTING CONNECTOR 15 CONNECTED TO THE 41458 DO NOT TOUCH THE OUTPUT TERMINAL OR IN NER CONDUCTOR OF DURING MEASUREMENT SECTION 1 Model 41458 Table 1 3 Accessories Supplied Sheet 5 of 5 System Dise Set 04145 81501 L Model 41458 SECTION Il SECTION II INSTALLATION 2 1 INTRODUCTION 2 2 This section provides installation instruc tions for the Model 41458 Semiconductor Parameter Analyzer This section also ineluches information on initial inspection and damage claims preparation for using the 41458 and packaging storage and shipment 2 3 INITIAL INSPECTION 2 4 The 41458 Semiconductor Parameter Analyzer as shipped from the factory meets all the specifica
122. he HP1310B displays on the 4145B s CRT will be displayed on HP1311B 23emx28em the external display also Recommended HP1317HB 26emxi5em external displays are listed in Table 3 12 HP1321H i cmx isem Note Figure 3 60 shows the interconnections between the 41455 and the external display The bandwidth of the external display must be at least 2M Hz Hote Qutput impedance of the EXTERNAL CRT OUTPUTS is 3300 X and Y and 2406 Z Thus the input impedance of the external display must be sufficiently higher te obtaian satisfactory display results Connection 1 Equipment External Display equips X Y Z analog inputs and three BNC BNC cables 2 Intereonneet the 4145B and External Display shown below 1311B 3 n condition displays on the 4145B s CRT are also displayed on the external aplay Figure 3 60 External Display 3 126 Model 41458 SECTION 3 144 Dise Initializing 3 145 The purpose of dise initialization is to generate direetory onto the dise which enables You to use the dise for the 41458 Measurement Setups Auto Sequence Programs and measurement results from the 41458 be stored on the initialized disc Also for archival purposes the 41458 operating system can be copied to the initialized dise by using the operating system funetion Refer paragraph 3 146 The procedure to initialize dise ik deseribed in Figure 3 61 The recommended dise is
123. he equipment which normally includes all exposed metal structures Alternating current power line Direct current power line Alternating or direct current power line A WARNING denotes a hazard It calls attention to a pro cedure practice condition or the like which if not correctly performed or adhered to could result in injury or death to personnel The CAUTION Sign denotes a hazard It calls attention to operating procedure practice condition or the like which if not correctly performed or adhered to could result in damage to or destruction of part or all of the product Note denotes important information It calls attention to a procedure practice condition or the like which is essential to highlight j Model 41458 TABLE OF CONTENTS Section Title Page I GENERAL INFORMATION 1 1 Introduction eee 1 1 1 4 Description 1 2 1 11 Specifications 1 3 1 13 Safety Considerations 1 3 1 16 Instruments Covered by Manual 1 3 1 21 Options 1 4 1 23 Accessories Supplied 1 4 1 25 Accessories Available 1 4 1 27 Warranty Limitation for Accessories 1 4 II INSTALLATION 2 Introduction 2 1 2 3 Initial Inspection 2 2 5 Preparation for Use 2 1 2 6 Power Requirements 2 1 2 8 Line Voltage and Fuse Selection 2 1 2 10 Line Frequency Fil
124. he same source mode V or I s that specified for VARI VARI i swept in synehronism with VARI at either constant offset value or constant ratio offset amp nd ratio values gre entered with the corresponding softkey The offset value and ratio must be such that the VARI source channel does not exceed its maximum output limits VAR 2 EA WER IW VAR 2 LINEAR START o a STOP 3 STEP 3 9 Stir 5 i hendacnDamen pointa Figure 1 17 Relationship Between VARI and VARZ Model 41458 I RATIO 1 5 VAR DCW VAR s VAR I RATIO x VAR OFFSET YARI Y VAR 1 OFFSET LEV 2 4 VAR VAR OFFSET WAR Figure 3 18 Relationship Between VARI and VART 3 37 The number of measurement points per decade im LOG sweep is selectable at 10 25 or 0 The output at each point determined by the number of measurement points per decade and the sweep START value The output at the nth measurement point is calculated as Output at nth point START value 10 52 9 1 where is the number of measurement points per decade 10 25 50 SECTION 3 38 TIME DOMAIN MEASUREMENT 3 38 time domain messurement i amp one in whieh the voltages and or eurrents applied to the device under test are held constant and the desired device parameter E measured as funetion of time Only one source channel can be swept and
125. ications Sheet of 8 GENERAL SPECIFICATIONS Data Input Output External CRT Analog Output From 0 te 1 Vde X and Y outputs in series with approx 33050 Z output in series with approx 2400 via rear panel BAC connectors Frequency Bandwidth DC 2MHz External Plotter Printer Output Measurement data and all data appear ing on the CRT may be output via the HP IB to an HP plotter printer aperated in the LISTEN ONLY Mode Output is initiated using the PLOT or PRINT key HP GL Control The CRT of the 41458 may be program controlled in the Graphies Display Mode via HP TB compatible Controller HP IB and Remote Control Funetions The 4145B may be interfaced to any HP controller or other instrument having HP IB interface capability HP IB is Hewlett Packard s implementation of IEEE 488 and ANSI MC 1 1 standards Self Test Funetion At power ON the 4145B automatically verifies its own operational status HP IB and DIAGNOSTICS page allow Self Test to be performed at any time Operating Temperature Range I0 C to 40 C 5705 RH 40 C Permissible Temperature Changers min Maximum Wet bulb temperature 29 C Power Requirements 100 120 220V 105 240V 10 55 48 270VA Dimensions 426W x 235H x 6120 mm approx Weight Approx 27kg Approx 33kg ineuding accessories REFERENCE DATA The following information is reference data only It is not guaranteed speci
126. ilable for VAR2 are START STEP and NO OF STEPS Sweep parameters available for VARI are OFFSET specifiable in linear sweep mode only and RATIO both of which are softkey functions Also when displaying measurement results on the GRAPHICS page either LINEAR or LOG sealing can be specified on the MEAS DISP MODE SETUP page regardless of the SWEEP MODE of VARI Calibration is performed every 5 min when AUTO CAL is on Figure 3 16 Staircase Sweep Output 3 29 SECTION 3 36 Of the six source channels four SMUs two voltage sources three can be swept by specifying VARI VARI or VARZ in the SOURCE FCTN field on the CHANNEL DEFINITION page The remaining three source channels are either not used or are set to CONST source function The VARI source channel i the main sweep channel and VAR and VARI are VAR dependent gs shown in Figures 1 17 and 3 18 respectively and as described below subordinate sweep At the completion of the VARI sweep VAR is incremented or decremented by the specified STEP value 4 in Figure 3 17 and VARI is swept again The total number of VARI swe E determined by the NO OF STEPS C5 in Model 4145B Figure 3 17 specified for VAR2 VAR cannot be swept logarithmically Also VARI and VARZ ean have different source functions START STEP and NO OF STEPS must be specified synchronous sweep VARI can be used only when VARI is used and it must have t
127. ion Arithmetic expressions are executed by pressing the EXECUTE key Results are displayed on the CRT USER FUNCTION Up to two USER FUNCTION can be defined as arith metic expressions USER FUNCTIONS are executed during measurement and the results are displayed with measurement results Physical Constants Three commonly used physical constants are perma mently stored in memory The stored value of each constant has seven digit aceuracy but only the five most significant digits are displayed Electron Charge l 602188x10 k Boltzmann s Constant 1 380662x10 7 3 J e Dielectrie Constant of vacuum B 854185x10 F m Engineering Units m 107 u 1075 n 107 p 10712 Analysis Funetlans Overlay Graph Comparison A GRAPHIC plot can be stored and later recalled to obtain an overlay comparison of two measurements A SCHMOO plot can also be stored but when the RECALL key is pressed only the stored plot is displayed Pressing RECALL second time redisplays the previous plot Only one set of data can be stored and sealing information is not included Auto Retrieve Funetion Measurement data obtained in any display mode is automatically redisplayed whenever the display mode is changed However when the value of rmesmsurement setup parameter is changed all measurement data is cleared MARKER On a GRAPHICS plot the MARKER be moved along a plotted eurve or line The X Yj and coordinate
128. ithmetic expressions however 124 bytes of which 78 bytes max are used for the object buffer Arithmetic operators i 1 byte Variables and other operators 3 bytes Constants 5 bytes Figure 3 7 Byte Size of Arithmetic Expressions 3 18 Up to two user funetions can be defined as arithmetic expressions in the USER field on the CHANNEL DEFINITION page This allows automatic calculation of secondary parameters such as hpg and gm which are functions of applied and measured voltages and currents For example if the static collector characteristics of a bipolar transistor are to be measured and plotted the transistor s forward current transfer ratio hpp can be defined as HFEsIC IB in the USER FUNCTION field on the CHANNEL DEFINITION page will appear as a softkey prompt on the MEAS amp DISP MODE SETUP page and can be selected as the axis When measurement is made on the GRAPHICS page HEE will be plotted along with the primary eharaeteristies lC IB and VCE Similarly the transconductance gm of a field effect tran sistor ean be defined as GM AID AVG Model 41458 The delta 4 function be used in user function definitions or for keyboard calculations on the GRAPHICS LIST MATRIX or SCHMOO page In the latter case the value returned by executing AA where is the name af one of the source or monitor channels depends on the location of the marker GRAPHICS page or eurso
129. ive Direction Relative Character Size Character Plot LINE TYPE Group LT Line Type SP Select V5 Velocity Selec AXES Group 9 KT M Tick YT Y Tick SETUP Group 9 Turns off the beam Pu Turns on the beam PD Moves the beam to the point X coordinate Y coordinate specified by the X and Y X eo0o0rinate Y coordinate coordinates Moves the beam the specified PR X increment Y increment units eos X increment Y increment Selects the character sat 2 CS Character Set Writes characters using the LB Charactars ETX 3 assigned character set Selects the writingdirection DR run rise 128 5 5 127 selects the character size 5 SR width height Moves the beam the specified CP horizontal vertical of characters 128 3 number 127 Selects the line type Selects the beam intensity LT pattern number 6 SP intensity number 47 Selects the beam writing speed V5 velocity 8 beam intensity number Writes an X axis tick mark XT at the present beam position Writes a Y axis tick mark at the present beam position Sets up the scaling points Pl IP Plx Ply Pax 2 and P2 0 Outputs the scaling points Limits the plot urn IW Tia Xp Tur Returns the CRT setup to the DF default condition 1 Returns to the default condition IN and clears the display Selects mask value of the error mask value number which can cause a
130. le Ag ta store measurement data 20 Set measurement integration time auto calibration CAL data ready DRO and data buffer clear BC 30 40 Setup the CHANNEL DEFINITION Page DE 50 Setup the SOURCE SETUP Page 85 B Setup the MEAS amp DISP MODE SETUP Page SM 70 Preceed to the GRAPHICS PLOT Page MD and perform one measurement ME1 B Read the 41456 s Status Byte and assign the result to variable A B Wait until bit 0 of variable A set to 1 Data Ready 100 Send data output DO command to obtain the measurement data fram the TC monitor channel 110 Enter the measurement date inte the string variable 120 Display the string variable Ag Figure 3 56 Sample Program 1 Sheet 1 of 2 3 121 SECTION Model 4145 The proceeding program can be modified as follows to make overlay plots on the GRAPH 100 110 120 130 140 150 160 170 ICS PLOT Page DIM G 20 OUTPUT 717 GL1 IN OUTPUT 717 1570 493 PD PA220 1725 PU OUTPUT 717 PA1000 1000 PD 580 3 G 41 45 OUTPUT 717 LB amp G amp CHR 3 OUTPUT 71 GLO END These program modifications perform the following Line 110 120 130 140 150 160 Deseription Set the 4145B to GL1 mode GLI and initialize the CRT IN Draw a line from lower right corner to upper left corner of the plot area Move the beam PA and seleet the character size SR Enter the data to be displaye
131. lected on the MEAS DISP MODE SETUP b Limits specified on the MEAS DISP MODE SETUP page source d VARI source name Pur E um ade Edit petat a Funetion of this page 1 Plot measurement results on an X Y 2 graph 2 Allow analysis of measurement results with the softkeys and arithmetic capabilities MEASUREMENT make measurement press the SINGLE or REPEAT key APPEND can not be used Measurement results will be displayed as the measurement progresses Figure 3 29 SCHMOO PLOT Page Sheet 1 of 3 3 64 Model 41456 SECTION and Y Axis Sealing Sealing for the X and Y axes is determined by the START and STEP values of VARI and VAR and by the VARI SWEEP MODE The maximum number of measurement points along the X axis is 41 along the Y axis 21 l Linear VAR Sweep X Bxis VARI Min Max a 40 x b Y axis VAR2 Min 20 where a VARI START value b WVARI STEP value e VAR START value d VAR STEP value Note STOP value is not used in determining axes sealing Also if the VARI STEP value or VAR STEP value is 0 the minimum and maximum scale values for the respective axis are set to the START value 2 Logarithmic VARI Sweep X axis VARI lo Y axis VART Max e 20xd where VARI START value z Number of step per decade 10 25 or 50 VAR START value d
132. m Depending on the number of channels used in the measurement up to six digit numbers are displayed in the format shown below whenever the measurement eannat be performed correctly Data Errors Error DXX AA XX AA XX Here XX 2 digit number which represents channel status The left to right order in whieh the 2 digit error codes appear corresponds to the order in whieh the channels are assigned on the MEAS DISP MODE SETUP page Also the number af 2 digit error codes that appear is identical to the number of channels used in the measurement The left digit of XX is hexadecimal and must be converted into a 4 dizit binary number as deseribed below The right digit is decimal and requires no conversion Also zero Means no error Stack register overflow Calculation error Insufficient data for 4 measurement Undefined user funetian INTERVAL in m time domain measurement is too short Complete measurement date cannot be stored before the next measurement begins Son aa Convert hexadecimal number into binary Oscillation Other channel has reached compliance limit This channel has reached compliance limit LIII L A D converter saturated Channel eorrespondenee E shown below GRAPHICS PLOT Error DXX X axis XX YI axi VY axis LIST DISPLAY Error DXX XX lst XX ind rd XX 4th XX ath MATRIX DISP
133. ment are erased from the data buffer and a new measurement must be made make a new measurement press the SINGLE REPEAT or APPEND key Measurement results of the first three monitor channels selected the MEAS DISP MODE SETUP page will be displayed as the measurement progresses The list contains four columns Each VARI step is listed in the left most column The VAR2 STEP corresponding to the top line VAR1 STEP is displayed in brackets above the list c in Figure A The remaining three columns list the measurement results of the first three monitor channels selected on the MEAS DISP MODE SETUP page If more than three monitor channels are selected on the MEAS DISP MODE SETUP page measurement results for the fourth fifth and sixth monitor ehannels ean be displayed by pressing the LEFT softkey Only ten lines ean be displayed To display additional lines use the ROLL UP or ROLL DOWN softkeys Figure 3 27 LIST DISPLAY Page Sheet 1 of 3 3 59 SECTION Model 41458 DISPLAY Measurement results are displayed in 3x10 window as shown in Figure B The field can be moved left right up or down by pressing the LEFT RIGHT ROLL UP or ROLL DOWN softkey to view other measurement results ee Be Softkey Functions This page has only one softkey prompt shown in Figure A The funetion of each softkey is described below Turns on the lime cursor When this softke
134. n and logical 1 up position The switch has three functions as follows 1 Bit switches through 5 Address Bits are used to set the HP IE address in binary of the 4145B Any address between 0 00000 and 30 11110 ean be set 2 Bit switeh 6 Data Form Bit determines the output data delimiter When the bit switeh is set ta 0 the delimiter is a comma when set to l the delimiter is carriage return and line feed CR LF 3 Bit switeh 7 EOI End or Identify determines whether or not the 414586 sends the signal when data transfer ends The HP IB Control Switeh settings are displayed when the 4145B is turned on Refer to Figure 3 22 Note The HP IB Control Switch as set at the factory is shown in Figure 3 51 EQ OFF E COMMA EO ON Bits 1 through 5 17 Blt 6 Comma Bit 7 BOL on Figure 3 51 HP IB Control Switeh 3 10 SECTION 3 120 HP IB INTERFACE CAPABILITIES 3 121 The 4145B has eight HP IB interface functions Refer to Table 3 10 Table 3 10 HP IB Interface Capabilities Interface Function HP IB Capabilities Source Handshake Acceptor Handshake Talker basie talker serial poll talk only mode unaddress to talk if addressed to listen Listener basie listener unaddress to listen if addressed to talk Service Request Remote local with local lockout Device Clear Device Trigger End Message Sending Interface functions pr
135. n SR Outputs the error number 1z OF that caused an SRO IP Input Pl and PZ P2 OF Output Pl and IW Input Window CONFIGURATION and STATUS Group DF Default IN Initialize Input Mask Output Error 05 Output Status Outputs the CRT s status byte 15 los 3 113 SECTION Model 41458 Table 3 11 HP GL Commands Sheet 2 of ORIGINAL INSTRUCTION Group a3 PLI 3 114 Memory Address Sets the memory pointer to the MA address number specified address Memory Jump Sets the Memory Jump command to jump address the address Memory Count Outputs the memory count to which the memory pointer points Memory Clear Clears the user memory and resets the memory pointer Page MK Memory Clear Advance Full ME Memory Clear Page Terminater LF is required at the end of each command Only one Character set is available on the 41458 Indicated Label Terminator use ASCII CODE ETX Example for LB command sent by HP85 displays 41458 OUTPUT 717 LB 41458 amp CHR 3 All run and rise values are converted into 0 90 180 or 270 as follows 2 45 4 direction g 45 0 45 lt direction lt 135 90 3 135 direction 5 225 180 Ton 225 direction lt 3157 gt 270 Four character sizes 1 0 x1 5 x2 0 and x2 5 are selectable according ta larger value of width or height as follows s larger value lt
136. n be entered If a line is inserted inte 50 line program the last line is deleted Figure 3 30 AUTO SEQUENCE SETUP Page Sheet 3 of 4 SECTION Model 41458 Program Execution To execute an auto sequence program press the AUTO SEQ START STOP key The program will begin and the AUTO SEQ START STOP indicator lamp will come on The line number and the command being executed are displayed on the Keyboard Input Line during program execution The program continues execution until it somes to a PAUSE command or until all lines have been executed When the program halted by the PAUSE command press the AUTO SEQ CONT key to continue the program To stop the program press AUTO SEQ START STOP key again The indicator lamp will go off and the program will stop at the present Line Note An amp uto sequence program cannot be executed when the instrument is measuring plotting printing or in GLI mode under HP GL control The AUTO SEQ STOP key cannot be pressed when the auto sequence program E executing a GET P SAVE D or RE SAVE D command Note Once auto sequence program containing a SAVE D command is executed it can not be executed again If it is executed again error MOS file name already reserved will be displayed on the CRT To run the auto sequenee program again use the RE SAVE command or change the file name specified in the SAVE D command Note If an error eode ZXX is displayed the auto sequence program stops
137. n if a comment is alread displayed below the page title This allows you to change or delete an existing comment For example to delete a comment press the COMMNT softkey the Keyboard Input Line and press ENTER Figure 3 26 GRAPHICS PLOT Page Sheet 2 of 6 3 54 Model 4145B SECTION Re seales the plot area to provide optimum display of the existing measurement results When auto sealing is performed the minimum and maximum measured values are used as the plot area scaling factors The MIN and MAX values specified on the MEAS DISP MODE SETUP page however are not changed and the new sealing factors are cancelled when the PREV or MENU key is pressed To re seale the existing plot press the AUTO SCALE softkey The frame around the softkey prompt will be highlighted and will remain so until auto sealing is completed about 5 seconds Graticule or tick mode control When this softkey is pressed grid lines are replaced by tick marks along each axis To return to graticule mode press this softkey again ponere Displays a marker 9 which can be moved along plotted curves by rotating the MARKER dial X Y and Y eoordinates of the marker location are digitally displayed above the plot area When the Y axis is used two markers are displayed Both have the same X axis coordinates and move in unison The marker can be used for keyboard ealeulations Instead of entering the numeric value of a measurement
138. n press the 5 softkey This automatically changes the measurement setup to one that is more appropriate for measurement of bipolar transistors A few simple changes remain to be made however To make these changes first make sure that the field pointer is in the NAME V field of SMUI then perform the following key sequence olojojcalcicia The CHANNEL DEFINITION page should now look as that shown in Figure 3 46 Press the lt key 3 98 Model 41458 mai acai fa iur BRL Figure 3 44 Setup the 16058A s Personality Board of Measurement Example ub ad ERE m im omi m mi DEFINITION SOURCE MEAG mOOE SET ALTD SEQUENCE UF OUTPUT SEQUENCE usEH FILE CATALOG OPERZTION niagHOSTICH a a 5 7 a Example Figure 3 46 Channel Definition Example Model 4145 3 105 On this SOURCE SETUP page the output parameters for each SMU selected the CHANNEL DEFINITION page are set VE is entered in the VARI NAME field because it is the V name of a voltage source V MODE whose function is VARI Similary VB and VC are listed under CONSTANT For this measurement this page must set up as shown in Figure 3 47 To do this move the field pointer to the VARI SWEEP MODE field and then perform the following key sequence c oOOO00c9o9 200060000 When measurement is made
139. nce refer to the instrument by model number and full serial number 2 28 Other Packaging The following general instructions should be used for re paeking with commercially available materials a Wrap instrument in heavy paper plastic If shipping to Hewlett Packard office or service center attach tag indicating type of service required return address model number and full serial number Use strong In any Model 4145B shipping container A double wall carton made of 350 pound test material is adequate Use enough shock absorbing material 3 to 4 inch layer around all sides of instrument to provide firm cushion and prevent movement inside container Proteet eontrol panel with eardboard Seal shipping container securely Mark shipping container FRAGILE to ensure eareful handling correspondence refer to instrument by model number and full serial number Model 41458 SECTION Il 907 Handle Kit Front Handle 2 Trim Strip Screw Rack Mount Flange 2 Screw 6 Rack Flange Front handle 2 Handle Kit Rack Mount Flange Screw Rack Flange Kit 3879 l Remove adhesive backed trim strips 0 from side at right and left front of instrument 2 HANDLE INSTALLATION Attach front handle 1 to sides at right and left front of instrument with serews provided and attach trim 1 to handle RACK MOUNTING Attach rack mount flange 2 to sides at
140. nd also if the MIN MAX range is very large part of the graph will not have division lines If MIN and MAX are close their displayed value may include quantum error and if they are so close that the differenee between them is smaller than best resolution the maximum allowable resolution is used 1mV voltage 50pA eurrent 100ms time 1E 34 user function units Also 1 division can not be less than 0 1 in LOG seale Figure 3 25 MEAS amp DISP MODE SETUP Page Sheet 3 of 6 3 49 SECTION Model 4145 LIST DISPLAY Setup When LIST is selected on the DISPLAY MODE line the MEAS DISP MODE SETUP page will be as shown below Chol MEAS DISP HODE SET The field pointer will be in the top row of the NAMES table Up ta six of the names listed in the softkey prompt area can be entered Measurement results of each name listed here will be digitally listed on the LIST DISPLAY page The measurement results are those obtained at each VARI step MATRIX DISPLAY Setup When MATRIX is selected on the DISPLAY MODE line the MEAS DISP MODE SETUP page will be as shown below E DIS MODE UP The field pointer will be in the top row of the NAMES table Only one of the names listed im the softkey prompt area can be entered Measurement results of the name listed here will be digitally listed on the MATRIX DISPLAY page The measurement results are those obtained at each VARI and ste
141. nd channel date for each SMU V5 VM and User Function Data for each E contained in and ll byte long data group amd all groups have the same structure Figure 3 67 shows the 414588 CHANNEL DEFINITION page and prov ides mare detailed information on ID TABLE data groups 3 132 2 3 4 5 6 Model 41458 SVCBV Source Value Control Block for Variables bytes 171 through 264 The SVCBY contains setup Hold Time and Delay Time data for variables VARI VAR2 and VARI Data for each variable is contained in 26 byte long date group and all variable data groups have the same structure Hold and Delay Times written using the 4145B s 4 byte floating point data format ms shown and explained in Figure 3 68 Figure 3 68 shows the 41456 SOURCE SET UP page and provides more detailed information on data groups SVCBC Source Value Control Block for Constants bytes 265 through 330 The SVCBC contains setup data for each constant MU 1 4 51 and VS2 Data for each constant is contained in an ll byte long data group and all groups have the same structure Figure 3 70 shows SVCBC data group structure and provides more detailed information DACB Data Array Central Block bytes 331 through 390 The DACE contains Data Area data for each channel SMUs 1 4 VMI and VMZ Data for each channel is contained in a 1 byte long data group and all groups have the same structure Figure 3 71
142. nt of general PN junction diodes When the diode is connected as shown below V I forward bias voltage forward current characteristics can be measured Figure 3 43 Connection Examples for Application Package SECTION 3 87 SECTION MEASUREMENT EXAMPLE 3 101 In the following example the cheracteristies of an NPN transistor connected for common emitter operation are measured and graphically displayed Base emitter voltage is swept and the resultant base and collector currents are measured 3 102 Turn off the 41458 Set up the 16058 A s Personality Board as shown in Figure 3 44 and insert a transistor into the DUT sockel Insert the furnished System Dise into the 41458 then turn the 4145B on 3 103 When the 41458 is turned on it will first read a portion of the operating system software stored on the dise and will then perform a brief self test after which it will display the MENU page shown in Figure 3 45 For this measurement example the CHANNEL DEFINITION page SOURCE SET UP page and MEAS amp DISP MODE SET UP page are used Press the ai softkey or the key 3 104 On the CHANNEL DEFINITION page the channels 8M Us voltage source and voltage moniter to be used in the measurement are selected assign source and monitor names and specify source modes and functions To use the Application Package refer to paragraph 3 88 move the field pointer to the NAME V field of SMUL and the
143. nt s rear panel The first four digits and the letter are the serial prefix and the last five digits are the suffix The letter placed between the two sections identifies the country where the instrument was manufactured The prefix is the same for all identieal instruments it changes only when a change is made to the instrument The suffix however is assigned sequentially and is different for each instrument The contents of this manual apply to instruments with the serial number prefix es listed under SERIAL NUMBERS on the title page Figure 1 2 Serial Number Plate SECTION I 1 18 An instrument manufactured after the printing of this manual may have a serial number prefix that is not listed on the title page This unlisted serial number prefix indicates the instrument is different from those described in this manual The manual for this new instrument may be accompanied by a yellow Manual Changes supplement or have a different manual part number This supplement contains change information that explains how to adapt the manual to the newer instrument 1 19 In addition to change information the supplement may contain information for correcting errors called Errata in the manual To keep this manual as current and accurate as possible Hewlett Packard recommends that you periodically request the latest Manual Changes supplement The supplement for this manual is identified with the manual print date and part number
144. o 5080 3149 for other countries Part No 1251 8196 and connect the grounding tab on the adapter to power line ground CAUTION THE MAIN PLUG MUST ONLY BE INSERTED IN A SOCKET OUTLET PROVIDED WITH A PROTECTIVE EARTH CONTACT THE PRO TECTIVE ACTION MUST NOT BE NEGATED BY THE USE OF AN EXTENSION CORD POWER CABLE WITHOUT PROTECTIVE CONDUC TOR GROUNDING 2 15 Figure 2 2 shows the available power cords which may be used in various countries including the standard power cord furnished with the instrument HP Part number applicable standards for power plug power cord color electrical characteristics and countries using each power cord are listed in the figure If OPERATION 120V OPERATION Fuse 2 5A 250V HP P N 2110 0015 220V I20V 220V I20V o poo v pov Model 4145B assistance is needed for selecting the correct power cable contact the nearest Hewlett Packard office 2 16 OPERATING ENVIRONMENT 2 17 Temperature The instrument including the mass storage medium may be operated in temperatures from 10 C to 40 C 2 18 Humidity The instrument including the mass storage medium may be operated in environments with relative humidities from 8 to 70 and maximum Wet bulb temperature 29 However the instrument should be protected from temperature extremes which cause condensation within the instrument 2 19 INSTALLATION INSTRUCTIONS 2 20 The HP Model 414
145. of Hewlett Packard Company is prohibited extra system dises are required for purposes other than archival purposes order P N 04145 61507 2 Operating System Software Copy 1 Turn on the 41458 2 Same procedure as that is step 2 of Figure 3 61 3 Same procedure as that is step 3 of Figure 3 61 4 Press the COPY SYS softkey 5 When Copy system OK 7 is displayed press the EXEC softkey If the QUIT softkey is pressed before pressing the EXEC softkey the Operating System Software Copy operation is cancelled Note The System Dise must be in the 41 45B s dise drive if the QUIT softkey is pressed in the cancel procedure 6 Insert the Master Disc dise to be copied that contains the Operating System and press the EXEC softkey 7 After the dise has been accessed Insert the copy dise is displayed Remove the Master Dise and insert the initialized dise target dise then press the EXEC softkey Copy completed is displayed when Copy is finshed To copy additional dises press the EXEC softkey and repeat steps 6 to 7 To return to the MENU page press the QUIT softkey insert the System Dise and press the EXEC or QUIT softkey Figure 3 82 Operating System Copy Procedures 3 128 Model 41455 SECTION 3 148 DISC COPY 3 143 All files m the user area of a 41458 dise ean be copied onto another dise The procedure is given in Figure 3 63 The operating system software and the system files can also
146. of date files paragraphs 3 163 and 3 164 deseribe how to read measurement data from a dig These paragraphs were written for users familiar with 41458 operation amd BASIC 3 0 or 4 0 date storage and retrieval techniques If this is not the case however this section and Chapter 7 Data Storage and Retrieval of the BASIC 3 0 or 4 0 Programming Techniques Manual will help you understand date file atrueture 3 154 The 41458 data files are divided into four main sectors as follows 1 BOAT System sector 256 bytes 2 File Comment sector 258 bytes 3 Setup Data sector 7168 bytes 4 Measurement Date sector 4608 bytes 3 155 System Sector 1 156 Thi sector contains an End of File pointer and the number of defined records in the file You cannot directry eccess the system sector For more information refer to Reading and Writing BDAT Files in Chapter 7 of the BASIC 3 0 or 4 0 Programming Techniques Manual 3 157 File Comment Seetor 3 158 This sector contains the file comment diplayed on the catalog page Figure 3 65 shows the structure of the File Comment Sector 3 159 Setup Data Sector 3 160 This sector contains CHANNEL DEFINITION SOURCE SETUP MEAS amp DISP SETUP and OUTPUT SEQUENCE SETUP page date Figure 3 66 shows the structure of the Setup Date sector brief explanation of each block m this sector i as follows 1 ID TABLE bytes 16 through 169 Thi block contains symbolic name status funetion a
147. of the instrument s detected by the SELF TEST is displayed at the bottom of the CRT HP IB Address 0 30 Shows the setting of the HP IB Control Switeh located on the rear panel To change the address turn the instrument off set the desired address and turn the instrument on again Output data delimiter COMMA or CR LF is displayed depending on the setting of the HP IB Control Switeh EOL End or Identify EOI is displayed when bit of the HP IB Control Switch is set to EO ON Line Filter setting Indicates the setting of the Line Filter Switeh on the rear panel 50Hz indicates that the instrument is set for operation from a 50Hz AC source The LINE FILTER switch on the rear panel should be set to the frequency of the AC source if accurate measurements are to be obtained Figure 3 22 MENU Page Sheet 1 of 2 3 37 SECTION Model 41458 SMU Status Displays each SMU channel number and its status 10 20 30 40 indicates that all SMUs are functioning properly Each Z digit number represents the channel number and the channel status No error Y offset error offset error Channel No leak WV range error range error lin offset error Loop Change Detector error For example 10 20 31 40 indicates that SMU 3 has a V offset error and should not be used SMUs 1 2 and 4 however are functioning properly and be used for measurement When DOWN is displayed the SMU control
148. ogl decreasing Logis decreasing Logh0 decraesing da s BR BB 4 Refer to Figure 3 08 sample program lines 120 through 160 to transform 2 complement binary value to a REAL value Start Value Stop Value Step Value and Compliance Value These bytes contain values that are assigned on the SOURCE SET UP page These values are written using 41458 4byte Floating Point Data Format Refer to Figure 3 68 of Steps The No of Steps bytes contain the number of steps that are assigned on the SOURCE SET UP page This value is written using the Zbyte Integer format Figure 3 69 VARI VARZ and VARI Structure 2 of 2 3 143 SECTION 41458 byte foji ait abe loli Compliance Value Channel Status Source Value source Value and Compliance Value These bytes contain constant source values and compliance values that are assigned on the SOURCE SET UP page The values are written using the 4145B 4byte Floating Point Data Format Refer to Figure 3 68 Status The Status byte contains ehannel s used or not used setting 00H used 80H Used Channel The Channel byte contains the channel setting 00H SMUI DIH SMUS 02H SMU3 MH SMU4 04H Ysl OSH Vaz Mode The Mode byte contains the source mode setting that is assigned on the SOURCE SET UP page Common B H I mode Figure 3 70 SVCBC Structure 3 144 Model 41458 SECTION
149. om the front panel When this softkey is pressed the existing gradient value will be displayed on the Keyboard Input Line To enter a new value press the CLEAR key key in the desired value and press ENTER The line will automatically adjust to the new gradient Interchanges the moveable and fixed cursors of the line Note GRAD value and 1 GRAD value display 170E 39 and 5 88E 39 instead of overflow and zero respectively Figure 3 26 GRAPHICS PLOT Page Sheet 5 of 6 3 57 SECTION 3 58 These softkeys allow the operator to check of change Changes the START value for VARI Changes the STOP value for VARI Changes the value for VARI Changes the START value for VARZ Changes the STEP value for VAR2 Changes the HOLD TIME 0 655 35 sec Changes the DELAY TIME 0 6 500 sec Model 4145B the existing measurement parameters without having to return to the SOURCE SETUP page The new values are automatically entered on the SOURCE SETUP page Measurement parameter values can be changed during measurement but only DELAY TIME is valid immediately HOLD TIME is valid for the next step VARI and VARZ parameters are valid for the next measurement Notes Range and resolution are the same as those on the SOURCE SETUP page Error message Step overflow will be displayed when an attempt is made to enter value that causes the number of steps for VARI to exeeed 1024 VAR
150. on ends This bit does not get the RQS bit Self Test Fail This bit is set when Self Test fails It is reset when Self Test is performed again and the result is pass If this bit is set while bit 8 is set it has another meaning Refer to the description for bit 8 Figure 3 55 Status Byte for the 4145B Sheet 1 of 2 3 118 Model 41458 SECTION RQS Request Service This bit is set whenever bit 2 3 4 6 or B isset Also set when bit 1 is set if program code DAL Data Ready ON has been sent Emergency This bit is set when potentially dangerous condition exists The meaning of this bit depends on whether bit 2 bit 4 or bit 6 set Each is deseribed below Bit 2 Fixture lid open This bit and bit 8 are set when the fixture lid opened during or at the start of measurement in which the output voltage will exeeed 42V In user mode regardless the output voltage this bit is set if the fixture lid is open or shorting connector is not connected SMU shut down This bit and bit 8 are set when SMU output is shut down by the instrument to prevent damage to SMU Power Failure This bit and bit 8 set when the SMU output was reset by momentary power loss Note All bits except bit 5 are reset by a Serial Poll and all bits except bit 1 and 5 are reset by Device Clear Figure 3 55 Status Byte for the 4145B Sheet 2 of 2 3 118 SECTION 1 138 Programming Guide for 41458 3 139 Sampl
151. only with the WVARZ source function All other channels are either not used or must be set to CONST souree funetion Seleetable TIME DOMAIN parameters are WAIT TIME INTERVAL and NO OF RDNGS number of readings Each is described below WAIT TIME Identical to the HOLD TIWE of a WAR sweep measurement Setting range is roe D to 100 seconds and resolution is 10 milli seconds INTERVAL Time between each measurement point Setting range is from 10 milliseconds to 1D seconds and resolution is 10 milliseconds OF RDNGS Total number of measurement points If is used OF RDNGS per each step of VAR2 Up to 1024 measurement points ean be specified depending on the number of VARZ steps To make a TIME DOMAIN measurement do mot assign VARI to any of the source ehannels on the CHANNEL DEFINITION page Assigning VAR2 is optional Output values for all CONST sources must still be entered on the SOURCE SETUP page VAR is used its START STEP and HO OF STEPS must also be entered Also HOLD TIME and DELAY TIME are not used in a TIME DOMAIN measurement TIME DOMAIN parameters WAIT TIME INTERVAL and OF HDNGS must be entered on the MEAS DISP MODE SETUP page Refer to Figure 3 35 Integration time during TIME DOMAIN measurement i automatically set to SHORT and cannot be changed SECTION Model 41458 2nd Jra Sth Th Hih Sih i o 4 4 1 t bt ss Tima lic 3 B
152. ot detect the 2 Interconnect the 4145B HP IB plotter or end of a plot or print operation by reading printer and controller with HP IB cables the status byte of the 41458 3 Send the PLOT of PRINT command to the Figure 3 59 shows programming example of 41458 HP IB controlled plot operations with the HP series 200 300 Desktop Computer 4 Set the 4145B to TALKER and set the plotter or printer to LISTENER And set the ATH Attention Line to Inactive t start the plot or print operation 5 End of plot or print can be detected by monitoring the EO Line or SEQ Line HP series 200 300 Program ON INTR 7 GOTO 70 ENABLE INTR 7 2 OUTPUT 717 PLLI00 100 5000 3000 SEND 7 UNT UNL TALK 17 LISTEN 5 DATA REMOTE 7 GOTO 680 AsSPOLL T717 IF BIT A 2 THEN PRINT END BEEP END These programs perform the following Line Description 10 Interrupt PLOT END handling instructions 20 Enables controller to respond an SRQ 30 PLOT command 40 Asigna TALKER and LISTENER and sets line to Inactive Figure 3 59 Program for HP IB controlled PLOT Operations 3 125 3 142 External Display Table 3 12 Recommended External Displays 3 143 The 4l45B s CRT is equipped with X Y Z analog outputs which can be connected directly B Sereen Size Hx W to large sereen graphics display With the X Y and Z EXTERNAL CRT OUTPUT located on the HP1304A 2 ecmxz5em rear panel connected to an external display t
153. ovide the means for a device to receive process and transmit messages over the bus The suffix number of the interface code indicates the limitation of the function eapability as defined in Appendix C of IEEE Std 488 3 122 CONTROL MODES 3 123 When controlled via the HP IB the 4145B has two modes 1 System Mode Setup and measurement is made by a eontroller via the HP IB This is much like manual setup and measurement operation 3 102 2 Model 4145B User Mode Direct control of the CRT and each SMU Vs and Vm via the HP IB The instrument is set to this mode when program eode US is sent Output from each SMU or Vs ean be set and measurement can be made by triggering the desired SMU or Vm The CRT is blank in this mode but can be used as 8 programmable graphies display by sending program code GL2 To exit from this User Mode return to System Mode send deviee CLEAR command or a paging command DE SS SM or MD Model 4145B SECTION 3 124 Remote Program Codes and Parameter Setting 3 125 Figure 3 52 shows the remote available program codes and parameter settings Program codes are divided into three categories l System Mode program codes 2 User Mode program codes and 3 program codes common to both modes User functions OUTPUT SEQUENCE PURGE and DISC COPY can not be programmed Program ming notes 1 Numeric values can be entered in fixed decimal forma
154. p Hote Hf VARZ is not assigned on the CHANNEL DEFINITION page only one sweep will be made and thus only one set of measurement results will be listed Figure 3 25 MEAS amp DISP MODE SETUP Page Sheet 4 of 6 Model 4145B SECTION SCHMOO PLOT Setup When SCHMOO is selected on the DISPLAY MODE line the MEAS DISP SETUP page will be as shown below Chole MEAS amp DISP HODE SET UP SCHMOO PLOT is three dimensional display where VARI is the X axis FARZ is the Y axis and the channel whose name is listed in the NAME field is the Z axis When measurement is made the results are distinguished by the symbols listed in the SCHMOO table X axis and Y axis scaling is determined by the VARI and VARZ sweep parameters The LIMIT for each symbol is the lower limit For example if the LIMIT amp for M and A are 500 and 100 respectively M represents measurement results greater than 5404 and amp representa measurement results between 100 and 500 For measurement results less than the LIMIT for is used To enter LIMIT move the field pointer to the M A or field enter the value with the ENTRY keys and press ENTER SCHMOO PLOT Sealing X and Y axes sealing is determined by the VARI and VAR sweep parameters The X axis ean have up to 41 points and the Y axis up to 21 points MIN and values for each axis are calculated as follows l SWEEP MODE of VARI is LINEAR X axis VARI
155. page Execution on any other page will result in error 202 To enter this command press the SINGLE softkey ave 5 SAVE D file name This command stores measurement results into the specified file name data file on the disc The file name specified in this command must be unique that is the file name of an existing date file cannot be used To enter this command press the SAVE D softkey key in the desired file name and press ENTER RE SAVE D displayed RSAVED file name This command stores measurement results into the specified file name data file on the dise The file name specified in this command must be the file name of existing data file To enter this command press the RE SAVE D softkey RSAVED is displayed on the program line key in the desired file name amd press ENTER PLOT Xmin Ymin Xmax Ymax This command dumps the existing display GRAPHICS PLOT LIST MATRIX or SCHMOO PLOT onto an HP IB plotter Sealing parameters Amin Y min Xmax Ymax must be delimited by comma or space To enter this command press the PLOT softkey key in the sealing parameters and press ENTER Figure 3 30 AUTO SEQUENCE SETUP Page Sheet of 4 Model 41458 SECTION CURVE PLOT displayed CPLOT Xmin Ymin Xmax Ymax This command dumps only the measurement results of GRAPHICS PLOT onte on HP IB plotter Scaling parameters Xmin Ymin Xmax Ymax must be delimited with commas or by le
156. ponent Engineering notation multiples of 3 from 39 to 36 d Display Format for Keyboard Executed Calculations Al wariable values sddddnEsum amp HP IB Data utput Format 5 digits All variable values sndddnnE ma Designations are the same as those af format c Figure 3 14 Display Output Format SECTION SECTION 1 32 COMPLIANCE 3 33 To prevent over voltage or over current damage to the device under test several levels of output protection termed COMPLIANCE have been incorporated into the 4145H The maximum output current from an SMU operating in SOURCE MODE V voltage source current monitor can be specified by entering the desired limit in the COMPLIANCE field of each source channel on the SOURCE SETUP page Similarly the maximum output voltage from an SMU operating in SOURCE MODE 1 current source voltage monitor can be specified Maximum compliance depends on the voltage or current range at whieh the source channel operating Refer to the Maximum Output column in Table 3 5 Setting resolution for current and voltage compliance is S0pA and lmVW respectively When SMU is operating in SOURCE MODE COM its current compliance amp automatically set to l 5mA and cannot be changed If a source channel reaches compliance during measurement an error code see Table 3 3 will appear on the CRT Measurement data obtained prior to this point is valid hut measurement
157. press the STORE softkey The frame around the STORE softkey prompt will be highlighted until the data is completely stored after which it will return to normal intensity Measurement results are stored in the display buffer as background data and when recalled will be of Slightly less intensity than normal Two important points to remember are 1 sealing information is not stored and 2 resealing is not performed on recalled measurement results even if the AUTO SCALE function is used Thus if the plot to be overlaid is sealed differently from the stored plot any comparison between the two is meaningless To recall a stored plot press the RECALL softkey The frame around the softkey prompt will be highlighted and will remain so until the softkey is pressed again User entered comments of up to 30 characters can be displayed on the CRT The procedure is as follows 1 Press the COMMNT softkey The frame around the softkey prompt will be highlighted and the BLUE key will be set to on 2 Key in the comment up to 30 characters There is no restriction on character type 3 Press the ENTER key The comment will be displayed directly below the page title and the frame around the COMMNT softkey prompt will be de highlighted normal intensity With the comment function set to on COMMNT softkey prompt highlighted anything displayed on the Keyboard Input Line will be entered and displayed as a comment if the ENTER key is pressed eve
158. put from the SMUs and voltage sources Vs can be swept in a stairegse manner as shown in Figure 3 16 by specifying VARI or VAR in the SOURCE field on the CHANNEL DEFINITION page The maximum number of source channels that can be swept is three VARI VARI and VAR can be specified only once on the CHANNEL DEFINITION page and VARI eannot be specified without VARI VARI VARI and VAR2 are deseribed in paragraph 3 36 Sweep setup i made on the SOURCE SETUP page by seleeting the SWEEP MODE and entering the desired START STOP STEP DELAY and HOLD values Each sweep parameter is described below START Voltage or current value at whieh sweep begins STOP Voltage or current value at which sweep stops STEP Sweep incremental of decremental value Can be specified in LINEAR SWEEP MODE only Output welt Telaga E NE Gun Gum REOS um SECTION DELAY Wait time before measurement is made at each step softkey function HOLD Wait time before sweep begins softkey funetion SWEEP MODE LINEAR or LOG In LINEAR mode output is swept linearly in accordance with the specified STEP value In LOG mode output is swept logsrithmically at 10 steps 25 steps or 50 steps selectable with softkeys per decade LOG cannot be specified for VARS Refer to paragraph 3 37 for further details on LOG sweeps The above sweep parameters are for VARI only Sweep parameters ava
159. puter s CRT The X axis corresponds to the VARI setting linear and the axis corresponds to the Yl axis setting on the GRAPHIC PLOT page 3 134 Model 41458 SECTION o PITTI TTT CE GE A yn RL GA 100 eT TTT TTT TTR TTT TTT et TT TTT TTT Tet ee _ eet ete eee ty een ELLLTLTITERMETITITTITRITITITITTRETTITTTTERLTITTITIT 200 Figure 3 65 Structure of the File Comment Seetor 3 135 SECTION 41458 TTT 1 _ 1 sob TT TTT TTT pe ttt ttt d Ex aris cider OR RS da Grete 10 TABLE Wn 1 100 TTT et et CTT TT WV eee dui T User Function 2 TIITITIILIRTITIITIIIPSNTIITIITMITITITIT DA EE ES GNEME Ee i 200 Se es REESE RU mese EB IEEE af Lu Figure 3 56 Data File Structure of the Setup Date Seetor 1 of 3 3 138 41458 SECTION 300 dl ee i EXER 350 COT TTT Tt TTT TT m HLL EEEE me aa GRAPHIC PLOT DCH Yl axis RAPHIC PLOT IGRAPHIC PLOT pcB LIST DCE m LLLI SEDRE EUN A LL E E E 500 SS PS Pe RE A Om Pigure 3 66 Data File Str
160. qual to or greater than the STOP value If LOG has been selected as the SWEEP MODE START and STOP must have the same signs If the specified START and STOP values are identical no sweep is performed and measurement if made at one point only STEP determines the number of measurement points for LINEAR sweep If LOG has been selected as the SWEEP MODE the instrument s operating system software automatically calculates and enters the appropriate STEP value In LINEAR SWEEP MODE If the STEP value is greater than the START STOP range STEP ISTOP START sweep is performed and measurement is made at the START value only NO OF STEP number of steps for VARI is automatically ealeulated by the instrument as No OF step STOP START 1 3 2 The START STOP and STEP values must be such that NO OF STEP does not exceed 1024 Also both the START and STOP values for LOG sweep must be greater than zero Even if zero entered it automatically changed to 1mV ar IpA START STEP and OF STEP for VAR2 START STEP and NO OF STEP number of steps determine the sweep range for the VAR source channel VARZ sweeps are VARI dependent that is VAR2 is swept one STEP for each complete sweep of VARI The maximum OF STEP for VAR lg 32 When only one monitor channel SMU or Vm is used the maximum number of measurement points is Measurement Points NO OF STEP VARI OF STEP VAR2 3 2 If the number of measu
161. r MATRIX LIST and SCHMOO pages Here A i calculated as half the difference between the values of A above and below the eursor marker location In equation form M where the value of A at the measurement step following the eursor marker position and is the value of the measurement step preceeding the eursor marker position When is the first or last position of the marker GRAPHIC page cursor MATRIX LIST and SCHWOD pages is calculated as follows AA A for the first position A where A is the value of at the measurement step following the marker cursor position far the last position A where A 15 the value of A at the measurement step pr ceding the marker eurser position Note Delta A is not avaliable for an arithe metic operations listed im Table 3 5 The result of the arithmetic function may include rounding error 3 20 Source and Measurement Channels 3 21 The 4 45B is equipped with eight channels for device stimulus and measurement Channels through 4 are Source Wositor units EMUs channels 5 and are voltage sources 15 and WSU and channels 7 and amp are voltage monitors Va and Vag Refer to Figure 3 8 By correctly combining and setting up the source and measurement channels a wide range of semicomduclor devices can measured The SMUs are described in paragraph 3 24 the voltage sources amd voltage
162. r the new ehannel assignments The field pointer will move back to area 1 in Figure Figure 3 23 CHANNEL DEFINITION Page Sheet 4 of 4 Model 41458 SECTION SOURCE SETUP PAGE ERI NEM NAME vs ite SLEEP HODE LIMEAR LINEAR Purpose and funetion of this page 1 Select the sweep mode linear or log for the VARI source channel 2 Set the START STOP and STEP values for the VARI source channel 3 Set the START and STEP values and NO OF STEP for the source channel Set the RATIO and OFFSET values for the VARI source channel Set the HOLD TIME and DELAY TIME Set the source output value for the CONST channels Set the COMPLIANCE value for each source channel Setup To change or enter source channel parameters on this page move the fleld polnter ib ta the desired field and enter the parameter value with the ENTRY keys Each time an entry is made the field pointer will automatically move to the next field as shown in Figure B Except for SWEEP MODE only numeric values and engineering units m p can be entered on this page The source assigned to each source channel on the CHANNEL DEFINITION page is automatically entered on this page Note Entered value may be automatically changed to acceptable value when the ENTER key is pressed or the page is changed Figure 3 24 SOURCE SETUP Page Sheet of 4 3 43 SECTION Model 4145B hpl SOURCE SET UP ewe
163. re pressing the EXEC softkey the PURGE ALL operation will be cancelled SAVE RE SAVE GET PURGE and PURGE ALL cannot be input using the alphabetic keys and ean be used for user area filing operations only No filing operations can be performed with the furnished application programs 3 17 ARITHMETIC CAPABILITIES 3 18 Arithmetic operations that can performed on the 4145B are listed in Table 3 5 To perform an arithmetic operation first key in the expression it will appear on the display as you do sa then press EXECUTE The result will be displayed on the Keyboard Input Line of the in a floating decimal format seientific notation Example 2 Key strokes 3 CICO EXECUTE Displayed Result 2 3142E 00 Table 1 5 Arithmetic Operators Example Equation Key Strokes Addition 3 19 SECTION Results of arithmetic operations are always displayed in scientific notation consisting of a 5 digit base and Z digit exponent regardless of the expression s complexity Thus if 1 amp executed the result is displayed as 3 0000E 00 Also the exponent is always multiple of three regardless of the exponent used in the original expression For example if 1E 07 is executed the result amp displayed as 10 000 06 The decimal point is always positioned so that the exponent i a multiple of three Results are always rounded before bering displayed if they contain more than 5 digits Th
164. rement points exeeeds 1140 Buffer full will be displayed on the CRT RATIO and OFPSET Values for VARI VARI con be swept in unison with VARI at a constant RATIO or OFFSET The output from the VARI source channel is calculated as VARI RATIO x VARI 3 4 VARI OFFSET 3 5 To enter RATIO and OFFSET move the field pointer to area 2 3 in Figure C press the VARI RATIO or VARI OFFSET softkey enter the desired value and press EXECUTE The entered value will be displayed on the CRT between the two tables Both RATIO and OFFSET can be entered but only the one displayed on this page is valid during measurement Note The specified RATIO or OFFSET values must be such that the VARI source channel does not exceed its maximum output SMU s100V Vs 7201 Also output from VARI may lead or lag the VARI output by 1ms in V mode and from dms to 50 in I mode For log sweep measurements only VARI RATIO ean be specified Figure 1 24 SOURCE SETUP Page Sheet 3 of 4 SECTION Model 41458 HOLD TIME and DELAY TIME HOLD TIME is the initial wait time and the wait time after a VAR step change DELAY TIME is the wait time after VARI step change To enter HOLD TIME and DELAY TIME move the field pointer to area 2 or 3 in Figure C press the HOLD TIME or DELAY TIME softkey enter the desired value and press EXECUTE SOURCE Value for CONSTANT Channels The NAME and SOURCE MODE of all source ch
165. rements are made SMU s set to I monitor guarding can be used to reduce the effects of leakage current Voltage at the guard terminal is held at the same potential as the SMU output voltage Connect the guard terminal GD1 through 4 terminals on the Personality Board of the SMU used for 1 monitor to the outer shield of the DUT Figure 3 40 shows an example of guarding WARNING GUARD POTENTIAL 15 THE SAME AS SMU OUTPUT DO NOT TOUCH THE GUARD TERMINAL DURING MEASURMENT Note Do not connect the guard terminal to the common terminal Guard 2 to anything Lankage Oerrent Lagkeoge carent does not flow Inte the SMU ameter Figure 3 40 Example of Guarding 3 90 Model 41458 SECTION 3 94 PLOT Table 3 6 Recommended HP IB Plotters 5 95 The 41458 can directly dump an existing display onto an HP IB plotter without the aid of a controller list of recommended plotters amp given in Table 3 8 Measurement Graphics System HP7440A Graphics Plotter HPT7T47T0A Graphies Plotter m HPT475A Graphics Plotter oe Fic Other plotters can be used but they HPTSS0A Graphics Plotter must have LISTEN ONLY mede Also on some older type plotters it may not be possible to precisely position alphabetic or numeric strings such as labels within a specified plot area Operating instructions for the PLOT function are given in Figure 3 41 cannot plot 4 and
166. ressing the appropriate softkey For example pressing softkey 3 while the MENU page is displayed sutometically displays the MEAS DISP MODE SETUP page Pressing the MENU key automatically returns the display to the MENU page regardless of the present display page To change from the GRAPHICS page to say the LIST page the PREV key to diplay the MEAS DISP MODE SETUP page select LIST with the softkeys and then press the NEXT key Paging cannot be performed during measurement printing or plotting 3 49 When the NEXT key or PREV key is pressed while the CHANNEL DEFINITION page SOURCE SETUP page MEAS DISP MODE SETUP or OUTPUT SEQUENCE SETUP page is displayed the page checked for completeness and correctness If an illegal setup amp detected n error message will be displayed and no page change will occur In this case you must either correct the setup or press the MENU key Changes mode on the CHANNEL DEFINITION SOURCE SETUP MEAS DISP MODE SETUP and OUTPUT SEQUENCE SETUP pages are not valid for SAVE or RE SAVE until the PREV or NEXT key pressed kay returne the display to the start up Can be used at any time key advances the display ta the next paga l key returns the dieplay te previous Page ure used for display selection mecmurcamant met up and funotion selection EXTM key displays odditianal softkey Furet lor Figure 3 20 Page Control Keys SECTION Model 41455
167. result the channel name ean be entered Note When a log sweep is made marker loeation displayed may include quantum error eB RTE Used for higher resolution marker positioning Normally the marker moves from one measurement point to the next and cannot be positioned between two measurement points With the INTERPOLATE funetion however the marker can be positioned at any point between two measurement points Moves the marker or markers to the next VAR2 Step VARI does not change If this softkey is pressed when the marker is at the last VAR2 step the marker will return to the first VAR2 step Also INTERPOLATE is turned off when MARKER SKIP is performed Figure 3 26 GRAPHICS PLOT Page Sheet 3 of 6 3 55 SECTION Model 41458 Displays the LONG CURSOR When this softkey is pressed the frame around the softkey prompt will be highlighted and the LONG CURSOR will be displayed at the center of the plot area The LONG CURSOR can be moved to any point in the plot area by pressing the appropriate CURSOR keys Pressing the FAST CURSOR key while pressing one of the directional CURSOR keys moves the cursor faster The X Yi and coordinates of the cursor location are digitally displayed above the plot area The LONG CURSOR is turned off by pressing this softkey again by turning bn the SHORT CURSOR or pressing the PREV or MENU key Horizontal zoom in x2 Horizontal zoom out x2 Vertical zoom in
168. s at the MARKER location are digitally displayed on the CRT INTERPOLATE Allows positioning of the MARKER between two measurement points The X and coordinates at the MARKER loeation are estimated and digitally displayed on the CURSOR On GRAPHICS plot the CURSOR is two intersecting and perpendicular lines which can be positioned at any point on the graph There are two GRAPHICS cursors LONG and SHORT The X Yi and Y coordinates at the CURSOR location are digitally displayed on the On SCHMOO plot the CURSOR highlights the symbol at measurement point and only the Z axis value is digitally displayed on the On LIST and MATRIX displays the CURSOR is a moveable pointer Model 41458 SECTION 1 Table 1 1 Specifications Sheet 7 of 8 AUTO SCALE GRAPHIC plots can be automatically rescaled after mess surement providing optimum display of measurement results ZOOM Funetion 1 i 1 Pos Used eonjunetion with the CURSOR on GRAPHIC plots Expands or contracts the graph in the indicated direction and in reference to the CURSOR location MOVE WINDOW Repositions the LONG or SHORT CURSOR to the exact center of the plot area and moves displayed plots in reference to the CURSOR LINE Draws straight line between two moveable cursors X and Y axes intercepts are digitally displayed as are the line gradient GRAD and gradient reciprocal 1 GR AD values
169. s stored on the dise And lists the file type of each file stored on the disc Sys System file Pro Program file measurement setups file type P Dat Data file measurement results file type D Seq ASP file auto sequenee program file type S When storing or recalling a file the file type P D or S must be specified in the SAVE RE SAVE or GET command System files can be recalled only when the CHANNEL DEFINITION page is displayed and only with the softkeys File comments Lists any comments that were specified in the SAVE or RE SAVE command when the file was stored When specifying a comment in the SAVE or RE SAVE command it must be entered after the file name must be preceeded by a space and must not be more than eight characters long File address Shows the address of the first record of each file The first user area address of the system dise is 286 Addresses below 286 are used for operating system software and system files Number of records used Shows the number of records reserved for each file Normally the number of records reserved is equal to the number of records used but there are cases when this is not true For example if a program file 5 records is stored after a data file 23 records has been purged the new file will have 23 records but will use only 5 The 18 unused records are wasted They cannot be used for storage of additional files Figure 3 32 4145B FILE CATALOG Page She
170. sage Line Displays instructions error messages and error codes When the instrument is turned an instrument status amp displayed S Softkey Prompt Display Area Displays Softkey Prompts SKP Note 2 3 and 4 are erased by pressing the CLEAR key Figure 3 5 Useable Display Area CRT intensity and focus adjustment Requires a small flat tip screwdriver Turn on the 41458 The MENU page will be displayed on the CRT Press the EXTM softkey and the DIAG softkey Press the GDU TEST softkey Display will be as shown in the figure Adjust INTENSITY 2 until all three lines Kor line has different intensity are visible D Adjust FOCUS until the corners of the di amp played trace are sharp Press the MENU key Figure 3 6 Oprerator Adjustment 3 11 SECTION SELF TEST 3 10 The 41458 E equipped with an automatic self diagnostic function that is initiated each time the instrument is turned on to confirm normal operation of the instrument s basic funetions The SELF TEST ean also be initiated from the DIAGNOSTICS page or via the HP IB When SELF TEST is performed at instrument turn on the five tests listed in Table 3 1 are automatically performed If the instrument is operatimg normally the MENU page will be displayed when the SELF TEST is completed If an error is deteeted an error code will be displayed on the When SELF TEST initiated from the DIAGNOSTICS page or via the HP IB onl
171. st byte is omitted 3 Blank unused areas All blank measurement data bytes will return 3 Blank unused Area Blank measurement data bytes will return Figure 4 77 Measurement Data sector Structure 2 of 2 3 152 Model 41458 SECTION Hote This sample program runs under tshe BASIC 3 0 or 4 0 environment and requires loading the GRAPH binary files as well as the appropriate files from your dise drive INTEGER no Data ptr Flag Stat Ch INTEGER Commanttb 127 Prog 0 383 Data 5i2432 4735 INTEGER Meas ch 5 INTEGER Data end INTEGER Praw valid REAL Sueep start Sueep end Sweep step Varl Vary REAL Ymin Ymax DIM Filename 100 1001 HorkdirS SYSTEMSC MSI Anand STORAGE IS HP3122 700 0 GIMIT GRAPHICS p LINPUT Please anter File lenamed ASSIGN File Filenames ENTER amp File Comment Pragdbin Datasbi IF FNGet_byte Prog45t 760 0 THEN DISP No valid data 111 ELSE Ch active frag 0 FOR Channel 0 TD 5 Meas_ch_active Channel BLT FNGet_byte Prog45 617 Channel 5 Ch active frag Ch active Frag Heas ch activetChannel NEXT Channel IF Ch active lt gt 0 THEN FOR Channel 0 TO 5 IF BIT FNGet byte ProgdSt 617 Channel 6 THEN MCCB Smu no Channel Data amp tarte FNGet uwordiProg45 9 331 5mu nas 10 6 DACB Data end FMGet wordi Prog45 331 5mu nao 10 8 DACB
172. t floating decimal format max 12 char and max 2 digits exponent Example Fixed decimal 25 32 Floating decimal 2 532 01 Voltage V eurrent A and time s units are not required when entering numeric values Terminator or CR or LF is required at the end of each parameter setting on a program line In the examples given below TERM represents the terminator Channel names must be enclosed in apostrophes SYSTEM MODE PROGRAM CODES Following program codes are used when the 4145B is set to System Mode Direct Paging to change page DE CHANNEL DEFINITION Page SS SOURCE SETUP Page SM MEAS amp DISP MODE SETUP Page MD Display Page page selected for DISPLAY MODE US User Mode Notes When the 4145B receives a Direct Paging command it checks the setup on the displayed page before proceeding to the specified page If an illegal setup is detected an error message will be displayed the SRQ bit will be turned on and the page will not be changed Display returns to the MENU page when the 4145B receives a Device Clear command Figure 3 52 Remote Program Codes and Parameter Setting Sheet 1 of 9 3 103 SECTION Model 4145 CHANNEL DEFINITION Page program eode DE Setup for SMUs 1 through 4 CH XXXXXX XXXXXX N N TERM a 2 G gt 4 5 1 SMU channel number 1 4 2 NAME up to 6 eharacters 3 I NAME up to 6 eharaeters 4 SOURCE MODE 1 3 1
173. t for external plotter 200 200 Upper right T400 4800 Kote The system dise contains four different application programs of whieh GENL is one Refer to paragraph 3 88 for details on the furnished applications programs All data stored on the disc is retained that is the disc is not erased when the instrument E turned off 3 15 USER AREA FILING OPERATIONS 3 18 The 41458 uses 3 5 inch double sided double density micro flexible dise as the storage medium for its MSU mass storage unit The system dise furnished with the 41458 contains the necessary operating system software four general purpose measurement programs and enough user area for 2178 records Up to 240 files can be stored in the user ares Hote A record is the minimum unit for storage on the disc A file of 4 5 or 23 records depending on the file type Model 4145B Three types of files can be stored in the user area 1 Measurement program files file type Specifying fle type P in the SAVE or RE AVE command reserves 5 records on ihe and stores the existing measurement setup channel assignments parameter settings graphic scaling output sequence etc at the reserved S record location 2 Measurement data files file type D Specifying file type D in the SAVE or eommand reserves 73 records on the dise and stores the measurement setup and measurement results GRAPHICS LIST MATRIX or
174. t date The date header portion contains the measurement data s Measurement append number and the VAR step number Figure 3 77 shows the Measurement Data Seetor s strueture and provides more detailed information The Measurement Data Sector begins with record number 2 432 and finishes with record number 4 735 This sector is divided into equal measurement data areas depending on the number of measurement channels used For example if two channels are used the first measurement data area will cover records 2 432 through 3 583 while the second measurement data area will cover records 3 584 through 4 735 3 163 Reading Data Files 3 164 The procedure for reading data file as follows 1 Confirm the presence of measurement data by reading the DATA ST byte byte 760 in the Setup Data sector 2 Confirm which measurement channels were used by reading the MOCE bytes 615 through 623 of the Setup Data sector 3 Retrieve the number of the measurement data record by reading the DACE bytes 331 through 390 of the Setup Data sector 4 Read the desired measurement data record retrieved in step 3 from the Measurement Data sector Returned measurement data ineludes the VARI nnd VARZ step numbers and the measurement append number 3 133 SECTION Model 4145 Figure 3 78 shows a sample program for reading a data file from a dise in accordance with the preceding procedure and for plotting the data on the com
175. t are automatieally re displayed regardless of the display mode used in the previous measurement If any change is made on the CHANNEL DEFINITION page or SOURCE SETUP page or if NAME on the MEAS DISP MODE SETUP page is changed the results of the previous measurement are erased from the data buffer and a new measurement must be made To make a new measurement press the SINGLE or REPEAT key Measurement results of the monitor channel selected on the MEAS DISP MODE SETUP page will be displayed as the measurement progresses Results are displayed for each VARI step e in Figure A and VAR2 step f in Figure Only three VAR2 steps and ten VARI steps can be displayed at one time Measurement results not displayed can be viewed by pressing the LEFT RIGHT ROLL UP or ROLL DOWN softkey Figure 3 28 MATRIX DISPLAY Page Sheet 1 of 2 Model 41458 SECTION DISPLAY Measurement results are displayed in a 3 x 10 window as shown in Figure B The field ean be moved left right up down by pressing the LEFT RIGHT ROLL UP or ROLL DOWN softkeys to view other measurement results LL Uu FLE eee MAL DOWN Figure B Softkey Prompts This page has onlv one softkey prompt shown in Figure A Refer to the Softkey Functions deseription given in Figure 3 28 the function of each softkey Figure 3 28 MATRIX DISPLAY Page Sheet 2 of 2 SECTION Model 41458 SCHMOO PLOT PAGE a Monitor channel name se
176. te to 438 Ist Byte 2nd Byte_3rd Byte_4th Real_value Data_flag Sm tatus Channel IF SELECT Chane THEN Channel CASE d 5 SMU 174 172 Channel 1 CASE 7 lost data Channels 1 CASE ELSE illegal Channel EHD SELECT EMD IF RETURN Real value FHEND beeen eee ses SS SS Se ee eee ee DEF FNGet_stringS INTEGER rray Pointer Length t m mmm m mms tiep ERR m m amm m mmn m mmm in m m Rd pai il IMTEGER Char painter INTEGER Char valid DET AS String Figure 3 78 Sample Program for Reading Data File Sheet 2 of 4 3 154
177. ter 2 1 2 12 Power Cable 2 2 2 16 Operating Environment 2 2 2 19 Installation Instructions 2 2 2 21 Installation of Options 907 908 and 909 2 2 2 23 Storage and Shipment 2 4 2 24 Environment 2 4 2 26 Packaging 2 4 III OPERATION 3 1 Introduction seeds dsl 3 3 Panel Features 3 2 3 5 Micro Flexible Disc Handling 3 10 3 7 CRT Display 3 10 3 9 Self Test e 3 12 3 11 Error Messages Error Codes 3 12 3 13 Initial Control Setting 3 18 3 15 User Area Filing Operations 3 18 3 17 Arithmetic Capabilities 3 19 3 20 Source and Measurement Channels Pm 3 21 3 22 Protection against Hazardous Voltage Exceeding 42V 3 21 3 24 Source Monitor Units SMU 3 22 3 26 Voltage Sources Vs and Voltage Monitors Vm 3 22 Section 3 28 3 30 3 32 3 34 3 38 3 40 3 42 3 45 3 47 3 50 3 52 3 54 3 56 3 58 3 60 3 62 3 64 3 66 3 68 3 70 3 72 3 74 3 76 3 78 3 80 3 82 3 84 3 86 3 88 3 90 3 92 3 94 3 96 3 98 3 100 3 110 3 112 3 114 3 116 3 118 3 120 3 122 3 124 3 126 Table of Contents Title Page Measurement Ranges and Resolution 3 22 Resolution and Format for Displayed Data and Data Output eere Compliance Sweep
178. the deleted character moves one position to the left as each character is deleted INSERT RECALL CLEAR Clears all Model 4145B Causes the character at the position of the cursor and all text to the right of the eursor to move right one position leaving a space at the position of the eursor and allowing insertion of additional characters To exit from this mode press INSERT a second time Causes previous entries or exeeutions to be re displayed on the Keyboard Input Line text from the Keyboard Input Line and returns the cursor to the home left most position Figure 3 2 Front Panel Features Sheet 5 of 6 Model 41456 20 USER FILE Keys These keys are used to store program or data files onto the dise or to recall them SAVE KE SAVE1 Used to store the exiting measurement setup mea surement result or auto sequence program onto ihe flexixe dise Press SAVE enter the file type P measurement setup D for measurement result 5 for an auta sequenee program file name and comment if necessary and then press EXECUTE 12 Used to store by the file names that have been used already on the miero flexible dise the existing measure ment setup messurement results or gButo sequenee program onto the dise Press the GREEN key then press the SAVE key enter the file name and comment if necessary then press EXECUTE Used to recall measure ment se
179. the HP 92192 Floppy Dise double sided double density Disc Initializing Procedure 10 Turn on the 41458 des the CATALOG softkey on the MENU Page Display will be as shown below 31 Dhal FILE CATALOG Volume HPa4l4s Haw 1 0 svsilabla records 2078 File name comments sdra bik Press the EXTN softkey then softkey prompt will be SKP 31 Remove the dise and insert the blank disc Press the INIT DISC softkey Initialize OK will be displayed in the system message area Press the EXEC softkey If the QUIT softkey is pressed before pressing the EXEC softkey the FORMAT operation is cancelled Disc initialization takes only a few minutes Note executing the Dise Initializing all the programs and datas that are exiting on the dise are purged Figure 3 81 Dise Initializing Procedures 3 1237 SECTION Medel 41458 3 146 Operating System Copy Note 3 147 For archival purposes the 41458 can copy The Operaring System Copy funetion the Operating System Software onto discs that cannot copy the files of the user area are initialized by the 4145B or series 200 300 onto the disc Desktop Computers The procedure is described in Figure 1 62 CAUTION The Operating System Copy funetion erase all files of the user area on the disc Hote Copying the 4l45B s Operating System Software for any means except for archival purposes without the prior written consent
180. the Lower Left and Upper Right Limits of the X Y or axis These bytes are written using the 4145B 4byte Floating Point Date Format as shown Figure 3 68 Figure 3 73 GRAPHIC PLOT DCB Strueture 3 147 SECTION Model 4145B No of RDNGS Wait Time 1 Wait Time Interval No of RDNGS These bytes contain wait time interval time and number of RDNGS data for a time domain measurement These bytes are written using the 4145B s 4 byte floating point data format as shown Figure 3 68 Figure 3 74 TBCB Structure 3 148 Model 4145 SECTION 1 SMUs 1 4 Yml Vm2 These bytes contain channel setting data Whether the channel is set to or not V measurement or measurement Each bit for each byte i as follows bit 4 3 Always 1 means auto range bit 4 and 5 Always 0 bit n Not measure 1 Measure hit 7 0 V measure 1 measure 2 MCCB 8 This byte also contains channel setting data whether measure or not measure 6 set Each bit is defined as follows bit 0 SMUI 0 Not measure 1 Measure bitl 0 Not measure 1 Measure bit 2 SMUJ Not measure 1 Measure bit 3 SMUA 0 Not measure 1 Measure bit 4 Yml 0 Not measure 1 Measure bit 5 Ymz 0 Not measure 1 Measure bit amp and 7 Always 0 Figure 3 75 MCCB Strueture 3 148 SECTION Model 41458 st O
181. tion of the OUTPUT SEQUENCE SETUP page is given in Figure 3 31 4 70 USER FILE CATALOG PAGE 3 71 The USER FILE CATALOG page is di played when softkey 6 is pressed on the MENU page On this page the operator ean intialize the blank dise eopy the operating system purge file or all files on the dise and transfer the all files from the 41454A s disc or another 4145B s disc to the 4145B s dise The number of records available stored files file type comments file addresses number of records reserved for each file and number of records actually used by each file are displayed A detailed description of the USER FILE CATALOG page is given in Figure 3 3 3 72 OPERATION GUIDE PAGE 3 73 The OPERATION GUIDE page is displayed when softkey 7 is pressed on the MENU page This page provides brief paging information and brief deseriptions of error messages and error codes detailed description of the OPERATION GUIDE page is given in Figure 3 33 DIAGNOSTICS PAGE 3 75 The DIAGNOSTICS page is displayed when softkey 8 press EXTN softkey to display softkey 8 is pressed on the MENU page On this page the operator ean perform SELF TEST front panel test graphics display test dise cleaning and dise copy user area only A detailed des eription of the DIAGNOSTICS page is given in Figure 3 34 Medel 41458 3 76 SOFTKEY PROMPTS SKP 3 17 Softkey prompts the function of each softkey are displayed along the right side o
182. tions for the produet or improper site preparation or maintenance NO OTHER WARRANTY IS EXPRESSED OR IMPLIED HP SPECIFICALLY DIS CLAIMS THE IMPLIED WARRANTIES OF MERCHANTABILTY AND FITNESS FOR A PARTICULAR PURPOSE EXCLUSIVE REMEDIES THE REMEDIES PROVIDED HEREIN ARE BUYER S SOLE AND EXCLUSIVE REMEDIES HP SHALL NOT BE LIABLE FOR ANY DIRECT INDIRECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES WHETHER BASED ON CON TRACT TORT OR ANY OTHER LEGAL THEORY ASSISTANCE Produet maintenance agreements and other customer assistance agreements are available for Hewlett Packard products For any assistance contact your nearest Hewlett Packard Sales and Service Office Addresses are provided at the back of this manual Herstellerbescheinigung Hiermit wird bescheinigt daB das Ger t HP 4145B Semiconductor Parameter Analyzer in bereinstimmung mit den Bestimmungen von Postverf gung 1046 84 funkentst rt ist Der Deutschen Bundespost wurde das Inverkehrbringen dieses Ger tes angezeigt und die Berechtigung zur berpr fung der Serie auf Einhaltung der Bestimmungen eingeraumt Anm Werden Me und Testgerate mit ungeschirmten Kabeln und oder in offenen MeBaufbauten verwendet so ist vom Betreiber sicherzustellen da die Funk Entst rbestimmungen unter Betriebsbedingungen seiner Grundstucksgrenze eingehalten werden Manufacturer s Declaration This is to certify that this product the HP 4145B Semiconductor Parameter
183. tions listed in Table 1 2 Upon receipt inspect the shipping container for damage If the shipping container or cushioning material is damaged it should be kept until the eontents of the shipment have been checked for completeness and the instrument hes been checked mechanically and electrically The eontents of the shipment should be as shown in Figure 1 1 The procedures for checking the general electrical operation are given in Section Paragraph 3 9 SELF TEST and the procedures for checking the 41458 Semicon ductor Parameter Analyzer against its specifications are given in Section IV First do the self test If the 41458 is electrically questionable then do the Performance Tests to determine whether the 41458 has failed or not If the contents are incomplete if there is mechanical damage or defects scratches dents broken switches ete or if the performance does not meet the self test or performance tests notify the nearest Hewlett Packard office see list at beck of the manual The HP office will arrange for repair or replacement without waiting for claim settlement 2 5 PREPARATION FOR USE 2 6 POWER REQUIREMENTS 2 7 The 414568 requires power source of 100 120 220 Volts ac 10 or 240 Volts ac 5 10 48 to single phase power consumption is maximum WARNING IF THE INSTRUMENT IS TO ENERGIZED VIA EXTERNAL AUTOTRANSFORMER UNIT FOR VOLTAGE REDUCTION BE SURE THAT THE COMMON TER
184. tup measurement result or auto sequenee program from the flexible disc Press GET enter the file type P for a mea surement setup D for a measurement result amp for an AULO Sequence program and file name and then 55 EXECUTE 2 34 SECTION Gi MEASURING Lamp This lamp comes on when the 41458 is measuring When measurement is com pleted or when the STOP key is pressed this lamp goes off immediately CRT Adjustment INTENSITY determines the brightness of traces displayed on the CRT FOCUS adjusts the writing beam for sharp well defined traces MICRO FLEXIBLE DISC DRIVE Accommodates a 630K byte double sided double density 3 5 inch micro flexible dise and functions as the 41456 s mass storage unit MSU The yellow lamp located on the left side of the flexible dise eject button comes on when the 41456 is storing data the dise or retrieving data from the dise Refer to paragraph 3 5 for information on proper handling of the micro flexible disc Figure 3 2 Front Panel Features Sheets 6 of 6 SECTION Voltage Monitor Vm Input Connectors Two female BNC connectors for input to Vml and Vm2 Used in applications in which a user fabricated test fixture is used These connectors cannot be connected to the 16058A Test Fixture Maximum allowable input voltage is 20V de Voltage Source Vs Output Connectors Two female BNC connectors for Vsl and Vs2 Used in applications in
185. u of Standards to the extent allowed by the Bureau s calibration facility and to the calibration facilities of other International Standards Organization members WARRANTY This Hewlett Packard instrument product is warranted against defects in material and workmanship for a period of one year from date of shipment except that in the case of certain components listed in Section 1 of this manual the warranty shall be for the specified period During the warranty period Hewlett Packard Company will at its option either repair or replace products which prove to be defective For warranty service or repair this product must be returned to a service facility designated by HP Buyer shall prepay shipping charges to HP and HP shall pay shipping charges to return the product to Buyer However Buyer shall pay all shipping charges duties and taxes for products returned to HP from another country HP warrants that its software and firmware designated by HP for use with an in strument will execute its programming instructions when properly installed on that instrument does not warrant that the operation of the instrument or soft ware or firmware will be uninterrupted or error free LIMITATION OF WARRANTY The foregoing warranty shall not apply to defects resulting from improper or inade quate maintenance by Buyer Buyer supplied software or interfacing unauthorized modification or misuse operation outside of the environment specifica
186. ucture of the Setup Data Sector 2 of 3 3 137 SECTION 41458 User Function 2 Figure 3 66 Data File Structure of the Setup Data Sector 3 of 3 3 138 Model 41458 SECTION iota Address hannel Funet on l Status Symbolic Name 1 Symbolic Name The Symbolic Name bytes contain the user specified SMU or User Function that is assigned on the 414585 CHANNEL DEFINITION page This name can be up to 6 ASCH ehargeters long 2 Status The Status byte containsur channel s source mode setting that assigned on the CHANNEL DEFINITION page Each bit is defined as follows bit Normal 1 Common bit la 4 Always 0 bit 5 0 Source 1 Monitor bit 6 0 V mode 1 I mode hit 7 D SMU Vm Wa 1 User Funetion Example OOH source 01H Common 20H V monitor Vs or User Function not used 40H source I monitor User Funetion Hexadecimal notation 3 Funetion The Funetion byte contains the channels source function setting that amp assigned on the CHANNEL DEFINITION page Several examples are as follows Monitor User Function used 40H User Funetion 41H User Funetion 7 80H Constant 81H Var 1 Ver 2 84H Var 4 Channel The channel byte contains ane of the following settings OOH SMUL User Funetion OlH 02H MUJ 03H SMU4 04H Yal Vml Vs2 Vm2
187. utput 1 1st through 6th Output Each byte contains channel number setting data as follows DIH SMUI OLIH SMU 02H 03H SMU4 4H Val Figure 3 78 Structure 4 150 Model 41458 SECTION 1 channel SMU Measurement Data Sector Date VARI lst Data VARI Ist L pata Header Data Header 1 Data Header This AN byte contains measurement Append Number data bit 7 is always 1 B H initial measurement data SIA lst append measurement data 82H 2nd append measurement data 33H 3rd append measurement data 2 v25 This V2S byte contains VAR step number data DOH Ist step UIH 2nd Var step D2H 3rd Var step 03H 4th Var step Figure 3 77 Measurement Data Sector Structure 1 of 2 3 151 SECTION Model 41458 Measurement Data Status amp Ch 1 Status amp Ch The Status amp Ch byte contains data error status end channel number data bit 0 2 transform binary te decimal number 0 SMU SMUG Yml lost data Status if bit 3 A D converter is saturated is 1 if bit 4 is 1 Oscillation is Other ehannel has reached compliance if bit 6 is 1 This channel hes reached compliance bit 7 always 0 if bit 5 2 Measurement Data Date contained in the measurement Data bytes written using the 4145B s 3 byte floating point data format which is the same as the 4 byte floating point format shown in Figure 3 88 except the la
188. ve and the metal centering hub down Carefully slide the dise into the drive until yeu feel it eontaet the rear of the drive Continue pressing the dise until it amp pulled down into the drive 7 Remove the dise by depressing the dise eject button that is located at under right of the dise drive and pulling the dise straight out Make sure the shutter is elosed before storing the disc The procedure to follow when write proteeting the dise is shown in Figure 3 4 dT CRT DISPLAY 3 8 The 4145B is equipped with the HP Model 1345A Digital Display Useable display area on the CRT shown in Figure 3 5 Operator adjustments are given in Figure 3 8 Figure 3 4 Write Proteeting 3 10 Model 41456 SECTION The CRT sectioned into five areas as shown in the figure Description for each area is as follows 1 Page Display Area The instrument s various pages are displayed in this area When the PLOT key is pressed only this area is output to the plotter 2 Command Display Area The SAVE RSAVE GET PLOT CPLOT PRINT and PURGE commands are displayed in thi area 3 Keyboard Input Line All keyboard front panel entries are displayed in this gree Up to 60 characters cen be entered but only 27 be displayed To edit the displayed characters use the BACK FORWARD DELETE and INSERT keys When the RECALL key is pressed the previous entry is re displayed System Mes
189. vers the opening and press the two black fasteners Figure 3 36 DUT Connection Using the 160584 Sheet 1 of 4 Model 4145B SECTION III To connect the SMU Vs and Vm terminals on the Personality Board to the terminals on the DUT Socket Board use the furnished connection leads P N s 16058 61600 16058 61601 and 16058 61602 Examples are given below Example 1 Transistor Socket Board Connect SMUs 1 through 4 directly to terminals 1 through 4 respectively as shown below terminal 1 to SMUI terminal 2 to SMU2 terminal 3 to SMU3 terminal 4 to SMU4 CONI TION CONNECTION Swi TOM EXAMPLE FOR FET Example 2 8 pin Socket Board Connect SMUs 1 through 4 directly to terminals 1 3 5 and 7 respectively as shown below DE 16058 50003 PERSONALITY BOARD QOPOGOBO 0000000 spot TM LG terminal 1 to SMUL terminal 3 to SMU2 terminal 5 to SMU3 terminal 7 to SMU4 CORNECTION CONNECTION Figure 3 36 DUT Connection Using the 16058 Sheet 2 of 4 SECTION 3 84 Model 41458 Example 3 Using the CONNECTION SWITCH Conneet the Socket Board terminals and SMUs 1 and 2 to the CONNECTION SWITCH as shown below When the switch is set to position 1 the SMUs are connected to the top two terminals NARROW of the Socket Board and when it sets to position 2 the SMUs are connected to the lower two terminals When the amp witeh is set to the center position the Socket Board is
190. which a user fabrieated test fixture is used These connectors cannot be connected to the 16058A Test Fixture Maximum output voltage is 20V de SMU Output Connectors Four triaxial connectors for SMU1 through 4 Can be connected to the 16058A Test Fixture or to a user fabrieated test fixture Each connector outputs or measures up to 100V or 100mA Model 4145B EXTERNAL CRT OUTPUT 4 COM COMMON GROUND Terminals Common 37 and Ground b for floating and grounded measurements The terminal is tied directly to the outer eonduetor of the Vm 1 Vs 2 and SMU 3 connectors the ground terminal is tied direetly to the instrument chassis For grounded measurements these terminals must be interconnected using the shorting bar For floating measurements disconnect the shorting bar WARNING A POTENTIAL SHOCK HAZARD MAY EXIST WHEN COMMON IS NOT CONNECTED TO GROUND SHORTING BAR DISCON NECTED DO NOT REGARDLESS OF THE OUTPUT VOLTAGE TOUCH THE COMMON TERMINAL OR OUTER CONDUCTOR OF THE SMU Vs OR Vm CONNECTORS DURING A FLOATING MEASUREMENT SHORTING BAR DISCONNECTED Figure 3 3 Rear Panel Features Sheet 1 of 2 Model 4145B 5 FILTER Switeh This switeh determines the measurement integration time to reduce the effects of line frequency noise Set this switch to the frequency of the ac power source System Cable Connector Twenty four pin connector for int
191. y is pressed the cursor will be displayed in the VARI eolumn and it can be moved up or down with the CURSOR keys The cursor is used when making keybourd calculations Instead of entering the numeric value of a measurement result or VARI or VAR step the channel name ean be used in arithmetic expressions Using the values listed in Figure suppose you want to calculate the square roof of IC when WCE is 1200V Simply move the cursor down the VCE column and stop at VCE 1200V then key in 7 The square root of 86 06 yA will then be displayed on the Keyboard Input Line Figure 3 27 LIST DISPLAY Page Sheet 2 of 3 3 60 4145 SECTION User entered comments of up to 30 characters can be displayed on the CRT The procedure is as follows 1 Press the COMMNT softkey The frame around the softkey prompt will be highlighted and the BLUE key will be set to on 2 Key in the comment up to 30 characters There is no restriction on character type 3 Press the ENTER key The comment will be displayed directly below the page title and the frame around the COMMNT softkey prompt will be de highlighted normal intensity With the comment function set to on COMMNT softkey prompt highlighted anything displayed on the Keyboard Input Line will be entered and displayed as a comment if the ENTER key is pressed even if comment is already displayed below the page title This allows you to change
192. y is pressed on the CHANNEL DEFINITION page On this page the operator must enter the output parameters START STOP STEP COMPLIANCE ete for the source channels SMUs and voltage sources defined on the CHANNEL DEFINITION page A detailed description of the SOURCE SETUP page is given in Figure 3 24 3 56 MEAS DISP MODE SETUP PAGE 3 57 The MEAS DISP MODE SETUP page is displayed when softkey 3 is pressed on the MENU page or when the NEXT key is pressed on the SOURCE SETUP page On this page the operator must select the desired display mode GRAPHICS LIST MATRIX SCHMOO enter the appropriate source and monitor names and enter the desired scaling factors A detailed description of the MEAS DISP MODE SETUP page is given in Figure 3 25 SECTION III 3 58 GRAPHICS PLOT PAGE 3 59 The GRAPHICS PLOT page is displayed when the MEAS DISP MODE SETUP page has been set up for GRAPHICS MODE DISPLAY and the NEXT key is pressed On this page the operator can make the measurement by pressing the SINGLE REPEAT or APPEND key and can analyze the measurement results with the softkeys detailed description of the GRAPHICS PLOT page is given in Figure 3 26 3 60 LIST DISPLAY PAGE 3 61 The LIST DISPLAY page is displayed when the MEAS DISP MODE SETUP page has been set up for LIST mode display and the NEXT key is pressed On this page the operator can make the measurement by pressing the SINGLE REPEAT or APPEND key and ean an
193. y press the desired softkey The selected command will be displayed on the line and if the command requires no parameters the field pointer will automatically move to the next line If the command requires parameters plot area file name time the field pointer will not move indicating that the operator must enter parameters from the front panel After the parameters have been keyed in and the ENTER key pressed the field pointer will move to the next line Up to 50 lines can be entered however up to 24 lines can be displayed at once The rollup and rolldown of the lines ean be effeetive by the arrow key of the front panel Blank lines are allowed but are ignored during aulo sequenee program exeeut ion Program Commands There are eight program commands GET P SINGLE SAVE D RE SAVE D PLOT CURVE PLOT PRINT PAUSE WAIT PAGE They are available with the softkeys only Each is described below GET P file name This command calls the specified file name measurement setup from the dise and displays the display page GRAPHICS LIST MATRIX or SCHMOO specified in the measurement setup To enter this command press the GET P softkey key in the desired file name and press ENTER This command executes one measurement and is equivalent to pressing the SINGLE key on the front panel If SINGLE is entered on line 1 of an auto sequence program the program can be executed only on the GRAPHICS PLOT LIST MATRIX or SCHMOO PLOT
194. y two tests are performed MPU test and SMU test If the instrument fails the SELF TEST contact the nearest Hewlett Packard Service Office see list at back of this manual Model 4145B 3 11 ERROR MESSAGES ERROR CODES 3 12 Error messages and error codes are displayed on the amp ystem Message Line of the CRT whenever an illegal operation out of range measurement is mace or whenever an internal circuit fails Error messages and error codes related to operator errors not instrument failure are listed in Table 3 2 and 3 3 respectively Error codes related to instrument failure are listed in Table 3 4 the instrument displays one of the error codes Listed in Table 3 4 contact the nearest Hewlett Packard Sales Service Office Hote One of the error codes Listed in Table 3 4 may be displayed if the instrument is turned on after experiencing an extreme change of ambient temperature In this case allow the instrument to fully warm up ignore the displayed error eode and then turn it off and on one time Table 3 1 41458 SELF TEST Test Name Deseription Checks the basic functions of the MPU Microprocessor Unit by checking four ROMs Read Only Memory and sixteen RAMs Randam Aceecess Memory Cheeks the functions of the GDU Graphies Displey Unit HP IB test Cheeks all HP IB interface capabilities Checks the MSU Mass Storage Unit Micro Flexible Die Drive and Disc Checks the basie functions o

HEWLETT PACKARD HP 4145B SEMICONDUCTOR PARAMETER ANALYZER OPERATION MANUAL

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